JPWO2019069847A1 - Three-dimensional structure grindstone and its manufacturing method - Google Patents

Abstract

A three-dimensional structure (2) such as a honeycomb structure is formed from a sheet-shaped grindstone having a structure in which a plurality of abrasive grains (11) are arranged on the sheet (21). As a result, the abrasive grains (11) are dispersed on the wall of the three-dimensional structure (2). The space inside the three-dimensional structure (2), that is, the space between the sheets (21) functions as a chip pocket during polishing / grinding.

Description

The present invention relates to a three-dimensional structure grindstone and a method for manufacturing the same.

A polishing sheet or a grinding sheet (hereinafter, simply a polishing / grinding sheet) is used to polish or grind (hereinafter, polishing / grinding) an object to be polished or an object to be ground (hereinafter, a body to be polished / ground). The polishing / grinding sheet is composed of a sheet-like base material and abrasive grains fixed to the base material.

The performance of the polishing / grinding sheet is greatly affected by the properties of the abrasive grains. In order to fully exert the performance of the polishing / grinding sheet, the important factor is the arrangement in which the abrasive grains are fixed to the base material.

In particular, in order to precisely polish and grind the object to be polished and ground, it is not preferable to arrange the abrasive grains so that they are fixed to the substrate in a state where the abrasive grains are aggregated. This is because if the abrasive grains are agglomerated, the surface roughness of the polishing / grinding sheet becomes uneven, and only unfavorable polishing / grinding that causes scratches on the surface of the object to be polished / ground can be achieved.

Therefore, a grindstone in which the grain size of the abrasive grains is made as uniform as possible and the abrasive grains are fixed by a single layer has been devised (Patent Document 1).

However, this polishing / grinding sheet has a drawback that it has a short life because the abrasive grain layer is a single layer. In order to make up for this defect, a grindstone has been devised in which a plurality of abrasive grain layers are used and pores are arranged between the abrasive grains to form a place for escape of chips (Patent Document 2). The abrasive grain sheet described in Patent Document 2 has a plurality of abrasive grain layers, and has a porosity (volume ratio of pores in the abrasive grain layer) of pores acting as chip pockets of 3 to 40%.

Japanese Unexamined Patent Publication No. 60-80562 Japanese Unexamined Patent Publication No. 2002-166370

The problem that the invention is trying to solve

The abrasive grain sheet described in Patent Document 2 has a porosity of 3 to 40%. However, in order to improve the polishing / grinding performance, it is necessary to make the tip pocket larger.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a grindstone having a larger tip pocket and having abrasive grains arranged in a plurality of layers and a method for manufacturing the grindstone.

In order to achieve the above object, the three-dimensional structure grindstone of the present invention
A three-dimensional structure composed of sheets and
It is composed of abrasive grains fixed to the sheet and arranged in a plurality of layers in the thickness direction of the three-dimensional structure.

The three-dimensional structure is composed of, for example, a honeycomb structure composed of the sheet.

For example, a plurality of openings are formed in the sheet, and abrasive grains are arranged in the openings.

The arrangement interval of the abrasive grains on the sheet is, for example, 2 to 50 times the average particle size of the abrasive grains.

The sheet has, for example, a thickness of 10 to 1000 μm and is composed of any of resin, paper, metal, and cloth.

The three-dimensional structure has, for example, through holes having a diameter of 1 to 20 mm between a plurality of the sheets.

In order to achieve the above object, the method for manufacturing a three-dimensional structure grindstone of the present invention is:
The process of arranging abrasive grains on one or more sheets, and
The process of forming a three-dimensional structure from one or more sheets on which abrasive grains are arranged, and
To be equipped.

The step of forming the three-dimensional structure includes, for example, a step of placing a plurality of the sheets so as to face each other at intervals.

In the step of arranging the abrasive grains on the sheet, for example, an opening having a size of 1/4 to 3/4 of the average particle size of the abrasive grains is formed in the sheet, and 2 to 2 of the average particle size of the abrasive grains. The process includes a step of forming the abrasive grains at intervals of 50 times and a step of arranging the abrasive grains in the plurality of openings.

According to the three-dimensional structure grindstone of the present invention, since the abrasive grains are arranged in the three-dimensional structure, the abrasive grains can be arranged in a plurality of layers. Further, by forming the three-dimensional structure from the sheet, the portion between the sheets can function as a chip pocket, and a grindstone having a large opening ratio of the chip pocket can be obtained.
Further, according to the method for manufacturing a three-dimensional structure grindstone of the present invention, it is possible to manufacture a three-dimensional structure grindstone that can obtain the above effect.

