JP6029042B1 - Circular saw, dicing saw, disc grindstone, cup grind ring and production method - Google Patents

Abstract

[PROBLEMS] To improve the life of a main body ring by making the main body ring constituting the main body of a circular saw, a dicing saw, a disk grindstone, a cup grindstone, etc. fundamentally from the metal structure into a surface lattice structure or a cubic lattice structure of a metal mesh structure. To improve the grinding efficiency by increasing the efficiency of coolant fluid in the grinding wheel, increasing the efficiency of grinding waste discharge, and shortening the grinding time. A wire mesh 11 or woven fabric 22 knitted with fine lines 1 and 2 is fixedly bonded to the intersections (nodes) 3 of the knitted vertical and horizontal lines. The elastic strength of the disk metal mesh 10 whose ratio of the free knots 5 is adjusted can be adjusted, and a cubic lattice structure is formed by laminating a plurality of sheets according to the required grindstone width. The main body ring is characterized in that various superabrasive grains D are electrodeposited or welded to the periphery. [Selection] Figure 2

Description

  The present invention relates to a circular saw that can freely cut a plate material in a straight line or a curved shape with an arbitrary radius of curvature to the left and right, a dicing saw that cuts a silicon wafer thinly, a disk grindstone that performs grinding and grooving of a planar workpiece, and a drilling cup For body rings such as grindstones (round saw bodies, grindstone bodies, and cup bodies), the metal mesh body has a cubic lattice structure (face-centered cubic lattice) in order to fundamentally improve the metal structure of the body ring and ensure a long-life cutting tool. , A cubic lattice, a body-centered cubic lattice, a surface lattice, etc.) and a production method thereof.

  In recent years, a circular saw has been provided in which a circular saw is straightly moved and bent to the left and right to cut the plate material in a straight line and bend and cut at an arbitrary curvature radius on the left and right. For example, a driving source, a support member that is fixed to the output shaft of the driving source and includes a rotation shaft that is concentric with the output shaft, a circular saw that includes a fitting hole that is fitted into the rotation shaft, and the rotation A substantially dish-shaped abutting member provided on the shaft and formed such that an outer peripheral edge portion of a surface facing the circular saw protrudes toward the circular saw side along the axis of the rotating shaft from the center portion; and The outer peripheral edge of the contact member is contacted over the entire circumference of the circular saw, and the center portion of the contact member and the circular saw are fitted. There is a circular saw device including a fixing member capable of pressing a hole peripheral portion in a direction close to each other along the rotation axis direction (see, for example, Patent Document 1).

  Further, in the circular saw, a curved cutting apparatus for cutting a workpiece with an arbitrary curved cutting line includes a circular saw for cutting the workpiece with a curved cutting line by bending an outer peripheral portion, and the circular saw. A rotating means for rotating the circular saw, an urging means for curving the outer periphery of the circular saw by pressing or displacing the circular saw in a direction parallel to the rotation axis at the urging portion in the rotating side surface, and the workpiece A control means for controlling the relative position between the workpiece and the circular saw and the rotation means and the biasing means, the control means according to the curvature of the cutting line of the workpiece, It is a curvilinear cutting apparatus that controls the pressing force or displacement amount of the urging means. The circular saw is provided with slits at a plurality of locations in the rotation surface, and presses or displaces the urging portion in the rotation side surface in a direction parallel to the rotation axis, so that the outer peripheral portion is deformed into a predetermined curved surface ( For example, see Patent Document 2.)

  Further, a cutting grindstone used for cutting a silicon wafer is called a dicing saw, and a thin-walled dicing saw is essential for cutting chips without waste for cutting the wafer. The current wall thickness is 0.05 mm as the commercial limit. One of the specific dicing saw devices is one that can spray cutting fluid. The shaft 20 is rotationally driven, flanges 11 and 12 attached to the tip of the shaft 20, and the flange 11, And a ring-shaped dicing saw 17 fixed around the shaft 20. Furthermore, the liquid storage chamber 16 formed in the flanges 11 and 12 holding the dicing saw 17, the cutting fluid introduction paths 18 and 23 for feeding the cutting fluid into the liquid storage chamber 16, and the cutting in the liquid storage chamber 16. And a gap formed by a groove 21 for feeding the liquid from the inner peripheral side to the outer peripheral side of the dicing saw 17. The cutting fluid in the liquid storage chamber 16 is ejected to the outer peripheral side which is the cutting edge of the dicing saw 17 through the gap formed by the groove 21 due to the centrifugal force when the dicing saw 17 rotates (for example, patents). Reference 3).

  Further, a grinding wheel for grinding a planar work is a disk grinding wheel of a type in which a grinding stone portion is fixed to the outer periphery of a disk-shaped base metal, and a workpiece is ground by a side surface of the grinding stone portion. . One of the grinding wheels is provided with an abrasive grain layer 2 on the outer peripheral surface of the base 1, and the abrasive grain layer 2 is formed by a plurality of segments 3 that are independent in the circumferential direction by slit grooves 4. In this structure, the slit groove 4 absorbs deformation of the base 1 and the mass of each segment 3 is small so that the stress generated by the rotational inertia force can be reduced (see, for example, Patent Document 4). ).

  Furthermore, one of the cup grindstones for drilling is to use a mesh base material as a support base material for abrasive grains, and fix the abrasive grains with a resin-based adhesive and leave a mesh opening. Cutting blade consisting of a large number of abrasive grains protruding from the adhesive layer acts on the work piece with buffering properties, supplying sufficient coolant through the open mesh, discharging chips smoothly and without clogging, good There is one in which a sharpness is maintained (for example, see Patent Document 5).

  Japanese Utility Model Publication No. 58-9701   Japanese Patent No. 5527740   Japanese Patent Laid-Open No. 10-064856   JP-A-6-91543   JP-A 63-283868

  The circular saw in the Japanese Utility Model Laid-Open No. 58-9701 is forcibly pressed by the outer peripheral edge portion of the abutting member curved in a dish shape and the fixing member on the opposite side across the circular saw, and the dish-shaped curved surface It is elastically deformed. This forced bending action, which is made of steel or tool steel and is repeated multiple times to the left and right with respect to the circular saw, eventually reaches the elastic limit and causes the metal structure to fatigue. That is, a problem is pointed out that the metal structure of the circular saw becomes hard and brittle, and finally the circular saw is plastically deformed or cracked.

