JPWO2020094053A5

JPWO2020094053A5 -

Info

Publication number: JPWO2020094053A5
Application number: JP2021524229A
Authority: JP
Publication date: 2022-04-07
Anticipated expiration: 2039-11-06

Claims

A spraying device including a first nozzle, wherein the first nozzle is
An atomizing structure that atomizes the cleaning liquid when spraying the cleaning liquid to form droplets.
Including a jet structure configured to spray a gas along a determined direction and cause the sprayed gas to collide with the droplets to form atomized particles.
The atomized structure includes an atomized body, and an atomized body is arranged in the atomized body, and the atomized channel penetrates the atomized body along a first direction. The liquid inlet end of the atomization channel is connected to a cleaning liquid source, the portion of the atomizer forming the atomization channel is made of a semiconductor crystal material, and the spray device further comprises an electrode pulse system. The electrode pulse system applies a pulse voltage to the semiconductor crystal material to cause the semiconductor crystal material to generate an electrolytic strain effect that causes the cleaning liquid to form the droplets when the cleaning liquid is sprayed from the atomization channel. A spray device that is configured to .

The injection structure includes an injection body, the injection channel is arranged in the injection body, the injection channel penetrates the injection body along a second direction, and the gas inlet end of the injection channel is Connected to a gas source, the second direction is configured to collide the gas sprayed from the gas outlet end of the injection channel with the droplets to form the atomized particles. The spraying device according to claim 1 .

The spray device according to claim 2 , wherein a predetermined sandwiching angle is arranged between the first direction and the second direction.

The spraying device according to claim 3 , wherein the first direction and the surface to be cleaned are perpendicular to each other.

The atomized body includes a central portion and a plurality of edge portions, and a central channel is arranged in the central portion.
The plurality of edges are spaced apart from the periphery of the central portion and are fixedly connected to the central portion, and edge channels are arranged at the plurality of edges, and the edges are arranged. The liquid inlet end of the partial channel is connected to the liquid outlet end of the central channel.
A plurality of atomization channels are included, and the plurality of atomization channels are arranged on the plurality of edges in a one-to-one correspondence, and each of the plurality of atomization channels at the edges is described. The plurality of atomizing holes include the plurality of atomizing holes, the liquid inlet end of the plurality of atomizing holes is connected to the liquid outlet end of the edge channel, and the plurality of atomizing holes are the plurality of atomizing holes along the first direction. The spraying device according to claim 2 , which penetrates the edge of the surface.

For the plurality of edges, the orthographic projections of the plurality of atomized holes are divided into a plurality of atomized hole groups on the cross section of the central portion parallel to the surface to be cleaned, and the center of the cross section is the center of the circle. Dispersed on the circumference, the orthographic projections of the plurality of atomized holes in each of the atomized hole groups are spaced in at least one row along the radial direction of the circumference. Item 5. The spraying device according to Item 5.

The injection body includes a plurality of injection division bodies, one of the plurality of injection division bodies is arranged between two adjacent edges, and a plurality of injection channels are provided with the plurality of injection division bodies. The plurality of injection channels in the plurality of injection split bodies include a plurality of injection holes, and the plurality of injection holes are arranged along the second direction. The spray device according to claim 5 , wherein the spray device penetrates the plurality of injection split bodies.

The spray according to claim 7 , wherein for the plurality of injection divided bodies, the orthographic projections of the plurality of injection holes in the cross section of the plurality of injection divided bodies parallel to the surface to be cleaned are uniformly distributed with respect to the cross section. device.

The first nozzle further includes a nozzle body, the nozzle body is connected to the central portion and the plurality of injection divided bodies, and a liquid inlet channel and a gas inlet channel are arranged in the nozzle body. The liquid inlet channel is connected to the atomization channel and is configured to supply the cleaning liquid to the atomization channel.
The spraying device of claim 7 , wherein the gas inlet channel is an annular channel, surrounds the liquid inlet channel, and the gas inlet channel is connected to an injection channel to supply the gas.

The first nozzle further comprises a guide pipe, which is used in the atomized structure and the jet structure to remove atomized particles having a spraying direction that is not perpendicular to the surface to be cleaned. The spraying device according to any one of claims 1 to 9 , which is connected.

Further equipped with a first liquid inlet pipeline, a gas inlet pipeline, and a first drive source,
The first drive source is configured to drive the first nozzle so as to swing back and forth between the edge and the center of the surface to be cleaned.
The first liquid inlet pipeline is configured to supply the cleaning liquid to the atomized structure, and the first flow rate regulating valve is arranged in the first liquid inlet pipeline. The spray device according to any one of claims 1 to 9 , wherein the gas inlet pipeline is configured to supply the gas to the injection structure.

The first drive source includes a first drive arm and a first rotary motor.
The first drive arm is arranged on the side surface of a carrier configured to convey a piece to be cleaned along a direction perpendicular to the surface to be cleaned.
The first nozzle is arranged on the first drive arm and is arranged on the carrier.
11. The eleventh claim, wherein the first rotary motor is configured to drive the first drive arm so as to swing back and forth between the edge of the surface to be cleaned and the center. Spray device.

Further equipped with a second nozzle, a second liquid inlet pipeline, and a second drive source,
The second nozzle is configured to spray the cleaning liquid toward the surface to be cleaned.
The second drive source is configured to drive the second nozzle so as to swing back and forth between the edge and the center of the surface to be cleaned.
The second liquid inlet pipeline is configured to supply the cleaning liquid to the second nozzle.
A second flow control valve is arranged in the second liquid inlet pipeline, and the flow of the cleaning liquid in the second liquid inlet pipeline is the flow of the cleaning liquid in the first liquid inlet pipeline. 11. The spraying device of claim 11 , which is larger than the flow.

The second drive source includes a second drive arm and a second rotary motor.
The second drive arm is arranged on the side surface of a carrier configured to convey the work piece to be cleaned along a direction perpendicular to the surface to be cleaned.
The second nozzle is placed on the second drive arm and placed on the carrier.
13. The thirteenth aspect of the present invention, wherein the second rotary motor is configured to drive the second drive arm so as to swing back and forth between the edge and the center of the surface to be cleaned. Spray device.

The atomizing device according to claim 1 , wherein the atomization channel has a diameter of 1 to 300 μm.

The spray device according to claim 2 , wherein the injection channel has a diameter of 1 to 300 μm.

A cleaning device comprising a carrier configured to convey a piece to be cleaned and a spraying device configured to clean the surface to be cleaned of the piece to be cleaned, wherein the spraying device claims. A cleaning device using the spraying device according to any one of Items 1 to 16 .