JPWO2019230883A1 - Ultrasonic vibration imparting tool, traveling wave generator and ultrasonic processing device - Google Patents

Ultrasonic vibration imparting tool, traveling wave generator and ultrasonic processing device Download PDF

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JPWO2019230883A1
JPWO2019230883A1 JP2020522589A JP2020522589A JPWO2019230883A1 JP WO2019230883 A1 JPWO2019230883 A1 JP WO2019230883A1 JP 2020522589 A JP2020522589 A JP 2020522589A JP 2020522589 A JP2020522589 A JP 2020522589A JP WO2019230883 A1 JPWO2019230883 A1 JP WO2019230883A1
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vibration
mass
ultrasonic
peripheral surface
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大西　一正
一正 大西
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UWAVE CO., LTD.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08—Means for treating work or cutting member to facilitate cutting
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Turning (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Drilling And Boring (AREA)

Abstract

【課題】超音波加工装置に組み込んで円環状進行波を発生させるのに適したランジュバン型超音波振動子を備えた超音波振動付与具を提供する。【解決手段】下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；ハウジングの接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスとその上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部にフランジ部の下面に接触し、フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；圧電素子への電気エネルギーの印加により、フロントマスの上下方向の振動とその振動と同一方向に突き出るフランジ部の平面中央部の撓み振動とが生じ、同時に、フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動がリング状釣り合い重りの外周面で生じる超音波振動付与具。PROBLEM TO BE SOLVED: To provide an ultrasonic vibration imparting tool provided with a Langevin type ultrasonic vibrator suitable for incorporating into an ultrasonic processing apparatus to generate an annular traveling wave. A cylindrical housing having a downwardly expanding contact surface at the lower part of the inner peripheral surface and a threaded surface at the lower part of the outer peripheral surface; a flange portion having a contact surface fitted to the contact surface of the housing at the upper part. A Langevin-type ultrasonic vibrator with a structure in which a polarized piezoelectric element is sandwiched between the front mass provided and the rear mass placed above it; and the threaded surface at the bottom of the outer peripheral surface of the housing is screwed in. Includes a ring-shaped counterweight with a threaded surface at the top of the inner peripheral surface, with an inner peripheral extension that touches the lower surface of the flange at the bottom and does not touch the sides of the front mass; The application of electrical energy to the element causes vertical vibration of the front mass and bending vibration of the center of the plane of the flange that protrudes in the same direction as the vibration, and at the same time, it protrudes due to the bending vibration of the center of the plane of the flange. An ultrasonic vibration imparting tool in which arc-shaped vibration in the direction opposite to the direction in which it is applied is generated on the outer peripheral surface of a ring-shaped balanced weight.

Description

本発明は、超音波振動付与具、進行波発生装置及び超音波加工装置に関する。本発明は特に、ランジュバン型超音波振動子を使用する超音波振動付与具であるが、新規な振動モードの超音波振動を示す超音波振動付与具、そして、その超音波振動付与具を用いる進行波発生装置と超音波加工装置に関する。 The present invention relates to an ultrasonic vibration imparting tool, a traveling wave generator and an ultrasonic processing device. The present invention is particularly an ultrasonic vibration imparting tool using a Langevin type ultrasonic vibrator, but an ultrasonic vibration imparting tool exhibiting ultrasonic vibration in a novel vibration mode, and a progress using the ultrasonic vibration imparting tool. Regarding wave generators and ultrasonic processing devices.

圧電素子を超音波発生源として利用する超音波振動子は各種の構成のものが知られているが、その代表的な構成として、一対の金属ブロックとこれらの金属ブロックの間に固定された分極処理済の圧電素子から構成されたランジュバン型超音波振動子が知られている。なかでも、分極処理済の圧電素子を一対の金属ブロックの間でボルトにより接続し、高圧で締め付け固定した構造のボルト締めランジュバン型超音波振動子は高エネルギーの超音波振動の発生が可能なため、各種材料の研磨加工、切削加工、塑性加工、砥粒加工などを行うための工具に付設して用いる超音波加工処理での利用が検討され、実際に使用されている。さらに、各種の超音波振動子については、その超音波振動子にて発生する超音波振動を振動板や各種振動手段を介して送信することによる、超音波洗浄、金属接合、プラスチック溶着、超音波霧化、乳化・分散などの超音波処理の用途、そして魚群探知機などの水中音響器（ソナー）、超音波探傷器、医療用エコー診断装置、流量計などの通信的応用機器への利用が検討され、多くの分野で実際に使用されている。 Ultrasonic transducers that use a piezoelectric element as an ultrasonic source are known to have various configurations, and as a typical configuration, a pair of metal blocks and polarization fixed between these metal blocks. A Langevin type ultrasonic vibrator composed of a processed piezoelectric element is known. Among them, the bolted Langevin type ultrasonic vibrator, which has a structure in which polarized piezoelectric elements are connected by bolts between a pair of metal blocks and tightened and fixed at high pressure, can generate high-energy ultrasonic vibrations. , It has been studied for use in ultrasonic processing, which is attached to tools for polishing, cutting, plastic working, abrasive grain processing, etc. of various materials, and is actually used. Furthermore, for various ultrasonic vibrators, ultrasonic cleaning, metal bonding, plastic welding, and ultrasonic waves are performed by transmitting the ultrasonic vibration generated by the ultrasonic vibrator via a vibrating plate or various vibrating means. Applications for ultrasonic processing such as atomization, emulsification / dispersion, and communication application devices such as underwater acoustic devices (sonar) such as fish finder, ultrasonic flaw detectors, medical echo diagnostic devices, and flow meters. It has been considered and is actually used in many fields.

また、特許文献１に記載されているように、超音波振動を利用して進行波を発生させる方法や装置も既に知られている。この超音波振動を利用する進行波として代表的なものは円環形状を持つ振動体に円環状の進行波を発生させる方法であって、この進行波の利用形態としては、超音波モータ、研磨装置、そして切削装置などが提案されている。しかしながら、進行波を発生させる超音波振動モードを利用する装置であって、実際に利用されている装置は、現時点では、機械的負荷が少なく、かつ変動が少ないカメラに内蔵するモータに限られている。 Further, as described in Patent Document 1, a method and an apparatus for generating a traveling wave by using ultrasonic vibration are already known. A typical traveling wave that utilizes this ultrasonic vibration is a method of generating an annular traveling wave in a vibrating body having an annular shape, and the usage form of this traveling wave is an ultrasonic motor or polishing. Devices and cutting devices have been proposed. However, devices that use the ultrasonic vibration mode that generates traveling waves and are actually used are currently limited to motors built into cameras that have a low mechanical load and little fluctuation. There is.

進行波超音波振動モードを示す超音波振動は、その振動に節（ノード）が発生しない点に特徴を持つ振動モードであって、振動源を兼ねる振動体としては円環状の平面を持つ圧電セラミック板が用いられることが一般的である。しかしながら、進行波が発生する円環状振動体には振動の節が現れないため、その振動体を、振動特性を維持したまま支持することができない。すなわち、通常の振動体は、その振動体に現れる超音波振動を有効に活用するために、その超音波振動の節が現れる位置で支持するようにされているが、超音波振動の節が現れない進行波超音波振動モードを利用する場合、このような支持方法を利用して振動体を支持することができない。このため、これまでに実用化されている進行波超音波振動モードの超音波振動を発生する円環状振動体の支持は、フェルトなどの柔らかい材料の成形体を支持基板として利用する方法が利用されており、このような支持方法により、振動体を空気中に浮遊させることにより実現している。
しかしながら、大きな機械的負荷が振動体に加わると、フェルトなどの柔らかい材料の成形体が圧縮されて硬くなるため、振動体に発生した進行波超音波振動モードの超音波振動が支持基板に伝播してしまい、その振動体における円滑な進行波の発生が実現しなくなることがあるとの問題がある。Ultrasonic vibration, which indicates a traveling wave ultrasonic vibration mode, is a vibration mode characterized in that no nodes are generated in the vibration, and a piezoelectric ceramic having an annular flat surface as a vibrating body that also serves as a vibration source. Boards are commonly used. However, since no vibration node appears in the annular vibrating body in which the traveling wave is generated, the vibrating body cannot be supported while maintaining the vibration characteristics. That is, a normal vibrating body is supported at a position where the ultrasonic vibration node appears in order to effectively utilize the ultrasonic vibration appearing in the vibrating body, but the ultrasonic vibration node appears. No traveling wave When using the ultrasonic vibration mode, it is not possible to support the vibrating body by using such a support method. For this reason, a method of using a molded body made of a soft material such as felt as a support substrate is used to support the annular vibrating body that generates ultrasonic vibration in the traveling wave ultrasonic vibration mode that has been put into practical use so far. This is achieved by suspending the vibrating body in the air by such a support method.
However, when a large mechanical load is applied to the vibrating body, the molded body made of a soft material such as felt is compressed and hardened, so that the ultrasonic vibration of the traveling wave ultrasonic vibration mode generated in the vibrating body propagates to the support substrate. Therefore, there is a problem that the smooth traveling wave generation in the vibrating body may not be realized.