  In Japanese Patent No. 5527740, in order to prevent the metal structure of the circular saw from being fatigued and destroyed by a strong bending force, the circular saw is provided with slits at a plurality of positions in the rotating surface. As a result, the circular saw can be deflected and displaced even with a weak pressing force (bending force) in the direction parallel to the rotation axis at the urging part in the rotating side surface, and the outer periphery of the circular saw is deformed into a predetermined curved surface. doing. According to this method, there is an advantage that the circular saw can be bent with a weak pressing force. However, since the circular saw base is made of steel or tool steel, the circular saw wall plate (base metal) formed into a strip shape with slits is easily bent in the left-right direction, but it is repeated many times. The resulting stress load can cause fatigue cracks on the surface. That is, there is a problem that the circular saw is plastically deformed from the slit portion of the wall plate (base metal) during a short period of use, and cracks enter.

  In Japanese Patent Laid-Open No. 10-064856, a thin dicing saw is indispensable for cutting chips without waste, and the current wall thickness is 0.05 mm as a commercial limit. For this reason, when a silicon wafer is cut with a dicing saw with a thickness of 0.05 mm, it will be elastically deformed at first, but it will be restored to a normal dicing saw (the right and left deflections are restored to the normal posture). Finally, the cutting work of the dicing saw causes plastic deformation so that the straight cutting cannot be performed, and it becomes unusable.

  In JP-A-6-91543, by forming an abrasive grain layer or a bonding layer with a plurality of segments, the gaps between the segments absorb the deformation of the base, and the influence of the stress due to the deformation on the abrasive grain layer. Can be eliminated. However, a fatigue crack phenomenon occurs when a bending stress load to the side of the main body plate is repeatedly applied during grinding with a disc grindstone.

  The superabrasive drilling tool disclosed in Japanese Patent Laid-Open No. 63-283868 can sufficiently supply coolant to the processing part through the open mesh, has good chip dischargeability, is not clogged, and has good sharpness. In this case, the intersection where the vertical and horizontal wires cross each other is displaced by an external force, so that lateral deformation occurs due to the applied pressure during cutting. Therefore, in order to prevent deformation of the mesh due to applied pressure, the above-mentioned mesh body is laminated in multiple layers and hot pressed to completely cure the resin so that it does not deform with applied pressure. However, if the pressing force of the abrasive grains on the machined part is abnormally large or fluctuates, the abrasive grains will be lost, and the durability of the tool cannot be expected. Similarly, the problem that durability cannot be wiped out remains. Accordingly, when the mesh body is completely cured with a resin, the flexibility is lost, and a fatigue crack phenomenon occurs when a stress load is repeatedly applied.

  Furthermore, it is configured so that the grinding fluid can be supplied to the inner peripheral surface of the porous annular grindstone, and the grinding fluid is sufficiently applied to the contact portion between the work material and the grinding stone without reducing the strength and polishing accuracy of the grinding stone. There are liquid grinding wheels that can be supplied. However, since this liquid-passing type grinding wheel is a structure in which a number of discontinuous pores are provided in the abrasive grains in an irregular number of times, the passage of coolant liquid can be expected at the initial stage of use of the grinding wheel. There is a problem that clogging phenomenon occurs at an early stage due to accumulation of grinding scraps in the inner holes.

  The inventor of the present application provides a circular ring main body ring (disk main body), a dicing saw main body ring (disk main body), a cup grindstone main body ring (cylindrical main body), a grinding wheel main body ring (abrasive grains on the outer peripheral surface). It was made in view of the problems of the fixed grindstone main body and collectively called the main body ring) and the porous annular grindstone. That is, in a circular saw, the main body ring is generated by repeated bending of the curve and fatigue cracks of the main body ring due to the bending stress load in the left and right direction, and the bending stress load applied in the rotation direction and the left and right direction in a thin dicing saw. Focusing on the fatigue crack phenomenon that occurs in the main body ring due to repeated bending stress loading to the side during grinding of the disc grindstone and the disc grinding wheel, it was researched and developed back to the metal structure that is the grain centered structure of steel .

  Below, I will explain the story of this research and development. When the metal surface is enlarged with a microscope, as shown in FIG. 12, it finally reaches the crystal grain face-centered structure B0 (body-centered cubic lattice B1 or face-centered cubic lattice B2) of steel. This crystal grain face-centered structure has crystal grains K1 to K9 of a body-centered cubic lattice B1 and crystal grains K1 to K16 of a face-centered cubic lattice B2 arranged in a cubic shape, and these crystal grains are linked to a cubic system. It is firmly connected with the string H.

  That is, the crystal grain face-centered structure B0 (body-centered cubic lattice B1 or face-centered cubic lattice B2), which is the minimum structure of the metal structure shown in FIG. 12, is further divided into a face lattice B3, cubic lattice as shown in FIG. Structural analysis can be widely performed for B4, body-centered cubic lattice B1, face-centered cubic lattice B2, and the like. With this crystal grain face-centered structure B0 as a hint, the surface lattice formed by resembling a plane wire mesh body similar to the crystal grain face-centered structure and various cubic lattice structures BX (curved surface with the metal mesh bodies 11 and 22 made one layer and one layer. The main body rings 10 and 20 formed in a curved cubic lattice M2) having a multilayer of at least double with the lattice M1 were configured. That is, the circular saw body ring, the dicing saw main body ring, the grinding wheel main body ring, and the cup grindstone main body ring were configured in a cubic lattice structure M2 by a metal net. The above-mentioned main body ring means (a disk main body in which abrasive grains are electrodeposited or welded on the outer peripheral surface or the cylindrical front end surface, and is collectively referred to as a main body ring. It was named “Torinos Grindstone” because of its shape.

