JPWO2020018850A5 - - Google Patents

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Publication number
JPWO2020018850A5
JPWO2020018850A5 JP2021502883A JP2021502883A JPWO2020018850A5 JP WO2020018850 A5 JPWO2020018850 A5 JP WO2020018850A5 JP 2021502883 A JP2021502883 A JP 2021502883A JP 2021502883 A JP2021502883 A JP 2021502883A JP WO2020018850 A5 JPWO2020018850 A5 JP WO2020018850A5
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JP
Japan
Prior art keywords
gas
distributor
annular array
mixer
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021502883A
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English (en)
Japanese (ja)
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JP2021532581A (ja
JP7410120B2 (ja
Publication date
Priority claimed from US16/040,326 external-priority patent/US10943769B2/en
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Publication of JP2021532581A publication Critical patent/JP2021532581A/ja
Publication of JPWO2020018850A5 publication Critical patent/JPWO2020018850A5/ja
Priority to JP2023215337A priority Critical patent/JP2024029058A/ja
Application granted granted Critical
Publication of JP7410120B2 publication Critical patent/JP7410120B2/ja
Active legal-status Critical Current
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JP2021502883A 2018-07-19 2019-07-18 ガス分配器および流量検証器 Active JP7410120B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023215337A JP2024029058A (ja) 2018-07-19 2023-12-21 ガス分配器および流量検証器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/040,326 US10943769B2 (en) 2018-07-19 2018-07-19 Gas distributor and flow verifier
US16/040,326 2018-07-19
PCT/US2019/042490 WO2020018850A1 (fr) 2018-07-19 2019-07-18 Distributeur de gaz et vérificateur de flux

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023215337A Division JP2024029058A (ja) 2018-07-19 2023-12-21 ガス分配器および流量検証器

Publications (3)

Publication Number Publication Date
JP2021532581A JP2021532581A (ja) 2021-11-25
JPWO2020018850A5 true JPWO2020018850A5 (fr) 2022-08-23
JP7410120B2 JP7410120B2 (ja) 2024-01-09

Family

ID=69162522

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021502883A Active JP7410120B2 (ja) 2018-07-19 2019-07-18 ガス分配器および流量検証器
JP2023215337A Pending JP2024029058A (ja) 2018-07-19 2023-12-21 ガス分配器および流量検証器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023215337A Pending JP2024029058A (ja) 2018-07-19 2023-12-21 ガス分配器および流量検証器

Country Status (6)

Country Link
US (2) US10943769B2 (fr)
JP (2) JP7410120B2 (fr)
KR (1) KR20210024200A (fr)
CN (1) CN112437976A (fr)
TW (2) TWI821336B (fr)
WO (1) WO2020018850A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10256075B2 (en) * 2016-01-22 2019-04-09 Applied Materials, Inc. Gas splitting by time average injection into different zones by fast gas valves
US10943769B2 (en) 2018-07-19 2021-03-09 Lam Research Corporation Gas distributor and flow verifier
KR20220116351A (ko) * 2019-03-01 2022-08-22 램 리써치 코포레이션 통합된 툴 리프트
CN114121585B (zh) * 2020-08-26 2023-10-31 中微半导体设备(上海)股份有限公司 一种等离子体处理装置及气体供应方法
KR102627141B1 (ko) * 2023-07-20 2024-01-23 (주)효진이앤하이 플라즈마 가스 변환 시스템

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3442604B2 (ja) * 1996-02-15 2003-09-02 株式会社フジキン 混合ガスの供給方法及び混合ガス供給装置並びにこれらを備えた半導体製造装置
US7335396B2 (en) * 2003-04-24 2008-02-26 Micron Technology, Inc. Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
US7510624B2 (en) * 2004-12-17 2009-03-31 Applied Materials, Inc. Self-cooling gas delivery apparatus under high vacuum for high density plasma applications
US20080102011A1 (en) * 2006-10-27 2008-05-01 Applied Materials, Inc. Treatment of effluent containing chlorine-containing gas
CN101556904B (zh) * 2008-04-10 2010-12-01 北京北方微电子基地设备工艺研究中心有限责任公司 一种气体分配装置及应用该分配装置的半导体处理设备
US8236133B2 (en) 2008-05-05 2012-08-07 Applied Materials, Inc. Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias
WO2011159690A2 (fr) * 2010-06-15 2011-12-22 Applied Materials, Inc. Système d'injection à jets parallèles de précurseurs multiples avec ocs de dérivation
KR101693673B1 (ko) 2010-06-23 2017-01-09 주성엔지니어링(주) 가스분배수단 및 이를 포함한 기판처리장치
US8528338B2 (en) * 2010-12-06 2013-09-10 General Electric Company Method for operating an air-staged diffusion nozzle
JP6123208B2 (ja) * 2012-09-28 2017-05-10 東京エレクトロン株式会社 成膜装置
TW201435138A (zh) 2012-12-21 2014-09-16 Applied Materials Inc 具高清洗效率的對稱氣體分配設備及方法
US20140224175A1 (en) 2013-02-14 2014-08-14 Memc Electronic Materials, Inc. Gas distribution manifold system for chemical vapor deposition reactors and method of use
US20140329185A1 (en) * 2013-05-03 2014-11-06 Uop Llc Apparatus and method for minimizing smoke formation in a flaring stack
US20140329189A1 (en) * 2013-05-03 2014-11-06 Uop Llc Apparatus and method for minimizing smoke formation in a flaring stack
US10167557B2 (en) 2014-03-18 2019-01-01 Asm Ip Holding B.V. Gas distribution system, reactor including the system, and methods of using the same
US10128087B2 (en) * 2014-04-07 2018-11-13 Lam Research Corporation Configuration independent gas delivery system
US9679749B2 (en) * 2014-09-26 2017-06-13 Lam Research Corporation Gas distribution device with actively cooled grid
WO2017003644A1 (fr) * 2015-06-30 2017-01-05 Exxonmobil Chemical Patents Inc. Distribution de gaz dans des réactions d'oxydation
US10943769B2 (en) 2018-07-19 2021-03-09 Lam Research Corporation Gas distributor and flow verifier

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