JPWO2020213551A5 - - Google Patents

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Publication number
JPWO2020213551A5
JPWO2020213551A5 JP2020521377A JP2020521377A JPWO2020213551A5 JP WO2020213551 A5 JPWO2020213551 A5 JP WO2020213551A5 JP 2020521377 A JP2020521377 A JP 2020521377A JP 2020521377 A JP2020521377 A JP 2020521377A JP WO2020213551 A5 JPWO2020213551 A5 JP WO2020213551A5
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JP
Japan
Prior art keywords
flow velocity
substrate
velocity sensor
substrate surface
resistor
Prior art date
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Granted
Application number
JP2020521377A
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English (en)
Japanese (ja)
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JP7410022B2 (ja
JPWO2020213551A1 (https=
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Publication date
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Priority claimed from PCT/JP2020/016245 external-priority patent/WO2020213551A1/ja
Publication of JPWO2020213551A1 publication Critical patent/JPWO2020213551A1/ja
Publication of JPWO2020213551A5 publication Critical patent/JPWO2020213551A5/ja
Application granted granted Critical
Publication of JP7410022B2 publication Critical patent/JP7410022B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020521377A 2019-04-16 2020-04-13 流速センサ Active JP7410022B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019078202 2019-04-16
JP2019078202 2019-04-16
PCT/JP2020/016245 WO2020213551A1 (ja) 2019-04-16 2020-04-13 流速センサ

Publications (3)

Publication Number Publication Date
JPWO2020213551A1 JPWO2020213551A1 (https=) 2020-10-22
JPWO2020213551A5 true JPWO2020213551A5 (https=) 2023-02-03
JP7410022B2 JP7410022B2 (ja) 2024-01-09

Family

ID=72837147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020521377A Active JP7410022B2 (ja) 2019-04-16 2020-04-13 流速センサ

Country Status (4)

Country Link
US (1) US11726104B2 (https=)
JP (1) JP7410022B2 (https=)
CN (1) CN113677999B (https=)
WO (1) WO2020213551A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021211022A1 (de) * 2021-09-30 2023-03-30 Skf Lubrication Systems Germany Gmbh Fluidgeschwindigkeitssensoreinheit und/oder Fluidvolumenstromsensoreinheit und Bestimmungsverfahren
JP7842057B2 (ja) * 2023-03-24 2026-04-07 パナソニックオートモーティブシステムズ株式会社 車両
KR102931871B1 (ko) * 2023-07-10 2026-02-27 한국공학대학교산학협력단 기준 센서를 포함하고 관통 홀을 갖는 반도체식 풍속 센서 및 이의 제조방법

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61170618A (ja) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
DE3713981A1 (de) 1987-04-27 1988-11-17 Robert Buck Waermeuebergangsmessgeraet, insbesondere stroemungswaechter
EP0357903B1 (de) 1988-07-23 1991-09-11 Robert Buck Wärmeübergangsmessgerät, insbesondere Strömungswächter
JPH0438425A (ja) * 1990-06-01 1992-02-07 Mitsubishi Electric Corp 熱式流量センサ
US5417110A (en) * 1991-05-29 1995-05-23 Wood; Tony J. Unit and system for sensing fluid velocity
JPH0835978A (ja) 1994-07-20 1996-02-06 Murata Mfg Co Ltd 風速センサ
JPH0953967A (ja) 1995-08-17 1997-02-25 Murata Mfg Co Ltd 流量センサ
DE19614459A1 (de) * 1996-04-12 1997-10-16 Grundfos As Elektronisches Bauelement
JP3500040B2 (ja) * 1997-06-02 2004-02-23 株式会社リコー フローセンサ
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
JP3655838B2 (ja) * 2001-04-27 2005-06-02 三菱電機株式会社 感熱式流量センサ
JP3920247B2 (ja) * 2003-07-02 2007-05-30 三菱電機株式会社 感熱式流量検出素子およびその製造方法
JP2006133243A (ja) * 2006-02-13 2006-05-25 Yamatake Corp フローセンサ
JP5080020B2 (ja) * 2006-04-13 2012-11-21 日立オートモティブシステムズ株式会社 熱式流量センサ
JP2008215825A (ja) * 2007-02-28 2008-09-18 Yamatake Corp センサ
JP2012181061A (ja) * 2011-02-28 2012-09-20 Seiko Epson Corp 流速センサー
JP2012189349A (ja) * 2011-03-09 2012-10-04 Seiko Epson Corp 流速センサー
JP6706871B2 (ja) * 2015-10-02 2020-06-10 Koa株式会社 流量センサ
JP6825821B2 (ja) * 2016-04-26 2021-02-03 Koa株式会社 流量センサ
JP7445369B2 (ja) * 2018-09-21 2024-03-07 Koa株式会社 流量センサ装置
JP7285056B2 (ja) * 2018-09-21 2023-06-01 Koa株式会社 流量センサ装置

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