JPWO2021014610A1 - - Google Patents
Info
- Publication number
- JPWO2021014610A1 JPWO2021014610A1 JP2021534482A JP2021534482A JPWO2021014610A1 JP WO2021014610 A1 JPWO2021014610 A1 JP WO2021014610A1 JP 2021534482 A JP2021534482 A JP 2021534482A JP 2021534482 A JP2021534482 A JP 2021534482A JP WO2021014610 A1 JPWO2021014610 A1 JP WO2021014610A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/34—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to influence the nature of flow of the liquid or other fluent material, e.g. to produce swirl
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/08—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
- B05B9/0423—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material for supplying liquid or other fluent material to several spraying apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/004—Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
- B05B12/006—Pressure or flow rate sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/027—Pump details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2019/029014 WO2021014610A1 (ja) | 2019-07-24 | 2019-07-24 | ノズル、および液体噴射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021014610A1 true JPWO2021014610A1 (ja) | 2021-01-28 |
JP7312486B2 JP7312486B2 (ja) | 2023-07-21 |
Family
ID=74192538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021534482A Active JP7312486B2 (ja) | 2019-07-24 | 2019-07-24 | 液体噴射装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220351985A1 (ja) |
JP (1) | JP7312486B2 (ja) |
KR (1) | KR102658632B1 (ja) |
CN (1) | CN114126764A (ja) |
TW (1) | TWI711488B (ja) |
WO (1) | WO2021014610A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153150U (ja) * | 1979-04-17 | 1980-11-05 | ||
JPH05212317A (ja) * | 1992-02-05 | 1993-08-24 | Sugino Mach Ltd | 急拡大型液中ジェット噴射用ノズル |
JP2001044602A (ja) * | 1999-07-30 | 2001-02-16 | Kyocera Corp | 描画装置 |
EP1306136A1 (en) * | 2001-10-23 | 2003-05-02 | Theodorus Alphonsius Niemeijer | Method and arrangement for treating surfaces |
JP2005205397A (ja) * | 2003-12-24 | 2005-08-04 | Matsushita Electric Ind Co Ltd | 流体供給ノズル、基板処理装置及び基板処理方法 |
JP2010129840A (ja) * | 2008-11-28 | 2010-06-10 | Asahi Sunac Corp | 洗浄用ノズル |
JP2014064979A (ja) * | 2012-09-25 | 2014-04-17 | Sugino Machine Ltd | キャビテーションノズル |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56141860A (en) * | 1980-04-07 | 1981-11-05 | Nippon Steel Corp | Liquid injector |
JP3320105B2 (ja) * | 1992-07-30 | 2002-09-03 | バブコック日立株式会社 | キヤビテーシヨン噴流用ノズル |
JPH11204480A (ja) | 1998-01-20 | 1999-07-30 | Dainippon Screen Mfg Co Ltd | 基板洗浄装置 |
US20060118495A1 (en) * | 2004-12-08 | 2006-06-08 | Ilia Kondratalv | Nozzle for generating high-energy cavitation |
ES2370158T3 (es) * | 2005-04-19 | 2011-12-13 | Special Coating Laboratory International | Unidad de lavado para una máquina de limpieza de cristales oftálmicos u otros sustratos. |
JP2012170849A (ja) * | 2011-02-18 | 2012-09-10 | Panasonic Corp | 微細気泡生成ノズル |
CN202238396U (zh) * | 2011-09-09 | 2012-05-30 | 海南绿航水下清洗科技有限公司 | 水下清洗枪用喷头 |
CN102513237B (zh) * | 2011-12-28 | 2014-03-12 | 天津海源流体工程技术有限公司 | 空化型超高压水锤式水枪喷头 |
CN102941172B (zh) * | 2012-11-26 | 2015-06-10 | 宁波恒瑞机械有限公司 | 一种混液发泡装置 |
CN107960075B (zh) * | 2015-05-01 | 2019-12-31 | Ok工程有限公司 | 具备环流式气泡产生喷嘴的液体供给装置 |
CN105275702B (zh) * | 2015-11-18 | 2017-12-26 | 武汉科技大学 | 一种空燃比自适应调节的喷油器雾化装置 |
CN105642456A (zh) * | 2016-01-04 | 2016-06-08 | 湖南工业大学 | 一种高压低频自振脉冲气液射流喷嘴 |
JP6865952B2 (ja) * | 2016-12-07 | 2021-04-28 | 旭サナック株式会社 | 1流体ノズル |
CN207254577U (zh) * | 2017-09-01 | 2018-04-20 | 西安东仪海博机电科技有限责任公司 | 一种清洗剥离用脉冲水射流喷头装置 |
CN207745859U (zh) * | 2017-12-13 | 2018-08-21 | 广东药科大学 | 一种制备低聚壳聚糖的自振空化装置 |
-
2019
- 2019-07-24 KR KR1020227001885A patent/KR102658632B1/ko active IP Right Grant
- 2019-07-24 JP JP2021534482A patent/JP7312486B2/ja active Active
- 2019-07-24 US US17/619,020 patent/US20220351985A1/en active Pending
- 2019-07-24 CN CN201980098460.3A patent/CN114126764A/zh active Pending
- 2019-07-24 WO PCT/JP2019/029014 patent/WO2021014610A1/ja active Application Filing
- 2019-10-15 TW TW108137002A patent/TWI711488B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153150U (ja) * | 1979-04-17 | 1980-11-05 | ||
JPH05212317A (ja) * | 1992-02-05 | 1993-08-24 | Sugino Mach Ltd | 急拡大型液中ジェット噴射用ノズル |
JP2001044602A (ja) * | 1999-07-30 | 2001-02-16 | Kyocera Corp | 描画装置 |
EP1306136A1 (en) * | 2001-10-23 | 2003-05-02 | Theodorus Alphonsius Niemeijer | Method and arrangement for treating surfaces |
JP2005205397A (ja) * | 2003-12-24 | 2005-08-04 | Matsushita Electric Ind Co Ltd | 流体供給ノズル、基板処理装置及び基板処理方法 |
JP2010129840A (ja) * | 2008-11-28 | 2010-06-10 | Asahi Sunac Corp | 洗浄用ノズル |
JP2014064979A (ja) * | 2012-09-25 | 2014-04-17 | Sugino Machine Ltd | キャビテーションノズル |
Also Published As
Publication number | Publication date |
---|---|
CN114126764A (zh) | 2022-03-01 |
WO2021014610A1 (ja) | 2021-01-28 |
TW202103800A (zh) | 2021-02-01 |
JP7312486B2 (ja) | 2023-07-21 |
US20220351985A1 (en) | 2022-11-03 |
TWI711488B (zh) | 2020-12-01 |
KR102658632B1 (ko) | 2024-04-19 |
KR20220020389A (ko) | 2022-02-18 |
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