JPH01107860A - Injection nozzle - Google Patents

Injection nozzle

Info

Publication number
JPH01107860A
JPH01107860A JP26351487A JP26351487A JPH01107860A JP H01107860 A JPH01107860 A JP H01107860A JP 26351487 A JP26351487 A JP 26351487A JP 26351487 A JP26351487 A JP 26351487A JP H01107860 A JPH01107860 A JP H01107860A
Authority
JP
Japan
Prior art keywords
vibrating body
nozzle
waves
phase difference
traveling waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26351487A
Other languages
Japanese (ja)
Inventor
Kiyoshi Inoue
潔 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP26351487A priority Critical patent/JPH01107860A/en
Publication of JPH01107860A publication Critical patent/JPH01107860A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers

Landscapes

  • Special Spraying Apparatus (AREA)
  • Nozzles (AREA)

Abstract

PURPOSE:To improve vibration efficiency by tightly sticking an electrostrictive (magnetostrictive) material to an annular vibrating body for forming a nozzle, providing a high-frequency (polyphase AC) electric source having a phase difference for exciting it and generating ultrasonic traveling waves in the vibrating body. CONSTITUTION:An annular vibrating body 1 forms the tip part of a nozzle. Further an electrostrictive material 3 which is polarized in the thickness direction is tightly stuck to the bottom part of the vibrating body 1 and electrodes are arranged so that positive and negative electric fields can be alternately impressed in series and connected with high-frequency electric sources E1, E2. E1 and E2 timely have a phase difference of 90 deg. and two-set electrode groups are positionally deviated at 90 deg. and arranged. In this constitution, when alternately impressing positive and negative AC electric fields in series, standing wave vibration correspondent to the frequency of the electric fields is generated. The standing waves are positionally deviated at 90 deg. and timely have the phase difference of 90 deg. and therefore two traveling waves are overlapped and thereby traveling waves turning an annulus ring are generated. In the vibrating body 1, Such movement that waves are traveled so as to turn the annulus ring is performed by the traveling waves. Therefor liquid passed through the vibrating body 1 is energized with turning force due to ultrasonic traveling waves and rotatably injected through an injection port 1a.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は流体を噴射して洗浄するノズル、加工液の噴射
供給ノズル、冷却液の噴射ノズル等に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a nozzle for cleaning by spraying fluid, a machining fluid spray supply nozzle, a cooling fluid spray nozzle, and the like.

〔従来技術及び問題点〕[Prior art and problems]

従来、放電加工機の加工液の噴射供給に、ノズル基端の
加工液貯蔵タンク内に超音波撮動子を設け、撮動子の超
音波を加工液に伝播させて噴射するようにしたノズルが
知られているが、ノズル内を流過中に超音波撮動勢力が
減衰してしまう欠点があり、又定在波振動による場合の
振動効果は低く、電極、被加工体間の微小な加工間隙に
充分多舖の加工液を供給し難い欠点があった。
Conventionally, for the injection supply of machining fluid in electrical discharge machines, an ultrasonic sensor was installed in the machining fluid storage tank at the base end of the nozzle, and the ultrasonic waves from the sensor were propagated into the machining fluid and then injected into the nozzle. However, it has the drawback that the ultrasonic imaging force is attenuated while flowing through the nozzle, and the vibration effect due to standing wave vibration is low, and the microscopic vibration between the electrode and the workpiece is There was a drawback that it was difficult to supply a sufficient amount of machining liquid to the machining gap.

〔問題点の解決手段〕[Means for solving problems]

本発明は前記の欠点に鑑みて発明されたもので、ノズル
本体若しくはその一部を形成する円環形の振動体を設け
、該振動体の側面若しくは底面に固着して電歪材若しく
は磁歪材を設け、該電歪材若しくは磁歪材を励振する位
相差を有する高周波電源若しくは多相交流電源を設け、
前記円環形振動体に超音波進行波を発生させるようにし
たことを特徴とする。
The present invention was invented in view of the above-mentioned drawbacks, and includes a ring-shaped vibrating body forming a nozzle body or a part thereof, and an electrostrictive material or magnetostrictive material fixed to the side or bottom surface of the vibrating body. and providing a high frequency power source or a multiphase AC power source having a phase difference that excites the electrostrictive material or magnetostrictive material,
The present invention is characterized in that the annular vibrating body generates an ultrasonic traveling wave.

〔実施例〕〔Example〕

以下図面の一実施例により本発明を説明する。 The present invention will be explained below with reference to an embodiment of the drawings.

