JPWO2020096794A5 - - Google Patents
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- JPWO2020096794A5 JPWO2020096794A5 JP2021524017A JP2021524017A JPWO2020096794A5 JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5 JP 2021524017 A JP2021524017 A JP 2021524017A JP 2021524017 A JP2021524017 A JP 2021524017A JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5
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- JP
- Japan
- Prior art keywords
- stage
- metrology system
- light source
- sample holder
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005540 biological transmission Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 3
- 210000004279 Orbit Anatomy 0.000 claims 1
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000003287 optical Effects 0.000 claims 1
- 230000001360 synchronised Effects 0.000 claims 1
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862756964P | 2018-11-07 | 2018-11-07 | |
US62/756,964 | 2018-11-07 | ||
US201862772887P | 2018-11-29 | 2018-11-29 | |
US62/772,887 | 2018-11-29 | ||
PCT/US2019/058313 WO2020096794A1 (en) | 2018-11-07 | 2019-10-28 | Methods and apparatus for waveguide metrology |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022514180A JP2022514180A (ja) | 2022-02-10 |
JPWO2020096794A5 true JPWO2020096794A5 (zh) | 2022-11-08 |
Family
ID=70459610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021524017A Pending JP2022514180A (ja) | 2018-11-07 | 2019-10-28 | 導波計測のための方法及び装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11029206B2 (zh) |
EP (1) | EP3877739A4 (zh) |
JP (1) | JP2022514180A (zh) |
KR (1) | KR20210072123A (zh) |
CN (1) | CN112997058A (zh) |
WO (1) | WO2020096794A1 (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10676325B1 (en) | 2018-02-27 | 2020-06-09 | Willie Dell | Hoist track adaptor |
WO2021119153A1 (en) * | 2019-12-09 | 2021-06-17 | Egalon Claudio Oliveira | Systems and methods of side illumination of waveguides |
WO2022081366A1 (en) | 2020-10-15 | 2022-04-21 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
DE102021200231A1 (de) * | 2021-01-13 | 2022-07-14 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Ermitteln einer Beugungscharakteristik eines Hologrammelements für eine Datenbrille |
CN113218627B (zh) * | 2021-03-26 | 2022-10-14 | 歌尔股份有限公司 | 光栅衍射效率测试装置及方法 |
US20240201456A1 (en) * | 2021-04-30 | 2024-06-20 | Magic Leap, Inc. | Thin illumination layer waveguide and methods of fabrication |
CN113884180B (zh) * | 2021-09-29 | 2024-03-12 | 歌尔光学科技有限公司 | 衍射光波导的测试系统、方法及装置 |
WO2023197106A1 (en) * | 2022-04-11 | 2023-10-19 | Goertek Optical Technology Co., Ltd | Waveguide measurement device |
US20230375410A1 (en) * | 2022-05-20 | 2023-11-23 | Facebook Technologies, Llc | Apparatuses and systems for optical element measurements |
WO2024059310A1 (en) * | 2022-09-15 | 2024-03-21 | Applied Materials, Inc. | Methods to measure light loss and efficiency of diffraction gratings on optical substrates |
CN115931303B (zh) * | 2022-10-26 | 2023-11-17 | 江西凤凰光学科技有限公司 | 一种多色衍射光波导的测试方法 |
DE102022132453A1 (de) | 2022-12-07 | 2024-06-13 | Trioptics Gmbh | Vorrichtung und Verfahren zum Bestimmen einer Abbildungsqualität zumindest einer Abbildung für einen Prüfling |