なお、特許文献１の図１１には、ランジュバン型超音波振動子を用いる進行波の発生方法の図が開示されているが、その開示されているランジュバン型超音波振動子の構成や進行波発生のための振動体の支持方法に関する具体的な説明は一切見られない。 Although FIG. 11 of Patent Document 1 discloses a diagram of a traveling wave generation method using a Langevin type ultrasonic vibrator, the configuration of the disclosed Langevin type ultrasonic vibrator and traveling wave generation are disclosed. There is no specific explanation on how to support the vibrating body for.

また、超音波加工装置において各種工具に超音波振動を与えることにより期待される効果は、超音波振動子にて発生した超音波振動が、超音波振動子に組み合わされている工具保持具に保持されている工具に高い効率で伝達され、その結果として得られる当該工具による加工作業に必要な電気エネルギーの節減や加工精度の向上などである。しかしながら、これまでに製造され、実際の加工作業に使用されている超音波加工装置では、その期待された効果が充分に得られていない場合が多い。このため現在の時点でも、超音波加工装置の普及は充分進んでいるとは云えない。従って、超音波加工装置の更なる普及を進めるためには、超音波振動子にて発生した超音波振動が高い効率で工具に伝達されるような超音波加工装置を開発する必要がある。 In addition, the effect expected by applying ultrasonic vibration to various tools in the ultrasonic processing equipment is that the ultrasonic vibration generated by the ultrasonic vibrator is held by the tool holder combined with the ultrasonic vibrator. It is transmitted to the tool being used with high efficiency, and as a result, the electrical energy required for the machining work by the tool is reduced and the machining accuracy is improved. However, in many cases, the ultrasonic processing apparatus manufactured so far and used in the actual processing work does not sufficiently obtain the expected effect. Therefore, even at the present time, it cannot be said that the spread of ultrasonic processing equipment is sufficiently advanced. Therefore, in order to further popularize the ultrasonic processing apparatus, it is necessary to develop an ultrasonic processing apparatus in which the ultrasonic vibration generated by the ultrasonic vibrator is transmitted to the tool with high efficiency.

本発明の発明者は、これまでに、超音波加工装置に組み込んだ超音波振動子にて発生した超音波振動が高い効率で工具に伝達されるようにする改良を提供する発明を案出し、多数の特許出願を行ってきた。それらの改良発明の内で最近の発明の一つとして、特許文献２に開示されている発明を挙げることができる。なお、この特許文献２は、その公開日が２０１８年８月１５日であって、本ＰＣＴ出願において優先権を主張している特願２０１８年５月３０日出願の特願２０１８−１１４９８９号出願より後の公開である。 The inventor of the present invention has so far devised an invention that provides an improvement that allows ultrasonic vibration generated by an ultrasonic vibrator incorporated in an ultrasonic processing apparatus to be transmitted to a tool with high efficiency. He has filed numerous patent applications. Among these improved inventions, one of the recent inventions is the invention disclosed in Patent Document 2. It should be noted that this Patent Document 2 has a publication date of August 15, 2018, and the application of Japanese Patent Application No. 2018-114989 filed on May 30, 2018, which claims priority in this PCT application. It will be released later.

特許文献２には、接触面を内周面下部もしくは底部に備え、そして外周面下部にねじ部を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされる接触面を備えた円盤状膨出部を上部に有する円筒状工具取付具を含むフロントマスと、該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、円筒状ハウジングのねじ部がねじ込まれるねじ部を内周面上部に有するリング状釣り合い重りを含む超音波振動付与具が開示されている。そして、上記リング状釣り合い重りの好ましい構成として、そのねじ部の下側に内径が該ねじ部の内径よりも小さい下側小径部が形成されていて、その下側小径部の内周面と円筒状工具取り付け具（フロントマスを兼ねる）の側面との間に空隙が形成されている構成が開示されている。 Patent Document 2 describes a cylindrical housing having a contact surface on the lower or bottom of the inner peripheral surface and a threaded portion on the lower outer peripheral surface; a disk having a contact surface fitted to the contact surface of the cylindrical housing. A Langevin type with a structure in which a polarized piezoelectric element is sandwiched between a front mass including a cylindrical tool fixture having a bulging portion at the top and a rear mass arranged above the front mass, and bolted. An ultrasonic vibrator; and an ultrasonic vibration imparting tool including a ring-shaped balancing weight having a threaded portion on an upper inner peripheral surface into which a threaded portion of a cylindrical housing is screwed are disclosed. As a preferable configuration of the ring-shaped balancing weight, a lower small-diameter portion having an inner diameter smaller than the inner diameter of the threaded portion is formed on the lower side of the threaded portion, and the inner peripheral surface and the cylinder of the lower small-diameter portion are formed. A configuration is disclosed in which a gap is formed between the side of the tool fitting (which also serves as the front mass) and the side surface.

特許文献１ : 特開昭５９−１２２３８５（１９８４−７−１４公開）
特許文献２：ＰＣＴ／ＪＰ２０１８／００４７２８（２０１８年２月９日出願、ＷＯ ２０１８／１４７４４５Ａ１として２０１８年８月１５日公開）Patent Document 1: JP-A-59-122385 (published in 1984-7-14)
Patent Document 2: PCT / JP2018 / 00428 (filed on February 9, 2018, published as WO 2018/147445A1 on August 15, 2018)

本発明の発明者は、上記の特許文献２に記載の超音波振動付与具が円環状振動体に効率良く円環状進行波を発生させる超音波振動付与具として利用できるのではないかとの期待を持ち、特許文献２に具体的に開示されている構成の超音波振動付与具を用いる円環状振動体への効率の良い円環状進行波の発生状況を検討した。しかしながら、その円環状進行波の発生状況は必ずしも満足することができるレベルに達しなかった。
The inventor of the present invention expects that the ultrasonic vibration imparting tool described in Patent Document 2 can be used as an ultrasonic vibration imparting tool that efficiently generates an annular traveling wave in an annular vibrating body. We investigated the state of efficient annular traveling wave generation in an annular vibrating body using the ultrasonic vibration imparting tool having the configuration specifically disclosed in Patent Document 2. However, the state of generation of the annular traveling wave did not always reach a satisfactory level.

従って、本発明の課題は、円環状振動体への進行波モードの超音波振動を安定して付与するために特に適した、ランジュバン型超音波振動子を備えた超音波振動付与具を提供することにある。 Therefore, an object of the present invention is to provide an ultrasonic vibration imparting tool provided with a Langevin type ultrasonic vibrator, which is particularly suitable for stably applying ultrasonic vibration in a traveling wave mode to an annular vibrating body. There is.

本発明の発明者は、特許文献２に記載の超音波振動付与具の構成をさらに検討する過程において、本明細書に添付の図１乃至図３に記載の構成の超音波振動付与具を作製し、この超音波振動付与具の超音波振動特性を調べた。 In the process of further examining the configuration of the ultrasonic vibration imparting tool described in Patent Document 2, the inventor of the present invention prepares the ultrasonic vibration imparting tool having the configuration shown in FIGS. 1 to 3 attached to the present specification. Then, the ultrasonic vibration characteristics of this ultrasonic vibration imparting tool were investigated.

すなわち、図１−図３において、超音波振動付与具１は、下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング２；円筒状ハウジング２の上記接触面に嵌め合わされている接触面を持つフランジ部３を上部に備えたフロントマス４と該フロントマス４の上方に配置したリアマス５との間に電極層６ａ、６ｂを利用しての分極処理が施された圧電素子６を挟んだ状態でボルト５ａにより固定（ボルト締め）した構成のランジュバン型超音波振動子；そして、円筒状ハウジング２の外周面下部のねじ面がねじ込まれているねじ面を内周面の上部７ａに備え、下部７ｂに上記フランジ部３の下面に接触し、かつ上記フロントマス４の側面には接触することのない内周側延長部７ｃを有するリング状釣り合い重り７を含み；上記円筒状ハウジング２の接触面と上記フランジ部３の接触面とが互いに接触する領域の上端部が構成する円周円の直径（Ｈin）がリング状釣り合い重り７の内側延長部７ｃの内周表面が構成する円周円の直径（Ｎin）よりも大きいことに特徴を持つ超音波振動付与具である。 That is, in FIGS. 1 to 3, the ultrasonic vibration imparting tool 1 has a cylindrical housing 2 having a contact surface that expands downward at the lower part of the inner peripheral surface and a screw surface at the lower part of the outer peripheral surface; the cylindrical housing 2 The electrode layers 6a and 6b are used between the front mass 4 having a flange portion 3 having a contact surface fitted to the contact surface and the rear mass 5 arranged above the front mass 4. A flange van type ultrasonic vibrator having a configuration in which a polarized piezoelectric element 6 is sandwiched and fixed (bolted) with a bolt 5a; and a screw surface at the lower part of the outer peripheral surface of the cylindrical housing 2 is screwed. A ring-shaped balance having a screw surface on the upper portion 7a of the inner peripheral surface and an inner peripheral side extension portion 7c on the lower portion 7b that contacts the lower surface of the flange portion 3 and does not contact the side surface of the front mass 4. The weight 7 is included; the diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing 2 and the contact surface of the flange portion 3 are in contact with each other is an extension of the ring-shaped equilibrium weight 7 inward. It is an ultrasonic vibration imparting tool characterized in that it is larger than the diameter (Nin) of the circumferential circle formed by the inner peripheral surface of the portion 7c.

