JPWO2016129577A1 - Manufacturing method of semiconductor chip - Google Patents

Abstract

The present invention is a method of manufacturing a semiconductor chip by dicing a wafer in a state where it is reinforced with a dicing tape, and no displacement occurs even when an aqueous organic solvent is used. It is an object of the present invention to provide a method for manufacturing a semiconductor chip in which residue adhesion does not occur on the semiconductor chip. The present invention is a dicing tape sticking step in which a dicing tape composed of a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that crosslinks and hardens upon stimulation and a base film is attached to a wafer from the pressure-sensitive adhesive layer side for reinforcement. A pressure-sensitive adhesive layer curing step for stimulating the pressure-sensitive adhesive layer to cross-link and cure the curable pressure-sensitive adhesive component; a dicing step for dicing the wafer reinforced by the dicing tape to obtain a semiconductor chip; and the dicing step A semiconductor chip manufacturing method including a semiconductor chip peeling step of peeling a semiconductor chip from a tape.

Description

The present invention is a method of manufacturing a semiconductor chip by dicing a wafer in a state where it is reinforced with a dicing tape, and no displacement occurs even when an aqueous organic solvent is used. The present invention relates to a method of manufacturing a semiconductor chip in which residue adhesion does not occur on the semiconductor chip.

For semiconductor chips, a high-purity rod-shaped semiconductor single crystal or the like is usually sliced into a wafer, a predetermined circuit pattern is formed on the wafer surface using a photoresist, and then the back surface of the wafer is ground by a grinder. After that, it is manufactured by finally dicing into chips.

Conventionally, when dicing, a dicing tape is attached to the back side of the wafer, the wafer is bonded and fixed in a vertical direction and a horizontal direction, and separated into individual semiconductor chips. A method of picking up the chip from the dicing tape side with a needle and fixing it on the die pad has been adopted. For example, in Patent Document 1, using a grinding apparatus having a plurality of grindstone axes, a process of thinning the wafer thickness with at least one grindstone axis from the back side of the wafer, and at least one other grindstone axis Although a wafer grinding method that simultaneously cuts and separates a wafer into a rectangular shape has been disclosed, dicing tape is used for the purpose of preventing wafer misalignment even in such a method. Yes.

In order to surely prevent the wafer from being displaced during dicing, a high adhesive force is required for the dicing tape for fixing the wafer. In dicing, a water-based organic solvent such as an isopropyl alcohol aqueous solution may be sprayed on the surface of the wafer in order to remove shavings. Therefore, the dicing tape is also required to have chemical resistance against the aqueous organic solvent. However, when the adhesive force of the dicing tape is increased and chemical resistance is imparted, when the semiconductor chip obtained from the dicing tape is peeled off, residues resulting from the dicing tape may adhere to the surface of the semiconductor chip. There was a problem that there was. Such a problem of adhesion of residues tended to become more prominent as time passed after the dicing tape was applied to the wafer.

JP 7-78793 A

The present invention is a method for manufacturing a semiconductor chip by dicing a wafer in a state reinforced with a dicing tape in view of the above-described situation, and no positional deviation or the like occurs even when an aqueous organic solvent is used. And it aims at providing the manufacturing method of the semiconductor chip which adhesion of a residue does not generate | occur | produce on the obtained semiconductor chip.

The present invention is a dicing tape sticking step in which a dicing tape composed of a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that crosslinks and hardens upon stimulation and a base film is attached to a wafer from the pressure-sensitive adhesive layer side for reinforcement. A pressure-sensitive adhesive layer curing step for stimulating the pressure-sensitive adhesive layer to cross-link and cure the curable pressure-sensitive adhesive component; a dicing step for dicing the wafer reinforced by the dicing tape to obtain a semiconductor chip; and the dicing step A semiconductor chip manufacturing method including a semiconductor chip peeling step of peeling a semiconductor chip from a tape.
The present invention is described in detail below.

As a result of intensive studies, the present inventors have used a dicing tape comprising a base material film and a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that crosslinks and cures by stimulation, and affixes this to a wafer in an uncured state. On the other hand, after applying the dicing tape, before the dicing process, it is stimulated to crosslink and cure, so that even when an aqueous organic solvent is used, misalignment or the like does not occur on the obtained semiconductor chip. The present invention was completed by discovering that no adhesion of residues occurs on the wafer.
Since the pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that is crosslinked and cured by stimulation has sufficient flexibility before the curable pressure-sensitive adhesive component is crosslinked and cured, a dicing tape using the adhesive layer is Even if it is a wafer having irregularities on its surface (for example, irregularities with a height of 20 μm or more, protruding electrodes, etc.), it has high adhesiveness that can reliably follow the irregularities and adhere to the wafer to protect it. It can be demonstrated. Further, since the pressure-sensitive adhesive layer is cross-linked and cured in this way, even when a water-based organic solvent is used in the dicing process, misalignment or the like does not occur. Furthermore, since the pressure-sensitive adhesive layer is cross-linked and cured, the semiconductor chip can be peeled off from the dicing tape without causing adhesion enhancement and the like.
In addition, in a method for manufacturing a semiconductor chip, a wafer processing step of performing a process involving heating on a wafer reinforced with a dicing tape may be performed before the dicing step. In such a wafer processing step, the pressure-sensitive adhesive layer of the dicing tape contracts due to heating and warpage of the wafer occurs, or adhesion is increased and residue adhesion to the surface of the semiconductor chip becomes significant. was there. In the semiconductor chip manufacturing method of the present invention, even when such a wafer processing step is performed, the occurrence of warping or the surface of the semiconductor chip is obtained by crosslinking and curing the curable adhesive component before the wafer processing step. It is possible to prevent the residue from adhering to the surface.