It is a figure which shows the three-dimensional structure grindstone which concerns on embodiment of this invention. It is a figure of the polishing / grinding surface of the three-dimensional structure grindstone shown in FIG. It is a figure which shows the arrangement structure of the sheet which constitutes the base material of the three-dimensional structure grindstone shown in FIG. It is a figure for demonstrating the diameter of the hollow part of the honeycomb structure of the base material of the three-dimensional structure grindstone shown in FIG. It is a figure which shows the structure of the sheet shown in FIG. It is a figure which illustrates the arrangement of the abrasive grain on the sheet shown in FIG. It is a figure which illustrates the abrasive grain fixed to the sheet shown in FIG. It is a figure for demonstrating the manufacturing process of the three-dimensional structure grindstone shown in FIG. 1, and is the top view which illustrates the sheet which formed the adhesive margin. It is a figure for demonstrating the manufacturing process of the three-dimensional structure grindstone shown in FIG. 1, and is the figure which illustrates the process of forming the honeycomb structure from the laminated sheet. It is a figure which illustrates the honeycomb structure formed by the process shown in FIG. It is a top view of the three-dimensional structure grindstone which arranged the frame body around.

Hereinafter, the three-dimensional structure grindstone and the manufacturing method thereof according to the embodiment of the present invention will be described.
As shown in FIG. 1, the three-dimensional structure grindstone 1 according to the present embodiment is for polishing or grinding (hereinafter, polishing / grinding) an object to be polished or an object to be ground (hereinafter, an object to be polished / ground). Is. The three-dimensional structure grindstone 1 has a three-dimensional structure, and the polished surface or the ground surface (hereinafter referred to as the polished / ground surface) 1a is pressed against an arbitrary polished / ground body 100 to polish the polished / ground body 100.・ Grind. The object to be polished / ground 100 is optional, such as a magnetic disk substrate, a silicon wafer, various glass substrates for display devices, lenses, and the like, and mechanical parts. In FIG. 1, the object to be polished / ground body 100 is illustrated as a sphere.

The three-dimensional structure grindstone 1 is composed of a base material 2 having a honeycomb structure and a plurality of abrasive grains (not shown in FIG. 1) fixed to the base material 2. The base material 2 having a honeycomb structure is an example of a three-dimensional structure.

The base material 2 is composed of a honeycomb structure having a honeycomb structure, and the wall thereof extends in the direction perpendicular to the polished surface or the ground surface 1a. An XYZ Cartesian coordinate system in which the polishing / grinding surface 1a is the XY surface and the vertical direction is the Z-axis direction is set and referred to as appropriate. As shown in FIG. 2, a plurality of abrasive grains 11 are fixed to this wall. A plurality of layers of abrasive grains 11 are arranged in the Z direction, that is, in the direction perpendicular to the polishing / grinding surface 1a.

As schematically shown in FIG. 3, the base material 2 is composed of a combination of a plurality of sheets 21 and has a honeycomb structure as a whole. Each sheet 21 functions as a wall having a honeycomb structure. The hollow portion 21a of the honeycomb structure constitutes a through hole extending from one surface (polishing / grinding surface 1a) of the base material 2 to the other surface. The diameter D of the hollow portion 21a of the honeycomb structure is set to 1 to 20 mm. The diameter D of the hollow portion 21a of the honeycomb structure refers to the diameter D of the polygonal circumscribed circle 41 constituting the honeycomb structure, as illustrated in FIG. The height T of the base material 2 is, for example, 1 to 30 mm. Note that FIG. 4 shows an example in which the polygon of the honeycomb structure is a regular hexagon.

The individual sheets 21 are bent and shaped, for example, as shown in FIG. As shown in FIG. 3, the sheets 21 are laminated alternately and fixed to each other to form a base material 2 having a honeycomb structure. The thickness of each sheet 21 is, for example, 10 to 1000 μm, and the material may be resin, paper, metal, or cloth. Specifically, the sheet 21 is formed of a resin such as polyethylene terephthalate, a woven cloth, a cloth such as a non-woven fabric, paper, and a metal such as aluminum.

Openings 21b are regularly formed in each sheet 21 at equal intervals, and as shown in FIG. 6, abrasive grains 11 are arranged and fixed in the openings 21b.
The abrasive grains 11 are composed of, for example, fine particles of an inorganic abrasive such as alumina, silica, or diamond, or a grinding material.

The abrasive grains 11 are preferably parallel to the side (line AA in FIG. 6) forming the polishing / grinding surface 1a of the sheet 21 and have an intersection angle θ of 30 ° to 60 °, preferably 45 °. It is desirable that they are arranged in such a manner.
It is desirable that the spacing between the openings 21b, that is, the spacing between the abrasive grains 11 is 2 to 50 times the average particle size of the abrasive grains 11. The particle size of the abrasive grains 11 corresponds to the diameter of the circumscribed sphere of the abrasive grains 11.

