JPWO2020218482A1 - - Google Patents

Info

Publication number
JPWO2020218482A1
JPWO2020218482A1 JP2021516243A JP2021516243A JPWO2020218482A1 JP WO2020218482 A1 JPWO2020218482 A1 JP WO2020218482A1 JP 2021516243 A JP2021516243 A JP 2021516243A JP 2021516243 A JP2021516243 A JP 2021516243A JP WO2020218482 A1 JPWO2020218482 A1 JP WO2020218482A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021516243A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020218482A1 publication Critical patent/JPWO2020218482A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2021516243A 2019-04-26 2020-04-24 Pending JPWO2020218482A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019086713 2019-04-26
PCT/JP2020/017642 WO2020218482A1 (ja) 2019-04-26 2020-04-24 ＳｉＣ基板の製造方法、その製造装置、及び、エピタキシャル成長方法

Publications (1)

Publication Number Publication Date
JPWO2020218482A1 true JPWO2020218482A1 (ja) 2020-10-29

Family

ID=72942203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021516243A Pending JPWO2020218482A1 (ja) 2019-04-26 2020-04-24

Country Status (6)

Country Link
US (1) US11952678B2 (ja)
EP (1) EP3960912A4 (ja)
JP (1) JPWO2020218482A1 (ja)
CN (1) CN114174563A (ja)
TW (1) TW202044353A (ja)
WO (1) WO2020218482A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023058492A1 (ja) * 2021-10-05 2023-04-13 学校法人関西学院 ドーパントの活性化率を向上させる方法及びそれらの方法により作製された構造

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000053493A (ja) * 1998-07-31 2000-02-22 Denso Corp 単結晶の製造方法および単結晶製造装置
WO2002099169A1 (fr) * 2001-06-04 2002-12-12 The New Industry Research Organization Carbure de silicium monocristal et son procede de production
JP2007112661A (ja) * 2005-10-20 2007-05-10 Bridgestone Corp 炭化ケイ素単結晶の製造方法及び製造装置
JP2011243618A (ja) * 2010-05-14 2011-12-01 Sumitomo Electric Ind Ltd 炭化珪素基板の製造方法、半導体装置の製造方法、炭化珪素基板および半導体装置
WO2014020694A1 (ja) * 2012-07-31 2014-02-06 株式会社エコトロン 単結晶炭化珪素基板およびその作製方法
JP6721208B2 (ja) 2016-04-08 2020-07-08 株式会社ユメックス ショートアーク放電ランプ用電極
EP3892761A1 (en) * 2016-04-28 2021-10-13 Kwansei Gakuin Educational Foundation Vapour-phase epitaxial growth method, and method for producing substrate equipped with epitaxial layer
JP2018158858A (ja) * 2017-03-22 2018-10-11 日本電信電話株式会社 結晶成長方法および装置

Also Published As

Publication number Publication date
EP3960912A1 (en) 2022-03-02
CN114174563A (zh) 2022-03-11
US20220213615A1 (en) 2022-07-07
WO2020218482A1 (ja) 2020-10-29
TW202044353A (zh) 2020-12-01
EP3960912A4 (en) 2023-05-03
US11952678B2 (en) 2024-04-09

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