  However, as shown in FIG. 13, a curved cubic lattice (cubic lattice structure) having a curved surface lattice (also referred to as a surface lattice structure) M1 in which the metal mesh bodies 11 and 22 are one layer and a single layer is used as a basis. A main body ring (for example, a cup grindstone or the like) formed with M2 is obtained. It has been developed that, if the abrasive grains D are fixed to the cylindrical tip, etc., various types of grindstones can be obtained that can withstand repeated bending stress loads in each direction and prevent the occurrence of epidemic cracks. The reason why the above new functions and performances can be obtained is as follows: (1) Torinos has a preconception of a flexible wire mesh, and at first glance it seems to be weak. However, it can be said that it is representative of the hard structure, and since each node is fixed like the molecular structure of the metal, the hardness that can withstand the grinding resistance can be obtained. {Circle around (2)} By making an arbitrary number of knot points free, it is possible to obtain a function capable of adjusting the hardness. In other words, it can be said to have a “vibration isolation function” with a curved cubic lattice structure. (3) Furthermore, the coolant structure is filled inside by the hollow structure of the wire mesh of the above-mentioned plane lattice structure or cubic lattice structure, and the coolant flowability is also kept high. (4) However, the grinding efficiency, cooling efficiency, grinding waste discharge efficiency, etc. that can not be obtained with conventional products, as well as the long service life required for circular saws, dicing saws, disc grindstones, cup grindstones can be satisfied. found.

The main body ring according to claim 1 which achieves the above object is a structure of a circular saw for cutting a plate material, a dicing saw for thinly cutting a silicon wafer, or a grinding wheel for drilling a planar work or a drilled cup grinding wheel. In the main body ring of the structure formed by adhering abrasive grains to the outer peripheral surface or tip surface or the peripheral portion of each of the above surfaces
Intersections of knitted or woven fabrics woven by vertical / horizontal lines of fiber yarns, or intersections of knitted or woven metal meshes of vertical / horizontal lines made of metal yarns are at least A surface consisting of a tightly or sparsely electrodeposited or welded fixed node with increased rigidity and a free node with weakened rigidity without electrodeposition or welding, and a variable ratio of the above fixed node and free node It is a disk metal mesh or cylindrical metal mesh having a lattice structure .

A second aspect of the present invention is the main body ring according to the first aspect, wherein a plurality of the sheet metal mesh or cylindrical metal mesh having the face lattice structure is laminated and bonded according to a grindstone width required by a circular saw, a grindstone, or a cup grindstone. It is characterized by a cubic lattice structure .

A third aspect of the present invention is the main body ring according to the first aspect, wherein the dicing saw is a knitted or nonwoven fabric having a thickness of φ0.05 mm or less knitted or entangled with a fiber yarn (vertical line / horizontal line) of φ0.025 mm, and the outer periphery and the inner part. The peripheral portion is a fixed metal node only, and the middle portion is a sheet metal mesh having a plane lattice structure in which the ratio between the fixed node and the free node is variable .

According to a fourth aspect of the present invention, in the main body ring of the second aspect, the circular saw has a cubic lattice structure in which a plurality of circular saws are laminated and bonded in accordance with the grindstone width of the disc metal mesh, and the outer peripheral portion and the inner peripheral portion of the disc metal mesh. Is characterized by high rigidity at the fixed node, and the middle part of the sheet metal mesh has a cubic lattice structure in which free nodes are mixed in the fixed node and the rigidity is weakened .

According to a fifth aspect of the present invention, in the main body ring of the second aspect, the cup grindstone has a cubic lattice structure in which a plurality of cup grindstones are laminated and bonded according to the grindstone width of the cylindrical wire mesh, and the front end portion and the rear end portion of the cylindrical wire mesh are fixed. It is characterized by a cubic lattice structure in which rigidity is high at the nodal point and the middle part of the cylindrical wire mesh has a weakened rigidity due to a mixture of free nodal points in the fixed nodal point .

According to a sixth aspect of the present invention, in the main body ring of the second aspect, the grinding wheel has a cubic lattice structure in which a plurality of grinding wheels are stacked and bonded according to the width of the wheel of the disk metal mesh, and the outer periphery and the inner periphery of the disk metal mesh are The fixed node has high rigidity, and the middle part of the sheet metal mesh has a cubic lattice structure in which free nodes are mixed in the fixed node and the rigidity is weakened .

According to claim 1, which shows a body ring of a circular saw, a dicing saw, a grindstone, a cup grindstone or the like of the present invention, from the cutting of a circular saw plate, the thinning of a silicon wafer with a dicing saw, the surface grinding with a grindstone, the thin plate with a cup grindstone The through-hole processing up to the thick plate can be made smoothly.
The main reason and effect are that each grindstone and other main body rings can obtain appropriate elasticity. In particular, it is plastically deformed with respect to the bending load of the circular saw repeatedly received during bending by the circular saw and does not cause fatigue failure. Further, the coolant liquid is efficiently and efficiently ejected to the abrasive grains and the processing points through the mesh of the metal mesh. As a result, the grinding efficiency can be improved in a chained manner by increasing grinding waste discharge efficiency and shortening the grinding time. In particular, the mesh mesh coolant liquid passes through the coolant guide and passes through the mesh mesh or gap of the main body ring, and the discharge efficiency from the gap between the mesh mesh body and the workpiece is less than that of the conventional grindstone. Compared to a dramatic improvement.

Furthermore, according to the main body ring of the dicing saw according to claim 2, the fiber yarn (longitudinal) of any of ferrous metal, non-ferrous, petroleum-based fiber, plant-based fiber, carbon fiber, cellulose nanofiber, non-woven fabric, etc. Line or horizontal line) is knitted or entangled into a knitted or non-woven fabric with a thickness of φ0.05 mm or less. After the knitted or non-woven fabric is cut and formed into a circle, the intersection (node) of the vertical and horizontal lines is loosely plated or fixed to fix the knot And the ratio of free nodes is adjusted to form a surface lattice structure, and superabrasive to fix diamond, CBN electrodeposited abrasive grains or WA, GC abrasive grains, etc. to the outer peripheral surface of the above-mentioned disk metal mesh and its peripheral portion. Because the grains were electrodeposited or welded,
Unlike conventional dicing saws, it does not suffer fatigue failure because it flexibly responds to fatigue due to rotational load applied to the body ring during cutting. Further, the coolant liquid is efficiently and efficiently ejected to the abrasive grains and the processing points through the mesh of the metal mesh. As a result, the grinding waste discharge efficiency can be increased and the grinding efficiency can be improved. In particular, the mesh mesh coolant liquid passes through the coolant guide and passes through the mesh mesh and gaps of the main body ring, and the discharge efficiency from the gaps of the mesh mesh body and the workpiece is significantly higher than that of conventional dicing saws. Improve.

