JPWO2020054386A1 - 基板移載装置及びその制御方法 - Google Patents
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Abstract
Description
前記基板を保持している前記基板保持ハンドを前記アライナの周囲に規定された所定のレディ位置へ移動させること、
前記基板保持ハンドを前記アライナに規定された所定の載置位置へ移動させて、前記基板を前記アライナの回転台へ移載させること、
前記基板保持ハンドを前記載置位置から前記レディ位置よりも近い位置に規定された所定の待機位置で待機させながら、前記アライナに前記基板をアライメントさせること、
前記基板保持ハンドを前記載置位置へ移動させて、前記基板を前記アライナから前記基板保持ハンドへ移載させること、及び、
前記基板を保持している前記基板保持ハンドを前記レディ位置へ移動させること、を含むものである。
前記基板移載プログラムは、前記基板搬送ロボットに、
前記基板を保持している前記基板保持ハンドを前記アライナの周囲に規定された所定のレディ位置へ移動させ、
前記基板保持ハンドを前記アライナに規定された所定の載置位置へ移動させて、前記基板を前記アライナの回転台へ移載させ、
前記基板保持ハンドを前記載置位置から前記レディ位置よりも近い位置に規定された所定の待機位置で前記アライナによるアライメントが終わるまで待機させ、
前記基板保持ハンドを前記載置位置へ移動させて、前記基板を前記アライナから前記基板保持ハンドへ移載させ、
前記基板保持ハンドを前記レディ位置へ移動させるように、構成されているものである。
先ず、本発明の一実施形態に係る基板移載装置1を具備する基板処理設備100の概略構成から説明する。図1は本発明の一実施形態に係る基板移載装置1を具備する基板処理設備100の概略構成を示す平面断面図であり、図2は図1に示す基板処理設備100の概略構成を示す側面断面図である。図1及び図2に示すように、基板処理設備100は、基板移載装置1と、プロセス処理装置2とを備える。なお、基板処理設備100は、例えば、SEMI(Semiconductor Equipment and Materials International)規格などの規定に適合するように設計されている。
次に、基板移載装置1の構成について詳細に説明する。基板移載装置1は、基板搬送ロボット7と、基板24の向きを整えるアライナ92と、調整装置93と、これらを収容する筐体8と、ロードポート91と、コントローラ6とを備える。
図3は、基板移載装置1の制御系統の構成を示すブロック図である。コントローラ6は、ロボット制御部62、アライナ制御部63を含む。コントローラ6は、いわゆるコンピュータであって、例えば、マイクロコントローラ、CPU、MPU、PLC、DSP、ASIC又はFPGA等のプロセッサ6aと、ROM、RAM等のメモリ6bとを有する。メモリ6bには、基板移載プログラム60を含むプロセッサ6aが実行するプログラムが記憶されている。また、メモリ6bには、プロセッサ6aが行う処理に使用されるデータなどが格納されている。コントローラ6では、メモリ6bに記憶されたプログラム等のソフトウェアをプロセッサ6aが読み出して実行することにより、ロボット制御部62、アライナ制御部63として機能するための処理が行われる。なお、コントローラ6は単一のコンピュータによる集中制御により各処理を実行してもよいし、複数のコンピュータの協働による分散制御により各処理を実行してもよい。
ここで、上記構成の基板移載装置1の動作について説明する。基板移載装置1では、基板搬送ロボット7によって基板24が基板キャリア25から搬送室80へ搬出され、アライナ92で基板24の中心位置及び方向が識別された後、再び基板搬送ロボット7によって処理室22へ搬送される。
2 :プロセス処理装置
5 :回転台
6 :コントローラ
6a :プロセッサ
6b :メモリ
7 :基板搬送ロボット
8 :筐体
20 :処理装置本体
21 :筐体
22 :処理室
24 :基板
25 :基板キャリア
31 :ラインセンサ
35 :回転台
37 :回転駆動装置
51 :ハンド基部
52 :ブレード
60 :基板移載プログラム
61 :容器側ドア
62 :ロボット制御部
63 :アライナ制御部
69 :昇降駆動装置
70 :昇降軸
71 :アーム
72 :基板保持ハンド
73 :基台
75,76 :リンク
77,78,79 :駆動装置
80 :搬送室
81 :前壁
82 :後壁
86 :前開口
87 :後開口
91 :ロードポート
92 :アライナ
93 :調整装置
95 :開口枠
96 :オープナ側ドア
97 :支持台