In the method for producing a semiconductor chip of the present invention, first, a dicing tape composed of at least a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that is crosslinked and cured by stimulation and a base film is pasted on the wafer from the pressure-sensitive adhesive layer side. Then, a dicing tape sticking step for reinforcing is performed.
The wafer is a raw material for semiconductor chips, and is not particularly limited, and a conventionally known wafer can be used. Further, in the present specification, the wafer includes a wafer level package, that is, a wafer that is processed in a wafer state up to a final package process.
In particular, the present invention is particularly effective for a wafer having irregularities with a height of 20 μm or more on the surface.

The dicing tape has at least an adhesive layer and a base film.
The pressure-sensitive adhesive layer contains a curable pressure-sensitive adhesive component that is crosslinked and cured by stimulation. By using such a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component, a dicing tape can be affixed to a wafer with high adhesive strength, and misalignment may occur even when an aqueous organic solvent is used. It is possible to achieve both high adhesiveness with no adhesion and high non-residue adhesion that can peel the semiconductor chip from the dicing tape without adhesion of residues.

Examples of the stimulus for crosslinking and curing the curable pressure-sensitive adhesive component include light, heat, electromagnetic waves, electron beams, and ultrasonic waves. Among these, a photocurable pressure-sensitive adhesive component that is cross-linked and cured by ultraviolet irradiation is preferable.
Examples of the photocurable pressure-sensitive adhesive component include a photocurable pressure-sensitive adhesive containing a polymerizable polymer as a main component and a photopolymerization initiator.

The polymerizable polymer is prepared by, for example, previously synthesizing a (meth) acrylic polymer having a functional group in the molecule (hereinafter referred to as a functional group-containing (meth) acrylic polymer) and reacting with the functional group in the molecule. It can obtain by making it react with the compound (henceforth a functional group containing unsaturated compound) which has a functional group to perform and a radically polymerizable unsaturated bond.

The functional group-containing (meth) acrylic polymer is an acrylic polymer having an alkyl group usually in the range of 2 to 18 as a polymer having adhesiveness at room temperature, as in the case of a general (meth) acrylic polymer. By copolymerizing an acid alkyl ester and / or methacrylic acid alkyl ester as a main monomer, a functional group-containing monomer, and, if necessary, another modifying monomer copolymerizable therewith by a conventional method It is obtained. The weight average molecular weight of the functional group-containing (meth) acrylic polymer is usually about 200,000 to 2,000,000.

Examples of the functional group-containing monomer include a carboxyl group-containing monomer such as acrylic acid and methacrylic acid; a hydroxyl group-containing monomer such as hydroxyethyl acrylate and hydroxyethyl methacrylate; and an epoxy group containing glycidyl acrylate and glycidyl methacrylate. Monomers; Isocyanate group-containing monomers such as isocyanate ethyl acrylate and isocyanate ethyl methacrylate; and amino group-containing monomers such as aminoethyl acrylate and aminoethyl methacrylate.

Examples of other modifying monomers that can be copolymerized include various monomers used in general (meth) acrylic polymers such as vinyl acetate, acrylonitrile, and styrene.

The functional group-containing unsaturated compound to be reacted with the functional group-containing (meth) acrylic polymer is the same as the functional group-containing monomer described above according to the functional group of the functional group-containing (meth) acrylic polymer. it can. For example, when the functional group of the functional group-containing (meth) acrylic polymer is a carboxyl group, an epoxy group-containing monomer or an isocyanate group-containing monomer is used, and when the functional group is a hydroxyl group, an isocyanate group-containing monomer is used. When the functional group is an epoxy group, a carboxyl group-containing monomer or an amide group-containing monomer such as acrylamide is used, and when the functional group is an amino group, an epoxy group-containing monomer is used.

The polymerizable polymer preferably has a lower limit of the content of the radical polymerizable unsaturated bond of 0.01 meq / g and a preferable upper limit of 2.0 meq / g. When the content of the radically polymerizable unsaturated bond in the polymerizable polymer is within this range, the adhesive layer is stimulated in the adhesive layer curing step to crosslink and cure the curable adhesive component. Even when an aqueous organic solvent is used in the dicing process, the pressure-sensitive adhesive layer can sufficiently protect the wafer without causing misalignment or the like. The minimum with more preferable content of the radically polymerizable unsaturated bond of the said polymeric polymer is 0.05 meq / g, and a more preferable upper limit is 1.5 meq / g.