Furthermore, the main ring of the circular saw of claim 3 is a fiber thread (vertical line / horizontal line) made of any of ferrous metals, non-ferrous metals, petroleum fibers, plant fibers, carbon fibers, cellulose nanofibers, non-woven fabrics, and the like. A knitted or non-woven fabric that is knitted or entangled, and after cutting and forming the knitted fabric or non-woven fabric into a circular shape, the intersections (nodes) of the vertical and horizontal lines are loosely plated or fixed to adjust the ratio between the fixed and free nodes It is made of a disk mesh with a cubic lattice structure, and superabrasive grains are electrodeposited or welded to fix diamonds, CBN electrodeposited abrasive grains or WA, GC abrasive grains, etc. on the outer peripheral surface of the above-mentioned disk metal mesh and its peripheral part. Because
Unlike the conventional circular saw body ring (saw disk body), it flexes flexibly against metal fatigue due to the lateral deflection applied to the body ring (saw disk body) when cutting a curve. Corresponds to fatigue failure. Further, the coolant liquid is efficiently and efficiently ejected to the abrasive grains and the processing points through the mesh of the metal mesh. Thereby, the cutting efficiency of a board | plate material can be improved. In particular, the mesh coolant fluid of the metal mesh with the face-centered structure passes through the coolant guide and passes through the mesh and gaps of the metal mesh of the main body ring (disc body), and the discharge efficiency from the gaps of the metal mesh body and the plate material Compared to conventional circular saws, this is a dramatic improvement.

Further, the main body ring of the disc grindstone according to claim 4 is similar to the main ring of the circular saw of claim 3 in that the intersection (node point) of the vertical line and the horizontal line is loosely plated or fixed to fix the fixed node and the free node. By adjusting the ratio of the points, a cubic lattice structure disk metal mesh is formed, and diamond, CBN electrodeposited abrasive grains, or WA, GC abrasive grains, etc. are bonded to the outer peripheral surface of the disk metal mesh and its peripheral portion. Because the abrasive grains were electrodeposited or welded,
Unlike a conventional ring of a disk grinding wheel, since it flexibly responds to metal fatigue caused by a bending load in the outer periphery and the axial direction applied to the body ring having a face-centered structure at the time of grinding, there is no fatigue failure. In particular, the coolant liquid through the mesh of the metal mesh is efficiently and efficiently ejected from the abrasive grains on the outer periphery of the grindstone to the processing point of the grinding workpiece. Therefore, the processing efficiency of surface grinding can be improved. In particular, the center-through coolant liquid passes through the mesh and gaps of the metal ring of the main body ring, and the efficiency of discharging and supplying to the polishing surface is dramatically improved.

Further, the main ring of the cup grinding wheel for drilling according to claim 5 is fixed by loosely plating or fixing the intersections (nodes) of the vertical and horizontal lines in the same manner as the main ring of the disk grinding wheel of claim 4. A cylindrical wire mesh with a cubic lattice structure is formed by adjusting the ratio between the nodal points and the free nodal points, and diamond, CBN electrodeposited abrasive grains, WA, GC abrasive grains, etc. are fixed to the outer peripheral surface of the cylindrical metal mesh and its peripheral portion. Because superabrasive grains were electrodeposited or welded,
Unlike the main body ring of a conventional cup grindstone, since it flexibly responds to metal fatigue due to the outer periphery and the axial bending load applied to the main body ring during grinding, it does not cause fatigue failure. In particular, the coolant liquid through the mesh of the metal mesh is efficiently and efficiently ejected from the abrasive grains on the outer periphery of the grindstone to the processing point of the grinding workpiece. Thus, the drilling efficiency can be improved compared to the conventional product. In particular, the center-through coolant liquid passes through the mesh and gaps of the metal ring of the main body ring, and the efficiency of discharging and supplying to the polishing surface is dramatically improved.

  FIG. 2 is an enlarged perspective view of a main body ring by a wire mesh knitted with fine lines in the vertical and horizontal directions according to the first embodiment of the present invention.   FIG. 2 is an enlarged perspective view showing the first embodiment of the present invention and showing the adhesion of free knots, free knots and abrasive grains of a wire mesh plate.   FIG. 9 shows the second embodiment of the present invention, and is an assembly action diagram of the assembled state of the circular saw and the pair of flanges, the ratio of the fixed and free joint points of the wire mesh body and the welded state of the abrasive grains in the circular saw. .   It is the side view and sectional drawing which were made into the surface lattice structure which shows 3rd Embodiment of this invention and shows the ratio of the fixed node of a metal net | network in a dicing saw, the ratio of a free node, and the ratio of an abrasive grain.   FIG. 10 is a perspective view of a main body ring having a three-dimensional lattice structure showing a fourth embodiment of the present invention and showing a ratio of fixed and free knots of a wire mesh and a ratio of abrasive grains in a disc grindstone.   FIG. 10 is a perspective view of a main body ring showing a fifth embodiment of the present invention and having a three-dimensional lattice structure of a fixed mesh point and a free node point of a wire mesh in a cup grindstone, and an abrasive grain ratio.   It is an operation | movement perspective view of the circular saw of this invention, a dicing saw, a disk grindstone, and a cup grindstone.   It is a flowchart figure of the manufacturing method of the main body ring which shows 6th Embodiment of this invention and uses the ferrous metal and nonferrous as a fiber thread and electrodeposits and welds an abrasive grain.   The flowchart of the production method which shows 7th Embodiment of this invention and consists of any of fiber yarns, such as petroleum fiber, vegetable fiber, carbon fiber, a cellulose nanofiber, and a nonwoven fabric, and fixes an abrasive grain to the knot of a main body ring. FIG.   It is a related figure explaining the superabrasive electrodeposition method and superabrasive thermal welding method of this invention.   It is a performance comparison figure with various whetstones which employ | adopted the main body ring of this invention, and the conventional type.   It is an expansion perspective view which shows the crystal grain face-centered structure (body-centered cubic structure and face-centered cubic structure) of steel.   It is a perspective view explaining the three-dimensional lattice structure of each Torinos employ | adopted as the main body ring of this invention.

  Hereinafter, with reference to FIG. 1 to FIG. 12, the production methods of each grindstone, dicing saw, circular saw, etc. employing a three-dimensional lattice structure in the main body ring (disk main body) of the present invention will be described in order.