第1図は本発明ノズルの斜視図、第2図はその底面図で
ある。1は噴射口先端がすぼまった傘形の円環形振動体
で、ノズルの先端部を形成する。振動体1には円周に沿
って上下縦方向に多数の切欠き1aを形成して振動体自
体を軟らかくし、振動体の振幅増大をはかつている。又
振動体の円環先端1bはノズル噴射口を形成するので、
前記切欠き1aから流体漏洩することがないよう振動体
1の外周には合成樹脂等の被覆l112が形成しである
FIG. 1 is a perspective view of the nozzle of the present invention, and FIG. 2 is a bottom view thereof. Reference numeral 1 denotes an umbrella-shaped annular vibrating body with a tapered tip, which forms the tip of the nozzle. A large number of notches 1a are formed vertically and vertically along the circumference of the vibrating body 1 to soften the vibrating body itself and increase the amplitude of the vibrating body. Also, since the annular tip 1b of the vibrating body forms a nozzle injection port,
A coating 112 made of synthetic resin or the like is formed on the outer periphery of the vibrating body 1 to prevent fluid from leaking from the notch 1a.

第2図は振動体底面図で、振動体に固着して厚さ方向に
分極した電歪材3を設け、図のように正と負の電界が交
互に並んで印加できるように電極を配置し、高周波電源
E+とElを接続する。
Figure 2 is a bottom view of the vibrating body. An electrostrictive material 3 fixed to the vibrating body and polarized in the thickness direction is provided, and electrodes are arranged so that positive and negative electric fields can be applied alternately in line as shown in the figure. Then, connect high frequency power source E+ and El.

ElとElは時間的に90”の位相差を有し、又、El
とElによって励振される2組の電極群は位置的に90
°ずれて配置される。
El and El have a temporal phase difference of 90'', and El
The two sets of electrode groups excited by El and El are positioned at 90
°It is placed out of alignment.

電歪材3に電界を加えると電界の方向が分極方向と同じ
時には厚み方向に伸び、分極と逆方向の時には縮む性質
がある。従って図のように電極を配置し、正と負の交流
電界を交互に並んで印加すると、電界の周波数に応じた
定在波振動を発生する。高周波電源E1とElによって
発生する定在波は位置的に90’ずれるように配置され
、El、Elが時間的に90°位相差を有するからこの
2つの定在波が重なって円環を廻る進行波と発生する。
When an electric field is applied to the electrostrictive material 3, it has the property of expanding in the thickness direction when the direction of the electric field is the same as the polarization direction, and shrinking when the direction is opposite to the polarization direction. Therefore, by arranging the electrodes as shown in the figure and applying positive and negative alternating current electric fields alternately, standing wave vibrations will be generated depending on the frequency of the electric field. The standing waves generated by the high frequency power sources E1 and El are arranged to be shifted by 90' in position, and since El and El have a phase difference of 90° in time, these two standing waves overlap and go around the ring. Occurs as a traveling wave.

進行波は波動の振幅が移動し、円環振動体1は進行波に
よって撓み振動し円環を廻るように波動が進行する運動
を行なう。振動体1には多数の切欠き1aが形成して軟
らかくしてあり、上下方向と周方向の振幅が拡大する。
The amplitude of the traveling wave moves, and the annular vibrating body 1 bends and vibrates due to the traveling wave, and performs a motion in which the wave travels around the ring. A large number of notches 1a are formed in the vibrating body 1 to make it soft, and the amplitude in the vertical direction and the circumferential direction is expanded.

この振動体1がノズル先端部を形成し、図示しない流体
供給ポンプからパイプ4を通って供給される。流体が、
前記振動体1を通過するとき超音波進行波による回転力
を付勢され、噴射口1aから噴出する流体は回転噴射す
るようになる。この超音波進行波の伝播作用はノズルの
噴射寸前の流体に作用するから極めて効率が高く作用す
る。
This vibrating body 1 forms a nozzle tip, and is supplied through a pipe 4 from a fluid supply pump (not shown). The fluid is
When passing through the vibrating body 1, the fluid is applied with a rotational force by the ultrasonic traveling wave, and the fluid ejected from the injection port 1a rotates and is ejected. The propagation effect of this ultrasonic traveling wave acts on the fluid just before it is ejected from the nozzle, so it acts with extremely high efficiency.