When the curable pressure-sensitive adhesive component is a photo-curable pressure-sensitive adhesive component, examples of the photopolymerization initiator to be blended include those that are activated by irradiation with light having a wavelength of 250 to 800 nm. Examples of such photopolymerization initiators include acetophenone derivative compounds such as methoxyacetophenone, benzoin ether compounds such as benzoinpropyl ether and benzoin isobutyl ether, ketal derivative compounds such as benzyldimethyl ketal and acetophenone diethyl ketal, and phosphine. Oxide derivative compounds, bis (η5-cyclopentadienyl) titanocene derivative compounds, benzophenone, Michler ketone, chlorothioxanthone, todecylthioxanthone, dimethylthioxanthone, diethylthioxanthone, α-hydroxy Examples include photo radical polymerization initiators such as rohexyl phenyl ketone and 2-hydroxymethylphenyl propane. These photoinitiators may be used independently and 2 or more types may be used together.

The curable pressure-sensitive adhesive component preferably further contains a radical polymerizable polyfunctional oligomer or monomer. By containing a radical polymerizable polyfunctional oligomer or monomer, the curability when stimulated is improved.
The polyfunctional oligomer or monomer preferably has a molecular weight of 10,000 or less, and more preferably has a molecular weight of 5,000 or less so that a three-dimensional network of the cured component can be efficiently formed by heating or light irradiation. The number of radically polymerizable unsaturated bonds in the molecule is 2 to 20.

The polyfunctional oligomer or monomer is, for example, trimethylolpropane triacrylate, tetramethylolmethane tetraacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol monohydroxypentaacrylate, dipentaerythritol hexaacrylate, or the same methacrylate as described above. And the like. Other examples include 1,4-butylene glycol diacrylate, 1,6-hexanediol diacrylate, polypropylene glycol # 700 diacrylate, polyethylene glycol diacrylate, commercially available oligoester acrylate, and methacrylates similar to those described above. These polyfunctional oligomers or monomers may be used alone or in combination of two or more.

The pressure-sensitive adhesive layer may further contain a gas generating agent that generates gas upon stimulation. When the pressure-sensitive adhesive layer contains the gas generating agent, in the semiconductor chip peeling step, the adhesive layer is stimulated to generate gas from the gas generating agent, thereby making it easier and less adhesive residue. The dicing tape can be peeled off from the wafer without doing so.

Here, the curable pressure-sensitive adhesive component and the gas generating agent are selected from combinations in which the stimulus for crosslinking and curing the curable pressure-sensitive adhesive component and the stimulus for generating gas from the gas generating agent are qualitatively or quantitatively different. To do. By selecting such a combination, it is possible to prevent gas from being generated from the gas generating agent due to stimulation in the pressure-sensitive adhesive layer curing step and separation of the wafer and the dicing tape.

Specifically, for example, when the photocurable pressure-sensitive adhesive component is used, a gas generating agent that generates gas by a stimulus other than light such as heat is selected. In addition, even if the stimulus for generating gas from the gas generating agent is light, the light curable pressure-sensitive adhesive component can be used even if the wavelength is different from or overlaps with the light that crosslinks and cures the photo-curable pressure-sensitive adhesive component. A gas generating agent that requires a larger amount of light than the amount of light that crosslinks and cures is selected.
For example, as a photocurable pressure-sensitive adhesive component that is crosslinked and cured by light irradiation, a polymer having an unsaturated double bond such as a vinyl group in the side chain and a photopolymerization initiator activated at a wavelength of 250 to 800 nm are contained. When an adhesive is used, it can be crosslinked and cured by irradiation with light having a wavelength of 365 nm or longer. If such a photocurable pressure-sensitive adhesive component is combined with a gas generating agent that generates a gas by irradiating light with a wavelength of 300 nm or less, light having a wavelength of 365 nm or more is emitted in the pressure-sensitive adhesive layer curing step. Irradiation and light with a wavelength of 300 nm or less can be irradiated in the semiconductor chip peeling step.

The said gas generating agent is not specifically limited, For example, conventionally well-known gas generating agents, such as an azo compound and an azide compound, can be used.
In addition, since it has particularly excellent heat resistance, a carboxylic acid compound represented by the following general formula (1) or a salt thereof is also suitable. Such a gas generating agent generates gas (carbon dioxide gas) by irradiating light such as ultraviolet rays, and has high heat resistance that does not decompose even if heat is generated during the dicing process.

In formula (1), R ^{1 to} R ⁷ each represent hydrogen or an organic group. R ^{1 to} R ⁷ may be the same or different. Two of R ^{1 to} R ⁷ may be bonded to each other to form a cyclic structure.

