CN111225767A - Three-dimensional structure grinding stone and manufacturing method thereof - Google Patents
Three-dimensional structure grinding stone and manufacturing method thereof Download PDFInfo
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- CN111225767A CN111225767A CN201880064806.3A CN201880064806A CN111225767A CN 111225767 A CN111225767 A CN 111225767A CN 201880064806 A CN201880064806 A CN 201880064806A CN 111225767 A CN111225767 A CN 111225767A
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- sheet
- dimensional structure
- abrasive grains
- grinding stone
- grinding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The purpose of the present invention is to form a three-dimensional structure (2) such as a honeycomb structure from a sheet-like grindstone having a structure in which a plurality of abrasive grains (11) are arranged on a sheet (21). As a result, abrasive grains (11) are dispersed in the wall of the three-dimensional structure (2). The space in the three-dimensional structure (2), that is, the space between the sheets (21), functions as a chip pocket during grinding/polishing.
Description
Technical Field
The present invention relates to a three-dimensional structure grinding stone and a manufacturing method thereof.
Background
A polishing pad or a grinding pad (hereinafter, simply referred to as a polishing/grinding pad) is used for polishing or grinding (hereinafter, referred to as polishing/grinding) a polishing object or a grinding object (hereinafter, referred to as a polishing/grinding object). The polishing/grinding sheet is composed of a sheet-like base material and abrasive grains fixed to the base material.
The performance of the polishing/grinding sheet is greatly affected by the properties of the abrasive grains. How the abrasive grains are fixed to the base material in the arrangement is important for sufficiently exhibiting the performance of the polishing/grinding sheet.
In particular, in order to precisely polish/grind a polished/ground object, it is not preferable to arrange abrasive grains such that the abrasive grains are fixed to a substrate in an aggregated state. If the abrasive grains aggregate, the surface roughness of the polishing/grinding sheet becomes inconsistent, and only unfavorable polishing/grinding such as generation of scratches on the surface of the object to be polished/ground can be achieved.
Therefore, a grinding stone in which abrasive grains are fixed to each other in a single layer while making the grain size of the abrasive grains uniform as much as possible has been proposed (patent document 1).
However, this polishing/grinding sheet has a disadvantage of short life because the layer of abrasive grains is a single layer. To compensate for this drawback, a grinding stone has been proposed in which abrasive grain layers are formed in a plurality of layers, and pores are arranged between abrasive grains to form a site where cutting dust overflows (patent document 2). The abrasive grain sheet described in patent document 2 has a plurality of abrasive grain layers, and the porosity (volume ratio of pores in the abrasive grain layer) of pores functioning as chip pockets (chip pockets) is 3% to 40%.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 60-80562
Patent document 2: japanese patent laid-open publication No. 2002-166370
Disclosure of Invention
The abrasive grain sheet described in patent document 2 has a porosity of 3% to 40%. However, in order to improve the grinding/abrading performance, the chip flutes need to be made larger.
The present invention has been made in view of the above circumstances, and an object thereof is to provide a grinding stone having a larger chip pocket and having abrasive grains arranged in a plurality of layers, and a method for manufacturing the same.
Means for solving the problems
In order to achieve the above object, the three-dimensional structure grinding stone of the present invention comprises a three-dimensional structure and abrasive grains,
the three-dimensional structure is composed of a sheet material,
the abrasive grains are fixed to the sheet and arranged in a plurality of layers in the thickness direction of the three-dimensional structure.
The three-dimensional structure is constituted by, for example, a honeycomb structure constituted by the sheet.
For example, a plurality of openings are formed in the sheet, and abrasive grains are arranged in the openings.
The abrasive grains are arranged at intervals of, for example, 2 to 50 times the average particle diameter of the abrasive grains on the sheet.
The sheet is made of, for example, any one of resin, paper, metal, and cloth having a thickness of 10 to 1000 μm.
The three-dimensional structure has, for example, through-holes having a diameter of 1 to 20mm between a plurality of the sheets.
In order to achieve the above object, a method for manufacturing a three-dimensional structure grinding stone according to the present invention includes:
disposing abrasive particles on one or more sheets; and
the three-dimensional structure is formed from one or more sheets on which abrasive grains are arranged.
