JPWO2020096794A5 - - Google Patents

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Publication number
JPWO2020096794A5
JPWO2020096794A5 JP2021524017A JP2021524017A JPWO2020096794A5 JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5 JP 2021524017 A JP2021524017 A JP 2021524017A JP 2021524017 A JP2021524017 A JP 2021524017A JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5
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JP
Japan
Prior art keywords
stage
metrology system
light source
sample holder
sample
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Pending
Application number
JP2021524017A
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English (en)
Japanese (ja)
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JP2022514180A (ja
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Priority claimed from PCT/US2019/058313 external-priority patent/WO2020096794A1/en
Publication of JP2022514180A publication Critical patent/JP2022514180A/ja
Publication of JPWO2020096794A5 publication Critical patent/JPWO2020096794A5/ja
Pending legal-status Critical Current

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JP2021524017A 2018-11-07 2019-10-28 導波計測のための方法及び装置 Pending JP2022514180A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862756964P 2018-11-07 2018-11-07
US62/756,964 2018-11-07
US201862772887P 2018-11-29 2018-11-29
US62/772,887 2018-11-29
PCT/US2019/058313 WO2020096794A1 (en) 2018-11-07 2019-10-28 Methods and apparatus for waveguide metrology

Publications (2)

Publication Number Publication Date
JP2022514180A JP2022514180A (ja) 2022-02-10
JPWO2020096794A5 true JPWO2020096794A5 (zh) 2022-11-08

Family

ID=70459610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021524017A Pending JP2022514180A (ja) 2018-11-07 2019-10-28 導波計測のための方法及び装置

Country Status (6)

Country Link
US (1) US11029206B2 (zh)
EP (1) EP3877739A4 (zh)
JP (1) JP2022514180A (zh)
KR (1) KR20210072123A (zh)
CN (1) CN112997058A (zh)
WO (1) WO2020096794A1 (zh)

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CN113218627B (zh) * 2021-03-26 2022-10-14 歌尔股份有限公司 光栅衍射效率测试装置及方法
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