例えばこれを放電加工装置の加工液噴射に使用すれば、
噴出勢力と回転力によって噴流液は螺旋状に回転噴流し
、電極と被加工体の対向する微小な加工間隙、加工溝内
への侵入流量が増大し、間隙洗浄効果、冷却効果が向上
し、安定放電加工により加工速度が増大する。又ワイヤ
カットに於けるワイヤ電極の洗浄、冷却効果により断線
が防止され、安定した能率の良い放電加工を続けること
ができる。又表面の洗浄ノズルとしても螺旋形に回転噴
射するので汚れの剥離等の効果が高く洗浄効果は向上し
能率的洗浄をすることができる。
For example, if this is used for machining fluid injection in electrical discharge machining equipment,
The jet liquid rotates in a spiral shape due to the jetting force and rotational force, increasing the flow rate into the micro machining gap where the electrode and the workpiece face each other, and into the machining groove, improving the gap cleaning effect and cooling effect. Stable electrical discharge machining increases machining speed. Furthermore, the cleaning and cooling effect of the wire electrode during wire cutting prevents wire breakage, allowing stable and efficient electrical discharge machining to continue. Furthermore, since the cleaning nozzle for the surface rotates and sprays in a spiral pattern, it is highly effective in removing dirt, improving the cleaning effect, and cleaning can be carried out efficiently.

第3図は振動体ノズル5の外壁面に電歪材6を固着して
設けた実施例で、電歪材には分極方向を図の矢印方向の
ように分極した素子を配列し、隣接する素子に交互に高
周波電源E1とElを接続する。ElとElは時間的に
90°位相差を有する電源を用いることによって、各々
による2つの定在波を発生し、その合成による進行波を
発生する。
FIG. 3 shows an embodiment in which an electrostrictive material 6 is fixed to the outer wall surface of a vibrating body nozzle 5. Elements polarized in the direction of the arrow in the figure are arranged in the electrostrictive material, and adjacent High frequency power sources E1 and El are connected alternately to the elements. By using power sources having a temporal phase difference of 90 degrees, El and El generate two standing waves, and a traveling wave is generated by combining them.

振動体5に発生する進行波は振幅が円環内径方向に変化
する撓み振動で、円環振動体5内を流通する流体に回転
振動を与え、先端の噴射口から螺旋形に回転する流体噴
射をすることができる。
The traveling wave generated in the vibrating body 5 is a bending vibration whose amplitude changes in the direction of the inner diameter of the annular ring, which imparts rotational vibration to the fluid flowing inside the annular vibrating body 5, and a fluid jet that rotates in a spiral shape from the injection port at the tip. can do.

尚、超音波進行波の進行方向の逆転制御は高周波電源E
1とElの位相差を270′″にすることによって容易
に逆転することができる。振動素子には磁歪材を設け、
これを高周波電源により発生させた磁界を印加して振動
させることにより同様に超音波進行波を発生させること
ができる。励振電源には多相交流電源、位相差制御電源
等も同様に利用することができる。
In addition, the reversal control of the traveling direction of the ultrasonic traveling wave is performed by the high frequency power source E.
The reversal can be easily achieved by setting the phase difference between 1 and El to 270''.The vibration element is provided with a magnetostrictive material,
By applying a magnetic field generated by a high-frequency power source to vibrate this, it is possible to similarly generate an ultrasonic traveling wave. A multiphase AC power supply, a phase difference control power supply, etc. can be similarly used as the excitation power supply.

(発明の効果) 以上のように本発明は流体の噴射ノズルに於て、ノズル
本体若しくはその一部を形成する円環形の振動体を設け
、該振動体の側面若しくは底面に固着して電歪材若しく
は磁歪材を設け、該電歪材若しくは磁歪材を励振する位
相差を有する高周波電源若しくは多相交流電源を設け、
前記円環形振動体に超音波進行波を発生するようにした
ものであるから、ノズル噴射口から噴射する流体に対し
振動体流過中に回転運動を与えることができ、螺旋形に
噴射する流体噴射をすることができる。又振動体は噴射
ノズルの先端部を形成し、流体の噴射先端部分で超音波
進行波による回転振動を与えるのであるから、従来のよ
うにノズルへ流体供給する流体ポンプ側に超音波振動子
を設け、供給流体に超音波撮動を伝播作用する場合のよ
うに供給バイブで撮動が減衰することがなく、又作用超
音波が従来の定在波に比較して進行波の回転力を作用す
るものであるから、旋回流を噴出することができ、噴流
供給効果を著しく向上させることができる。従ってこの
噴射ノズルを用いて放電加工装置の加工間隙に加工液を
噴流供給するときは旋回流によって微小な加工間隙にも
多量の加工液を流すことができ、加工間隙に介在する加
工屑を揺乱し排除する効果が高まり、又冷却効果が向上
してパルス放電を安定に発生し、加工速度を増大する。
(Effects of the Invention) As described above, the present invention provides a fluid injection nozzle with an annular vibrating body forming a nozzle body or a part thereof, and is fixed to the side or bottom of the vibrating body to form an electrostrictive or a magnetostrictive material, and a high frequency power source or a multiphase AC power source having a phase difference that excites the electrostrictive material or magnetostrictive material,
Since the annular vibrating body is configured to generate ultrasonic traveling waves, rotational motion can be imparted to the fluid jetted from the nozzle jetting port while the vibrating body is flowing, and the fluid is jetted in a spiral shape. Can be sprayed. In addition, since the vibrating body forms the tip of the injection nozzle and applies rotational vibration due to ultrasonic traveling waves at the tip of the fluid injection, it is not necessary to place an ultrasonic vibrator on the side of the fluid pump that supplies fluid to the nozzle, as in the past. The ultrasonic waves are not attenuated by the supply vibrator as would be the case when ultrasonic waves propagate through the supply fluid, and the acting ultrasonic waves exert a rotating force of traveling waves compared to conventional standing waves. Therefore, a swirling flow can be ejected, and the jet flow supply effect can be significantly improved. Therefore, when this jet nozzle is used to supply a jet of machining fluid to the machining gap of an electric discharge machining device, a large amount of machining fluid can be flowed into the minute machining gap due to the swirling flow, and the machining debris present in the machining gap can be shaken. The effect of disturbing and eliminating is enhanced, and the cooling effect is also improved to stably generate pulsed discharge and increase machining speed.

