JPWO2019167615A1 - 光偏向器 - Google Patents
光偏向器 Download PDFInfo
- Publication number
- JPWO2019167615A1 JPWO2019167615A1 JP2020502918A JP2020502918A JPWO2019167615A1 JP WO2019167615 A1 JPWO2019167615 A1 JP WO2019167615A1 JP 2020502918 A JP2020502918 A JP 2020502918A JP 2020502918 A JP2020502918 A JP 2020502918A JP WO2019167615 A1 JPWO2019167615 A1 JP WO2019167615A1
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- Japan
- Prior art keywords
- reflector
- distance
- shaped portion
- shaped
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0043—Increasing angular deflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
2 反射板
3 フレーム
4A、4B 軸部
5A、5B 梁状部
52 スリット
6A、6B 駆動素子
61 第1辺
62 第2辺
10A、10B 駆動ユニット
Claims (6)
- 反射板と、
前記反射板の回動軸を定める一対の軸部と、
前記一対の軸部を支持するとともに前記回動軸に交差するように延びる一対の梁状部と、
前記梁状部を変形させることで前記反射板を回動させる駆動素子と、を備え、
前記駆動素子は、前記梁状部に配置され、前記回動軸の軸方向に沿って前記反射板から第1距離だけ離れた位置における前記回動軸との直交方向の寸法が、前記軸方向に沿って前記反射板から前記第1距離よりも大きい第2距離だけ離れた位置における前記直交方向の寸法よりも大きいことを特徴とする光偏向器。 - 前記駆動素子は、前記反射板から前記第1距離だけ離れた位置における所定幅の微小面積が、前記反射板から第2距離だけ離れた位置における前記所定幅の微小面積よりも大きいことを特徴とする請求項1に記載の光偏向器。
- 前記駆動素子における前記梁状部の基端側の第1辺は、前記軸方向に沿って前記反射板から離れるにしたがって前記回動軸に近づくように、前記軸方向に対して傾斜した傾斜部を有することを特徴とする請求項1に記載の光偏向器。
- 前記駆動素子における前記梁状部の先端側の第2辺は、前記軸部の延長線上に配置されていることを特徴とする請求項1に記載の光偏向器。
- 前記反射板及び前記梁状部を囲む枠状のフレームをさらに備え、
前記梁状部と前記フレームとの間には、当該梁状部の先端から基端にかけて延びるスリットが形成されていることを特徴とする請求項1に記載の光偏向器。 - 前記一対の軸部と前記一対の梁状部と前記駆動素子とが駆動ユニットを構成し、
前記回動軸に対して直交方向に並ぶように配置された2組の前記駆動ユニットを備えることを特徴とする請求項1に記載の光偏向器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022211345A JP2023026527A (ja) | 2018-02-27 | 2022-12-28 | 光偏向器 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018032852 | 2018-02-27 | ||
JP2018032852 | 2018-02-27 | ||
PCT/JP2019/004981 WO2019167615A1 (ja) | 2018-02-27 | 2019-02-13 | 光偏向器 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022211345A Division JP2023026527A (ja) | 2018-02-27 | 2022-12-28 | 光偏向器 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2019167615A1 true JPWO2019167615A1 (ja) | 2021-03-04 |
Family
ID=67805322
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020502918A Pending JPWO2019167615A1 (ja) | 2018-02-27 | 2019-02-13 | 光偏向器 |
JP2022211345A Pending JP2023026527A (ja) | 2018-02-27 | 2022-12-28 | 光偏向器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022211345A Pending JP2023026527A (ja) | 2018-02-27 | 2022-12-28 | 光偏向器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11885957B2 (ja) |
EP (1) | EP3761100A4 (ja) |
JP (2) | JPWO2019167615A1 (ja) |
WO (1) | WO2019167615A1 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011013401A (ja) * | 2009-07-01 | 2011-01-20 | National Institute Of Advanced Industrial Science & Technology | 光ビーム走査装置 |
JP2012145755A (ja) * | 2011-01-12 | 2012-08-02 | Konica Minolta Advanced Layers Inc | 画像表示装置 |
JP2014153703A (ja) * | 2013-02-14 | 2014-08-25 | Jvc Kenwood Corp | 光偏向器 |
JP2014232180A (ja) * | 2013-05-28 | 2014-12-11 | スタンレー電気株式会社 | 光偏向器 |
JP2015022064A (ja) * | 2013-07-17 | 2015-02-02 | 富士フイルム株式会社 | ミラー駆動装置及びその駆動方法 |
US20170160540A1 (en) * | 2015-12-07 | 2017-06-08 | Stmicroelectronics S.R.L. | Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014137472A (ja) * | 2013-01-17 | 2014-07-28 | Funai Electric Co Ltd | 振動ミラー素子およびプロジェクタ機能を有する電子機器 |
-
2019
- 2019-02-13 JP JP2020502918A patent/JPWO2019167615A1/ja active Pending
- 2019-02-13 EP EP19761500.8A patent/EP3761100A4/en active Pending
- 2019-02-13 WO PCT/JP2019/004981 patent/WO2019167615A1/ja unknown
- 2019-02-13 US US16/975,675 patent/US11885957B2/en active Active
-
2022
- 2022-12-28 JP JP2022211345A patent/JP2023026527A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011013401A (ja) * | 2009-07-01 | 2011-01-20 | National Institute Of Advanced Industrial Science & Technology | 光ビーム走査装置 |
JP2012145755A (ja) * | 2011-01-12 | 2012-08-02 | Konica Minolta Advanced Layers Inc | 画像表示装置 |
JP2014153703A (ja) * | 2013-02-14 | 2014-08-25 | Jvc Kenwood Corp | 光偏向器 |
JP2014232180A (ja) * | 2013-05-28 | 2014-12-11 | スタンレー電気株式会社 | 光偏向器 |
JP2015022064A (ja) * | 2013-07-17 | 2015-02-02 | 富士フイルム株式会社 | ミラー駆動装置及びその駆動方法 |
US20170160540A1 (en) * | 2015-12-07 | 2017-06-08 | Stmicroelectronics S.R.L. | Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation |
Also Published As
Publication number | Publication date |
---|---|
WO2019167615A1 (ja) | 2019-09-06 |
US11885957B2 (en) | 2024-01-30 |
US20200409138A1 (en) | 2020-12-31 |
EP3761100A4 (en) | 2021-11-03 |
EP3761100A1 (en) | 2021-01-06 |
JP2023026527A (ja) | 2023-02-24 |
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