CN117367751B (zh) * | 2023-10-19 | 2024-05-10 | 中聚科技股份有限公司 | 超脉冲掺铥激光器的性能检测方法及装置 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5493393A (en) * | 1989-03-17 | 1996-02-20 | The Boeing Company | Planar waveguide spectrograph |
US5233405A (en) * | 1991-11-06 | 1993-08-03 | Hewlett-Packard Company | Optical spectrum analyzer having double-pass monochromator |
IL116583A (en) * | 1995-12-27 | 2001-06-14 | Ruschin Shlomo | Spectral analyzer and directional indicator |
JP4882139B2 (ja) * | 2000-07-19 | 2012-02-22 | 大日本印刷株式会社 | ホログラム評価装置 |
US6731380B2 (en) * | 2001-06-18 | 2004-05-04 | Applied Optics Center Of Delaware, Inc. | Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films |
KR100502560B1 (ko) * | 2002-07-25 | 2005-07-20 | 주식회사 솔루션닉스 | 광학식 마커를 이용한 3차원 측정 데이터 자동 정렬장치및 그 방법 |
JP2005257320A (ja) * | 2004-03-09 | 2005-09-22 | Tokyo Univ Of Pharmacy & Life Science | 分光電気化学セル及びこれを用いた光導波路分光電気化学測定法 |
US7254290B1 (en) | 2004-05-10 | 2007-08-07 | Lockheed Martin Corporation | Enhanced waveguide metrology gauge collimator |
US7791727B2 (en) * | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
CN101449134B (zh) * | 2006-05-01 | 2011-08-03 | 海因兹仪器公司 | 光学元件中线性和圆形双衰减的测量 |
JP4976113B2 (ja) | 2006-11-29 | 2012-07-18 | 三井化学株式会社 | 光導波路の検査方法および検査装置 |
JP2010139483A (ja) | 2008-12-15 | 2010-06-24 | Synergy Optosystems Co Ltd | 光導波路の検査システム及び検査方法 |
WO2010140998A1 (en) * | 2009-06-02 | 2010-12-09 | Vladimir Yankov | Optical integrated nanospectrometer and method of manufacturing thereof |
JP5467875B2 (ja) | 2010-01-18 | 2014-04-09 | シナジーオプトシステムズ株式会社 | 光導波路の検査装置 |
KR20130091390A (ko) | 2012-02-08 | 2013-08-19 | 주식회사 제씨콤 | 평판형 광도파로의 각도검사장치 |
WO2013188602A1 (en) * | 2012-06-13 | 2013-12-19 | Kla-Tencor Corporation | Optical surface scanning systems and methods |
JP2014194473A (ja) | 2013-03-28 | 2014-10-09 | Hitachi Chemical Co Ltd | 光導波路及び光導波路の検査方法 |
US9846122B2 (en) * | 2013-11-26 | 2017-12-19 | Nanometrics Incorporated | Optical metrology system for spectral imaging of a sample |
JP2015215237A (ja) | 2014-05-09 | 2015-12-03 | 日立化成株式会社 | 光導波路の検査方法 |
JP6331196B2 (ja) | 2015-01-05 | 2018-05-30 | シナジーオプトシステムズ株式会社 | 光学素子、照射光学系、集光光学系および光導波路検査装置 |
US9372347B1 (en) * | 2015-02-09 | 2016-06-21 | Microsoft Technology Licensing, Llc | Display system |
WO2017165403A1 (en) * | 2016-03-21 | 2017-09-28 | Nueon Inc. | Porous mesh spectrometry methods and apparatus |
JP6730125B2 (ja) * | 2016-08-01 | 2020-07-29 | 株式会社ディスコ | 計測装置 |
KR20230070077A (ko) * | 2016-10-28 | 2023-05-19 | 매직 립, 인코포레이티드 | 스캐닝 반사기를 갖는 대형 시야 디스플레이를 위한 방법 및 시스템 |
JP2018146437A (ja) | 2017-03-07 | 2018-09-20 | 日東電工株式会社 | 光導波路の検査方法およびそれを用いた光導波路の製法 |
US11092427B2 (en) * | 2018-09-25 | 2021-08-17 | The Charles Stark Draper Laboratory, Inc. | Metrology and profilometry using light field generator |
EP3956629A4 (en) * | 2019-04-15 | 2023-01-04 | Applied Materials, Inc. | MEASURING SYSTEM AND METHOD OF DIFFRACTING LIGHT |
-
2019
- 2019-10-28 JP JP2021524017A patent/JP2022514180A/ja active Pending
- 2019-10-28 WO PCT/US2019/058313 patent/WO2020096794A1/en unknown
- 2019-10-28 EP EP19881654.8A patent/EP3877739A4/en active Pending
- 2019-10-28 KR KR1020217016944A patent/KR20210072123A/ko unknown
- 2019-10-28 CN CN201980073431.1A patent/CN112997058A/zh active Pending
- 2019-10-31 US US16/670,976 patent/US11029206B2/en active Active
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