JPWO2016175185A1 - ポンプ - Google Patents
ポンプ Download PDFInfo
- Publication number
- JPWO2016175185A1 JPWO2016175185A1 JP2017503189A JP2017503189A JPWO2016175185A1 JP WO2016175185 A1 JPWO2016175185 A1 JP WO2016175185A1 JP 2017503189 A JP2017503189 A JP 2017503189A JP 2017503189 A JP2017503189 A JP 2017503189A JP WO2016175185 A1 JPWO2016175185 A1 JP WO2016175185A1
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vibration
- displacement restricting
- pump chamber
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 102
- 238000005452 bending Methods 0.000 claims abstract description 20
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 230000005489 elastic deformation Effects 0.000 claims description 5
- 239000012530 fluid Substances 0.000 description 40
- 239000000853 adhesive Substances 0.000 description 16
- 230000001070 adhesive effect Effects 0.000 description 16
- 239000012790 adhesive layer Substances 0.000 description 15
- 238000007789 sealing Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 238000009863 impact test Methods 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/023—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms double acting plate-like flexible member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Compressor (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
Abstract
Description
まず、本発明に係るポンプの概略構成について説明する。
図2は、本発明の第2の実施形態に係るポンプ1Aの外観斜視図である。
次に、本発明の第3の実施形態に係るポンプについて説明する。
次に、本発明の第4の実施形態について説明する。
2,2A,2B…ポンプ筐体
3…振動板
4…駆動部
5…変位規制部
6…ポンプ室
7…流路
8…開口
9…振動部
3A,4A…外部接続端子
5A,6A…主面
7A…ポンプ室
11…カバー板
12…流路板
13…対向板
14…接着層
15…振動板
16…圧電素子
17…絶縁板
18,18A,18B…給電板
19…スペーサ板
20…蓋板
21…円板部
22…枠部
23…連結部
24…振動部
27…内部接続端子
28…枠部
29,29A…支持部
30,30A…変位規制部
31…流路孔
32…開口
33…流路
35…流路孔
42…凸部
43,43A…波状部
44…可動部
3B…バルブ筐体
4B…ダイヤフラム
5B…バルブ凸部
10B…天板
11B…外部接続部
12B…弁座33B…開口
Claims (11)
- 内部にポンプ室を有するポンプ筐体と、
前記ポンプ室で前記ポンプ筐体に支持され、前記ポンプ室を第1ポンプ室と第2ポンプ室に分割し、所定方向に沿って屈曲振動するように駆動される振動部と、
前記第1ポンプ室の内壁から突出し、前記振動部に対向する変位規制部と、
を備えることを特徴とするポンプ。 - 前記変位規制部は、前記振動部が弾性変形時に位置することが可能な空間に位置することを特徴とする、請求項1に記載のポンプ。
- 前記変位規制部は、前記振動部が屈曲振動時に位置することが可能な空間に位置しないことを特徴する、請求項1または請求項2に記載のポンプ。
- 前記所定方向に積層される複数の平板状部材の積層体として構成されるポンプであって、
前記変位規制部を構成する平板状部材は、
前記ポンプ筐体側から前記ポンプ室に突出する支持部と、
前記支持部から前記振動部側に突出する前記変位規制部と、
を備えることを特徴とする、請求項1乃至請求項3のいずれかに記載のポンプ。 - 前記変位規制部を構成する平板状部材は、前記ポンプ筐体側から前記ポンプ室に突出して延び、先端が前記振動部に接続されている内部接続端子、を更に備えることを特徴とする、
請求項4に記載のポンプ。 - 前記振動部は、高次の共振モードで屈曲振動することを特徴とする、
請求項4または請求項5に記載のポンプ。 - 前記変位規制部は、前記振動部の中央部に対向することなく、前記振動部の屈曲振動の節となる位置に対向することを特徴とする、
請求項6に記載のポンプ。 - 前記変位規制部は、前記振動部の中央部に対向することなく、前記振動部の外周部に対向することを特徴とする、