Examples of the organic group in the general formula (1) include an alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, and an isobutyl group, an alkoxy group such as a methoxy group and an ethoxy group, a carboxyl group, a hydroxyl group, , Aromatic groups such as nitro groups and phenyl groups, polycyclic hydrocarbon groups such as naphthyl groups, fluorenyl groups and pyrenyl groups, ring-assembled hydrocarbon groups such as biphenyl groups, and heterocyclic groups such as xanthenyl groups Etc.
Among them, one of R ^{3 to} R ^{7 in} the above formula (1) is an organic group represented by the following formula (2), or R ^{3 to} R ⁷ in the above formula (1). It is preferable that two adjacent ones are bonded to each other to form a cyclic structure represented by the following formula (3).

In formula (2), R < ⁸ > -R < ¹² > shows hydrogen or an organic group, respectively. R ^{8 to} R ¹² may be the same or different. Two of R ^{8 to} R ¹² may be bonded to each other to form a cyclic structure.
In formula (3), R < ¹³ > -R < ¹⁶ > shows hydrogen or an organic group, respectively. R ^{13 to} R ¹⁶ may be the same or different. Two of R ^{13 to} R ¹⁶ may be bonded to each other to form a cyclic structure.
In addition, R ¹ in the above formula (1) is preferably a methyl group.

Specific examples of the carboxylic acid compound represented by the above formula (1) include, for example, phenylacetic acid, diphenylacetic acid, triphenylacetic acid, 2-phenylpropionic acid, 2,2-diphenylpropionic acid, 2,2,2- Triphenylpropionic acid, 2-phenylbutyric acid, α-methoxyphenylacetic acid, mandelic acid, atrolactone acid, benzylic acid, tropic acid, phenylmalonic acid, phenylsuccinic acid, 3-methyl-2-phenylbutyric acid, orthotoluylacetic acid , Metatoluylacetic acid, 4-isobutyl-α-methylphenylacetic acid, p-toluylacetic acid, 1,2-phenylenediacetic acid, 1,3-phenylenediacetic acid, 1,4-phenylenediacetic acid, 2-methoxyphenylacetic acid, 2-hydroxy Phenylacetic acid, 2-nitrophenylacetic acid, 3-nitrophenylacetic acid, 4-ni Trophenylacetic acid, 2- (4-nitrophenyl) propionic acid, 3- (4-nitrophenyl) propionic acid, 4- (4-nitrophenyl) propionic acid, 3,4-dimethoxyphenylacetic acid, 3,4- ( Methylenedioxy) phenylacetic acid, 2,5-dimethoxyphenylacetic acid, 3,5-dimethoxyphenylacetic acid, 3,4,5-trimethoxyphenylacetic acid, 2,4-dinitrophenylacetic acid, 4-biphenylacetic acid, 1-naphthyl Examples include acetic acid, 2-naphthylacetic acid, 6-methoxy-α-methyl-2-naphthylacetic acid, 1-pyreneacetic acid, 9-fluorenecarboxylic acid, or 9H-xanthene-9-carboxylic acid.

Among these, the carboxylic acid compound represented by the above formula (1) is ketoprofen represented by the following formula (1-1) or 2-xanthone acetic acid represented by the following formula (1-2). preferable.

Since the salt of the carboxylic acid compound represented by the above formula (1) also has a skeleton derived from the carboxylic acid compound represented by the above formula (1), decarboxylation easily occurs when irradiated with light, Carbon dioxide gas can be generated.

The salt of the carboxylic acid compound represented by the above formula (1) can be obtained by simply mixing the carboxylic acid compound represented by the above formula (1) and the basic compound in a container without going through a complicated synthesis route. Easy to prepare.
The basic compound is not particularly limited, and examples thereof include amines, hydrazine compounds, quaternary ammonium hydroxide salts, and phosphine compounds.
The amine is not particularly limited, and any of primary amines, secondary amines, and tertiary amines can be used.
Among these, the basic compound is preferably a monoalkylamine or a dialkylamine. When monoalkylamine or dialkylamine is used, the polarity of the obtained salt of the carboxylic acid compound represented by the formula (1) can be reduced, and the solubility with the pressure-sensitive adhesive component can be increased. More preferably, it is a C6-C12 monoalkylamine or dialkylamine.

As the gas generating agent, a tetrazole compound represented by the following general formula (4), general formula (5) or general formula (6) or a salt thereof is also suitable. These gas generating agents also generate gas (nitrogen gas) by irradiating light such as ultraviolet rays, and have high heat resistance that does not decompose even if heat is generated during the dicing process.

In formulas (4) to (6), R ²¹ and R ²² represent hydrogen, an alkyl group having 1 to 7 carbon atoms, an alkylene group, a phenyl group, a mercapto group, a hydroxyl group, or an amino group.

Since the salt of the tetrazole compound represented by the general formulas (4) to (6) also has a skeleton derived from the tetrazole compound represented by the general formulas (4) to (6), light is irradiated. And nitrogen gas can be generated.
The salt of the tetrazole compound represented by the general formulas (4) to (6) is not particularly limited, and examples thereof include a sodium salt, a potassium salt, and an ammonium salt.

