JPWO2021010019A1 - - Google Patents
Info
- Publication number
- JPWO2021010019A1 JPWO2021010019A1 JP2021532704A JP2021532704A JPWO2021010019A1 JP WO2021010019 A1 JPWO2021010019 A1 JP WO2021010019A1 JP 2021532704 A JP2021532704 A JP 2021532704A JP 2021532704 A JP2021532704 A JP 2021532704A JP WO2021010019 A1 JPWO2021010019 A1 JP WO2021010019A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/051—Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/058—Mixtures of metal powder with non-metallic powder by reaction sintering (i.e. gasless reaction starting from a mixture of solid metal compounds)
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
- C22C32/0068—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only nitrides
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
- C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
- C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
- C22C33/0292—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5% with more than 5% preformed carbides, nitrides or borides
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019129820 | 2019-07-12 | ||
JP2019129820 | 2019-07-12 | ||
PCT/JP2020/020307 WO2021010019A1 (ja) | 2019-07-12 | 2020-05-22 | Fe-Pt-BN系スパッタリングターゲット及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021010019A1 true JPWO2021010019A1 (ja) | 2021-01-21 |
JP7267425B2 JP7267425B2 (ja) | 2023-05-01 |
Family
ID=74210454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021532704A Active JP7267425B2 (ja) | 2019-07-12 | 2020-05-22 | Fe-Pt-BN系スパッタリングターゲット及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220267892A1 (ja) |
JP (1) | JP7267425B2 (ja) |
CN (1) | CN114072536B (ja) |
TW (1) | TWI821572B (ja) |
WO (1) | WO2021010019A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014045744A1 (ja) * | 2012-09-21 | 2014-03-27 | Jx日鉱日石金属株式会社 | Fe-Pt系磁性材焼結体 |
WO2014064995A1 (ja) * | 2012-10-25 | 2014-05-01 | Jx日鉱日石金属株式会社 | 非磁性物質分散型Fe-Pt系スパッタリングターゲット |
WO2014132746A1 (ja) * | 2013-03-01 | 2014-09-04 | 田中貴金属工業株式会社 | FePt-C系スパッタリングターゲット及びその製造方法 |
WO2016047236A1 (ja) * | 2014-09-22 | 2016-03-31 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
WO2016047578A1 (ja) * | 2014-09-26 | 2016-03-31 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
WO2018047978A1 (ja) * | 2016-09-12 | 2018-03-15 | Jx金属株式会社 | 強磁性材スパッタリングターゲット |
WO2019181823A1 (ja) * | 2018-03-20 | 2019-09-26 | 田中貴金属工業株式会社 | スパッタリングターゲット用Fe-Pt-酸化物-BN系焼結体 |
JP2021008641A (ja) * | 2019-06-28 | 2021-01-28 | 田中貴金属工業株式会社 | Fe−Pt−BN系スパッタリングターゲット及びその製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3191665B2 (ja) * | 1995-03-17 | 2001-07-23 | トヨタ自動車株式会社 | 金属焼結体複合材料及びその製造方法 |
CN104781446B (zh) * | 2012-10-23 | 2017-03-08 | 吉坤日矿日石金属株式会社 | Fe‑Pt基烧结体溅射靶及其制造方法 |
JP5969120B2 (ja) * | 2013-05-13 | 2016-08-17 | Jx金属株式会社 | 磁性薄膜形成用スパッタリングターゲット |
-
2020
- 2020-05-22 CN CN202080049423.6A patent/CN114072536B/zh active Active
- 2020-05-22 WO PCT/JP2020/020307 patent/WO2021010019A1/ja active Application Filing
- 2020-05-22 US US17/626,394 patent/US20220267892A1/en not_active Abandoned
- 2020-05-22 JP JP2021532704A patent/JP7267425B2/ja active Active
- 2020-06-12 TW TW109119798A patent/TWI821572B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014045744A1 (ja) * | 2012-09-21 | 2014-03-27 | Jx日鉱日石金属株式会社 | Fe-Pt系磁性材焼結体 |
WO2014064995A1 (ja) * | 2012-10-25 | 2014-05-01 | Jx日鉱日石金属株式会社 | 非磁性物質分散型Fe-Pt系スパッタリングターゲット |
WO2014132746A1 (ja) * | 2013-03-01 | 2014-09-04 | 田中貴金属工業株式会社 | FePt-C系スパッタリングターゲット及びその製造方法 |
WO2016047236A1 (ja) * | 2014-09-22 | 2016-03-31 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
WO2016047578A1 (ja) * | 2014-09-26 | 2016-03-31 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
WO2018047978A1 (ja) * | 2016-09-12 | 2018-03-15 | Jx金属株式会社 | 強磁性材スパッタリングターゲット |
WO2019181823A1 (ja) * | 2018-03-20 | 2019-09-26 | 田中貴金属工業株式会社 | スパッタリングターゲット用Fe-Pt-酸化物-BN系焼結体 |
JP2021008641A (ja) * | 2019-06-28 | 2021-01-28 | 田中貴金属工業株式会社 | Fe−Pt−BN系スパッタリングターゲット及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN114072536B (zh) | 2024-06-07 |
WO2021010019A1 (ja) | 2021-01-21 |
CN114072536A (zh) | 2022-02-18 |
JP7267425B2 (ja) | 2023-05-01 |
TWI821572B (zh) | 2023-11-11 |
US20220267892A1 (en) | 2022-08-25 |
TW202106908A (zh) | 2021-02-16 |
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