JPWO2016143195A1 - 撮像装置の小型化 - Google Patents
撮像装置の小型化 Download PDFInfo
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- JPWO2016143195A1 JPWO2016143195A1 JP2016552641A JP2016552641A JPWO2016143195A1 JP WO2016143195 A1 JPWO2016143195 A1 JP WO2016143195A1 JP 2016552641 A JP2016552641 A JP 2016552641A JP 2016552641 A JP2016552641 A JP 2016552641A JP WO2016143195 A1 JPWO2016143195 A1 JP WO2016143195A1
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- 238000003384 imaging method Methods 0.000 title claims abstract description 82
- 239000004065 semiconductor Substances 0.000 claims abstract description 111
- 239000002184 metal Substances 0.000 claims abstract description 57
- 229910052751 metal Inorganic materials 0.000 claims abstract description 57
- 239000011521 glass Substances 0.000 claims abstract description 56
- 230000001681 protective effect Effects 0.000 claims abstract description 56
- 230000002093 peripheral effect Effects 0.000 claims abstract description 41
- 239000012790 adhesive layer Substances 0.000 claims abstract description 23
- 238000007789 sealing Methods 0.000 claims description 24
- 229920005989 resin Polymers 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 23
- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 15
- 239000010410 layer Substances 0.000 abstract description 28
- 238000005452 bending Methods 0.000 description 11
- 238000012986 modification Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000003014 reinforcing effect Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004840 adhesive resin Substances 0.000 description 2
- 229920006223 adhesive resin Polymers 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
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- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001727 in vivo Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000007797 corrosion Effects 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
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- 230000008646 thermal stress Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
- A61B1/05—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by the image sensor, e.g. camera, being in the distal end portion
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/144—Devices controlled by radiation
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- H—ELECTRICITY
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/555—Constructional details for picking-up images in sites, inaccessible due to their dimensions or hazardous conditions, e.g. endoscopes or borescopes
Abstract
Description
図1は、本発明の実施の形態にかかる内視鏡システムの全体構成を模式的に示す図である。図1に示すように、内視鏡システム1は、内視鏡装置2と、ユニバーサルコード3と、コネクタ部5と、プロセッサ(制御装置)6と、表示装置7と、光源装置8とを備える。
図8は、本発明の実施の形態2にかかる撮像ユニットの部分断面図である。図8は、本発明の実施の形態2にかかる撮像ユニットの保護ガラス49と半導体チップ44Bの接続部の断面図を示している。図9は、図8の撮像ユニットで使用する半導体チップの平面図である。
図11は、本発明の実施の形態3にかかる撮像ユニットの部分断面図である。図11は、本発明の実施の形態3にかかる撮像ユニットの保護ガラス49と半導体チップ44の接続部の断面図を示している。
図12Aは、本発明の実施の形態4にかかる撮像ユニットの部分断面図である。図12Bは、本発明の実施の形態4にかかる撮像ユニットの正面図である。図12Aは、本発明の実施の形態4にかかる撮像ユニットの保護ガラス49と半導体チップ44Eの接続部の断面図を示している。
図13は、本発明の実施の形態5にかかる撮像ユニットで使用する半導体チップの平面図である。図14は、本発明の実施の形態5にかかる撮像ユニットの部分断面図であり、保護ガラスと半導体チップの接続部の断面図を示している。
2 内視鏡装置
3 ユニバーサルコード
3A 先端部
3B 湾曲部
3C 可撓管部
4 操作部
4a 処置具挿入口
5 コネクタ部
6 プロセッサ
7 表示装置
8 光源装置
35 撮像装置
40、40A、40B、40C、40D、40E、40F 撮像ユニット
41 先端部本体
41a 接着剤
42 被覆管
43 レンズユニット
43a−1〜43a−4 対物レンズ
43b レンズホルダ
44、44B、44E、44F 半導体チップ
44a 受光部
44b 周辺回路部
44c 電極パッド
44d ガードリング
44e メタルドット
44f 貫通電極
44g 裏面電極
44h バンプ
44i ダミー電極
44k 半導体基板
44m 絶縁層
45 フレキシブルプリント基板
45a インナーリード
46 封止樹脂
47 電気ケーブル束
48 信号ケーブル
49 保護ガラス
50 熱収縮チューブ
51 接着樹脂
52 補強部材
53 撮像素子ホルダ
54a、54b 封止樹脂
54c 接着層
55〜57 電子部品
81 湾曲管
82 湾曲ワイヤ
Claims (6)
- 撮像素子が形成された半導体チップと、前記撮像素子上に接着層を介して接着された保護ガラスと、を有する撮像ユニットにおいて、
前記半導体チップは、
光を光電変換して画像信号を生成する受光部と、
前記受光部から画像信号を受信するとともに、前記受光部へ駆動信号を送信する周辺回路部と、
前記受光部および前記周辺回路部の周囲を取り囲むガードリングと、