The salt of the tetrazole compound represented by the general formulas (4) to (6) can be obtained by simply mixing the tetrazole compound and the basic compound represented by the general formulas (4) to (6) in a container. It can be easily prepared without going through a complicated synthetic route.
The basic compound is not particularly limited, and examples thereof include amines, hydrazine compounds, quaternary ammonium hydroxide salts, and phosphine compounds.
The amine is not particularly limited, and any of primary amines, secondary amines, and tertiary amines can be used.
Among these, the basic compound is preferably a monoalkylamine or a dialkylamine. When monoalkylamine or dialkylamine is used, the polarity of the resulting salt of the tetrazole compound represented by the general formulas (4) to (6) can be reduced and dissolved with the photocurable pressure-sensitive adhesive component. Can increase the sex. More preferably, it is a C6-C12 monoalkylamine or dialkylamine.

The tetrazole compound represented by the general formula (4) or a salt thereof is not particularly limited, but specifically, for example, 1H-tetrazole, 5-phenyl-1H-tetrazole, 5,5-azobis-1H-tetrazole, 5 -Amino-1H-tetrazole, 5-methyl-1H-tetrazole, 1-methyl-5-mercapto-1H-tetrazole, 1-methyl-5-ethyl-1H-tetrazole, 1- (dimethylaminoethyl) -5-mercapto -1H-tetrazole and the like.

Although the tetrazole compound or its salt represented by the said General formula (5) is not specifically limited, For example, 5,5'-bistetrazole diammonium salt etc. are mentioned.

Although the tetrazole compound or its salt represented by the said General formula (6) is not specifically limited, For example, 5,5'-bistetrazoleamine monoammonium salt etc. are mentioned.

As for the content of the gas generating agent, a preferable lower limit with respect to 100 parts by weight of the curable pressure-sensitive adhesive component is 5 parts by weight, and a preferable upper limit is 50 parts by weight. When the content of the gas generating agent is less than 5 parts by weight, the generation of carbon dioxide gas or nitrogen gas due to stimulation may be reduced, and sufficient peeling may not be performed. In some cases, it cannot be dissolved in the pressure-sensitive adhesive component, resulting in a decrease in adhesive strength. The minimum with more preferable content of the said gas generating agent is 10 weight part, and a more preferable upper limit is 30 weight part.

The pressure-sensitive adhesive layer may further contain a photosensitizer.
Since the photosensitizer has an effect of amplifying stimulation by light on the gas generating agent, gas can be released by irradiation with less light. In addition, gas can be emitted by light in a wider wavelength region.

The photosensitizer is not particularly limited as long as it has excellent heat resistance.
Examples of the photosensitizer excellent in heat resistance include polycyclic aromatic compounds having at least one alkoxy group. Among these, a substituted alkoxy polycyclic aromatic compound having an alkoxy group partially substituted with a glycidyl group or a hydroxyl group is preferable. These photosensitizers have high resistance to sublimation and can be used at high temperatures. Moreover, when a part of alkoxy group is substituted with a glycidyl group or a hydroxyl group, the solubility to the said photocurable adhesive component increases, and a bleed-out can be prevented.

The content of the photosensitizer is preferably 0.05 parts by weight and preferably 10 parts by weight with respect to 100 parts by weight of the curable pressure-sensitive adhesive component. When the content of the photosensitizer is less than 0.05 parts by weight, a sufficient sensitizing effect may not be obtained. When the content exceeds 10 parts by weight, the residue derived from the photosensitizer increases. , Sufficient peeling may not be performed. The minimum with more preferable content of the said photosensitizer is 0.1 weight part, and a more preferable upper limit is 5 weight part.

The pressure-sensitive adhesive layer may contain fumed silica. By blending fumed silica, the cohesive force of the pressure-sensitive adhesive layer is increased. Therefore, the pressure-sensitive adhesive layer can be made uniform without separation even when additives having different polarities are mixed with the functional group-containing (meth) acrylic polymer.

The lower limit of the average particle diameter of the fumed silica is 0.05 μm, and the upper limit is 3 μm. When the average particle diameter of the fumed silica is within this range, it is possible to exhibit high heat resistance that does not cause floating or the like even in the metal vapor deposition step and high non-glue residue that does not leave glue in the peeling step. The preferable lower limit of the average particle diameter of the fumed silica is 0.06 μm, the preferable upper limit is 2 μm, the more preferable lower limit is 0.07 μm, and the more preferable upper limit is 1 μm.
In addition, in this specification, the average particle diameter of fumed silica is determined by using any of the laser scattering / diffraction method or the dynamic light scattering method, methyl ethyl ketone, methyl ethyl ketone / toluene (60:40) solution before blending, or the like. The particle diameter of fumed silica dispersed in the medium is measured.