As shown in the cross section taken along the line AA in FIG. 6, the abrasive grains 11 are arranged in the opening 21b of the sheet 21, and the adhesive layer 12 is formed around the opening 21b. The adhesive layer 12 is a layer of an adhesive such as resin. A metal plating layer may be arranged on the adhesive layer 12. Further, the adhesive layer 12 itself can be a metal plating layer.

As described above, the three-dimensional structure grindstone 1 of the present embodiment is composed of the sheet 21 (that is, the sheet-shaped grindstone) in which the abrasive grains 11 are regularly arranged on the surface. A plurality of abrasive grains 11 illustrated in FIG. 2 are laminated on the three-dimensional structure grindstone 1. Therefore, the abrasive grains are dispersed on the wall portion of the honeycomb structure. By using the XY cross section of the three-dimensional structure grindstone 1 as a polishing / grinding surface, a grindstone having a long life can be obtained.

Further, the hollow portion 21a (in other words, the gap portion of the sheet 21) arranged between the abrasive grains 11 is a through hole that functions as a tip pocket during polishing and grinding, and shavings can be smoothly removed. It becomes.

Next, an example of a method for manufacturing the three-dimensional structure grindstone 1 having the above configuration will be described.
First, the abrasive grains 11 and the sheet 21 that match the intended use are prepared.
Next, openings 21b are formed in the sheet 21 at equal intervals. The method of forming the opening 21b is arbitrary. For example, the opening 21b may be formed by intermittently irradiating the sheet 21 with a laser beam having a constant control mechanism. Further, the opening 21b may be formed by moving the plurality of needles up and down and left and right.
The initial size of the opening 21b is preferably about 1/4 to 3/4, more preferably about 1/2 of the average particle size of the abrasive grains 11.

Next, as shown in FIG. 6, the abrasive grains 11 are fitted into the openings 21b formed in the sheet 21. Specifically, the sheet 21 having the opening 21b formed is developed in the horizontal direction, vibrated while being slightly strained, the abrasive grains 11 are scattered on the sheet 21, and the abrasive grains 11 are fitted into the opening 21b. After that, the excess abrasive grains 11 are removed with a broom or the like.

Subsequently, in order to ensure the fitting of the abrasive grains 11 into the opening 21b, for example, the sheet 21 is pushed using a flat plate or the like to a height of 1/2 of the average abrasive particle size as shown in FIG. Push it in.
Subsequently, an adhesive is applied to the abrasive grains 11 and the sheet 21 to form an adhesive layer 12, and as shown in FIG. 7, the abrasive grains 11 are securely fixed to the sheet 21.

Next, a three-dimensional structure is formed by using a plurality of sheets 21 to which the abrasive grains 11 are fixed. The structure of the three-dimensional structure and the method of formation itself are arbitrary. In the following, a case where the polygon of the honeycomb structure forms a regular hexagonal honeycomb structure as illustrated in FIG. 4 will be described as an example.

First, as shown in FIG. 8, on the first sheet 211 to which the abrasive grains 11 are fixed, the bonding allowance 31 having a width Wa corresponding to the length L1 of one side of the regular hexagon of the honeycomb structure to be formed is spaced 3 apart. -Wa is vacated and formed in parallel (step 1).

A second sheet 212 having the same configuration as the sheet 211 is superposed on the first sheet 211. At this time, the adhesive margin 31 of the second sheet 212 is located at the center of the adhesive margin 31 of the first sheet 211, and the adhesive margins 31 of both sheets are overlapped so as to be parallel (step 2).
Hereinafter, similarly, n sheets are stacked as shown in FIG.

Then, the laminated sheets 211 to 21n are cut into an appropriate size.

After the adhesive of the adhesive margin 31 has solidified, as shown in FIG. 9, the first sheet 211 and the nth sheet 21n are pulled in parallel in the stacking direction to deform each sheet 21 (step 3). Due to this deformation, each sheet 21 is shaped into the shape illustrated in FIG. As a result, as illustrated in FIG. 10, a honeycomb structure is formed by the sheets 211 to 21n. At this time, for example, the frame plate may be fixed to the upper surface of the laminated sheets 21n and the lower surface of the sheet 211, and the frame plate may be pulled.

Next, electroless plating or electrolytic plating is performed to more firmly fix the abrasive grains 11 to the wall of the honeycomb structure composed of the sheet 21. By immersing the abrasive grains 11 in an electrolytic solution and performing electrolytic plating, the abrasive grains 11 can be electrodeposited on the wall (sheet 21) of the honeycomb structure. When the abrasive grains 11 are fixed to the sheet 21 with a resin such as an adhesive, the plating step may be removed.

Finally, as shown in FIG. 11, the frame 22 may be arranged around the three-dimensional structure grindstone 1.