前記ガードリングの外周に形成された複数のメタルドットと、を備え、
前記保護ガラスは、前記受光部、前記周辺回路部、前記ガードリングおよび前記メタルドットを覆うように前記接着層により接着されることを特徴とする撮像ユニット。 - 前記接着層は前記受光部上に中空部を有し、
前記保護ガラスは、前記周辺回路部、前記ガードリングおよび前記メタルドットを覆うように前記接着層により接着されることを特徴とする請求項1に記載の撮像ユニット。 - 前記半導体チップの前記受光部が形成された面であって、前記保護ガラスにより覆われていない部分に、前記メタルドットがさらに形成され、
前記保護ガラスにより覆われていない部分に形成された前記メタルドット上には、封止樹脂が充填され、前記保護ガラスの側面と接着されることを特徴とする請求項1または2に記載の撮像ユニット。 - 前記保護ガラスの前記半導体チップとの接続面であって、前記半導体チップと接しない部分には封止樹脂が充填され、前記半導体チップの側面と接着されることを特徴とする請求項1または2に記載の撮像ユニット。
- 前記ガードリングおよび前記メタルドットは、それぞれ前記受光部が形成された半導体基板上に積層された複数の絶縁部材に形成されたダミービアおよびダミーパッドからなり、
複数の前記絶縁部材はLow−k膜であることを特徴とする請求項1〜4のいずれか一つに記載の撮像ユニット。 - 請求項1〜5のいずれか一つに記載の撮像ユニットが先端に設けられた挿入部を備えたことを特徴とする内視鏡装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015048711 | 2015-03-11 | ||
JP2015048711 | 2015-03-11 | ||
PCT/JP2015/081480 WO2016143195A1 (ja) | 2015-03-11 | 2015-11-09 | 撮像装置の小型化 |
Publications (2)
Publication Number | Publication Date |
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JPWO2016143195A1 true JPWO2016143195A1 (ja) | 2017-04-27 |
JP6209288B2 JP6209288B2 (ja) | 2017-10-04 |
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JP2016552641A Active JP6209288B2 (ja) | 2015-03-11 | 2015-11-09 | 撮像装置の小型化 |
Country Status (5)
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US (1) | US20170360284A1 (ja) |
EP (1) | EP3270418A4 (ja) |
JP (1) | JP6209288B2 (ja) |
CN (1) | CN107408561A (ja) |
WO (1) | WO2016143195A1 (ja) |
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KR20220021238A (ko) | 2020-08-13 | 2022-02-22 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001094843A (ja) * | 1999-09-20 | 2001-04-06 | Olympus Optical Co Ltd | 撮像装置 |
JP2004153015A (ja) * | 2002-10-30 | 2004-05-27 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2006041244A (ja) * | 2004-07-28 | 2006-02-09 | Nec Electronics Corp | 半導体装置 |
JP2008270232A (ja) * | 2005-07-08 | 2008-11-06 | Renesas Technology Corp | 半導体装置 |
JP2009064839A (ja) * | 2007-09-04 | 2009-03-26 | Panasonic Corp | 光学デバイス及びその製造方法 |
JP2009088459A (ja) * | 2007-09-28 | 2009-04-23 | Samsung Electro Mech Co Ltd | ウェハーレベルのイメージセンサモジュール、その製造方法、及びカメラモジュール |
JP2014216554A (ja) * | 2013-04-26 | 2014-11-17 | オリンパス株式会社 | 撮像装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012033894A (ja) * | 2010-06-30 | 2012-02-16 | Canon Inc | 固体撮像装置 |
JP5721981B2 (ja) * | 2010-09-10 | 2015-05-20 | オリンパス株式会社 | 撮像ユニットおよび撮像ユニットを具備する内視鏡 |
CN105144385B (zh) * | 2013-04-26 | 2018-06-29 | 奥林巴斯株式会社 | 摄像装置 |
-
2015
- 2015-11-09 CN CN201580077584.5A patent/CN107408561A/zh active Pending
- 2015-11-09 EP EP15884679.0A patent/EP3270418A4/en not_active Withdrawn
- 2015-11-09 WO PCT/JP2015/081480 patent/WO2016143195A1/ja active Application Filing
- 2015-11-09 JP JP2016552641A patent/JP6209288B2/ja active Active
-
2017
- 2017-09-05 US US15/695,194 patent/US20170360284A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001094843A (ja) * | 1999-09-20 | 2001-04-06 | Olympus Optical Co Ltd | 撮像装置 |
JP2004153015A (ja) * | 2002-10-30 | 2004-05-27 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2006041244A (ja) * | 2004-07-28 | 2006-02-09 | Nec Electronics Corp | 半導体装置 |
JP2008270232A (ja) * | 2005-07-08 | 2008-11-06 | Renesas Technology Corp | 半導体装置 |
JP2009064839A (ja) * | 2007-09-04 | 2009-03-26 | Panasonic Corp | 光学デバイス及びその製造方法 |
JP2009088459A (ja) * | 2007-09-28 | 2009-04-23 | Samsung Electro Mech Co Ltd | ウェハーレベルのイメージセンサモジュール、その製造方法、及びカメラモジュール |
JP2014216554A (ja) * | 2013-04-26 | 2014-11-17 | オリンパス株式会社 | 撮像装置 |
Also Published As
Publication number | Publication date |
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CN107408561A (zh) | 2017-11-28 |
EP3270418A4 (en) | 2018-12-26 |
EP3270418A1 (en) | 2018-01-17 |
JP6209288B2 (ja) | 2017-10-04 |
US20170360284A1 (en) | 2017-12-21 |
WO2016143195A1 (ja) | 2016-09-15 |
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