The step of forming the three-dimensional structure includes, for example, a step of facing a plurality of the sheets with a space therebetween.
The step of disposing abrasive grains on the sheet includes, for example, the steps of: forming openings having a size of 1/4 to 3/4 of the average particle size of the abrasive particles at intervals of 2 to 50 times the average particle size of the abrasive particles on the sheet; and abrasive grains are arranged in the plurality of openings.
Effects of the invention
According to the three-dimensional structure grinding stone of the present invention, since the abrasive grains are arranged in the three-dimensional structure, the abrasive grains can be arranged in a plurality of layers. Further, by forming the three-dimensional structure from the sheet material, the portion between the sheet materials can function as a chip pocket, and a grinding stone having a large opening ratio of the chip pocket can be obtained.
Further, according to the method of manufacturing a three-dimensional structure grinding stone of the present invention, a three-dimensional structure grinding stone that achieves the above-described effects can be manufactured.
Drawings
Fig. 1 is a view showing a three-dimensional structure grinding stone according to an embodiment of the present invention.
Fig. 2 is a view of a grinding/milling face of the three-dimensional structure grinding stone shown in fig. 1.
Fig. 3 is a view showing the arrangement structure of the sheets constituting the base material of the three-dimensional structure grinding stone shown in fig. 1.
Fig. 4 is a view for explaining the diameter of the hollow portion of the honeycomb structure of the base material of the three-dimensional structure grindstone shown in fig. 1.
Fig. 5 is a diagram showing the structure of the sheet shown in fig. 3.
Fig. 6 is a diagram illustrating an arrangement of abrasive particles on the sheet shown in fig. 3 by way of example.
Fig. 7 is a view illustrating the abrasive particles fixed to the sheet shown in fig. 6 by way of example.
Fig. 8 is a view for explaining a process of manufacturing the grinding stone having the three-dimensional structure shown in fig. 1, and is a plan view illustrating a sheet on which an adhesive tape is formed, by way of example.
Fig. 9 is a view for explaining a process of manufacturing the three-dimensional structure grinding stone shown in fig. 1, and is a view illustrating a process of forming a honeycomb structure from laminated sheets by way of example.
Fig. 10 is a view illustrating a honeycomb structure formed by the process shown in fig. 9.
Fig. 11 is a plan view of a three-dimensional structure grinding stone having a frame disposed therearound.
Detailed Description
Hereinafter, a three-dimensional structure grinding stone and a method for manufacturing the same according to an embodiment of the present invention will be described.
As shown in fig. 1, a three-dimensional structure grinding stone 1 according to the present embodiment is a grinding stone for grinding or polishing (hereinafter referred to as "grinding/polishing") a grinding object or a grinding object (hereinafter referred to as "grinding/polishing object"). The three-dimensional structure grinding stone 1 has a three-dimensional structure, and grinds an arbitrary object to be ground and ground 100 by pressing a grinding surface or a ground surface (hereinafter referred to as a grinding/polishing surface) 1a against the object to be ground and ground 100. The object to be polished 100 is any of various objects to be polished such as a magnetic disk substrate, a silicon wafer, a glass substrate for a display device, a lens, and a machine component. It should be noted that, in fig. 1, the ground/milled body 100 is illustrated as a sphere.
The three-dimensional structure grinding stone 1 is composed of a base material 2 having a honeycomb structure and a plurality of abrasive grains (not shown in fig. 1) fixed to the base material 2. The substrate 2 having a honeycomb structure is an example of a three-dimensional structure.
The base material 2 is constituted by a honeycomb structure having a honeycomb structure, and its walls extend in a direction perpendicular to the ground or ground surface 1 a. Note that, an XYZ orthogonal coordinate system is set, and reference is made as appropriate, where the polishing/grinding surface 1a is an X-Y surface, and the vertical direction is a Z-axis direction. As shown in fig. 2, a plurality of abrasive grains 11 are fixed to the wall. The abrasive grains 11 are arranged in a plurality of layers in the Z direction, i.e., in the direction perpendicular to the grinding/polishing surface 1 a.