図３には、リング状釣り合い重り７の平面図（図３の（ａ））と図３のＡ−Ａ線に沿う断面図（図３の（ｂ））が示されている。図３に示したリング状釣り合い重り７は、振れ精度調整用の雌ねじ穴を備えたタイプのものである。そして、リング状釣り合い重り７の厚さ方向（高さ方向）の上側には、円筒状ハウジング２の外周面下部のねじ面がねじ込まれているねじ面を内周面に備える上部の領域７ａ（厚さ：７ａｔ）、そしてフランジ部３の下面に接触し、かつフロントマス４の側面には接触することのない内周側延長部７ｃを備えた下部領域７ｂ（厚さ：７ｂｔ）を持っている。 FIG. 3 shows a plan view of the ring-shaped balancing weight 7 (FIG. 3 (a)) and a cross-sectional view taken along the line AA of FIG. 3 (FIG. 3 (b)). The ring-shaped balancing weight 7 shown in FIG. 3 is of a type provided with a female screw hole for adjusting the runout accuracy. Then, on the upper side of the ring-shaped equilibrium weight 7 in the thickness direction (height direction), the upper region 7a (with a screw surface on which the screw surface of the lower outer peripheral surface of the cylindrical housing 2 is screwed is provided on the inner peripheral surface). It has a lower region 7b (thickness: 7bt) provided with an inner peripheral extension portion 7c that contacts the lower surface of the flange portion 3 and does not contact the side surface of the front mass 4 (thickness: 7at). There is.

そして、図１乃至図３に示した基本構成を持つ超音波振動付与具をフロントマス４の質量を種々変えて、それらの超音波振動付与具の超音波振動特性を調べた結果、以下に記載するような興味深い超音波振動特性が判明した。
（１）円筒状ハウジングの質量がランジュバン型超音波振動子とリング状釣り合い重りのいずれよりも大きい質量を持ち、そしてリング状釣り合い重りがランジュバン型超音波振動子の質量を１として、０．５−１．５の範囲にある質量を持つ場合には、ランジュバン型超音波振動子の縦零次振動を励起するための周波数を持つ電気エネルギーの圧電素子への印加により、ランジュバン型超音波振動子全体の上下方向の振動そしてランジュバン型超音波振動子全体の上下方向の振動と同一方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動がリング状釣り合い重りの外周面で生起する。Then, as a result of investigating the ultrasonic vibration characteristics of the ultrasonic vibration imparting tools having the basic configurations shown in FIGS. 1 to 3 by changing the mass of the front mass 4 in various ways, the ultrasonic vibration imparting tools are described below. An interesting ultrasonic vibration characteristic was found.
(1) The mass of the cylindrical housing is larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped counterweight, and the ring-shaped counterweight is 0.5, where 1 is the mass of the Langevin type ultrasonic vibrator. When the mass is in the range of −1.5, the Langevin type ultrasonic vibrator is made by applying electric energy having a frequency for exciting the longitudinal zero-order vibration of the Langevin type ultrasonic vibrator to the piezoelectric element. The vibration in the vertical direction of the whole and the bending vibration in the center of the plane of the flange protruding in the same direction as the vibration in the vertical direction of the entire Langevin type ultrasonic vibrator occur, and at the same time, the bending vibration in the center of the plane of the flange. An arc-shaped vibration in the direction opposite to the direction of protrusion occurs on the outer peripheral surface of the ring-shaped balanced weight.

（２）上記（１）に説明した超音波振動特性を模式的に示すのが、添付図面の図４乃至図６である。なお、図５は、図４に示されたランジュバン型超音波振動子とリング状釣り合い重りの振動モードを誇張した形で図示している。 (2) FIGS. 4 to 6 of the attached drawings schematically show the ultrasonic vibration characteristics described in (1) above. Note that FIG. 5 shows the vibration mode of the Langevin type ultrasonic vibrator and the ring-shaped equilibrium weight shown in FIG. 4 in an exaggerated form.

なお、図４乃至図６に示す振動モードでは、円筒状ハウジングの下端部付近のみに節（ノード：黒点で示されている）９が現れ、ランジュバン型超音波振動子は、全体として上下に振動し、またフランジ部とリング状釣り合い重りは上記のモードで振動するが、それらの振動は円筒状ハウジング２に殆ど伝播することなく、従って、円筒状ハウジング２は殆ど振動しない。 In the vibration mode shown in FIGS. 4 to 6, a node (node: indicated by a black dot) 9 appears only near the lower end of the cylindrical housing, and the Langevin type ultrasonic vibrator vibrates up and down as a whole. However, the flange portion and the ring-shaped equilibrium weight vibrate in the above mode, but the vibration hardly propagates to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.

（３）図７と図８は、ランジュバン型超音波振動子の縦一次振動を励起するための周波数を持つ電気エネルギーの圧電素子への印加により、円筒状ハウジングの下端部付近に節（ノード）９が現れる振動に加えて、ランジュバン型超音波振動子の圧電素子の付近に節（ノード）１０を持つ縦一次振動（縦方向の伸縮振動）が励起され、ランジュバン型超音波振動子に縦方向の伸縮振動が現れる様子を示す。従って、ランジュバン型超音波振動子の振動は、フロントマスとリアマスとが互いに反対の方向に上下に振動する伸縮振動となり、そして同時に、フロントマス４の振動方向と同じ方向に突き出るフランジ部の平面中央部の撓み振動が現れ、そしてこのフランジ部の平面中央部が撓み振動が突き出される方向とは逆方向の円弧状の振動がリング状釣り合い重りの外周面で生起する。
上記の図７と図８に示す振動モードでも、ランジュバン型超音波振動子の振動とリング状釣り合い重りの振動は円筒状ハウジング２に殆ど伝播することなく、従って、円筒状ハウジング２は殆ど振動しない。(3) FIGS. 7 and 8 show nodes near the lower end of the cylindrical housing by applying electrical energy having a frequency for exciting the longitudinal primary vibration of the Langevin type ultrasonic vibrator to the piezoelectric element. In addition to the vibration in which 9 appears, a longitudinal primary vibration (vertical expansion and contraction vibration) having a node 10 near the piezoelectric element of the Langevin type ultrasonic vibrator is excited, and the Langevin type ultrasonic vibrator is excited in the vertical direction. It shows how the expansion and contraction vibration of. Therefore, the vibration of the Langevin type ultrasonic vibrator becomes a telescopic vibration in which the front mass and the rear mass vibrate up and down in opposite directions, and at the same time, the center of the plane of the flange portion protruding in the same direction as the vibration direction of the front mass 4. The deflection vibration of the portion appears, and the arcuate vibration in the direction opposite to the direction in which the deflection vibration is projected from the central portion of the plane of the flange portion occurs on the outer peripheral surface of the ring-shaped equilibrium weight.
Even in the vibration modes shown in FIGS. 7 and 8 above, the vibration of the Langevin type ultrasonic vibrator and the vibration of the ring-shaped equilibrium weight hardly propagate to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates. ..

（４）これに対して、円筒状ハウジングの質量がランジュバン型超音波振動子とリング状釣り合い重りのいずれよりも大きい質量を持ち、そしてリング状釣り合い重りがランジュバン型超音波振動子の質量を１として、０．２５−０．７５の範囲にある質量を持つ場合には、ランジュバン型超音波振動子の圧電素子への電気エネルギーの印加により、ランジュバン型超音波振動子の伸縮振動そしてフロントマスの上下方向の振動とは逆方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する。 (4) On the other hand, the mass of the cylindrical housing has a mass larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped counterweight, and the ring-shaped counterweight has a mass of 1 for the Langevin type ultrasonic vibrator. When the mass is in the range of 0.25 to 0.75, the expansion and contraction vibration of the Langevin type ultrasonic vibrator and the expansion and contraction vibration of the front mass are caused by the application of electric energy to the piezoelectric element of the Langevin type ultrasonic vibrator. A bending vibration in the center of the plane of the flange portion that protrudes in the direction opposite to the vibration in the vertical direction occurs, and at the same time, an arc shape in the direction opposite to the direction of protrusion due to the bending vibration in the center of the plane of the flange portion. Vibration occurs on the outer peripheral surface of the ring-shaped balancing weight.

（５）図９と図１０は、上記（４）の構成の超音波振動付与具で発生する超音波振動の様子を模式的に示す図である。この図９と図１０に示す振動モードでも、フロントマス、そしてフランジ部とリング状釣り合い重りの振動は円筒状ハウジング２に殆ど伝播することなく、従って、円筒状ハウジング２は殆ど振動しない。 (5) FIGS. 9 and 10 are diagrams schematically showing the state of ultrasonic vibration generated by the ultrasonic vibration imparting tool having the configuration of (4) above. Even in the vibration modes shown in FIGS. 9 and 10, the vibration of the front mass and the flange portion and the ring-shaped equilibrium weight hardly propagates to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.

以上に記載した新規な知見に基づき、本発明の発明者は、以下に記載する発明を完成させた。 Based on the novel findings described above, the inventor of the present invention has completed the invention described below.

