JPWO2019207410A5 - - Google Patents
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- Publication number
- JPWO2019207410A5 JPWO2019207410A5 JP2020515311A JP2020515311A JPWO2019207410A5 JP WO2019207410 A5 JPWO2019207410 A5 JP WO2019207410A5 JP 2020515311 A JP2020515311 A JP 2020515311A JP 2020515311 A JP2020515311 A JP 2020515311A JP WO2019207410 A5 JPWO2019207410 A5 JP WO2019207410A5
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- oxide
- conductor
- layer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims 23
- 239000004020 conductor Substances 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 claims 7
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 239000012466 permeate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022133256A JP7462712B2 (ja) | 2018-04-27 | 2022-08-24 | 半導体装置 |
| JP2024049006A JP7724321B2 (ja) | 2018-04-27 | 2024-03-26 | 半導体装置 |
| JP2025129914A JP2025163171A (ja) | 2018-04-27 | 2025-08-04 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018086578 | 2018-04-27 | ||
| JP2018086578 | 2018-04-27 | ||
| PCT/IB2019/053094 WO2019207410A1 (ja) | 2018-04-27 | 2019-04-16 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022133256A Division JP7462712B2 (ja) | 2018-04-27 | 2022-08-24 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2019207410A1 JPWO2019207410A1 (ja) | 2021-05-13 |
| JPWO2019207410A5 true JPWO2019207410A5 (https=) | 2022-04-14 |
| JP7130738B2 JP7130738B2 (ja) | 2022-09-05 |
Family
ID=68293812
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020515311A Active JP7130738B2 (ja) | 2018-04-27 | 2019-04-16 | 半導体装置 |
| JP2022133256A Active JP7462712B2 (ja) | 2018-04-27 | 2022-08-24 | 半導体装置 |
| JP2024049006A Active JP7724321B2 (ja) | 2018-04-27 | 2024-03-26 | 半導体装置 |
| JP2025129914A Pending JP2025163171A (ja) | 2018-04-27 | 2025-08-04 | 半導体装置 |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022133256A Active JP7462712B2 (ja) | 2018-04-27 | 2022-08-24 | 半導体装置 |
| JP2024049006A Active JP7724321B2 (ja) | 2018-04-27 | 2024-03-26 | 半導体装置 |
| JP2025129914A Pending JP2025163171A (ja) | 2018-04-27 | 2025-08-04 | 半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US11881513B2 (https=) |
| JP (4) | JP7130738B2 (https=) |
| CN (2) | CN112005350A (https=) |
| WO (1) | WO2019207410A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113330555A (zh) * | 2019-01-29 | 2021-08-31 | 株式会社半导体能源研究所 | 摄像装置及电子设备 |
| US20240298435A1 (en) * | 2021-09-17 | 2024-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and storage device |
| JPWO2024100467A1 (https=) * | 2022-11-11 | 2024-05-16 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5190275B2 (ja) | 2008-01-09 | 2013-04-24 | パナソニック株式会社 | 半導体メモリセル及びそれを用いた半導体メモリアレイ |
| WO2016055903A1 (en) | 2014-10-10 | 2016-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, circuit board, and electronic device |
| KR102865410B1 (ko) | 2015-02-06 | 2025-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
| JP6717604B2 (ja) | 2015-02-09 | 2020-07-01 | 株式会社半導体エネルギー研究所 | 半導体装置、中央処理装置及び電子機器 |
| US9653613B2 (en) | 2015-02-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| KR20160114511A (ko) | 2015-03-24 | 2016-10-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
| JP2016225585A (ja) | 2015-05-26 | 2016-12-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2016225613A (ja) | 2015-05-26 | 2016-12-28 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の駆動方法 |
| US10424671B2 (en) | 2015-07-29 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, circuit board, and electronic device |
| US9773919B2 (en) | 2015-08-26 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US20170221899A1 (en) | 2016-01-29 | 2017-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller System |
| US10096718B2 (en) | 2016-06-17 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, electronic device, manufacturing method of transistor |
-
2019
- 2019-04-16 CN CN201980027125.4A patent/CN112005350A/zh active Pending
- 2019-04-16 JP JP2020515311A patent/JP7130738B2/ja active Active
- 2019-04-16 WO PCT/IB2019/053094 patent/WO2019207410A1/ja not_active Ceased
- 2019-04-16 CN CN202411539728.1A patent/CN119421415A/zh active Pending
- 2019-04-16 US US17/047,724 patent/US11881513B2/en active Active
-
2022
- 2022-08-24 JP JP2022133256A patent/JP7462712B2/ja active Active
-
2023
- 2023-11-22 US US18/517,115 patent/US12484270B2/en active Active
-
2024
- 2024-03-26 JP JP2024049006A patent/JP7724321B2/ja active Active
-
2025
- 2025-08-04 JP JP2025129914A patent/JP2025163171A/ja active Pending
- 2025-10-15 US US19/358,738 patent/US20260090047A1/en active Pending
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