JPWO2021090543A1 - - Google Patents

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Publication number
JPWO2021090543A1
JPWO2021090543A1 JP2021554820A JP2021554820A JPWO2021090543A1 JP WO2021090543 A1 JPWO2021090543 A1 JP WO2021090543A1 JP 2021554820 A JP2021554820 A JP 2021554820A JP 2021554820 A JP2021554820 A JP 2021554820A JP WO2021090543 A1 JPWO2021090543 A1 JP WO2021090543A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021554820A
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JP7351348B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2021090543A1 publication Critical patent/JPWO2021090543A1/ja
Application granted granted Critical
Publication of JP7351348B2 publication Critical patent/JP7351348B2/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0289—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling with means for avoiding collisions between vehicles
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0291—Fleet control
    • G05D1/0297—Fleet control by controlling means in a control room
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/08—Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Business, Economics & Management (AREA)
  • Economics (AREA)
  • Human Resources & Organizations (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Strategic Management (AREA)
  • Tourism & Hospitality (AREA)
  • General Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Marketing (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Development Economics (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Control Of Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021554820A 2019-11-07 2020-07-27 搬送システム及びグリッドシステム Active JP7351348B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019202369 2019-11-07
JP2019202369 2019-11-07
PCT/JP2020/028769 WO2021090543A1 (ja) 2019-11-07 2020-07-27 搬送システム及びグリッドシステム

Publications (2)

Publication Number Publication Date
JPWO2021090543A1 true JPWO2021090543A1 (ja) 2021-05-14
JP7351348B2 JP7351348B2 (ja) 2023-09-27

Family

ID=75848336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021554820A Active JP7351348B2 (ja) 2019-11-07 2020-07-27 搬送システム及びグリッドシステム

Country Status (7)

Country Link
US (1) US20220384229A1 (ja)
EP (1) EP4056501A4 (ja)
JP (1) JP7351348B2 (ja)
KR (1) KR20220066397A (ja)
CN (1) CN114341026B (ja)
IL (1) IL291115B2 (ja)
WO (1) WO2021090543A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210247774A1 (en) * 2020-02-10 2021-08-12 Shuhei Hotta Transport system and transport method
NO347700B1 (en) * 2022-06-29 2024-02-26 Autostore Tech As Rail vehicle
WO2024075417A1 (ja) * 2022-10-05 2024-04-11 村田機械株式会社 天井走行車停止装置及び走行車システム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016039023A1 (ja) * 2014-09-10 2016-03-17 村田機械株式会社 一時保管システムと、これを用いた搬送システム、及び一時保管方法
WO2018211898A1 (ja) * 2017-05-19 2018-11-22 村田機械株式会社 保管システム
JP2019500294A (ja) * 2015-11-11 2019-01-10 オカド・イノベーション・リミテッド 保管コンテナ、保管箱、および保管装置
WO2019101725A1 (en) * 2017-11-23 2019-05-31 Autostore Technology AS Automated storage and retrieval system

Family Cites Families (16)

* Cited by examiner, † Cited by third party
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JP3187358B2 (ja) * 1997-11-07 2001-07-11 村田機械株式会社 無人搬送車システム
US20130302132A1 (en) * 2012-05-14 2013-11-14 Kiva Systems, Inc. System and Method for Maneuvering a Mobile Drive Unit
JP6034612B2 (ja) * 2012-07-27 2016-11-30 ニッスイ・エンジニアリング株式会社 搬送システム及びコントローラ
EP2754357B1 (de) * 2013-01-09 2018-07-18 Hauni Maschinenbau GmbH Verfahren zur bedarfsgesteuerten Versorgung und Entsorgung mindestens zweier Produktionsstationen der Tabak verarbeitenden Industrie mit vollen und/oder leeren Transporteinheiten
JP5928402B2 (ja) * 2013-04-19 2016-06-01 株式会社ダイフク 走行車制御システム
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
JP6340963B2 (ja) * 2014-07-08 2018-06-13 村田機械株式会社 自動倉庫の搬送車
TW201710044A (zh) * 2015-06-11 2017-03-16 傑科布哈特蘭德邏輯股份有限公司 儲存系統
NO339783B1 (en) * 2015-06-11 2017-01-30 Jakob Hatteland Logistics As Storage system
AT516612B1 (de) * 2015-10-06 2016-07-15 Tgw Mechanics Gmbh Automatisiertes Lagersystem und Verfahren zum Lagern von Hängewaren in diesem Lagersystem
JP6706835B2 (ja) * 2016-01-29 2020-06-10 パナソニックＩｐマネジメント株式会社 移動ロボット制御システム及び移動ロボットを制御するサーバ装置
JP2020024476A (ja) * 2016-12-14 2020-02-13 村田機械株式会社 走行車システム
CN108858179B (zh) * 2017-05-09 2020-11-24 北京京东尚科信息技术有限公司 确定分拣机器人行车路径的方法和装置
NO346327B1 (en) * 2017-05-16 2022-06-07 Autostore Tech As Automated storage and retrieval system
JP6906754B2 (ja) * 2017-10-31 2021-07-21 村田機械株式会社 搬送システム
JP6863329B2 (ja) * 2018-04-13 2021-04-21 村田機械株式会社 走行車システム及び走行車の制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016039023A1 (ja) * 2014-09-10 2016-03-17 村田機械株式会社 一時保管システムと、これを用いた搬送システム、及び一時保管方法
JP2019500294A (ja) * 2015-11-11 2019-01-10 オカド・イノベーション・リミテッド 保管コンテナ、保管箱、および保管装置
WO2018211898A1 (ja) * 2017-05-19 2018-11-22 村田機械株式会社 保管システム
WO2019101725A1 (en) * 2017-11-23 2019-05-31 Autostore Technology AS Automated storage and retrieval system

Also Published As

Publication number Publication date
CN114341026A (zh) 2022-04-12
IL291115B2 (en) 2023-11-01
IL291115A (en) 2022-05-01
EP4056501A4 (en) 2023-11-08
JP7351348B2 (ja) 2023-09-27
KR20220066397A (ko) 2022-05-24
EP4056501A1 (en) 2022-09-14
US20220384229A1 (en) 2022-12-01
CN114341026B (zh) 2023-10-03
IL291115B1 (en) 2023-07-01
WO2021090543A1 (ja) 2021-05-14
TW202124235A (zh) 2021-07-01

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