請求項4乃至請求項6のいずれかに記載のポンプ。 - 前記第2ポンプ室の内壁から突出し、前記振動部に対向する変位規制部を備える、請求項1乃至請求項8のいずれかに記載のポンプ。
- 前記変位規制部として、互いの間に間隔を空けて並ぶ複数の変位規制部を備えることを特徴とする、
請求項1乃至請求項9のいずれかに記載のポンプ。 - 前記変位規制部として3つの変位規制部を備えることを特徴とする、
請求項10に記載のポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015090170 | 2015-04-27 | ||
JP2015090170 | 2015-04-27 | ||
PCT/JP2016/062970 WO2016175185A1 (ja) | 2015-04-27 | 2016-04-26 | ポンプ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017145037A Division JP6520993B2 (ja) | 2015-04-27 | 2017-07-27 | ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016175185A1 true JPWO2016175185A1 (ja) | 2017-05-18 |
JP6183574B2 JP6183574B2 (ja) | 2017-08-23 |
Family
ID=57198501
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017503189A Active JP6183574B2 (ja) | 2015-04-27 | 2016-04-26 | ポンプ |
JP2017145037A Active JP6520993B2 (ja) | 2015-04-27 | 2017-07-27 | ポンプ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017145037A Active JP6520993B2 (ja) | 2015-04-27 | 2017-07-27 | ポンプ |
Country Status (7)
Country | Link |
---|---|
US (2) | US10920765B2 (ja) |
JP (2) | JP6183574B2 (ja) |
CN (2) | CN107735573B (ja) |
BR (1) | BR112017021088B1 (ja) |
DE (1) | DE112016001938T5 (ja) |
GB (1) | GB2554254B (ja) |
WO (1) | WO2016175185A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107735573B (zh) * | 2015-04-27 | 2020-10-27 | 株式会社村田制作所 | 泵 |
TWI614857B (zh) | 2016-11-24 | 2018-02-11 | 研能科技股份有限公司 | 氣冷散熱裝置 |
TWI626374B (zh) | 2017-01-05 | 2018-06-11 | 研能科技股份有限公司 | 微型流體控制裝置 |
US10438868B2 (en) | 2017-02-20 | 2019-10-08 | Microjet Technology Co., Ltd. | Air-cooling heat dissipation device |
TWI667189B (zh) | 2017-08-31 | 2019-08-01 | 研能科技股份有限公司 | 微機電之流體控制裝置 |
TWI650484B (zh) * | 2017-10-27 | 2019-02-11 | 研能科技股份有限公司 | 氣體輸送裝置 |
TWI646262B (zh) * | 2017-10-27 | 2019-01-01 | 研能科技股份有限公司 | 氣體輸送裝置 |
CN111512047B (zh) * | 2017-12-22 | 2022-09-27 | 株式会社村田制作所 | 泵 |
WO2019131706A1 (ja) * | 2017-12-28 | 2019-07-04 | 株式会社村田製作所 | ポンプ |
WO2019230159A1 (ja) * | 2018-05-31 | 2019-12-05 | 株式会社村田製作所 | ポンプ |
TWI680232B (zh) | 2018-08-13 | 2019-12-21 | 科際精密股份有限公司 | 流體驅動裝置 |
JP7031758B2 (ja) * | 2018-11-27 | 2022-03-08 | 株式会社村田製作所 | ポンプ |
EP3828414A4 (en) | 2018-11-27 | 2022-05-04 | Murata Manufacturing Co., Ltd. | PUMP |
CN113614374B (zh) | 2019-03-18 | 2023-01-13 | 株式会社村田制作所 | 泵单元 |
CN109838367A (zh) * | 2019-04-04 | 2019-06-04 | 常州威图流体科技有限公司 | 一种高性能微型压电泵 |
WO2020261686A1 (ja) | 2019-06-27 | 2020-12-30 | 株式会社村田製作所 | ポンプ装置 |
CN114041013B (zh) * | 2019-07-03 | 2023-09-19 | 株式会社村田制作所 | 流体控制装置 |
CN112773344B (zh) * | 2019-11-07 | 2023-09-01 | 研能科技股份有限公司 | 血压量测模块 |