When mix | blending the said fumed silica, the compounding quantity of 40 weight part or less is preferable with respect to 100 weight part of said curable adhesive components. With a blending amount of 40 parts by weight or less, the effect of improving the cohesive force to make the pressure-sensitive adhesive layer uniform and the effect of improving non-glue residue can be exhibited. Although the minimum of the compounding quantity of the said fumed silica is not specifically limited, In order to fully exhibit the effect of the uniformity of the said adhesive, and non-glue remaining property, it is preferable to mix | blend 3 weight part or more.

The pressure-sensitive adhesive layer may contain a silicone compound having a functional group capable of crosslinking with the curable pressure-sensitive adhesive component (hereinafter also simply referred to as “silicone compound A”).
Since the silicone compound is excellent in heat resistance, even if heat is generated during the dicing process, the adhesive is prevented from being burnt and the like is bleed out to the adherend interface at the time of peeling to facilitate peeling. Since the silicone compound has a functional group capable of cross-linking with the curable pressure-sensitive adhesive component, the silicone compound reacts with the curable pressure-sensitive adhesive component by giving a stimulus and is incorporated into the curable pressure-sensitive adhesive component. Silicone compounds do not adhere to the body and become contaminated.

The silicone skeleton of the silicone compound A is not particularly limited, and may be either D-form or DT-form. The silicone compound A preferably has the functional group at the side chain or terminal of the silicone skeleton. In particular, the use of a silicone compound having a D-form silicone skeleton and having a functional group capable of crosslinking with the curable pressure-sensitive adhesive component at the end achieves both high initial adhesiveness and releasability at the time of peeling. It is more suitable because it is easy.

As the functional group of the silicone compound A, an appropriate one is selected and used in accordance with the curable pressure-sensitive adhesive component. For example, when the curable pressure-sensitive adhesive component is a curable pressure-sensitive adhesive mainly comprising a (meth) acrylic acid alkyl ester-based polymerizable polymer having a radical polymerizable unsaturated bond in the molecule, ) Select a functional group capable of crosslinking with an acrylic group.
The functional group capable of crosslinking with the (meth) acryl group is a functional group having an unsaturated double bond, and specific examples include a vinyl group, a (meth) acryl group, an allyl group, and a maleimide group. .

The functional group equivalent of the silicone compound A is not particularly limited, but the preferred lower limit is 1, and the preferred upper limit is 20. When the functional group equivalent is less than 1, the silicone compound A is not sufficiently taken into the photocurable pressure-sensitive adhesive component when the resulting pressure-sensitive adhesive layer is cured, and the adherend is contaminated or the peelability is sufficient. If it exceeds 20, sufficient adhesive strength may not be obtained. A more preferable upper limit of the functional group equivalent is 10, a more preferable lower limit is 2, and a more preferable upper limit is 6.

The molecular weight of the silicone compound A is not particularly limited, but a preferred lower limit is 300 and a preferred upper limit is 50000. When the molecular weight is less than 300, the chemical resistance and heat resistance of the pressure-sensitive adhesive layer may be insufficient, and when it exceeds 50,000, mixing with the curable pressure-sensitive adhesive component may be difficult. The more preferable lower limit of the molecular weight is 400, the more preferable upper limit is 10,000, the still more preferable lower limit is 500, and the more preferable upper limit is 5000.

The method for synthesizing the silicone compound A is not particularly limited. For example, the silicone resin having a SiH group and the vinyl compound having a functional group capable of crosslinking with the curable pressure-sensitive adhesive component are reacted by a hydrosilylation reaction. A method for introducing a functional group capable of crosslinking with the curable pressure-sensitive adhesive component into a silicone resin, a method for causing a condensation reaction between a siloxane compound and a siloxane compound having a functional group capable of crosslinking with the curable pressure-sensitive adhesive component, etc. Is mentioned.

Examples of commercially available silicone compounds A include X-22-164, X-22-164AS, X-22-164A, X-22-164B, and X-22-164C manufactured by Shin-Etsu Chemical Co., Ltd. , A silicone compound having methacrylic groups at both ends such as X-22-164E, and a methacrylic group at one end such as X-22-174DX, X-22-2426, X-22-2475 manufactured by Shin-Etsu Chemical Co., Ltd. Silicone compounds having an acrylic group such as EBECRYL350 and EBECRYL1360 manufactured by Daicel Cytec, and silicone compounds having an acrylic group such as AC-SQ TA-100 and AC-SQ SI-20 manufactured by Toagosei Co., Ltd. MAC-SQ TM-100, MAC-SQ SI-20, MAC-S manufactured by Toagosei Co., Ltd. Silicone compounds having a methacryl group such as HDM and the like.

Especially, since the said silicone compound A has especially high chemical resistance and heat resistance, and since the polarity is high, it is easy to bleed out from an adhesive layer, Therefore The following general formula (I), general formula (II) A silicone compound having a (meth) acryl group in the siloxane skeleton represented by the general formula (III) is preferable.

In the formula, X and Y represent an integer of 0 to 1200 (except when X and Y are both 0), and R represents a functional group having an unsaturated double bond.