（発明１）下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動と同一方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具。 (Invention 1) A cylindrical housing having a downwardly expanding contact surface at the lower part of the inner peripheral surface and a screw surface at the lower part of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between a front mass having a portion at the top and a rear mass arranged above the front mass and bolted together; and the above-mentioned cylindrical shape. The upper part of the inner peripheral surface is provided with a threaded surface on which the lower part of the outer peripheral surface of the housing is screwed, and the lower part is in contact with the lower surface of the flange portion and is not in contact with the side surface of the front mass. Includes a ring-shaped counterweight with an extension; by applying electrical energy to the piezoelectric element, the vertical vibration of the front mass and the center of the plane of the flange portion protruding in the same direction as the vertical vibration of the front mass. The deflection vibration of the portion occurs, and at the same time, the arcuate vibration in the direction opposite to the direction of protrusion due to the deflection vibration of the plane center portion of the flange portion occurs on the outer peripheral surface of the ring-shaped equilibrium weight. Grant tool.

（発明２）下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動とは逆方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具。 (Invention 2) A cylindrical housing having a downwardly expanding contact surface at the lower part of the inner peripheral surface and a screw surface at the lower part of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between a front mass having a portion at the top and a rear mass arranged above the front mass and bolted together; and the above-mentioned cylindrical shape. The upper part of the inner peripheral surface is provided with a threaded surface on which the lower outer peripheral surface of the housing is screwed, and the lower part is in contact with the lower surface of the flange portion and is not in contact with the side surface of the front mass. Includes a ring-shaped counterweight with an extension; the flat surface of the flange that projects in the direction opposite to the vertical vibration of the front mass and the vertical vibration of the front mass due to the application of electrical energy to the piezoelectric element. An ultrasonic wave in which a deflection vibration in the central portion is generated, and at the same time, an arcuate vibration in a direction opposite to the direction of protrusion due to the deflection vibration in the plane central portion of the flange portion is generated on the outer peripheral surface of the ring-shaped equilibrium weight. Vibration imparting tool.

（発明３）円環状振動体、そして該円環状振動体に、その円周に沿って互いに離れて配置され、接続された超音波振動付与具を含む、上記円環状振動体の円環に沿った進行波を発生させるための装置であって、超音波付与具として、上記発明１の超音波付与具を用いる装置。 (Invention 3) An annular vibrating body and along the annulus of the annular vibrating body including an ultrasonic vibration imparting tool arranged and connected to the annular vibrating body at a distance from each other along the circumference thereof. A device for generating a traveling wave, which uses the ultrasonic wave applying tool of the above invention 1 as an ultrasonic wave applying tool.

（発明４）円環状振動体、そして該円環状振動体に、その円周に沿って互いに離れて配置され、接続された超音波振動付与具を含む、上記円環状振動体の円環に沿った進行波を発生させるための装置であって、超音波付与具として、上記発明２の超音波付与具を用いる装置。 (Invention 4) An annular vibrating body, and along the annulus of the annular vibrating body including an ultrasonic vibration imparting tool arranged and connected to the annular vibrating body at a distance from each other along the circumference thereof. A device for generating a traveling wave, which uses the ultrasonic wave applying tool of the above invention 2 as an ultrasonic wave applying tool.

（発明５）超音波振動付与具そして該超音波振動付与具に取り付けられた工具を含む超音波加工装置であって、超音波付与具として、上記発明１の超音波付与具を用いる装置。 (Invention 5) An ultrasonic processing apparatus including an ultrasonic vibration imparting tool and a tool attached to the ultrasonic vibration imparting tool, wherein the ultrasonic vibration imparting tool of the above invention 1 is used as the ultrasonic vibration imparting tool.


（発明６）超音波振動付与具そして該超音波振動付与具に取り付けられた工具を含む超音波加工装置であって、超音波付与具として、上記発明２の超音波付与具を用いる装置。
(Invention 6) An ultrasonic processing apparatus including an ultrasonic vibration imparting tool and a tool attached to the ultrasonic vibration imparting tool, wherein the ultrasonic vibration imparting tool of the above invention 2 is used as the ultrasonic vibration imparting tool.


本発明の超音波振動付与具の好ましい態様を以下に記載する。
（１）上記円筒状ハウジングの接触面と上記フランジ部の接触面とが互いに接触する領域の上端部が構成する円周円の直径（Ｈin）がリング状釣り合い重りの内側延長部の内周表面が構成する円周円の直径（Ｎin）よりも大きい。
（２）上記円筒状ハウジングが上記ランジュバン型超音波振動子と上記リング状釣り合い重りのいずれよりも大きい質量を持つ。
（３）発明１の超音波振動付与具について−上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．５−１．５の範囲にある質量を持つ。
（４）発明２の超音波振動付与具について−上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．２５−０．７５の範囲にある質量を持つ。
A preferred embodiment of the ultrasonic vibration imparting tool of the present invention is described below.
(1) The diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange portion are in contact with each other is the inner peripheral surface of the inner extension portion of the ring-shaped equilibrium weight. It is larger than the diameter (Nin) of the circumference circle formed by.
(2) The cylindrical housing has a mass larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped balancing weight.
(3) Regarding the ultrasonic vibration imparting tool of Invention 1-The ring-shaped balanced weight has a mass in the range of 0.5-1.5, where 1 is the mass of the Langevin type ultrasonic vibrator.
(4) Regarding the ultrasonic vibration imparting tool of Invention 2-The ring-shaped balanced weight has a mass in the range of 0.25 to 0.75, where 1 is the mass of the Langevin type ultrasonic vibrator.

超音波加工装置に、本発明の超音波振動付与具を組み込んで用いると、超音波振動付与具からの超音波加工装置の超音波振動付与具の支持部材（超音波加工装置に組み込むための支持部材）への超音波振動エネルギーの漏出が顕著に低減する。このため、ランジュバン型超音波振動子にて発生した超音波振動を、超音波振動付与具に取り付けられた工具あるいは振動体に、高い効率で、かつ高い安定性にて伝達することが可能となる。 When the ultrasonic vibration imparting tool of the present invention is incorporated and used in the ultrasonic processing apparatus, the support member of the ultrasonic vibration imparting tool of the ultrasonic processing apparatus from the ultrasonic vibration imparting tool (support for incorporating into the ultrasonic processing apparatus). Leakage of ultrasonic vibration energy to the member) is significantly reduced. Therefore, it is possible to transmit the ultrasonic vibration generated by the Langevin type ultrasonic vibrator to the tool or the vibrating body attached to the ultrasonic vibration imparting tool with high efficiency and high stability. ..

また、円環状の振動体に本発明の超音波付与具を三個以上互いに離れた状態で装着することにより、その振動体に円環状の進行波の安定に生起させることができる。 Further, by attaching three or more ultrasonic wave applying tools of the present invention to the annular vibrating body in a state of being separated from each other, it is possible to stably generate an annular traveling wave in the vibrating body.