In this way, the three-dimensional structure grindstone 1 having a thickness in the Z direction, in which layers of abrasive grains 11 are laminated, and a hollow portion 21a functioning as a chip pocket penetrates from one surface to the other in the lamination direction. Can be manufactured.

The present invention is not limited to the above embodiment, and various modifications and applications are possible.
For example, in the above embodiment, a honeycomb structure having a hexagonal cross section is illustrated, but the shape of the cross section is arbitrary and may be a triangle, a quadrangle, a pentagon, or a heptagon or more.
Further, the method for forming the honeycomb structure is arbitrary. For example, it is also possible to form a honeycomb structure by combining cylinders formed of the sheet 21.

Further, the three-dimensional structure of the sheet grindstone constituting the three-dimensional structure grindstone 1 is not limited to the honeycomb structure. One or a plurality of sheets may be folded like origami to form a three-dimensional structure. Desirable configurations are: i) the three-dimensional structure is composed of a plurality of sheets, ii) the plurality of sheets have components extending in a direction perpendicular to the polished / ground surface, and iii. ) Multiple sheets are arranged separated by a space, the space functions as a chip pocket, iv) multiple abrasive grains are fixed to each sheet, v) multiple layers on the polished / ground surface. The structure is such that the abrasive grains of are laminated. It should be noted that each sheet does not have to be perpendicular to the polished / ground surface, and may have a component extending in a direction perpendicular to the polished / ground surface. Further, it is desirable that a plurality of abrasive grains fixed to the sheet are arranged in a direction perpendicular to the polishing / grinding surface, that is, a plurality of abrasive grain layers are arranged.

The three-dimensional structure grindstone 1 can be applied to the material and size of the three-dimensional structure, the material and size of the abrasive grains of the abrasive grains, and the grindstone for polishing and grinding in various fields.

Although an example in which the three-dimensional structure grindstone 1 grinds or grinds an object has been described, the three-dimensional structure grindstone 1 can also be applied to an application of polishing while grinding an object, that is, an application of polishing and grinding.

The present invention allows for various embodiments and modifications without departing from the broad spirit and scope of the present invention. Moreover, the above-described embodiment is for explaining the present invention, and does not limit the scope of the present invention. That is, the scope of the present invention is indicated not by the embodiment but by the claims. And various modifications made within the scope of the claims and within the equivalent meaning of the invention are considered to be within the scope of the present invention.

This application is based on Japanese Patent Application No. 2017-204001 filed on October 3, 2017. The specification of Japanese Patent Application No. 2017-204001, the scope of claims, and the entire drawing shall be incorporated into this specification as a reference.

1 Three-dimensional structure grindstone 1a Polished surface or ground surface 11 Abrasive grain 12 Adhesive layer 2 Base material 21 Sheet 21a Hollow part 21b Opening 211-21n Sheet 22 Frame 31 Adhesive allowance 100 Polished object or ground object

Claims (9)

A three-dimensional structure composed of sheets and
A three-dimensional structure grindstone fixed to the sheet and composed of abrasive grains arranged in a plurality of layers in the thickness direction of the three-dimensional structure. The three-dimensional structure grindstone according to claim 1, wherein the three-dimensional structure is composed of a honeycomb structure composed of the sheet. The three-dimensional structure grindstone according to claim 1 or 2, wherein a plurality of openings are formed in the sheet, and abrasive grains are arranged in the openings. The three-dimensional structure grindstone according to any one of claims 1 to 3, wherein the distance between the abrasive grains on the sheet is 2 to 50 times the average particle size of the abrasive grains. The three-dimensional structure grindstone according to any one of claims 1 to 4, wherein the sheet has a thickness of 10 to 1000 μm and is composed of any one of resin, paper, metal, and cloth. The three-dimensional structure grindstone according to any one of claims 1 to 5, wherein the three-dimensional structure has through holes having a diameter of 1 to 20 mm between the plurality of sheets. The process of arranging abrasive grains on one or more sheets, and
The process of forming a three-dimensional structure from one or more sheets on which abrasive grains are arranged, and
A method for manufacturing a three-dimensional structure grindstone, which comprises. The method for manufacturing a three-dimensional structure grindstone according to claim 7, wherein the step of forming the three-dimensional structure includes a step of placing a plurality of the sheets so as to face each other at intervals. The step of arranging the abrasive grains on the sheet is
A step of forming openings having a size of 1/4 to 3/4 of the average particle size of the abrasive grains on the sheet at intervals of 2 to 50 times the average particle size of the abrasive grains.
The process of arranging the abrasive grains in the plurality of openings and
The method for manufacturing a three-dimensional structure grindstone according to claim 7 or 8, wherein the three-dimensional structure grindstone is provided.

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