As schematically shown in fig. 3, the base material 2 is composed of a combination of a plurality of sheets 21, and has a honeycomb structure as a whole. Each sheet 21 functions as a wall of the honeycomb structure. The hollow portion 21a of the honeycomb structure constitutes a through hole from one surface (polished/ground surface 1a) to the other surface of the base material 2. The diameter D of the hollow part 21a of the honeycomb structure is set to 1 to 20 mm. As illustrated in fig. 4, the diameter D of the hollow portion 21a of the honeycomb structure is the diameter D of the circumscribed circle 41 of the polygon constituting the honeycomb structure. The height T of the base material 2 is, for example, 1 to 30 mm. Fig. 4 shows an example in which the polygon of the honeycomb structure is a regular hexagon.
Each sheet 21 is bent and deformed as shown in fig. 5, for example. As shown in fig. 3, the sheets 21 are stacked in a staggered manner and fixed to each other to form the honeycomb-structured base material 2. Each sheet 21 has a thickness of, for example, 10 to 1000 μm, and may be made of any of resin, paper, metal, and cloth. Specifically, the sheet 21 is made of resin such as polyethylene terephthalate, cloth such as woven cloth or nonwoven cloth, paper, metal such as aluminum.
The abrasive grains 11 are made of, for example, an inorganic abrasive material such as alumina, silica, or diamond, or fine particles of an abrasive material.
The abrasive grains 11 are preferably arranged in the following manner: 3 the 3 angle 3 of 3 intersection 3 θ 3 parallel 3 to 3 the 3 side 3 ( 3 line 3 a 3- 3 a 3 in 3 fig. 3 6 3) 3 constituting 3 the 3 polishing 3/ 3 grinding 3 surface 31 3 a 3 of 3 the 3 sheet 3 21 3 is 3 30 3 ° 3 to 3 60 3 ° 3, 3 preferably 3 45 3 ° 3. 3
The interval between the openings 21b, that is, the interval between the abrasive grains 11 is preferably 2 to 50 times the average particle diameter of the abrasive grains 11. The particle diameter of the abrasive grains 11 corresponds to the diameter of the outer sphere of the abrasive grains 11.
3 in 3 fig. 37 3, 3 as 3 shown 3 in 3 the 3 cross 3 section 3 along 3 line 3 a 3- 3 a 3 of 3 fig. 3 6 3, 3 the 3 abrasive 3 grains 3 11 3 are 3 disposed 3 in 3 the 3 opening 3 21 3 b 3 of 3 the 3 sheet 3 21 3, 3 and 3 the 3 adhesive 3 layer 3 12 3 is 3 formed 3 around 3 the 3 abrasive 3 grains 3. 3 The adhesive layer 12 is a layer of an adhesive such as a resin. A metal plating layer may be disposed from above the adhesive layer 12. The adhesive layer 12 itself may be a metal plating layer.
As described above, the three-dimensional structure grinding stone 1 of the present embodiment is composed of the sheet 21 (i.e., a sheet-like grinding stone) on which the abrasive grains 11 are regularly arranged on the surface. A plurality of layers of abrasive grains 11 as exemplified in fig. 2 are laminated on the three-dimensional structure grinding stone 1. Therefore, abrasive grains are dispersed in the wall portion of the honeycomb structure. By using the X-Y section of the three-dimensional structure grindstone 1 as a grinding/polishing surface, a grindstone having a long life can be obtained.
The hollow portion 21a disposed between the abrasive grains 11 (in other words, the gap portion of the sheet 21) is a through hole that functions as a chip pocket during grinding and grinding, and chips can be smoothly discharged.
Next, an example of a method for manufacturing the three-dimensional structure grinding stone 1 having the above-described configuration will be described.
First, abrasive grains 11 and a sheet 21 are prepared in accordance with the application.
Next, openings 21b are formed at equal intervals in the sheet 21. The method of forming the opening 21b is arbitrary. For example, the opening 21b may be formed by intermittently irradiating the sheet 21 with a laser beam having a fixed control mechanism. The opening 21b may be formed by moving a plurality of needles up and down and left and right.
