JPWO2019008884A1 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 140
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 140
- 239000004065 semiconductor Substances 0.000 title claims description 55
- 239000012535 impurity Substances 0.000 claims abstract description 359
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 238000003763 carbonization Methods 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 47
- 230000015556 catabolic process Effects 0.000 description 39
- 230000002093 peripheral effect Effects 0.000 description 21
- 210000000746 body region Anatomy 0.000 description 15
- 238000010586 diagram Methods 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910005883 NiSi Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
まず、本開示の実施形態の概要について説明する。本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また結晶学上の指数が負であることは、通常、”−”(バー)を数字の上に付すことによって表現されるが、本明細書中では数字の前に負の符号を付している。
以下、実施の形態について図に基づいて説明する。なお、以下の図面において、同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。
まず、第1実施形態に係る炭化珪素半導体装置の一例としてのMOSFET100の構成について説明する。
次に、第2実施形態に係る炭化珪素半導体装置の一例としてのMOSFET100の構成について説明する。第2実施形態に係るMOSFETは、主に下記の構成において第1実施形態に係るMOSFETと異なっており、それ以外の構成は、第1実施形態に係るMOSFETと同様である。
本実施形態に係るMOSFET100によれば、電圧が外周構造(第2不純物領域12および第4不純物領域22)全体に分散される。そのため、広い不純物濃度の範囲において、耐圧を維持することができる。つまり、耐圧のばらつきを抑制することができる。
Claims (21)
- 第1主面と、前記第1主面と反対側の第2主面とを有する炭化珪素基板と、
前記第1主面上に設けられたソース電極とを備え、
前記炭化珪素基板は、第1炭化珪素層と、前記第1炭化珪素層上に設けられかつ前記第1主面を構成する第2炭化珪素層とを含み、
前記第1炭化珪素層は、第1導電型を有する第1ドリフト領域と、前記第1導電型と異なる第2導電型を有する第1不純物領域と、前記第2導電型を有しかつ前記第1主面に対して垂直な方向から見て前記第1不純物領域を取り囲む第2不純物領域とを有し、
前記第2炭化珪素層は、前記第1導電型を有する第2ドリフト領域と、前記第2導電型を有しかつ前記第2ドリフト領域を挟んで前記第1不純物領域に対面する第3不純物領域と、前記第2導電型を有し、前記第2ドリフト領域を挟んで前記第2不純物領域と対面しかつ前記第1主面に対して垂直な方向から見て前記第3不純物領域を取り囲む第4不純物領域とを有し、
前記第2ドリフト領域における第1導電型不純物の濃度は、前記第1ドリフト領域における第1導電型不純物の濃度よりも高く、
前記第3不純物領域は、前記ソース電極と電気的に接続されており、
前記炭化珪素基板は、第1構造および第2構造のいずれか一方を有するように構成されており、
前記第1構造は、前記第1不純物領域は前記第2不純物領域に接しており、前記第3不純物領域は前記第2ドリフト領域によって前記第4不純物領域から隔てられており、かつ前記第1主面に平行な方向において前記第2不純物領域の幅は前記第4不純物領域の幅よりも大きい構造であり、
前記第2構造は、前記第1不純物領域は前記第1ドリフト領域によって前記第2不純物領域から隔てられており、前記第3不純物領域は前記第4不純物領域に接しており、かつ前記第1主面に平行な方向において前記第4不純物領域の幅は前記第2不純物領域の幅よりも大きい構造である、炭化珪素半導体装置。 - 前記炭化珪素基板は、前記第1構造を有するように構成されている、請求項1に記載の炭化珪素半導体装置。
- 前記第4不純物領域は、1以上のガードリングを含んでいる、請求項2に記載の炭化珪素半導体装置。
- 前記第1主面に平行な方向における前記第2不純物領域の幅は、前記第1炭化珪素層の厚みおよび前記第2炭化珪素層の厚みの合計の2倍以上である、請求項2または請求項3に記載の炭化珪素半導体装置。
- 前記第4不純物領域は、フローティングである、請求項2〜請求項4のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域は、フローティングである、請求項2〜請求項5のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域は、前記ソース電極と電気的に接続されている、請求項2〜請求項5のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域、前記第2不純物領域および前記第4不純物領域の各々は、前記ソース電極と電気的に接続されている、請求項2〜請求項4のいずれか1項に記載の炭化珪素半導体装置。
- 前記第2不純物領域における第2導電型不純物のドーズ量は、0.4×1013cm−2以上2.0×1013cm−2以下である、請求項2〜請求項8のいずれか1項に記載の炭化珪素半導体装置。
- 前記第4不純物領域における第2導電型不純物のドーズ量は、0.4×1013cm−2以上2.0×1013cm−2以下である、請求項2〜請求項9のいずれか1項に記載の炭化珪素半導体装置。
- 前記炭化珪素基板は、前記第2構造を有するように構成されている、請求項1に記載の炭化珪素半導体装置。
- 前記第2不純物領域は、1以上のガードリングを含んでいる、請求項11に記載の炭化珪素半導体装置。
- 前記第1主面に平行な方向における前記第4不純物領域の幅は、前記第1炭化珪素層の厚みおよび前記第2炭化珪素層の厚みの合計の2倍以上である、請求項11または請求項12に記載の炭化珪素半導体装置。
- 前記第2不純物領域は、フローティングである、請求項11〜請求項13のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域は、フローティングである、請求項11〜請求項14のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域は、前記ソース電極と電気的に接続されている、請求項11〜請求項14のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1不純物領域および前記第2不純物領域の各々は、前記ソース電極と電気的に接続されている、請求項11〜請求項13のいずれか1項に記載の炭化珪素半導体装置。
- 前記第4不純物領域における第2導電型不純物のドーズ量は、0.4×1013cm−2以上2.0×1013cm−2以下である、請求項11〜請求項17のいずれか1項に記載の炭化珪素半導体装置。
- 前記第2不純物領域における第2導電型不純物のドーズ量は、0.4×1013cm−2以上2.0×1013cm−2以下である、請求項11〜請求項18のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1ドリフト領域における第1導電型不純物の濃度は、5×1013cm−3以上1×1016cm−3以下である、請求項1〜請求項19のいずれか1項に記載の炭化珪素半導体装置。
- 前記第2ドリフト領域における第1導電型不純物の濃度は、5×1015cm−3以上1×1018cm−3以下である、請求項1〜請求項20のいずれか1項に記載の炭化珪素半導体装置。
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