本発明の超音波振動付与具の例の平面図である。It is a top view of the example of the ultrasonic vibration imparting tool of this invention. 図１に示した超音波振動付与具の正面断面図である。It is a front sectional view of the ultrasonic vibration imparting tool shown in FIG. 本発明の超音波振動付与具を構成するリング状釣り合い重りの構成の例を示す図であり、（ａ）は平面図、そして（ｂ）は、（ａ）に示したＡ−Ａ線に沿って切断した正面断面図である。It is a figure which shows the example of the structure of the ring-shaped equilibrium weight which constitutes the ultrasonic vibration imparting tool of this invention, (a) is a plan view, and (b) is along the line AA shown in (a). It is a front sectional view cut out. 図２に示した本発明の超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図は、ランジュバン型超音波振動子が振動により下降した位置にある状態を示す。The vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped equilibrium weight generated when electric energy is applied to the ultrasonic vibration imparting tool of the present invention shown in FIG. It is explanatory drawing which shows. It should be noted that this figure shows a state in which the Langevin type ultrasonic vibrator is in a lowered position due to vibration. 図４に示した本発明の超音波振動付与具を構成するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図４とは別の方法で示す説明図である。The vibration of the Langevin type ultrasonic vibrator constituting the ultrasonic vibration imparting tool of the present invention shown in FIG. 4, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped equilibrium weight are different from those of FIG. It is explanatory drawing shown by. 図２に示した本発明の超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図は、ランジュバン型超音波振動子が振動により上昇した位置にある状態を示す。The vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped equilibrium weight generated when electric energy is applied to the ultrasonic vibration imparting tool of the present invention shown in FIG. It is explanatory drawing which shows. It should be noted that this figure shows a state in which the Langevin type ultrasonic vibrator is in a raised position due to vibration. 図２に示した超音波振動付与具と類似の構成の超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図の構成では、ランジュバン型超音波振動子の圧電素子の位置の付近に振動の節（ノード）が現れる。そして、この図は、フロントマスが振動により下降した位置にある状態を示す。The vibration of the Langevin type ultrasonic vibrator generated when electric energy is applied to the ultrasonic vibration imparting tool having a configuration similar to that of the ultrasonic vibration imparting tool shown in FIG. 2, the vibration of the flange portion of the front mass, and the ring shape. It is explanatory drawing which illustrates each vibration of the equilibrium weight. In the configuration shown in this figure, a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer. Then, this figure shows a state in which the front mass is in a lowered position due to vibration. 図７に示した本発明の超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図の構成では、ランジュバン型超音波振動子の圧電素子の位置の付近に振動の節（ノード）が現れる。そして、この図は、フロントマスが振動により上昇した位置にある状態を示す。The vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped equilibrium weight generated when electric energy is applied to the ultrasonic vibration imparting tool of the present invention shown in FIG. It is explanatory drawing which shows. In the configuration shown in this figure, a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer. Then, this figure shows a state in which the front mass is in a raised position due to vibration. 図２に示した超音波振動付与具と類似の構成（但し、フロントマスが大きい質量を持つ点において相違する）の超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図の構成では、フロントマスに振動の節（ノード）が現れる。そして、この図は、フロントマスが振動により下降した位置にある状態を示す。Langevin type ultrasonic vibration generated when electric energy is applied to the ultrasonic vibration imparting tool having a configuration similar to that of the ultrasonic vibration imparting tool shown in FIG. 2 (however, the difference is that the front mass has a large mass). It is explanatory drawing which illustrates each of the vibration of a child, the vibration of the flange part of a front mass, and the vibration of a ring-shaped equilibrium weight. In the configuration shown in this figure, vibration nodes appear on the front mass. Then, this figure shows a state in which the front mass is in a lowered position due to vibration. 図９に示した超音波振動付与具に電気エネルギーを印加した際に発生するランジュバン型超音波振動子の振動、フロントマスのフランジ部の振動、そしてリング状釣り合い重りの振動のそれぞれを図示する説明図である。なお、この図の構成では、フロントマスに振動の節（ノード）が現れる。そして、この図は、フロントマスが振動により上昇した位置にある状態を示す。Explanation illustrating each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped equilibrium weight generated when electric energy is applied to the ultrasonic vibration imparting tool shown in FIG. It is a figure. In the configuration shown in this figure, vibration nodes appear on the front mass. Then, this figure shows a state in which the front mass is in a raised position due to vibration. 本発明の超音波振動付与具を、フロントマスがフランジ部を介して、リング状釣り合い重りと一体化した構成として示す図である。It is a figure which shows the ultrasonic vibration imparting tool of this invention as the structure which the front mass is integrated with the ring-shaped equilibrium weight through the flange part. 本発明の超音波振動付与具を円環状研磨具に装着して構成した研磨装置の平面図を示す。A plan view of a polishing apparatus configured by mounting the ultrasonic vibration imparting tool of the present invention on an annular polishing tool is shown. 図１２に示した研磨装置の正面断面図を示す。The front sectional view of the polishing apparatus shown in FIG. 12 is shown. 図１２と図１３に示した研磨装置に装着された超音波振動付与具に電気エネルギーを印加した際に円環状研磨具に発生する円環状進行波のモードを示す模式図である。It is a schematic diagram which shows the mode of the annular traveling wave generated in the annular polishing tool when electric energy is applied to the ultrasonic vibration imparting tool attached to the polishing apparatus shown in FIGS. 12 and 13. 本発明の超音波振動付与具を切削具（円環状ブレード）に装着して構成した切削装置の平面図を示す。A plan view of a cutting device configured by mounting the ultrasonic vibration imparting tool of the present invention on a cutting tool (annular blade) is shown. 図１５に示した切削装置の正面断面図を示す。The front sectional view of the cutting apparatus shown in FIG. 15 is shown. 図１５と図１６に示した切削装置に装着された超音波振動付与具に電気エネルギーを印加した際に切削具（円環状ブレード）に発生する円環状進行波のモードを示す模式図である。It is a schematic diagram which shows the mode of the annular traveling wave generated in the cutting tool (annular blade) when electric energy is applied to the ultrasonic vibration imparting tool mounted on the cutting device shown in FIGS. 15 and 16.

以下に、図１乃至図１０を参照して、本発明の超音波振動付与具の詳しい説明を記載する。 Hereinafter, a detailed description of the ultrasonic vibration imparting tool of the present invention will be described with reference to FIGS. 1 to 10.

図１と図２は、本発明の特徴的なモードの超音波振動の発生が可能な超音波振動付与具の代表的な構成例を示す図である。この図１と図２に示した超音波振動付与具の構成については、本明細書に既に記載した。すなわち、図１と図２に示した超音波振動付与具は、特許文献２に記載の超音波振動付与具と基本構成は同じである。
ただし、図１と図２に示した超音波振動付与具は、円筒状ハウジング２の接触面とフランジ部３の接触面とが互いに接触する領域の上端部が構成する円周円の直径（Ｈin）がリング状釣り合い重り８の内側延長部７の内周表面が構成する円周円の直径（Ｎin）よりも大きいことに特徴を持つ超音波振動付与具である点において、特許文献２に記載の超音波振動付与具とは相違している。なお、本願の添付にした各図面に示されている超音波振動付与具のランジュバン型超音波振動子に装着されている圧電素子には当然のことであるが、実際には電気エネルギーを供給するための配線システムが付属している。しかし、そのような配線システムの図示は煩雑となるため、各図面では省略した。
図３についても、既に説明を記載している。1 and 2 are diagrams showing a typical configuration example of an ultrasonic vibration imparting tool capable of generating ultrasonic vibration in a characteristic mode of the present invention. The configuration of the ultrasonic vibration imparting tool shown in FIGS. 1 and 2 has already been described in the present specification. That is, the ultrasonic vibration imparting tool shown in FIGS. 1 and 2 has the same basic configuration as the ultrasonic vibration imparting tool described in Patent Document 2.
However, in the ultrasonic vibration imparting tool shown in FIGS. 1 and 2, the diameter of the circumferential circle (Hin) formed by the upper end of the region where the contact surface of the cylindrical housing 2 and the contact surface of the flange portion 3 are in contact with each other. ) Is an ultrasonic vibration imparting tool characterized in that it is larger than the diameter (Nin) of the circumferential circle formed by the inner peripheral surface of the inner extension portion 7 of the ring-shaped equilibrium weight 8, and is described in Patent Document 2. It is different from the ultrasonic vibration imparting tool of. It should be noted that, as a matter of course, the piezoelectric element mounted on the Langevin type ultrasonic vibrator of the ultrasonic vibration imparting tool shown in each drawing attached to the present application actually supplies electric energy. Comes with a wiring system for. However, since the illustration of such a wiring system is complicated, it is omitted in each drawing.
The explanation has already been described for FIG.

図４乃至図１０は、本発明の超音波振動付与具の様々な構成、そしてそれらの構成の超音波振動付与具の圧電素子に電気エネルギーを印加した際に現れるのランジュバン型超音波振動子の縦方向の振動、フロントマスのフランジ部に現れる撓み振動、そしてリング状釣り合い重りに現れる弧状の振動の方向を模式的に示す図であり、各図についての説明は、本明細書において既に記載している。 4 to 10 show various configurations of the ultrasonic vibration imparting tool of the present invention, and a Langevin type ultrasonic vibrator appearing when electric energy is applied to the piezoelectric element of the ultrasonic vibration imparting tool having these configurations. It is a figure which shows typically the direction of the vertical vibration, the bending vibration appearing in the flange part of a front mass, and the arc-shaped vibration appearing in a ring-shaped equilibrium weight, and the description of each figure has already been described in this specification. ing.

なお、添付図面の図１乃至図１０では、フランジ部を備えたフロントマスとリング状釣り合い重りとをそれぞれ別体として作製した超音波振動付与具を示したが、フランジ部を備えたフロントマスとリング状釣り合い重りとは一体として作製しても同様の効果が得られる筈である。そのような構成を図１１に示す。すなわち、フロントマス４とリング状釣り合い重り７とは、それらを接続するリング状釣り合い重りの延長部７ｄと、その延長部７ｄと一体化したフロントマスのフランジ部７ｅにより、全体として一体化されている。ただし、図１１に示した超音波振動付与具は、その作製が容易ではないところから、実用性に乏しいとも考えられる。 In addition, in FIGS. 1 to 10 of the attached drawings, the ultrasonic vibration imparting tool manufactured by separating the front mass provided with the flange portion and the ring-shaped balancing weight from each other is shown, but the front mass provided with the flange portion is shown. The same effect should be obtained even if it is manufactured as a unit with the ring-shaped balancing weight. Such a configuration is shown in FIG. That is, the front mass 4 and the ring-shaped balancing weight 7 are integrated as a whole by the extension portion 7d of the ring-shaped balancing weight connecting them and the flange portion 7e of the front mass integrated with the extension portion 7d. There is. However, the ultrasonic vibration imparting tool shown in FIG. 11 is considered to be poor in practicality because it is not easy to manufacture.

次に、本発明の超音波振動付与具を用いて円環状進行波モードの超音波振動を発生させる方法を記載する。円環状進行波モードは進行波が伝播する方向には振動の節が現れることなく、また大型の振動体であっても励起が可能出あるため、大型の振動体の超音波加工の実施には有利となる。 Next, a method of generating ultrasonic vibration in the annular traveling wave mode using the ultrasonic vibration imparting tool of the present invention will be described. In the annular traveling wave mode, no vibration nodes appear in the direction in which the traveling wave propagates, and even a large vibrating body can be excited. It will be advantageous.

円環状進行波モードは、後述する図１４と図１７のそれぞれに模式的に記載された図に示されているように、円環状振動体の半径方向と直交する方向に撓むモードの進行波そして円環状振動体の半径方向に撓むモードの進行波の二種がある。そして、いずれのモードの進行波でも、その進行波を発生させるためには、円環状振動体の表面に三個以上の超音波振動付与具を互いに離れた状態、好ましく同一距離にて離れた状態で装着する必要がある。また、一般的には、振動体の大きさが大きくなればなるほど、装着する超音波振動付与具の個数を増加させる必要がある。 The traveling wave mode is a traveling wave in a mode that bends in a direction orthogonal to the radial direction of the annular vibrating body, as shown in the drawings schematically shown in FIGS. 14 and 17, which will be described later. And there are two types of traveling waves in a mode that bends in the radial direction of the annular vibrating body. Then, in order to generate the traveling wave in any mode of the traveling wave, three or more ultrasonic vibration imparting tools are separated from each other, preferably at the same distance, on the surface of the annular vibrating body. It is necessary to install it with. Further, in general, as the size of the vibrating body increases, it is necessary to increase the number of ultrasonic vibration imparting tools to be attached.