  First, a basic configuration for forming the disk metal mesh 10 and the cylindrical metal mesh 20 will be described with reference to FIGS. 1 and 2. This basic configuration is composed of a wire mesh 11 or a woven fabric 22 knitted with a horizontal line 2 in a vertical and horizontal direction 1. 12 and 13 is used as a model of the steel grain face centered structure B0 (body centered cubic structure B1 and face centered cubic structure B2), and the disk metal mesh 10 and the cylindrical metal mesh 20 are formed into a cubic lattice structure BX (surface lattice). B3, cubic lattice B4, body-centered cubic lattice B1, and face-centered cubic lattice B2).

First, in FIG. 1 which is the first embodiment of the present invention, the wire mesh 11 or woven fabric 22 knitted in the horizontal and vertical 1 with the horizontal line 2 sparses the intersection (nodal point) 3 of the knitted vertical and horizontal lines. The ratio of the fixed node 4 and the free node 5 is adjusted by plating or bonding to each other. FIG. 2 shows the cubic lattice structure BX in a single plane (surface lattice B3) in the figure, but the disk metal mesh 10 and the cylindrical metal mesh 20 are composed of a cubic lattice B4, a body-centered cubic lattice B1, a surface, It is composed of any of the centered cubic lattice B2. However, in the outer peripheral part, the fixed node 4 is concentrated in the concentrated area K1, and the bending is reduced and the elastic strength is increased. In the middle part, the area K having many free nodes 5 is easily bent and the elastic strength is lowered. The elastic strength is adjusted according to the ratio of the fixed node 4 and the free node 5. That is, the disk metal mesh 10 has an outer peripheral surface of the disk metal mesh (a large number of fixed nodes 4), a peripheral portion thereof (a large number of fixed nodes 4), and a tip surface of the cylindrical metal mesh 20 (a fixed node). This point is also set (more fixed nodes 4). The wire mesh 11 is electrodeposited with diamonds and CBN electrodeposited abrasive grains that form various superabrasive grains D, and the woven fabric 22 is welded with WA and GC abrasive grains. In other places where bending is desired, a large proportion of the free node 5 is set. In addition, the connecting portion (not shown in the boss) serving as the rotational axis O of the disk metal mesh 10 and the cylindrical metal mesh 20 is provided with many fixed knots 4 to accurately connect the rotary drive shaft (not shown). Hold on.
The disk metal mesh (main body ring) 10 constitutes a circular saw 30, a disk cutter 30 </ b> A, a dicing saw 40, and a disk grindstone 50, and the cylindrical metal mesh (main body ring) 20 constitutes a cup grindstone 60. .

  FIG. 10 is a relationship diagram illustrating the superabrasive electrodeposition method and the superabrasive thermal welding method of the present invention. Both conventional grinding wheels with superabrasive grains attached to the base metal and Torinos grinding wheels with superabrasive grains attached to thin and hollow wires can be electroplated (EP method) and chemical plating (CP method). There are thermal welding methods such as gas welding, soldering, high-frequency heat, and firing furnace. There is also a method using an adhesive.

The effects of the following embodiments will be described with reference to FIG.
That is, according to the first embodiment, the circular saw 30 and the disc cutter 30A are plate-cut, the dicing saw 40 is thinly sliced from a silicon wafer, the disc grindstone 50 is surface ground or grooved, and the cup grindstone 60 is thin to thick. The drilling of the holes up to is smoothly performed. The main reason and effect are that moderate elasticity is obtained for the main body rings 10 and 20 of each grindstone. In particular, there is no metal fatigue with respect to the bending load of the circular saw repeatedly received during bending by the circular saws 30 and 30A (described later in FIG. 3), and no fatigue failure occurs. Furthermore, in particular, when both sides of the circular saws 30 and 30A are held by flanges (not shown), the coolant C is efficiently and efficiently ejected to the abrasive grains and processing points through the mesh of the metal mesh 11. As a result, the grinding efficiency can be improved in a chained manner by increasing grinding waste discharge efficiency and shortening the grinding time. The coolant C is passed through the mesh space h of the metal mesh 11, and the discharge efficiency is greatly improved as compared with the conventional grindstone.

The configuration and operation of the main body ring 31 employed in the circular saw 30 and the disc cutter 30A according to the second embodiment of the present invention will be described with reference to FIG. The circular saw is provided with a saw blade N on the outer peripheral surface, and superabrasive grains D are electrodeposited or welded on the outer peripheral surface of the disc cutter 30A.
A wire net 11 or a woven fabric 22 knitted with a horizontal line 2 in the vertical and horizontal directions 1 shown in FIGS. 1 and 2 is employed.
The ratio of the fixed node 4 and the free node 5 is adjusted by loosely electrodepositing or welding the intersections (nodes) 3 of the knitted vertical and horizontal lines. The enlarged view of FIG. 3 shows a configuration in which the main body ring 31 has any one of the cubic lattice structures BX (surface lattice B3, cubic lattice B4, body-centered cubic lattice B1, face-centered cubic lattice B2). That is, the main body ring 31 has a surface lattice structure M1 or a cubic lattice structure M2 in which a plurality of layers are laminated according to the required grinding wheel width L, and the outer peripheral surface 31A of the main body ring (disk main body) 31 that becomes the disk metal mesh. Diamond, CBN electrodeposited abrasive grains, WA, GC abrasive grains, etc. are placed on this peripheral portion 31B.
Abrasive grains D are electrodeposited or welded for fixing.
The main body ring 31 of the circular saw 30 knits fiber yarns (vertical lines / horizontal lines) made of any of ferrous metals, non-ferrous metals, petroleum fibers, plant fibers, carbon fibers, cellulose nanofibers, non-woven fabrics, and the like. Or it consists of the knitted fabric 11 or the nonwoven fabric 22 entangled. After the knitted fabric or non-woven fabric is cut and formed into a circular shape, the intersections (nodes) 3 of the vertical and horizontal lines are loosely plated or fixed to adjust the ratio of the fixed nodes 4 and the free nodes 5 to form a sheet metal mesh 10 ing.