Of the silicone compounds having a (meth) acryl group in the siloxane skeleton represented by the above general formula (I), general formula (II), or general formula (III), commercially available products are, for example, manufactured by Daicel Cytec Co., Ltd. EBECRYL350, EBECRYL1360 (both of which R is an acrylic group) and the like.

Moreover, the said silicone compound can also use the silicone compound which has a three-dimensional structure represented by the following general formula (IV).

The preferable lower limit of the content of the silicone compound A is 0.5 parts by weight with respect to 100 parts by weight of the curable pressure-sensitive adhesive component, and the preferable upper limit is 50 parts by weight. When the content of the silicone compound A is less than 0.5 parts by weight, the adhesive strength may not be sufficiently reduced even if stimulation is given, and the adherend may not be peeled off. May cause contamination. The more preferable lower limit of the content of the silicone compound A is 1 part by weight, and the more preferable upper limit is 40 parts by weight.

The above-mentioned pressure-sensitive adhesive layer may appropriately contain various polyfunctional compounds that are blended in general pressure-sensitive adhesives such as isocyanate compounds, melamine compounds, and epoxy compounds for the purpose of adjusting the cohesive force.
The pressure-sensitive adhesive layer may contain known additives such as a plasticizer, a resin, a surfactant, a wax, and a fine particle filler.

The pressure-sensitive adhesive layer has a storage shear modulus of 1.0 × 10 5 at 25 ° C. measured at a continuous temperature rise from −50 ° C. to 300 ° C. in the shear mode of dynamic viscoelasticity measurement before the dicing tape attaching step. it is preferably ^{2 ~2.0} × ¹⁰ 5 Pa. The storage shear elastic modulus of the pressure-sensitive adhesive layer before crosslinking and curing is within this range, so that even if the wafer has a concavo-convex with a height of 20 μm or more on the surface, it can follow the concavo-convex more reliably. The wafer can be reliably protected. The more preferable lower limit of the storage shear modulus at 25 ° C. before the dicing tape attaching step of the pressure-sensitive adhesive layer is 1.0 × 10 ³ Pa, and the more preferable upper limit is 1.0 × 10 ⁵ Pa.

The pressure-sensitive adhesive layer has a storage shear modulus of 2.0 × 10 5 at 25 ° C. measured at -50 ° C. to 300 ° C. in the shear mode of dynamic viscoelasticity measurement after the pressure-sensitive adhesive layer curing step. ⁵ is preferably ~1.0 × ¹⁰ 9 Pa. When the storage shear modulus of the pressure-sensitive adhesive layer after crosslinking and curing is within this range, the wafer is sufficiently protected without causing misalignment even when an aqueous organic solvent is used in the dicing process, In addition, residue adhesion does not occur on the resulting semiconductor chip. In addition, even after the adhesive layer curing process and before the dicing process, the adhesive layer of the dicing tape shrinks due to heating even if it has a wafer processing process in which the wafer reinforced with the dicing tape is subjected to a process involving heating. Thus, it is possible to prevent the wafer from warping or adhesion enhancement to cause residue to adhere to the surface of the semiconductor chip. The more preferable lower limit of the storage shear modulus at 25 ° C. after the pressure-sensitive adhesive layer curing step of the pressure-sensitive adhesive layer is 1.0 × 10 ⁶ Pa, and the more preferable upper limit is 5.0 × 10 ⁸ Pa.

Although the thickness of the said adhesive layer is not specifically limited, A preferable minimum is 5 micrometers and a preferable upper limit is 100 micrometers. When the thickness of the pressure-sensitive adhesive layer is within this range, it can be adhered to the wafer with sufficient adhesive force, and the wafer being processed can be protected. The minimum with more preferable thickness of the said adhesive layer is 10 micrometers, and a more preferable upper limit is 50 micrometers.

In the case where the wafer is a wafer having irregularities with a height of 20 μm or more on the surface, it is also effective to make the thickness of the pressure-sensitive adhesive layer thinner than the irregularities of the wafer.
A passivation film made of a resin such as polyimide may be formed on the surface of the wafer for the purpose of protecting the surface of the wafer. When a dicing tape is affixed to the surface side having such irregularities on the wafer, the convex portion may bite into the pressure-sensitive adhesive layer, and may directly contact the passivation film. If a wafer processing step for performing a process involving heating in such a state is performed, the pressure-sensitive adhesive layer is scorched on the passivation film, which tends to cause adhesive residue. By making the thickness of the pressure-sensitive adhesive layer thinner than the height of the unevenness of the wafer, it is possible to prevent the pressure-sensitive adhesive layer from coming into direct contact with the passivation film at the time of sticking and to further prevent the occurrence of adhesive residue.

When the thickness of the pressure-sensitive adhesive layer is thinner than the height of the unevenness of the wafer, the preferable lower limit of the difference between the thickness of the pressure-sensitive adhesive layer and the height of the unevenness of the wafer is 10 μm, and the preferable upper limit is 100 μm. When the difference is less than 10 μm, a part where the pressure-sensitive adhesive layer and the passivation film are in direct contact with each other is generated, and an adhesive residue may be generated. If the difference exceeds 100 μm, the adhesive strength is insufficient and the wafer may not be sufficiently protected. The more preferable lower limit of the difference is 20 μm, and the more preferable upper limit is 80 μm.