円環状進行波モードの超音波振動を付与して研磨加工を行う超音波加工装置（研磨装置）の構成の例を図１２と図１３に示す。図１２は、研磨装置の平面図を示す。図１３は、図１２に示した研磨装置のＡ−Ａ線に沿って切断した正面断面図である。 12 and 13 show an example of the configuration of an ultrasonic processing apparatus (polishing apparatus) that applies ultrasonic vibration in the annular traveling wave mode to perform polishing processing. FIG. 12 shows a plan view of the polishing apparatus. FIG. 13 is a front sectional view taken along the line AA of the polishing apparatus shown in FIG.

本発明の超音波付与装置を利用する研磨装置で円環状進行波モードの超音波振動を発生させるために、図１２と図１３に示した研磨装置では、合計４個の超音波付与装置１（１ａ、１ｂ、１ｃ、１ｄ）が用いられ、そして回転板１１に互いに９０°離れた状態で、各超音波付与装置１のハウジングをボルトにより取り付けられる。本発明の超音波付与装置を用いることにより、前述のように、ランジュバン型超音波振動子で発生した超音波振動は、ハウジングに殆ど漏れることはない。そして、リング状釣り合い重りを装着した超音波付与装置は高い剛性を示すため、回転板１１に高い剛性を伴って取り付けられる。 In order to generate ultrasonic vibration in the annular traveling wave mode in the polishing device using the ultrasonic wave applying device of the present invention, in the polishing devices shown in FIGS. 12 and 13, a total of four ultrasonic wave applying devices 1 ( 1a, 1b, 1c, 1d) are used, and the housing of each ultrasonic applying device 1 is bolted to the rotating plate 11 at a distance of 90 ° from each other. By using the ultrasonic wave applying device of the present invention, as described above, the ultrasonic vibration generated by the Langevin type ultrasonic vibrator hardly leaks to the housing. Since the ultrasonic wave applying device equipped with the ring-shaped balancing weight exhibits high rigidity, it is attached to the rotating plate 11 with high rigidity.

次いで、各超音波付与装置（１ａ、１ｂ、１ｃ、１ｄ）のランジュバン型超音波振動子のフロントマスの頂面に、表面に円環状砥石面１３が形成された円環状研磨板１４をボルトを用いて装着する。このような構成の研磨装置を用いての研磨作業において、円環状研磨板１４の表面に形成された円環状砥石面１３に大きな機械的負荷が掛かっても、安定した状態の円環状進行波モードの超音波振動を供給することができる。 Next, on the top surface of the front mass of the Langevin type ultrasonic vibrator of each ultrasonic wave applying device (1a, 1b, 1c, 1d), an annular polishing plate 14 having an annular grindstone surface 13 formed on the surface is bolted. Use and wear. In the polishing operation using the polishing apparatus having such a configuration, the annular traveling wave mode in a stable state even when a large mechanical load is applied to the annular grinding wheel surface 13 formed on the surface of the annular polishing plate 14. Ultrasonic vibration can be supplied.

研磨作業の開始に際しては、まず円環状研削板１４の円環状砥石面１３に研削液を噴霧し、次いで、超音波発信回路から超音波付与装置１（１ａ、１ｂ、１ｃ、１ｄ）の各々のランジュバン型超音波振動子に下記の方法で所定電圧と周波数を持つ電気エネルギーを印加する。 At the start of the polishing work, first, the grinding liquid is sprayed on the annular grindstone surface 13 of the annular grinding plate 14, and then each of the ultrasonic applying devices 1 (1a, 1b, 1c, 1d) is sprayed from the ultrasonic transmitting circuit. Electric energy having a predetermined voltage and frequency is applied to the Langevin type ultrasonic vibrator by the following method.

すなわち、例えば、超音波付与装置１ａのランジュバン型超音波振動子にはＣoｓ波電圧、超音波付与装置１ｂのランジュバン型超音波振動子にはＳｉｎ波電圧、超音波付与装置１ｃのランジュバン型超音波振動子には−Ｃoｓ波電圧、そして超音波付与装置１ｄのランジュバン型超音波振動子には−Ｓｉｎ波電圧をそれぞれ印加する。各超音波付与装置のランジュバン型超音波振動子のそれぞれにこのような方法で異なった種類の電圧を印加することにより、図１４の模式図に示されているように、円環状研磨板１４の表面にその半径方向と直交する方向に撓むモードの進行波が発生する。 That is, for example, the Cos wave voltage is used for the Langevin type ultrasonic vibrator of the ultrasonic applying device 1a, the Sine wave voltage is used for the Langevin type ultrasonic vibrator of the ultrasonic applying device 1b, and the Langevin type ultrasonic wave of the ultrasonic applying device 1c is used. A -Cos wave voltage is applied to the vibrator, and a -Sine wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1d. By applying a different type of voltage to each of the Langevin type ultrasonic transducers of each ultrasonic wave applying device in this way, as shown in the schematic diagram of FIG. 14, the annular polishing plate 14 A traveling wave in a mode that bends in the direction orthogonal to the radial direction is generated on the surface.

次いで、回転軸１２を回転させ、予め決定されている加工プログラムに従い、研磨対象の材料の研磨を行う。 Next, the rotating shaft 12 is rotated to polish the material to be polished according to a predetermined processing program.

なお、ランジュバン型の駆動において、実際には駆動の位相を二相とした方が駆動回路を簡略化できるので、超音波付与装置１ｃのランジュバン型超音波振動子に−Ｃoｓ波電圧を印加する代わりに、超音波付与装置１ｃのランジュバン型超音波振動子に装着する圧電素子を逆向きに配置して、超音波付与装置１ｃのランジュバン型超音波振動子にＣoｓ波電圧を印加する方法も利用できる。また、同様に、超音波付与装置１ｄのランジュバン型超音波振動子に−Ｓｉｎ波電圧を印加する代わりに、超音波付与装置１ｄのランジュバン型超音波振動子に装着する圧電素子を逆向きに配置して、超音波付与装置１ｄのランジュバン型超音波振動子にＳｉｎ波電圧を印加する方法も利用できる。 In the Langevin type drive, the drive circuit can be simplified by actually setting the drive phase to two phases. Therefore, instead of applying a -Cos wave voltage to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1c. A method of arranging the piezoelectric elements mounted on the Langevin type ultrasonic transducer of the ultrasonic applying device 1c in the opposite direction and applying a sine wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applying device 1c can also be used. .. Similarly, instead of applying a -sine wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applying device 1d, the piezoelectric element mounted on the Langevin type ultrasonic transducer of the ultrasonic applying device 1d is arranged in the opposite direction. Then, a method of applying a sine wave voltage to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1d can also be used.

次に円環状進行波モードの超音波振動を付与して研削加工を行う超音波加工装置（研削装置）の構成の例を図１５と図１６に示す。図１５は、研削装置の平面図を示す。図１６は、図１３に示した研削装置の正面断面図である。 Next, FIGS. 15 and 16 show an example of the configuration of an ultrasonic processing apparatus (grinding apparatus) that applies ultrasonic vibration in the annular traveling wave mode to perform grinding. FIG. 15 shows a plan view of the grinding apparatus. FIG. 16 is a front sectional view of the grinding apparatus shown in FIG.

本発明の超音波付与装置を利用する研削装置で円環状進行波モードの超音波振動を発生させるために、図１５と図１６に示した研削装置では、合計４個の超音波付与装置１（１ａ、１ｂ、１ｃ、１ｄ）が用いられる。そして回転板１５に互いに９０°離れた状態で、各超音波付与装置１のハウジングをボルトにより取り付ける。本発明の超音波付与装置を用いることにより、前述のように、ランジュバン型超音波振動子で発生した超音波振動は、ハウジングに殆ど漏れることはない。そして、リング状釣り合い重りを装着した超音波付与装置は高い剛性を示すため、回転板１５に高い剛性を伴って取り付けられる。 In order to generate ultrasonic vibration in the annular traveling wave mode in the grinding device using the ultrasonic wave applying device of the present invention, in the grinding devices shown in FIGS. 15 and 16, a total of four ultrasonic wave applying devices 1 ( 1a, 1b, 1c, 1d) are used. Then, the housings of the ultrasonic wave applying devices 1 are attached to the rotating plate 15 with bolts in a state of being separated from each other by 90 °. By using the ultrasonic wave applying device of the present invention, as described above, the ultrasonic vibration generated by the Langevin type ultrasonic vibrator hardly leaks to the housing. Since the ultrasonic wave applying device equipped with the ring-shaped balancing weight exhibits high rigidity, it is attached to the rotating plate 15 with high rigidity.