The initial size of the opening 21b is preferably 1/4 to 3/4, more preferably about 1/2, of the average particle diameter of the abrasive grains 11.
Next, as shown in fig. 6, the abrasive grains 11 are fitted into the openings 21b formed in the sheet 21. Specifically, the sheet 21 having the opening 21b formed therein is spread horizontally, vibrated while slightly applying tension, and the abrasive grains 11 are dispersed thereon, and the abrasive grains 11 are fitted into the opening 21 b. Thereafter, the excess abrasive grains 11 are removed with a broom or the like.
Next, in order to reliably fit the abrasive grains 11 into the openings 21b, the sheet 21 is pressed, for example, using a flat plate or the like, and as shown in fig. 7, pressed to a height of 1/2 of the average abrasive grain diameter.
Next, an adhesive is applied to the abrasive grains 11 and the sheet 21 to form the adhesive layer 12, and as shown in fig. 7, the abrasive grains 11 are reliably fixed to the sheet 21.
Next, a three-dimensional structure is formed using the plurality of sheets 21 to which the abrasive grains 11 are fixed. The structure and the forming method of the three-dimensional structure itself are arbitrary. Hereinafter, a case where a honeycomb structure having a regular hexagonal honeycomb structure as illustrated in fig. 4 is formed by the polygon of the honeycomb structure will be described as an example.
First, as shown in fig. 8, adhesive tapes 31 are formed in parallel with each other at intervals 3 · Wa in a first sheet 211 to which abrasive grains 11 are fixed, and a width Wa of each adhesive tape 31 corresponds to a length L1 of one side of a regular hexagon which forms a predetermined honeycomb structure (step 1).
A second sheet 212 having the same configuration as the sheet 211 is stacked on the first sheet 211. At this time, the adhesive tape 31 of the second sheet 212 is positioned at the center of the adhesive tape 31 of the first sheet 211, and the two adhesive tapes 31 are overlapped in parallel (step 2).
The n sheets are similarly stacked as shown in fig. 9.
Thereafter, the laminated sheets 211 to 21n are cut into an appropriate size.
After the adhesive of the adhesive tape 31 is cured, as shown in fig. 9, the first sheet 211 and the n-th sheet 21n are stretched in parallel in the laminating direction to deform the sheets 21 (step 3). By this deformation, each sheet 21 is deformed into the shape exemplified in fig. 5. Thus, as illustrated in FIG. 10, a honeycomb structure composed of the sheets 211 to 21n is formed. At this time, for example, a frame plate may be fixed to the upper surface of the laminated sheet 21n and the lower surface of the sheet 211, and the frame plate may be stretched.
Next, electroless plating or electroplating is performed to more firmly fix the abrasive grains 11 to the walls of the honeycomb structure formed of the sheet 21. By immersing the abrasive grains 11 in the electrolyte to perform electroplating, the abrasive grains 11 can be electrodeposited on the walls of the honeycomb structure (sheet 21). When the abrasive grains 11 are fixed to the sheet 21 with a resin such as an adhesive, the plating step can be eliminated.
Finally, as shown in fig. 11, a frame 22 may be disposed around the three-dimensional structure grinding stone 1.
In this way, the three-dimensional structure grinding stone 1 can be produced in which the layers having the thickness and the abrasive grains 11 in the Z direction are laminated, and further the hollow portion 21a functioning as a chip pocket is formed so as to penetrate from one surface to the other surface in the laminating direction.
The present invention is not limited to the above embodiments, and various modifications and applications can be made.
For example, in the above-described embodiment, the honeycomb structure having a hexagonal cross section is exemplified, but the cross section may have any shape, such as a triangle, a quadrangle, a pentagon, or a heptagon.
The honeycomb structure may be formed in any manner. For example, a honeycomb structure may be formed by combining cylinders formed of the sheet 21.