又ワイヤカットに於けるワイヤ電極の洗浄、冷却作用に
よって断線が少なくなり、連続した能率のよいワイヤカ
ットを行なうことができる。又表面洗浄等のノズルとし
ても旋回流によって剥離作用に優れ、汚れ落し等の洗浄
効果が高く得られる。
Furthermore, the cleaning and cooling of the wire electrode during wire cutting reduces the number of wire breaks, allowing continuous and efficient wire cutting. Also, when used as a nozzle for surface cleaning, etc., the swirling flow provides an excellent peeling effect, and a high cleaning effect such as dirt removal can be obtained.

又冷却液、気体の噴射ノズルとしても有効である。It is also effective as a cooling liquid or gas injection nozzle.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例斜視図、第2図はその一部の
底面詳細図、第3図は本発明の他の実施例の正面図であ
る。 1・・・・・・・・・振動体 1a・・・・・・・・・切欠き 1b・・・・・・・・・先端噴射口 2・・・・・・・・・被覆膜 3・・・・・・・・・電歪材 4・・・・・・・・・バイブ E+ 、Ez・・・・・・・・・高周波電源時  許 
 出  願  人 株式会社井上ジャパックス研究所 代表者 井 上   潔
FIG. 1 is a perspective view of one embodiment of the present invention, FIG. 2 is a detailed bottom view of a portion thereof, and FIG. 3 is a front view of another embodiment of the present invention. 1... Vibrating body 1a... Notch 1b... Tip injection port 2... Coating film 3......Electrostrictive material 4......Vibe E+, Ez......When using high frequency power supply
Applicant: Kiyoshi Inoue, Representative of Inoue Japax Institute Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims]  先端噴射口から流体を噴射するノズルに於て、ノズル
本体若しくはその一部を形成する円環形の振動体を設け
、該振動体の側面若しくは底面に固着して電歪材若しく
は磁歪材を設け、該電歪材若しくは磁歪材を励振する位
相差を有する高周波電源若しくは多相交流電源を設け、
前記円環形振動体に超音波進行波を発生させるようにし
たことを特徴とする噴射ノズル。
In a nozzle that injects fluid from a tip injection port, an annular vibrating body forming a nozzle body or a part thereof is provided, and an electrostrictive material or a magnetostrictive material is fixed to the side or bottom of the vibrating body, Providing a high frequency power source or a multiphase AC power source having a phase difference that excites the electrostrictive material or magnetostrictive material,
An injection nozzle characterized in that the annular vibrating body generates an ultrasonic traveling wave.
JP26351487A 1987-10-19 1987-10-19 Injection nozzle Pending JPH01107860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26351487A JPH01107860A (en) 1987-10-19 1987-10-19 Injection nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26351487A JPH01107860A (en) 1987-10-19 1987-10-19 Injection nozzle

Publications (1)

Publication Number Publication Date
JPH01107860A true JPH01107860A (en) 1989-04-25

Family

ID=17390590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26351487A Pending JPH01107860A (en) 1987-10-19 1987-10-19 Injection nozzle

Country Status (1)

Country Link
JP (1) JPH01107860A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022506689A (en) * 2018-11-08 2022-01-17 北京北方華創微電子装備有限公司 Spraying device and cleaning equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022506689A (en) * 2018-11-08 2022-01-17 北京北方華創微電子装備有限公司 Spraying device and cleaning equipment

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