JPWO2021044611A1 - - Google Patents
Info
- Publication number
- JPWO2021044611A1 JPWO2021044611A1 JP2021543913A JP2021543913A JPWO2021044611A1 JP WO2021044611 A1 JPWO2021044611 A1 JP WO2021044611A1 JP 2021543913 A JP2021543913 A JP 2021543913A JP 2021543913 A JP2021543913 A JP 2021543913A JP WO2021044611 A1 JPWO2021044611 A1 JP WO2021044611A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
- G05B23/0275—Fault isolation and identification, e.g. classify fault; estimate cause or root of failure
- G05B23/0281—Quantitative, e.g. mathematical distance; Clustering; Neural networks; Statistical analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2846—Fault-finding or characterising using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2894—Aspects of quality control [QC]
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
- G06N3/09—Supervised learning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32275—Job, recipe cascading: no delay, next job is started immediatly when first is finished
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Artificial Intelligence (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Health & Medical Sciences (AREA)
- Software Systems (AREA)
- Medical Informatics (AREA)
- Data Mining & Analysis (AREA)
- Computing Systems (AREA)
- Mathematical Optimization (AREA)
- Algebra (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Computational Linguistics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Automation & Control Theory (AREA)
- Pure & Applied Mathematics (AREA)
- Biomedical Technology (AREA)
- Mathematical Analysis (AREA)
- Probability & Statistics with Applications (AREA)
- Biophysics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- General Factory Administration (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/035140 WO2021044611A1 (ja) | 2019-09-06 | 2019-09-06 | レシピ情報提示システム、レシピエラー推定システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021044611A1 true JPWO2021044611A1 (https=) | 2021-03-11 |
| JPWO2021044611A5 JPWO2021044611A5 (https=) | 2022-04-18 |
| JP7153142B2 JP7153142B2 (ja) | 2022-10-13 |
Family
ID=74853098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021543913A Active JP7153142B2 (ja) | 2019-09-06 | 2019-09-06 | レシピ情報提示システム、レシピエラー推定システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12174245B2 (https=) |
| JP (1) | JP7153142B2 (https=) |
| KR (1) | KR102889716B1 (https=) |
| CN (1) | CN114245933B (https=) |
| TW (1) | TWI743877B (https=) |
| WO (1) | WO2021044611A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102818861B1 (ko) * | 2020-03-30 | 2025-06-12 | 주식회사 히타치하이테크 | 진단 시스템 |
| US12372930B2 (en) * | 2021-12-01 | 2025-07-29 | United Microelectronics Corp. | Recipe verifying method, recipe verifying server, and smart manufacturing controlling system using the same |
| US12510878B2 (en) | 2022-05-16 | 2025-12-30 | Applied Materials, Inc. | Physically-informed multi-system hardware operating windows |
| CN119317938A (zh) * | 2022-06-21 | 2025-01-14 | 株式会社日立高新技术 | 不适合检测装置以及不适合检测方法 |
| TW202424469A (zh) * | 2022-08-18 | 2024-06-16 | 美商昂圖創新公司 | 基材缺陷偵測及比較 |