Further, the three-dimensional structure of the sheet grindstone constituting the three-dimensional structure grindstone 1 is not limited to the honeycomb structure. The three-dimensional structure may be formed by folding one or more sheets like a paper fold. Although not limited thereto, the following configuration is preferred: i) the three-dimensional structure is composed of a plurality of sheets; ii) a composition having a plurality of sheets extending in a perpendicular direction with respect to the grinding/abrading face; iii) the plurality of sheets are disposed separately with a space therebetween, the space functioning as a chip pocket; iv) a plurality of abrasive particles are fixed to each sheet; v) a plurality of layers of abrasive grains are laminated on the grinding/polishing surface. Each sheet is not necessarily perpendicular to the polishing/grinding surface, and may have a component extending in a direction perpendicular to the polishing/grinding surface. Further, it is preferable that a plurality of abrasive grains fixed to the sheet, that is, a plurality of abrasive grain layers are arranged in a direction perpendicular to the polishing/grinding surface.
The material and size of the three-dimensional structure and the material and size of the abrasive grains of the three-dimensional structure grinding stone 1 can be applied to grinding stones for grinding and polishing in various fields.
Although the example of grinding or grinding the object by the three-dimensional structure grinding stone 1 has been described, the present invention is also applicable to an application in which the three-dimensional structure grinding stone 1 grinds the object while grinding the object, that is, an application of grinding or grinding.
The present invention is capable of various embodiments and modifications without departing from the broader spirit and scope of the invention. The above embodiments are illustrative of the present invention, and do not limit the scope of the present invention. That is, the scope of the present invention is indicated not by the embodiments but by the scope of the claims. Further, various modifications made within the scope of the claims and within the meaning of the equivalent invention are considered to be within the scope of the present invention.
The present application is based on Japanese patent application No. 2017-204001 filed on 3.10.2017. The specification refers to and incorporates the entire contents of the specification, claims, drawings of Japanese patent application laid-open No. 2017-204001.
Description of the reference numerals
1: grinding stone with a three-dimensional structure;
1 a: grinding or milling the surface;
11: abrasive particles;
12: an adhesive layer;
2: a substrate;
21: a sheet material;
21 a: a hollow part;
21 b: an opening part;
211-21 n: a sheet material;
22: framing;
31: an adhesive tape;
100: an object to be ground or a ground body.
Claims (9)
1. A three-dimensional structure grinding stone is composed of a three-dimensional structure body and abrasive grains,
the three-dimensional structure is composed of a sheet material,
the abrasive grains are fixed to the sheet and arranged in a plurality of layers in the thickness direction of the three-dimensional structure.
2. The spatial structure grinding stone according to claim 1,
the three-dimensional structure is constituted by a honeycomb structure constituted by the sheet.
3. The spatial structure grinding stone according to claim 1 or 2,
the sheet is formed with a plurality of openings, and abrasive grains are arranged in the openings.
4. The spatial structure grinding stone according to any one of claims 1 to 3,
the interval between the abrasive grains on the sheet is 2 to 50 times of the average grain diameter of the abrasive grains.
5. The spatial structure grinding stone according to any one of claims 1 to 4,
the sheet is made of any one of resin, paper, metal and cloth with the thickness of 10-1000 mu m.
6. The spatial structure grinding stone according to any one of claims 1 to 5,
the three-dimensional structure has through holes with a diameter of 1-20 mm between a plurality of sheets.
7. A method for manufacturing a three-dimensional structure grindstone is characterized in that,
the manufacturing method comprises the following steps:
disposing abrasive particles on one or more sheets; and
the three-dimensional structure is formed from one or more sheets on which abrasive grains are arranged.
8. The method of producing a three-dimensional structure grinding stone according to claim 7,
the step of forming the three-dimensional structure includes a step of facing the plurality of sheets with a space therebetween.