次いで、各超音波付与装置（１ａ、１ｂ、１ｃ、１ｄ）のランジュバン型超音波振動子のフロントマスの頂面に設けた段差に円環状切削砥石(ブレード）１６を装着する。このような構成の研削装置を用いての研削作業において、円環状切削砥石(ブレード）１６に大きな機械的負荷が掛かっても、安定した状態の円環状進行波モードの超音波振動を供給することができる。 Next, the annular cutting grindstone (blade) 16 is mounted on a step provided on the top surface of the front mass of the Langevin type ultrasonic vibrator of each ultrasonic wave applying device (1a, 1b, 1c, 1d). In the grinding work using the grinding device having such a configuration, even if a large mechanical load is applied to the annular cutting grindstone (blade) 16, ultrasonic vibration in the annular traveling wave mode in a stable state is supplied. Can be done.

研削作業の開始に際しては、まず円環状切削砥石(ブレード）１６に研削液を噴霧し、次いで、超音波発信回路から超音波付与装置１（１ａ、１ｂ、１ｃ、１ｄ）のランジュバン型超音波振動子に所定電圧と周波数を持つ電気エネルギーを印加する。 At the start of the grinding work, the grinding fluid is first sprayed on the annular cutting grindstone (blade) 16, and then the Langevin type ultrasonic vibration of the ultrasonic applying device 1 (1a, 1b, 1c, 1d) is transmitted from the ultrasonic transmitting circuit. Apply electrical energy with a predetermined voltage and frequency to the child.

超音波付与装置１（１ａ、１ｂ、１ｃ、１ｄ）の各ランジュバン型超音波振動子には、所定電圧と周波数を持つ電気エネルギーを印加する。すなわち、例えば、超音波付与装置１ａのランジュバン型超音波振動子にはＣoｓ波電圧、超音波付与装置１ｂのランジュバン型超音波振動子にはＳｉｎ波電圧、超音波付与装置１ｃのランジュバン型超音波振動子には−Ｃoｓ波電圧、そして超音波付与装置１ｄのランジュバン型超音波振動子には−Ｓｉｎ波電圧をそれぞれ印加する。各超音波付与装置のランジュバン型超音波振動子のそれぞれにこのような方法で異なった種類の電圧を印加することにより、図１７に模式的に記載された図に示されているように、円環状切削砥石(ブレード）１６にの表面にその半径方向に撓むモードの進行波が発生する。ただし、図１７に示した進行波のモードは、６個（あるいは１２個）の超音波付与装置を装着した場合に得られる進行波である。 Electric energy having a predetermined voltage and frequency is applied to each Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1 (1a, 1b, 1c, 1d). That is, for example, the Cos wave voltage is used for the Langevin type ultrasonic vibrator of the ultrasonic applying device 1a, the Sine wave voltage is used for the Langevin type ultrasonic vibrator of the ultrasonic applying device 1b, and the Langevin type ultrasonic wave of the ultrasonic applying device 1c is used. A -Cos wave voltage is applied to the vibrator, and a -Sine wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1d. By applying different types of voltages in this way to each of the Langevin-type ultrasonic transducers of each ultrasonic applying device, a circle, as shown in the diagram schematically shown in FIG. A traveling wave in a mode of bending in the radial direction is generated on the surface of the annular cutting grindstone (blade) 16. However, the traveling wave mode shown in FIG. 17 is a traveling wave obtained when six (or twelve) ultrasonic wave applying devices are attached.

なお、この研削装置による研削作業の実施に際しても、超音波付与装置１ｃのランジュバン型超音波振動子に−Ｃoｓ波電圧を印加する代わりに、超音波付与装置１ｃのランジュバン型超音波振動子に装着する圧電素子を逆向きに配置して、超音波付与装置１ｃのランジュバン型超音波振動子をＣoｓ波電圧を印加する方法、そして、超音波付与装置１ｄのランジュバン型超音波振動子に−Ｓｉｎ波電圧を印加する代わりに、超音波付与装置１ｄのランジュバン型超音波振動子に装着する圧電素子を逆向きに配置して、超音波付与装置１ｄのランジュバン型超音波振動子にＳｉｎ波電圧を印加する方法も利用可能である。
次いで、回転軸１5を回転させ、予め決められた加工プログラムに従い、研削対象の材料の研削を実施する。In addition, when carrying out the grinding work by this grinding device, instead of applying a -Cos wave voltage to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1c, it is attached to the Langevin type ultrasonic vibrator of the ultrasonic applying device 1c. A method of applying a Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic wave applying device 1c by arranging the piezoelectric elements in the opposite directions, and a -Sine wave to the Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1d. Instead of applying a voltage, the piezoelectric element mounted on the Langevin type ultrasonic transducer of the ultrasonic applying device 1d is arranged in the opposite direction, and a sine wave voltage is applied to the Langevin type ultrasonic transducer of the ultrasonic applying device 1d. A method is also available.
Next, the rotating shaft 15 is rotated, and the material to be ground is ground according to a predetermined machining program.

また、これまでに記載した本発明の超音波付与装置の円環状進行波モードの超音波振動の励起以外にも、本発明の超音波付与装置は当然、従来から一般的に利用されているモードの超音波振動の付与にも有効に利用できる。たとえば、物品の搬送に用いるフィーダー、超音波浮上装置、超音波砥粒加工装置などにおいても本発明の超音波付与装置が有効に利用できる。 In addition to the excitation of ultrasonic vibration in the annular traveling wave mode of the ultrasonic wave applying device of the present invention described so far, the ultrasonic wave applying device of the present invention naturally has a mode generally used conventionally. It can also be effectively used to apply ultrasonic vibrations. For example, the ultrasonic wave applying device of the present invention can be effectively used in a feeder, an ultrasonic levitation device, an ultrasonic abrasive grain processing device, and the like used for transporting articles.

Claims (18)