98 :オープナ
100:基板処理設備
220:処理ステージ
A1 :第1関節
A2 :第2関節
A3 :手首関節
Claims (6)
- 基板保持ハンドを有する基板搬送ロボットとアライナとを備えた基板移載装置の制御方法であって、
基板を保持している前記基板保持ハンドを前記アライナの周囲に規定された所定のレディ位置へ移動させること、
前記基板保持ハンドを前記アライナに規定された所定の載置位置へ移動させて、前記基板を前記アライナの回転台へ移載させること、
前記基板保持ハンドを前記載置位置から前記レディ位置よりも近い位置に規定された所定の待機位置で待機させながら、前記アライナに前記基板をアライメントさせること、
前記基板保持ハンドを前記載置位置へ移動させて、前記基板を前記アライナから前記基板保持ハンドへ移載させること、及び、
前記基板を保持している前記基板保持ハンドを前記レディ位置へ移動させること、を含む、
基板移載装置の制御方法。 - 前記待機位置が、前記アライナに保持されている前記基板の下方又は上方である、
請求項1に記載の基板移載装置の制御方法。 - 前記待機位置が、前記載置位置と前記レディ位置との間にある、
請求項1に記載の基板移載装置の制御方法。 - 基板保持ハンドを有する基板搬送ロボットと、
アライナと、
基板移載プログラムを記憶したメモリ、及び、前記基板移載プログラムを実行するプロセッサを有するコントローラとを備え、
前記基板移載プログラムは、前記基板搬送ロボットに、
基板を保持している前記基板保持ハンドを前記アライナの周囲に規定された所定のレディ位置へ移動させ、
前記基板保持ハンドを前記アライナに規定された所定の載置位置へ移動させて、前記基板を前記アライナの回転台へ移載させ、
前記基板保持ハンドを前記載置位置から前記レディ位置よりも近い位置に規定された所定の待機位置で前記アライナによるアライメントが終わるまで待機させ、
前記基板保持ハンドを前記載置位置へ移動させて、前記基板を前記アライナから前記基板保持ハンドへ移載させ、
前記基板保持ハンドを前記レデイ位置へ移動させるように、構成されている、
基板移載装置。 - 前記待機位置が、前記アライナに保持されている前記基板の下方又は上方である、
請求項4に記載の基板移載装置。 - 前記待機位置が、前記載置位置と前記レディ位置との間にある、
請求項4に記載の基板移載装置。
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US16/127,460 US10636693B2 (en) | 2018-09-11 | 2018-09-11 | Substrate transfer device and control method therefor |
US16/127,460 | 2018-09-11 | ||
PCT/JP2019/033374 WO2020054386A1 (ja) | 2018-09-11 | 2019-08-26 | 基板移載装置及びその制御方法 |
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2018
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2019
- 2019-08-26 WO PCT/JP2019/033374 patent/WO2020054386A1/ja active Application Filing
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- 2019-08-26 CN CN201980059034.9A patent/CN112840446B/zh active Active
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TW202023771A (zh) | 2020-07-01 |
WO2020054386A1 (ja) | 2020-03-19 |
US10636693B2 (en) | 2020-04-28 |
JP7328981B2 (ja) | 2023-08-17 |
CN112840446A (zh) | 2021-05-25 |
US20200083086A1 (en) | 2020-03-12 |
CN112840446B (zh) | 2024-05-28 |
KR20210061358A (ko) | 2021-05-27 |
TWI717823B (zh) | 2021-02-01 |
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