  The elastic strength of the main body ring 31 is such that the bending node 4 is less bent in the concentrated area K1 and the elastic strength is increased, and the area K having more free nodes 5 is weakened and easily bent. The elastic strength is adjusted according to the ratio of the fixed node 4 and the free node 5. The disk metal mesh has an outer peripheral surface (more fixed knot points 4) and a peripheral portion (more fixed knot points 4), and diamonds and CBN electrodeposited abrasive grains serving as various superabrasive grains D are electroplated at these locations. Or WA or GC abrasive grains are welded. In other places where bending is desired, a large proportion of the free node 5 is set. Further, the connecting portion 32 which becomes the rotational axis O of the main body ring 31 is provided with a large number of fixing nodes 4 to accurately hold the connection with the rotational drive shaft (not shown).

  In the upper part of FIG. 3, an embodiment of the circular saw 30 and the disc cutter 30A is shown. This example shows a straight cut or a curved cut of a plate material. In the illustrated assembly drawing, a flange 33 having a slightly smaller outer diameter and a flange 34 having a slightly larger outer diameter are assembled by being sandwiched from both sides of the circular saw 30 or the disk cutter 30A. When there is no pressing force F against the circular saw 30 or the disc cutter 30A, straight cutting can be performed. Further, when the pressing force F against the circular saw 30 or the disk cutter 30A is gradually increased, the amount of bending increases as shown by the solid line of the circular saw 30 or the disk cutter 30A, and a large curve can be cut. As shown in the drawing, when the main body ring (disk main body) 31 is bent to the left, the left curve is cut and the right curve is cut at the time of the right bend 31 'indicated by the two-dot chain line.

It should be noted that the circular saw 30 or the disk cutter 30A has a cubic lattice structure M2 in which the middle part of the main body ring (disk main body) 31 has a wire mesh or woven cloth laminated in accordance with the required grinding wheel width L. Therefore, moderate rigidity and strength are obtained, but since both are gripped by the flanges 33 and 34, stronger rigidity is obtained. When the coolant liquid C is supplied from the center side toward the outer periphery, the flanges 33 and 34 prevent the coolant liquid C from leaking sideways and are completely supplied to the outer superabrasive grains D.
Therefore, also in the dicing saw 40, the disc grindstone 50, and the like, which will be described later, the middle part of the main body ring (disc main body) has a cubic lattice structure M2 in which a plurality of layers are laminated according to the required grindstone width L. Although it has rigidity and strength, it is desirable to hold it by the flanges 33, 34 and the like having the same outer diameter from both. Since the side leakage of the coolant C can also be prevented, detailed description of other embodiments below is omitted.

  According to the circular saw 30 and the disc cutter 30A according to the second embodiment of the present invention, the circular ring and the circular ring cutter body ring (saw disc main body) are made of ferrous metals, non-ferrous metals, petroleum fibers, plants. A knitted or non-woven fabric made of knitted or entangled fiber yarn (vertical line / horizontal line) made of fiber, carbon fiber, cellulose nanofiber, non-woven fabric, etc. (Nodes) are sparsely plated or fixed to adjust the ratio of fixed nodes and free nodes to form a disk metal mesh. On the outer peripheral surface 31A and the peripheral portion 31B of the disk metal mesh, diamond, CBN Electrodeposited abrasive forks are made by electrodepositing or welding superabrasive grains D to fix WA, GC abrasive grains, etc. Unlike conventional circular saw body rings (saw disk bodies), Added to the body ring (saw disk body) 31 of the cubic lattice structure M2 when cutting. No fatigue failure because the corresponding bends flexibly to metal fatigue due to bending load in the lateral direction that. Furthermore, the coolant C is efficiently and efficiently ejected to the abrasive grains and processing points through the mesh of the metal mesh. Thereby, the cutting efficiency of a board | plate material can be improved. In particular, the mesh coolant liquid of the wire mesh passes through the coolant guide and passes through the mesh or gap of the wire mesh of the main body ring (disc body) 31 and from the clearance of the metal mesh body 31 (10) and the gaps with the flanges 33 and 34. The effect that the discharge efficiency is greatly improved as compared with the conventional circular saw, that is, the merit is obtained.

  As in the first embodiment, the main body ring 41 of the dicing saw 40 according to the third embodiment of the present invention is formed by sparsely plating or joining the intersections (nodes) 3 of the knitted vertical and horizontal lines. Thus, the ratio of the fixed node 4 and the free node 5 is adjusted. In particular, the surface lattice structure M1 has a single layer configuration so that thin cutting is possible, and the elastic joint is strengthened by reducing the bending by using the fixed node 4 as the concentrated area K1 so that the bending does not occur. Now, as shown in the enlarged view of FIG. 4, a fiber thread made of any of ferrous metal, non-ferrous, petroleum-based fiber, plant-based fiber, carbon fiber, cellulose nanofiber, non-woven fabric, etc. Horizontal line) 1 ', 2' is knitted or entangled with a knitted fabric or nonwoven fabric having a thickness of φ0.05 mm or less, and the above knitted fabric or nonwoven fabric is cut and formed into a circle, and then the intersection (node) 3 of the vertical and horizontal lines is plated or fixed. The fixed nodal point 4 is increased to form a disk metal mesh 41 having a surface lattice structure M1. Diamond, CBN electrodeposited abrasive grains, WA, GC abrasive grains, and the like, which become various superabrasive grains D, are welded and fixed to the outer peripheral surface 41A of the above-described disk metal mesh and the peripheral portion 41B. The outer peripheral portion 41 </ b> A of the dicing saw 40 is fixed to the rotary shaft 45 with a nut N so as to be gripped from both sides by a pair of flanges 43 and 44. Since the rotation shaft 45 has a hole 45 </ b> A, the coolant C is press-fitted and discharged from the outer peripheral portion 41 </ b> A of the dicing saw 40. Other configurations are the same as those of the first embodiment of the present invention, and the description thereof is omitted.

  According to the main body ring 41 of the dicing saw 40 according to the third embodiment, a silicon wafer can be cut without waste with a cutting width of φ0.05 mm. Further, unlike the conventional dicing saw, since it flexibly responds to the metal fatigue caused by the rotational load applied to the main body ring formed as the surface lattice structure M1 at the time of cutting, it does not cause fatigue failure. Further, the coolant liquid is efficiently and efficiently ejected to the abrasive grains and the processing points through the mesh of the metal mesh. As a result, the grinding waste discharge efficiency can be increased and the grinding efficiency can be improved. In particular, the mesh mesh coolant liquid passes through the coolant guide and passes through the mesh mesh and gaps of the main body ring, and the discharge efficiency from the gaps of the mesh mesh body and the workpiece is significantly higher than that of conventional dicing saws. Improve.

