JP7410022B2 - 流速センサ - Google Patents

流速センサ Download PDF

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Publication number
JP7410022B2
JP7410022B2 JP2020521377A JP2020521377A JP7410022B2 JP 7410022 B2 JP7410022 B2 JP 7410022B2 JP 2020521377 A JP2020521377 A JP 2020521377A JP 2020521377 A JP2020521377 A JP 2020521377A JP 7410022 B2 JP7410022 B2 JP 7410022B2
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JP
Japan
Prior art keywords
substrate
flow rate
rate sensor
substrate surface
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020521377A
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English (en)
Japanese (ja)
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JPWO2020213551A1 (https=
JPWO2020213551A5 (https=
Inventor
智一 池野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPWO2020213551A1 publication Critical patent/JPWO2020213551A1/ja
Publication of JPWO2020213551A5 publication Critical patent/JPWO2020213551A5/ja
Application granted granted Critical
Publication of JP7410022B2 publication Critical patent/JP7410022B2/ja
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/24—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid
    • G01F23/246—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid thermal devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Thermal Sciences (AREA)
  • Measuring Volume Flow (AREA)
JP2020521377A 2019-04-16 2020-04-13 流速センサ Active JP7410022B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019078202 2019-04-16
JP2019078202 2019-04-16
PCT/JP2020/016245 WO2020213551A1 (ja) 2019-04-16 2020-04-13 流速センサ

Publications (3)

Publication Number Publication Date
JPWO2020213551A1 JPWO2020213551A1 (https=) 2020-10-22
JPWO2020213551A5 JPWO2020213551A5 (https=) 2023-02-03
JP7410022B2 true JP7410022B2 (ja) 2024-01-09

Family

ID=72837147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020521377A Active JP7410022B2 (ja) 2019-04-16 2020-04-13 流速センサ

Country Status (4)

Country Link
US (1) US11726104B2 (https=)
JP (1) JP7410022B2 (https=)
CN (1) CN113677999B (https=)
WO (1) WO2020213551A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021211022A1 (de) * 2021-09-30 2023-03-30 Skf Lubrication Systems Germany Gmbh Fluidgeschwindigkeitssensoreinheit und/oder Fluidvolumenstromsensoreinheit und Bestimmungsverfahren
JP7842057B2 (ja) * 2023-03-24 2026-04-07 パナソニックオートモーティブシステムズ株式会社 車両
KR102931871B1 (ko) * 2023-07-10 2026-02-27 한국공학대학교산학협력단 기준 센서를 포함하고 관통 홀을 갖는 반도체식 풍속 센서 및 이의 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6030709A (en) 1996-04-12 2000-02-29 Grundfos A/S Electronic component
JP2006133243A (ja) 2006-02-13 2006-05-25 Yamatake Corp フローセンサ
JP2008215825A (ja) 2007-02-28 2008-09-18 Yamatake Corp センサ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61170618A (ja) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
DE3713981A1 (de) 1987-04-27 1988-11-17 Robert Buck Waermeuebergangsmessgeraet, insbesondere stroemungswaechter
EP0357903B1 (de) 1988-07-23 1991-09-11 Robert Buck Wärmeübergangsmessgerät, insbesondere Strömungswächter
JPH0438425A (ja) * 1990-06-01 1992-02-07 Mitsubishi Electric Corp 熱式流量センサ
US5417110A (en) * 1991-05-29 1995-05-23 Wood; Tony J. Unit and system for sensing fluid velocity
JPH0835978A (ja) 1994-07-20 1996-02-06 Murata Mfg Co Ltd 風速センサ
JPH0953967A (ja) 1995-08-17 1997-02-25 Murata Mfg Co Ltd 流量センサ
JP3500040B2 (ja) * 1997-06-02 2004-02-23 株式会社リコー フローセンサ
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
JP3655838B2 (ja) * 2001-04-27 2005-06-02 三菱電機株式会社 感熱式流量センサ
JP3920247B2 (ja) * 2003-07-02 2007-05-30 三菱電機株式会社 感熱式流量検出素子およびその製造方法
JP5080020B2 (ja) * 2006-04-13 2012-11-21 日立オートモティブシステムズ株式会社 熱式流量センサ
JP2012181061A (ja) * 2011-02-28 2012-09-20 Seiko Epson Corp 流速センサー
JP2012189349A (ja) * 2011-03-09 2012-10-04 Seiko Epson Corp 流速センサー
JP6706871B2 (ja) * 2015-10-02 2020-06-10 Koa株式会社 流量センサ
JP6825821B2 (ja) * 2016-04-26 2021-02-03 Koa株式会社 流量センサ
JP7445369B2 (ja) * 2018-09-21 2024-03-07 Koa株式会社 流量センサ装置
JP7285056B2 (ja) * 2018-09-21 2023-06-01 Koa株式会社 流量センサ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6030709A (en) 1996-04-12 2000-02-29 Grundfos A/S Electronic component
JP2006133243A (ja) 2006-02-13 2006-05-25 Yamatake Corp フローセンサ
JP2008215825A (ja) 2007-02-28 2008-09-18 Yamatake Corp センサ

Also Published As

Publication number Publication date
CN113677999A (zh) 2021-11-19
CN113677999B (zh) 2024-09-20
WO2020213551A1 (ja) 2020-10-22
US11726104B2 (en) 2023-08-15
JPWO2020213551A1 (https=) 2020-10-22
US20220043020A1 (en) 2022-02-10

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