JP2023126990A (ja) * | 2020-07-31 | 2023-09-13 | Tdk株式会社 | ポンプ及び流体制御装置 |
Citations (7)
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JPS5223345B2 (ja) * | 1972-05-17 | 1977-06-23 | ||
JPS578385U (ja) * | 1980-06-13 | 1982-01-16 | ||
JP2004308465A (ja) * | 2003-04-03 | 2004-11-04 | Star Micronics Co Ltd | 定量搬送ポンプ |
JP2007092677A (ja) * | 2005-09-29 | 2007-04-12 | Casio Comput Co Ltd | ポンプ装置 |
JP2013068215A (ja) * | 2011-09-06 | 2013-04-18 | Murata Mfg Co Ltd | 流体制御装置 |
US20150023821A1 (en) * | 2012-02-10 | 2015-01-22 | The Technology Partnership Plc | Disc pump with advanced actuator |
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-
2016
- 2016-04-26 CN CN201680024341.XA patent/CN107735573B/zh active Active
- 2016-04-26 WO PCT/JP2016/062970 patent/WO2016175185A1/ja active Application Filing
- 2016-04-26 JP JP2017503189A patent/JP6183574B2/ja active Active
- 2016-04-26 CN CN202011001743.2A patent/CN112211807B/zh active Active
- 2016-04-26 GB GB1717643.9A patent/GB2554254B/en active Active
- 2016-04-26 DE DE112016001938.6T patent/DE112016001938T5/de active Granted
- 2016-04-26 BR BR112017021088-6A patent/BR112017021088B1/pt active IP Right Grant
-
2017
- 2017-07-27 JP JP2017145037A patent/JP6520993B2/ja active Active
- 2017-10-27 US US15/795,341 patent/US10920765B2/en active Active
-
2021
- 2021-01-12 US US17/146,527 patent/US11578715B2/en active Active
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JPS5223345B2 (ja) * | 1972-05-17 | 1977-06-23 | ||
JPS578385U (ja) * | 1980-06-13 | 1982-01-16 | ||
JP2004308465A (ja) * | 2003-04-03 | 2004-11-04 | Star Micronics Co Ltd | 定量搬送ポンプ |
JP2007092677A (ja) * | 2005-09-29 | 2007-04-12 | Casio Comput Co Ltd | ポンプ装置 |
JP2013068215A (ja) * | 2011-09-06 | 2013-04-18 | Murata Mfg Co Ltd | 流体制御装置 |
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Also Published As
Publication number | Publication date |
---|---|
GB2554254A (en) | 2018-03-28 |
US11578715B2 (en) | 2023-02-14 |
WO2016175185A1 (ja) | 2016-11-03 |
GB201717643D0 (en) | 2017-12-13 |
US20210131416A1 (en) | 2021-05-06 |
CN107735573A (zh) | 2018-02-23 |
GB2554254B (en) | 2021-05-19 |
JP6520993B2 (ja) | 2019-05-29 |
CN107735573B (zh) | 2020-10-27 |
BR112017021088B1 (pt) | 2022-12-20 |
BR112017021088A2 (pt) | 2018-07-03 |
CN112211807A (zh) | 2021-01-12 |
JP6183574B2 (ja) | 2017-08-23 |
JP2017207069A (ja) | 2017-11-24 |
US20180066650A1 (en) | 2018-03-08 |
DE112016001938T5 (de) | 2018-02-15 |
CN112211807B (zh) | 2022-07-05 |
US10920765B2 (en) | 2021-02-16 |
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