  The main body ring 51 of the disc grindstone 50 according to the fourth embodiment of the present invention is a wire net 11 or a woven fabric 22 knitted in a horizontal line 1 in a vertical and horizontal direction 1. The ratio of the fixed node 4 and the free node 5 is adjusted by loosely plating or joining the intersections (nodes) 3 of the knitted vertical and horizontal lines. The face-centered structure (cubic structure B1 or cubic structure B2) has a three-layer structure, for example. That is, the wire mesh or woven fabric is formed as face-centered structures B1 and B2 in which a plurality of sheets are laminated in accordance with the required grinding wheel width L, and the diamond ring is formed on the outer peripheral surface 51A of the main body ring 51 and the peripheral portion 51B. , CBN electrodeposited abrasive grains, or superabrasive grains are electrodeposited or welded to fix WA, GC abrasive grains or the like. As in FIG. 4, for attachment to the rotating shaft, although not shown, a pair of flanges are held airtight from both sides of the disc grindstone 50 and coolant liquid is also supplied. Other configurations are the same as those in the first to fourth embodiments, and a description thereof is omitted.

  The action of the main body ring 51 of the disc grindstone 50 according to the fourth embodiment of the present invention is different from the main body ring of the conventional disc grindstone in the metal fatigue due to the outer periphery and axial deflection load applied to the main body ring during grinding. On the other hand, since it flexes and responds flexibly, there is no fatigue failure. In particular, as shown in FIG. 7, the coolant liquid through the mesh of the mesh is efficiently and efficiently ejected from the abrasive grains on the outer periphery of the grindstone to the processing point of the grinding workpiece.

  As shown in FIG. 6, the main body ring 61 of the cup grindstone 60 according to the fifth embodiment of the present invention is a wire mesh 11 or a woven fabric 22 knitted in the vertical and horizontal directions 1 with the horizontal lines 2. The ratio of the fixed node 4 and the free node 5 is adjusted by loosely plating or joining the intersections (nodes) 3 of the knitted vertical and horizontal lines. And the cubic lattice structure M2 is shown by the structure of 2 layers or more, for example. That is, the wire mesh or woven fabric is formed as a cubic lattice structure M2 in which a plurality of layers are laminated according to the required grinding wheel width L, and a diamond, CBN electrode is formed on the outer peripheral surface 61A of the main body ring 61 and the peripheral portion 61B. Superabrasive grains are electrodeposited or welded so as to fix the abrasive grains or WA, GC abrasive grains. Other configurations are the same as those in the first to fourth embodiments, and a description thereof is omitted. FIG. 6 shows a configuration in which the main body ring 61 of the cup grindstone 60 is attached to the tool holder 14. h to h3 are through holes, 14a is a flange for holding the cup grindstone 60, 9b is a bolt head, 9c is a bolt, and 14b is a nut.

  The action of the main body ring 61 of the cup grindstone 60 according to the fifth embodiment of the present invention is different from the main body ring of the conventional cup grindstone as shown in FIG. 7, and is added to the main body ring of the cubic lattice structure M2 during grinding. Since it flexibly responds to the metal fatigue caused by the bending load in the outer periphery and the axial direction, it does not cause fatigue failure. In particular, the coolant C through the mesh of the metal mesh is efficiently and efficiently ejected from the abrasive grains on the outer periphery of the grindstone to the processing point of the grinding workpiece.

  In the production method of the main body ring of the sixth embodiment in each of the above grindstones, in the iron and non-ferrous system, as shown in FIG. 8, in the main body ring forming the main body such as a circular saw, a dicing saw, a grinding grindstone, a cup grindstone, In the first step (b), ferrous metal and non-ferrous are made into fiber yarns (vertical lines / horizontal lines), and then knitted or woven with fiber yarns (vertical lines / horizontal lines) knitted or entangled, and in the second step (b) The knitted fabric or the woven fabric is multilayered into a surface lattice structure M1 or a cubic lattice structure M2 and cut and formed into a circular shape. In the third step (C-2), the intersection of the vertical and horizontal lines of the knitted fabric or the woven fabric ( In the fourth step (e ~ he), the fixed node and the free node are loosely formed by the electrodeposition method (electrolysis method or scientific plating method) in the fourth step (e ~ he), and this ratio is adjusted to form the metal plate network. Then, diamond, CBN, etc. are electrodeposited on the outer peripheral surface of the above-mentioned disk metal mesh and the peripheral portion thereof. To form an abrasive grain D.

  The operation of the production method of the main body ring of the sixth embodiment is a knitted fabric or woven fabric in which a ferrous metal and non-ferrous are used as fiber yarns (vertical lines / horizontal lines), and then fiber yarns (vertical lines / horizontal lines) are knitted or entangled. The woven fabric is multi-layered into the surface lattice structure M1 or the cubic lattice structure M2 and cut into a circular shape, and the crossing points (nodes) of the vertical and horizontal lines are plated or fixed loosely to fix the fixed and free nodes. Various grindstones, circular saws, and dicing saws can be easily produced by electrodeposition means EM for electrodepositing diamond, CBN and other superabrasive grains on the outer peripheral surface of the above-mentioned disk metal mesh and its peripheral portion by adjusting the ratio. .

  As shown in FIG. 9, the production method of the main body ring of the seventh embodiment includes a petroleum-based fiber and a plant-based fiber in the first step (f) in the main body ring such as a circular saw, a dicing saw, a grinding wheel, and a cup wheel 20. A knitted or non-woven fabric in which fiber yarns (vertical lines / horizontal lines) such as fibers, carbon fibers, and cellulose nanofibers are knitted or entangled, and the knitted fabric or the woven fabric in the second step (g) is a surface lattice structure M1 or a cubic lattice structure. Multi-layered into M2 and cut and molded into a circular or cup shape, and in the third step (H), the intersections (nodal points) of the above-mentioned circular or cup-like vertical and horizontal lines are heat-sealed (thermal welding method) or adhesive In the fourth step (4), WA, GC abrasive grains, etc. are attached to the outer peripheral surface or tip surface of the circular or cup-shaped wire mesh body and its peripheral portion. And superabrasive grains D are welded and fixed.

