JPWO2020250591A1 - - Google Patents

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Publication number
JPWO2020250591A1
JPWO2020250591A1 JP2021525938A JP2021525938A JPWO2020250591A1 JP WO2020250591 A1 JPWO2020250591 A1 JP WO2020250591A1 JP 2021525938 A JP2021525938 A JP 2021525938A JP 2021525938 A JP2021525938 A JP 2021525938A JP WO2020250591 A1 JPWO2020250591 A1 JP WO2020250591A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021525938A
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JP7167337B2 (ja
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Publication of JPWO2020250591A1 publication Critical patent/JPWO2020250591A1/ja
Application granted granted Critical
Publication of JP7167337B2 publication Critical patent/JP7167337B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G33/00—Compounds of niobium
    • C01G33/006—Compounds containing, besides niobium, two or more other elements, with the exception of oxygen or hydrogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G35/00—Compounds of tantalum
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G55/00—Compounds of ruthenium, rhodium, palladium, osmium, iridium, or platinum
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/088—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Physical Vapour Deposition (AREA)
  • Semiconductor Memories (AREA)
JP2021525938A 2019-06-12 2020-04-28 圧電素子及び圧電素子の作製方法 Active JP7167337B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019109610 2019-06-12
JP2019109610 2019-06-12
PCT/JP2020/018079 WO2020250591A1 (ja) 2019-06-12 2020-04-28 圧電素子

Publications (2)

Publication Number Publication Date
JPWO2020250591A1 true JPWO2020250591A1 (ja) 2020-12-17
JP7167337B2 JP7167337B2 (ja) 2022-11-08

Family

ID=73780947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021525938A Active JP7167337B2 (ja) 2019-06-12 2020-04-28 圧電素子及び圧電素子の作製方法

Country Status (5)

Country Link
US (1) US20220093843A1 (ja)
EP (1) EP3985747B1 (ja)
JP (1) JP7167337B2 (ja)
CN (1) CN113950751A (ja)
WO (1) WO2020250591A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7539474B2 (ja) 2020-07-28 2024-08-23 富士フイルム株式会社 圧電膜付き基板、圧電素子、及び圧電膜付き基板の作製方法
JP2023035171A (ja) 2021-08-31 2023-03-13 富士フイルム株式会社 圧電積層体及び圧電素子
JP2023035170A (ja) 2021-08-31 2023-03-13 富士フイルム株式会社 圧電積層体及び圧電素子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186258A (ja) * 2004-12-28 2006-07-13 Seiko Epson Corp 圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、薄膜圧電共振子、周波数フィルタ、発振器、電子回路、および電子機器
WO2014007015A1 (ja) * 2012-07-02 2014-01-09 株式会社村田製作所 圧電薄膜素子及びその製造方法
WO2015194458A1 (ja) * 2014-06-20 2015-12-23 株式会社アルバック 多層膜の製造方法および多層膜
JP2019016793A (ja) * 2017-07-07 2019-01-31 アドバンストマテリアルテクノロジーズ株式会社 膜構造体及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07142600A (ja) * 1993-11-12 1995-06-02 Oki Electric Ind Co Ltd 薄膜の形成方法
JP2001223403A (ja) 2000-02-08 2001-08-17 Matsushita Electric Ind Co Ltd 強誘電体薄膜およびその形成方法とこれを用いた強誘電体薄膜素子
JP2004006722A (ja) * 2002-03-27 2004-01-08 Seiko Epson Corp 圧電アクチュエータ、インクジェット式ヘッド及び吐出装置
JP2005166912A (ja) * 2003-12-02 2005-06-23 Seiko Epson Corp 強誘電体薄膜の製造方法、強誘電体メモリ素子、圧電体素子、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、及び電子機器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186258A (ja) * 2004-12-28 2006-07-13 Seiko Epson Corp 圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、薄膜圧電共振子、周波数フィルタ、発振器、電子回路、および電子機器
WO2014007015A1 (ja) * 2012-07-02 2014-01-09 株式会社村田製作所 圧電薄膜素子及びその製造方法
WO2015194458A1 (ja) * 2014-06-20 2015-12-23 株式会社アルバック 多層膜の製造方法および多層膜
JP2019016793A (ja) * 2017-07-07 2019-01-31 アドバンストマテリアルテクノロジーズ株式会社 膜構造体及びその製造方法

Also Published As

Publication number Publication date
WO2020250591A1 (ja) 2020-12-17
EP3985747A1 (en) 2022-04-20
EP3985747B1 (en) 2023-12-13
CN113950751A (zh) 2022-01-18
US20220093843A1 (en) 2022-03-24
EP3985747A4 (en) 2022-09-14
JP7167337B2 (ja) 2022-11-08

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