下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動と同一方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具。 A cylindrical housing with a downwardly expanding contact surface at the bottom of the inner peripheral surface and a threaded surface at the bottom of the outer peripheral surface; a flange portion with a contact surface fitted to the contact surface of the cylindrical housing at the top. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between a front mass provided and a rear mass arranged above the front mass and bolted; and an outer peripheral surface of the cylindrical housing. A threaded surface on which the lower threaded surface is screwed is provided in the upper part of the inner peripheral surface, and the lower part has an inner peripheral side extension portion that contacts the lower surface of the flange portion and does not contact the side surface of the front mass. Includes a ring-shaped balanced weight; due to the application of electrical energy to the piezoelectric element, the vibration of the front mass in the vertical direction and the vibration of the center of the plane of the flange portion protruding in the same direction as the vibration of the front mass in the vertical direction. And at the same time, an arc-shaped vibration in the direction opposite to the direction of protrusion due to the bending vibration of the center of the plane of the flange portion is generated on the outer peripheral surface of the ring-shaped equilibrium weight. 下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動とは逆方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具。 A cylindrical housing with a downwardly expanding contact surface at the bottom of the inner peripheral surface and a threaded surface at the bottom of the outer peripheral surface; a flange portion with a contact surface fitted to the contact surface of the cylindrical housing at the top. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between a front mass provided and a rear mass arranged above the front mass and bolted; and an outer peripheral surface of the cylindrical housing. A threaded surface on which the lower threaded surface is screwed is provided in the upper part of the inner peripheral surface, and the lower part has an inner peripheral side extension portion that contacts the lower surface of the flange portion and does not contact the side surface of the front mass. Including a ring-shaped equilibrium weight; due to the application of electric energy to the piezoelectric element, the vibration of the front mass in the vertical direction and the deflection of the central flat portion of the flange portion protruding in the direction opposite to the vibration of the front mass in the vertical direction. An ultrasonic vibration imparting tool in which vibration is generated, and at the same time, arc-shaped vibration in a direction opposite to the direction of protrusion due to bending vibration in the center of the plane of the flange portion is generated on the outer peripheral surface of the ring-shaped equilibrium weight. 上記円筒状ハウジングの接触面と上記フランジ部の接触面とが互いに接触する領域の上端部が構成する円周円の直径がリング状釣り合い重りの内側延長部の内周表面が構成する円周円の直径よりも大きい請求項１もしくは２に記載の超音波振動付与具。 The diameter of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange portion are in contact with each other is a circular circle formed by the inner peripheral surface of the inner extension portion of the ring-shaped equilibrium weight. The ultrasonic vibration imparting tool according to claim 1 or 2, which is larger than the diameter of the above. 上記円筒状ハウジングが上記ランジュバン型超音波振動子と上記リング状釣り合い重りのいずれよりも大きい質量を持つ請求項１もしくは２に記載の超音波振動付与具。 The ultrasonic vibration imparting tool according to claim 1 or 2, wherein the cylindrical housing has a mass larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped equilibrium weight. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．５−１．５の範囲にある質量を持つ請求項１に記載の超音波振動付与具。 The ultrasonic vibration imparting tool according to claim 1, wherein the ring-shaped balanced weight has a mass in the range of 0.5 to 1.5, where 1 is the mass of the Langevin type ultrasonic vibrator. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．２５−０．７５の範囲にある質量を持つ請求項２に記載の超音波振動付与具。 The ultrasonic vibration imparting tool according to claim 2, wherein the ring-shaped balanced weight has a mass in the range of 0.25 to 0.75, where 1 is the mass of the Langevin type ultrasonic vibrator. 円環状振動体、そして該円環状振動体に、その円周に沿って互いに離れて配置され、接続された超音波振動付与具を含む、上記円環状振動体の円環に沿った進行波を発生させるための装置であって、
上記超音波振動付与具が、下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振
動そして該フロントマスの上下方向の振動と同一方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具であることを特徴とする装置。An annular vibrating body, and a traveling wave along the annulus of the annular vibrating body, including an ultrasonic vibration imparting tool arranged and connected to the annular vibrating body at a distance from each other along the circumference thereof. It is a device to generate
The ultrasonic vibration imparting tool has a contact surface that expands downward at the lower part of the inner peripheral surface and a screw surface at the lower part of the outer peripheral surface; a contact fitted to the contact surface of the cylindrical housing. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between a front mass having a flange portion having a surface at the top and a rear mass arranged above the front mass and bolted together; , The screw surface on the lower part of the outer peripheral surface of the cylindrical housing is provided on the upper part of the inner peripheral surface, and the lower part is in contact with the lower surface of the flange portion and the side surface of the front mass. Includes a ring-shaped counterweight with no inner peripheral extension; the flange that projects in the same direction as the vertical vibration of the front mass and the vertical vibration of the front mass due to the application of electrical energy to the piezoelectric element. The bending vibration of the central part of the plane of the portion occurs, and at the same time, the arcuate vibration in the direction opposite to the direction of protrusion due to the bending vibration of the central part of the plane of the flange portion occurs on the outer peripheral surface of the ring-shaped balancing weight. A device characterized by being an ultrasonic vibration imparting tool. 円環状振動体、そして該円環状振動体に、その円周に沿って互いに離れて配置され、接続された超音波振動付与具を含む、上記円環状振動体の円環に沿った進行波を発生させるための進行波を発生させる装置であって、上記超音波振動付与具が、下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動とは逆方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具であることを特徴とする装置。 An annular vibrating body, and a traveling wave along the annulus of the annular vibrating body including an ultrasonic vibration imparting tool arranged and connected to the annular vibrating body at a distance from each other along the circumference thereof. A device that generates a traveling wave to generate, and the ultrasonic vibration imparting tool has a contact surface that expands downward at the lower part of the inner peripheral surface, and a cylindrical housing having a screw surface at the lower part of the outer peripheral surface; A state in which a polarized piezoelectric element is sandwiched between a front mass having a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at the top and a rear mass arranged above the front mass. A Langevin-type ultrasonic vibrator having a structure bolted with a above; The side surface of the front mass includes a ring-shaped balancing weight having an inner peripheral extension that does not contact; the application of electrical energy to the piezoelectric element causes the front mass to vibrate in the vertical direction and the said. The bending vibration of the plane center portion of the flange portion that protrudes in the direction opposite to the vertical vibration of the front mass occurs, and at the same time, the bending vibration of the plane center portion of the flange portion protrudes in the direction opposite to the direction of protrusion. A device characterized in that it is an ultrasonic vibration imparting tool in which arc-shaped vibration is generated on the outer peripheral surface of the ring-shaped balancing weight. 上記円筒状ハウジングの接触面と上記フランジの接触面とが互いに接触する領域の上端部が構成する円周円の直径がリング状釣り合い重りの内側延長部の内周表面が構成する円周円の直径よりも大きい請求項７もしくは８に記載の装置。 The diameter of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange are in contact with each other is the diameter of the circumferential circle formed by the inner peripheral surface of the inner extension of the ring-shaped equilibrium weight. The device according to claim 7 or 8, which is larger than the diameter. 上記円筒状ハウジングが上記ランジュバン型超音波振動子と上記リング状釣り合い重りのいずれよりも大きい質量を持つ請求項７もしくは８に記載の装置。 The device according to claim 7 or 8, wherein the cylindrical housing has a mass larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped equilibrium weight. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．５−１．５の範囲にある質量を持つ請求項７に記載の装置。 The apparatus according to claim 7, wherein the ring-shaped balanced weight has a mass in the range of 0.5 to 1.5, where 1 is the mass of the Langevin type ultrasonic vibrator. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．２５−０．７５の範囲にある質量を持つ請求項８に記載の装置。 The apparatus according to claim 8, wherein the ring-shaped balanced weight has a mass in the range of 0.25 to 0.75, where 1 is the mass of the Langevin type ultrasonic vibrator. 超音波振動付与具そして該超音波振動付与具に取り付けられた工具を含む超音波加工装置であって、上記超音波振動付与具が、下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動と同一方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具であることを特徴とする装置。 An ultrasonic processing device including an ultrasonic vibration imparting tool and a tool attached to the ultrasonic vibration imparting tool, wherein the ultrasonic vibration imparting tool has a contact surface extending downward and has a contact surface lower than the inner peripheral surface. A cylindrical housing having a threaded surface at the lower part of the outer peripheral surface; a front mass having a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at the upper part and a rear mass arranged above the front mass. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between the two, and the screw surface of the lower part of the outer peripheral surface of the cylindrical housing is screwed into the inner peripheral surface. Includes a ring-shaped counterweight with an inner peripheral extension that contacts the lower surface of the flange and does not contact the sides of the front mass; The application causes vertical vibration of the front mass and bending vibration of the plane center portion of the flange portion protruding in the same direction as the vertical vibration of the front mass, and at the same time, of the plane center portion of the flange portion. A device characterized in that it is an ultrasonic vibration imparting tool in which an arcuate vibration in a direction opposite to the direction of protrusion due to bending vibration occurs on the outer peripheral surface of the ring-shaped balancing weight. 超音波振動付与具そして該超音波振動付与具に取り付けられた工具を含む超音波加工装置であって、上記超音波振動付与具が、下方に向かって拡がる接触面を内周面下部に持ち、外周面下部にねじ面を備えた円筒状ハウジング；該円筒状ハウジングの上記接触面に嵌め合わされている接触面を持つフランジ部を上部に備えたフロントマスと該フロントマスの上方に配置したリアマスとの間に分極処理済の圧電素子を挟んだ状態でボルト締めした構成のランジュバン型超音波振動子；そして、上記円筒状ハウジングの外周面下部のねじ面がねじ込まれているねじ面を内周面の上部に備え、下部に上記フランジ部の下面に接触し、上記フロントマスの側面には接触することのない内周側延長部を有するリング状釣り合い重りを含み；上記圧電素子への電気エネルギーの印加により、上記フロントマスの上下方向の振動そして該フロントマスの上下方向の振動とは逆方向に突き出る上記フランジ部の平面中央部の撓み振動が生起し、そして同時に、上記フランジ部の平面中央部の撓み振動で突き出される方向とは逆方向の円弧状の振動が上記リング状釣り合い重りの外周面で生起する超音波振動付与具であることを特徴とする装置。 An ultrasonic processing device including an ultrasonic vibration imparting tool and a tool attached to the ultrasonic vibration imparting tool, wherein the ultrasonic vibration imparting tool has a contact surface extending downward and has a contact surface lower than the inner peripheral surface. A cylindrical housing having a threaded surface at the lower part of the outer peripheral surface; a front mass having a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at the upper part and a rear mass arranged above the front mass. A Langevin-type ultrasonic vibrator having a structure in which a polarized piezoelectric element is sandwiched between the two, and the screw surface of the lower part of the outer peripheral surface of the cylindrical housing is screwed into the inner peripheral surface. Includes a ring-shaped counterweight with an inner peripheral extension that contacts the lower surface of the flange and does not contact the sides of the front mass; The application causes vertical vibration of the front mass and deflection vibration of the plane center portion of the flange portion protruding in the direction opposite to the vertical vibration of the front mass, and at the same time, the plane center portion of the flange portion. A device characterized in that it is an ultrasonic vibration imparting tool in which an arcuate vibration in a direction opposite to the direction of protrusion due to the bending vibration of the ring-shaped balancing weight is generated on the outer peripheral surface of the ring-shaped balancing weight. 上記円筒状ハウジングの接触面と上記フランジの接触面とが互いに接触する領域の上端部が構成する円周円の直径がリング状釣り合い重りの内側延長部の内周表面が構成する円周円の直径よりも大きい請求項１３もしくは１４に記載の超音波加工装置。 The diameter of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange are in contact with each other is the diameter of the circumferential circle formed by the inner peripheral surface of the inner extension of the ring-shaped equilibrium weight. The ultrasonic processing apparatus according to claim 13 or 14, which is larger than the diameter. 上記円筒状ハウジングが上記ランジュバン型超音波振動子と上記リング状釣り合い重りのいずれよりも大きい質量を持つ請求項１３もしくは１４に記載の超音波加工装置。 The ultrasonic processing apparatus according to claim 13 or 14, wherein the cylindrical housing has a mass larger than that of either the Langevin type ultrasonic vibrator and the ring-shaped equilibrium weight. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．５−１．５の範囲にある質量を持つ請求項１３に記載の超音波加工装置。 The ultrasonic processing apparatus according to claim 13, wherein the ring-shaped balanced weight has a mass in the range of 0.5 to 1.5, where 1 is the mass of the Langevin type ultrasonic vibrator. 上記リング状釣り合い重りが上記ランジュバン型超音波振動子の質量を１として、０．２５−０．７５の範囲にある質量を持つ請求項１４に記載の超音波加工装置。 The ultrasonic processing apparatus according to claim 14, wherein the ring-shaped balanced weight has a mass in the range of 0.25 to 0.75, where 1 is the mass of the Langevin type ultrasonic vibrator.
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