  In addition, the operation of the production method of the main body ring of the seventh embodiment is a knitted or non-woven fabric in which fiber yarns (vertical lines / horizontal lines) such as petroleum fibers, plant fibers, carbon fibers, and cellulose nanofibers are knitted or entangled. From now on, we will use knitted or woven fabrics that are knitted or entangled with fiber yarns (vertical / horizontal lines). The ratio of the fixed node and the free node is adjusted by plating or fixing, and superabrasive grains such as WA and GC abrasive grains are welded and fixed to the outer peripheral surface and the peripheral portion of the above-mentioned disk metal mesh with a firing machine SO. By means, various types of grindstones, circular saws, dicing saws, etc. can be easily produced.

  According to the above-mentioned circular saw, dicing saw, disc grindstone, cup grindstone ring and this production method, the actual measurement values shown in FIG. 11 are obtained. That is, (1) Regarding the bending load, the conventional type is deformed and cracked, but the main body ring of the present invention is excellent in repeated deformation. (2) Regarding metal fatigue, the conventional type is vulnerable to repeated loads. The main body ring of the present invention can withstand repeated loads and is excellent. (3) Regarding the flowability of the coolant, the conventional type is inferior in flowability even with a porous grindstone. The main body ring of the present invention is excellent in flowability with a wire mesh structure imitating a face-centered structure and is excellent. (4) About clogging, the conventional type clogs pores in the grindstone irregularly. The main body ring of the present invention is excellent in that it is not clogged with mesh-like continuous pores. (5) Regarding the grinding performance, the conventional type is likely to be degraded due to clogging. The main body ring of the present invention is excellent in that it is not clogged and hardly deteriorates in performance.

  The present invention includes various types of rotary grindstones, disc cutting grindstones and sticks in addition to the embodiments such as the dicing saw for cutting each circular saw and silicon wafer, a grinding grindstone for grinding a flat surface, and a cup grindstone for drilling holes. Applicable to grinding wheels. Further, the main body ring formed by forming the wire mesh body with the surface lattice structure M1 or the cubic lattice structure M2 may adopt a hexagonal close-packed structure. According to this structure, the strongest operational effect can be obtained. In addition, the use of the latest material carbon nanotubes makes it possible to obtain an extremely thin blade width and a supple and strong dicing saw, etc. by configuring a metal ring-structured body ring (disk body). In addition to cutting, it is also applicable to cutting with a circular saw, polishing with a grinding wheel, and a cup grinding wheel for drilling holes.

1 Vertical line 1 ', 2 Fiber yarn (vertical line / horizontal line)
2 Horizontal line 3 Intersection (node)
4 Fixed knot 5 Free knot 10 Disc wire mesh 11 Wire mesh 11A Knitted fabric 20 Cylindrical wire mesh 22 Woven fabric 22A Non-woven fabric 30 Circular saw 30A Disc cutter 31 Body ring (disc body etc.)
31A Peripheral surface 31B Peripheral part 40 Dicing saw 41 Main body ring 50 Disc grindstone 51 Main body ring 60 Cup grindstone 61 Main body ring B0 Grain face centered structure BX Various cubic lattice structures B1 Body centered cubic lattice B2 Face centered cubic lattice B3 Face lattice B4 Cubic Lattice C Coolant fluid F Pushing force K1 Concentrated area K Area with many free nodes K Various superabrasive grains L Necessary grinding wheel width N Saw blade M1 Surface lattice structure M2 Cubic lattice structure EM Electrodeposition means SO Baking machine

Claims (6)

A circular saw for cutting a plate material, a dicing saw for thinly cutting a silicon wafer, or a grinding wheel or a drilled cup grinding wheel for grinding a flat work, and an outer peripheral surface or a tip surface of the structure, or a peripheral portion of each of the above surfaces In the main body ring formed by adhering abrasive grains to
Intersections of knitted or woven fabrics woven by vertical / horizontal lines of fiber yarns, or intersections of knitted or woven metal meshes of vertical / horizontal lines made of metal yarns are at least A surface consisting of a tightly or sparsely electrodeposited or welded fixed node with increased rigidity and a free node with weakened rigidity without electrodeposition or welding, and a variable ratio of the above fixed node and free node A main body ring, which is a lattice-shaped disk metal mesh or a cylindrical metal mesh . In the main body ring according to claim 1, the disk metal mesh or the cylindrical metal mesh having the surface lattice structure has a cubic lattice structure in which a plurality of layers are laminated and bonded in accordance with a grindstone width required by a circular saw, a grinding wheel, or a cup grindstone. body ring, characterized in that. The main body ring according to claim 1, wherein the dicing saw is a knitted or non-woven fabric having a thickness of φ0.05 mm or less knitted or entangled with a fiber yarn (longitudinal line / horizontal line) of φ0.025 mm, and the outer peripheral portion and the inner peripheral portion are fixed knots. A body ring characterized in that the middle part of only the point is a disk metal mesh having a plane lattice structure in which the ratio between the fixed node and the free node is variable . The main body ring according to claim 2, wherein the circular saw has a cubic lattice structure in which a plurality of circular saws are laminated and bonded according to the width of the grinding wheel of the disk metal mesh, and the outer peripheral portion and the inner peripheral portion of the disk metal mesh are fixed knots. A body ring characterized by a cubic lattice structure that has high rigidity and the rigidity of the middle part of the disk metal mesh is weakened by mixing free joints with fixed joints . In the main body ring of claim 2, the cup grindstone has a cubic lattice structure in which a plurality of cup grindstones are laminated according to the grindstone width of the cylindrical wire mesh, and the front end portion and the rear end portion of the cylindrical wire mesh are rigid at the fixing nodes. The body ring is characterized by a cubic lattice structure in which the middle part of the cylindrical wire mesh is a cubic lattice structure in which free joints are mixed with fixed joints and rigidity is weakened . The main body ring according to claim 2, wherein the grinding wheel has a cubic lattice structure in which a plurality of pieces are laminated and bonded in accordance with a wheel width of the disk metal mesh, and an outer peripheral portion and an inner peripheral portion of the disk metal mesh are fixed nodes. A body ring characterized by a cubic lattice structure that has high rigidity and the rigidity of the middle part of the disk metal mesh is weakened by mixing free joints with fixed joints .

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