9. The method of producing a three-dimensional structure grinding stone according to claim 7 or 8,
the step of disposing abrasive grains on the sheet includes the steps of:
forming openings having a size of 1/4 to 3/4 of the average particle size of the abrasive particles at intervals of 2 to 50 times the average particle size of the abrasive particles on the sheet; and
abrasive grains are arranged in the plurality of openings.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-204001 | 2017-10-03 | ||
| JP2017204001 | 2017-10-03 | ||
| PCT/JP2018/036671 WO2019069847A1 (en) | 2017-10-03 | 2018-10-01 | Three-dimensional structure grindstone and manufacturing method therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111225767A true CN111225767A (en) | 2020-06-02 |
Family
ID=65994642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880064806.3A Pending CN111225767A (en) | 2017-10-03 | 2018-10-01 | Three-dimensional structure grinding stone and manufacturing method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6981682B2 (en) |
| CN (1) | CN111225767A (en) |
| TW (1) | TWI725344B (en) |
| WO (1) | WO2019069847A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7417988B2 (en) * | 2019-12-06 | 2024-01-19 | 株式会社ナノテム | Grinding wheels, grinding wheel units and machine tools |
| JP7426692B2 (en) * | 2019-12-06 | 2024-02-02 | 株式会社ナノテム | Grinding wheels and machine tools |
| JP7418009B2 (en) * | 2020-07-08 | 2024-01-19 | 株式会社ナノテム | polishing plate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08507978A (en) * | 1993-03-01 | 1996-08-27 | アルティメイト アブレイシブ システムズ，リミティド ライアビリティー カンパニー | Grinding tool |
| JP2008018532A (en) * | 2007-10-09 | 2008-01-31 | Nanotemu:Kk | Method for manufacturing grinding wheel |
| CN106457523A (en) * | 2014-06-17 | 2017-02-22 | 阪东化学株式会社 | Polishing pad and method for producing polishing pad |
| CN106881671A (en) * | 2017-02-24 | 2017-06-23 | 蓝思科技（长沙）有限公司 | A kind of multi-layered brazing diamond tool and preparation method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54130684U (en) * | 1978-03-03 | 1979-09-11 | ||
| US5427566A (en) * | 1994-01-21 | 1995-06-27 | Supracor Systems, Inc. | Flexible honeycomb panel containing wire or other abrasive material |
| JP2002172563A (en) * | 2000-11-24 | 2002-06-18 | Three M Innovative Properties Co | Abrasive tape |
| JP2004337986A (en) * | 2003-05-12 | 2004-12-02 | Noritake Co Ltd | Cylindrical resin grindstone and method of manufacturing the same |
| KR100773606B1 (en) * | 2006-01-24 | 2007-11-05 | 이창현 | Processing tool by using super-abrasive preform and fabricating method therefor |
| CN101376234B (en) * | 2007-08-28 | 2013-05-29 | 侯家祥 | Ordered arrangement method for abrading agent granule on abrading tool and abrading tool |
| JP5893669B2 (en) * | 2014-04-30 | 2016-03-23 | 富士製砥株式会社 | Rotating whetstone manufacturing method and rotating whetstone manufactured by the manufacturing method |
| JP6029042B1 (en) * | 2016-03-01 | 2016-11-24 | 伊藤 幸男 | Circular saw, dicing saw, disc grindstone, cup grind ring and production method |
-
2018
- 2018-10-01 CN CN201880064806.3A patent/CN111225767A/en active Pending
- 2018-10-01 WO PCT/JP2018/036671 patent/WO2019069847A1/en active Application Filing
- 2018-10-01 JP JP2019546692A patent/JP6981682B2/en active Active
- 2018-10-02 TW TW107134863A patent/TWI725344B/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08507978A (en) * | 1993-03-01 | 1996-08-27 | アルティメイト アブレイシブ システムズ，リミティド ライアビリティー カンパニー | Grinding tool |
| JP2008018532A (en) * | 2007-10-09 | 2008-01-31 | Nanotemu:Kk | Method for manufacturing grinding wheel |
| CN106457523A (en) * | 2014-06-17 | 2017-02-22 | 阪东化学株式会社 | Polishing pad and method for producing polishing pad |
| CN106881671A (en) * | 2017-02-24 | 2017-06-23 | 蓝思科技（长沙）有限公司 | A kind of multi-layered brazing diamond tool and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2019069847A1 (en) | 2020-10-22 |
| JP6981682B2 (en) | 2021-12-17 |
| TWI725344B (en) | 2021-04-21 |
| TW201924865A (en) | 2019-07-01 |
| WO2019069847A1 (en) | 2019-04-11 |
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Application publication date: 20200602 |