| WO2024105811A1 (ja) * | 2022-11-16 | 2024-05-23 | 株式会社日立ハイテク | エラー要因解析装置、および、エラー要因解析方法 |
| US12372943B2 (en) | 2023-10-06 | 2025-07-29 | Starbucks Corporation | Generation of computer-executable instructions based on monitoring network communications of remote computing systems |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0727707A (ja) * | 1993-07-09 | 1995-01-31 | Nikon Corp | 異物検査装置 |
| WO2007013170A1 (ja) * | 2005-07-29 | 2007-02-01 | Topcon Corporation | 自己診断機能を有する半導体デバイス製造検査装置 |
| WO2018159190A1 (ja) * | 2017-03-02 | 2018-09-07 | 東京エレクトロン株式会社 | 検査システム、および検査システムの故障解析・予知方法 |
| WO2018179890A1 (ja) * | 2017-03-30 | 2018-10-04 | 東京エレクトロン株式会社 | 検査システム、ウエハマップ表示器、ウエハマップ表示方法、およびコンピュータプログラム |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7065425B1 (en) | 2005-06-22 | 2006-06-20 | Internaitonal Business Machines Corporation | Metrology tool error log analysis methodology and system |
| JP4737564B2 (ja) * | 2008-07-08 | 2011-08-03 | ソニー株式会社 | 情報処理装置、情報処理方法、およびプログラム |
| JP2010087070A (ja) * | 2008-09-30 | 2010-04-15 | Hitachi High-Technologies Corp | 走査電子顕微鏡に用いられるレシピの診断装置 |
| JP5933985B2 (ja) | 2012-02-15 | 2016-06-15 | 株式会社日立ハイテクノロジーズ | レシピ実行時間演算装置および半導体検査装置 |
| KR102483787B1 (ko) * | 2016-02-25 | 2023-01-04 | 에스케이하이닉스 주식회사 | 반도체 장치의 결함 모델링 장치 및 방법, 이를 위한 컴퓨터 프로그램과, 이를 이용한 반도체 장치의 결함 검사 시스템 |
| US11047806B2 (en) | 2016-11-30 | 2021-06-29 | Kla-Tencor Corporation | Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures |
| US10565702B2 (en) * | 2017-01-30 | 2020-02-18 | Dongfang Jingyuan Electron Limited | Dynamic updates for the inspection of integrated circuits |
| TWI644190B (zh) | 2017-06-29 | 2018-12-11 | 台灣積體電路製造股份有限公司 | 製程系統與製程方法 |
| EP3489756A1 (en) * | 2017-11-23 | 2019-05-29 | ASML Netherlands B.V. | Method and apparatus to determine a patterning process parameter |
| JP7236231B2 (ja) * | 2018-09-07 | 2023-03-09 | ルネサスエレクトロニクス株式会社 | 半導体装置及び解析システム |
-
2019
- 2019-09-06 JP JP2021543913A patent/JP7153142B2/ja active Active
- 2019-09-06 US US17/634,809 patent/US12174245B2/en active Active
- 2019-09-06 WO PCT/JP2019/035140 patent/WO2021044611A1/ja not_active Ceased
- 2019-09-06 CN CN201980099384.8A patent/CN114245933B/zh active Active
- 2019-09-06 KR KR1020227004524A patent/KR102889716B1/ko active Active
-
2020
- 2020-07-09 TW TW109123151A patent/TWI743877B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0727707A (ja) * | 1993-07-09 | 1995-01-31 | Nikon Corp | 異物検査装置 |
| WO2007013170A1 (ja) * | 2005-07-29 | 2007-02-01 | Topcon Corporation | 自己診断機能を有する半導体デバイス製造検査装置 |
| WO2018159190A1 (ja) * | 2017-03-02 | 2018-09-07 | 東京エレクトロン株式会社 | 検査システム、および検査システムの故障解析・予知方法 |
| WO2018179890A1 (ja) * | 2017-03-30 | 2018-10-04 | 東京エレクトロン株式会社 | 検査システム、ウエハマップ表示器、ウエハマップ表示方法、およびコンピュータプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7153142B2 (ja) | 2022-10-13 |
| US20220334172A1 (en) | 2022-10-20 |
| TWI743877B (zh) | 2021-10-21 |
| US12174245B2 (en) | 2024-12-24 |
| KR20220034196A (ko) | 2022-03-17 |
| CN114245933B (zh) | 2025-11-18 |
| KR102889716B1 (ko) | 2025-11-21 |
| TW202111591A (zh) | 2021-03-16 |
| CN114245933A (zh) | 2022-03-25 |
| WO2021044611A1 (ja) | 2021-03-11 |
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