The base film is not particularly limited. For example, a film made of a transparent resin such as acrylic, olefin, polycarbonate, vinyl chloride, ABS, polyethylene terephthalate (PET), nylon, urethane, polyimide, or a film having a network structure. And a film having a hole formed therein.

Although the thickness of the said base film is not specifically limited, A preferable minimum is 10 micrometers and a preferable upper limit is 200 micrometers. When the thickness of the base film is within this range, the wafer can be sufficiently reinforced and the semiconductor chip can be easily peeled off in the semiconductor chip peeling step.

In the method for producing a semiconductor chip of the present invention, a pressure-sensitive adhesive layer curing step is then performed in which the pressure-sensitive adhesive layer is stimulated to crosslink and cure the curable pressure-sensitive adhesive component. As a result, even when a water-based organic solvent is used in the dicing process, the wafer can be sufficiently protected without causing misalignment or the like, and residue adherence occurs on the obtained semiconductor chip. There is no.

As the curable pressure-sensitive adhesive component, for example, a photo-curable pressure-sensitive adhesive component containing a polymer having an unsaturated double bond such as a vinyl group in a side chain and a photopolymerization initiator activated at a wavelength of 250 to 800 nm was used. In this case, the curable pressure-sensitive adhesive component can be crosslinked and cured by irradiating light having a wavelength of 365 nm or more.
For such a photocurable pressure-sensitive adhesive component, for example, it is preferable to irradiate light with a wavelength of 365 nm with an illuminance of 5 mW or more, more preferably with an illuminance of 10 mW or more, and with an illuminance of 20 mW or more. It is more preferable to irradiate with an illuminance of 50 mW or more. In addition, it is preferable to irradiate light with a wavelength of 365 nm with an integrated illuminance of 300 mJ or more, more preferably with an integrated illuminance of 500 mJ or more and 10,000 mJ or less, and more preferably with an integrated illuminance of 500 mJ or more and 7500 mJ or less. It is particularly preferable to irradiate with an integrated illuminance of 1000 mJ or more and 5000 mJ or less.

The semiconductor chip manufacturing method of the present invention may include a wafer processing step of performing a process involving heating on a wafer reinforced by a dicing tape after the pressure-sensitive adhesive layer curing step and before the next dicing step. Good. In the semiconductor chip manufacturing method of the present invention, even when such a wafer processing step is performed, the curable pressure-sensitive adhesive component is crosslinked and cured in the pressure-sensitive adhesive layer curing step before the wafer processing step. In addition, it is possible to prevent the occurrence of warpage due to heat and the adhesion of residues to the surface of the semiconductor chip.
The wafer processing step for performing the treatment with heating includes, for example, a grinding process for grinding the wafer to a certain thickness, sputtering, vapor deposition, etching, chemical vapor deposition (CVD), physical vapor deposition (PVD). ), Resist coating / patterning, reflow and the like.

In the semiconductor chip manufacturing method of the present invention, a dicing process is then performed to obtain a semiconductor chip by dicing the wafer reinforced with a dicing tape.
The dicing method is not particularly limited, and a method of cutting and separating using a conventionally known grindstone or the like can be used.
During dicing, a water-based organic solvent such as an isopropyl alcohol aqueous solution may be sprayed onto the surface of the wafer in order to remove shavings. The pressure-sensitive adhesive layer crosslinked and cured in the pressure-sensitive adhesive curing step can exhibit sufficient chemical resistance even with respect to an aqueous organic solvent.

In the semiconductor chip manufacturing method of the present invention, a semiconductor chip peeling step for peeling the semiconductor chip from the dicing tape is then performed.
The method for peeling the semiconductor chip is not particularly limited, and a conventionally known method can be used. That is, either a needle pickup method in which the obtained semiconductor chip is pushed from the dicing tape side with a needle or a needleless pickup method that does not use a needle may be used.
Since the elastic modulus of the pressure-sensitive adhesive layer crosslinked and cured in the pressure-sensitive adhesive curing step is increased, the semiconductor chip can be peeled off easily and without residue. Further, even if the time has elapsed after the dicing tape is applied to the wafer, the adhesion enhancement hardly proceeds.

When the pressure-sensitive adhesive layer contains the gas generating agent, the semiconductor chip can be peeled off more easily by generating a gas from the gas generating agent by applying a stimulus in the semiconductor chip peeling step.
For example, when a gas generating agent that generates gas by irradiating light with a wavelength of 300 nm or less is used as the gas generating agent, gas is emitted from the gas generating agent by irradiating light with a wavelength of 300 nm or less. The semiconductor chip can be peeled off from the dicing tape more easily.
For such a gas generating agent, for example, light with a wavelength of 254 nm is preferably irradiated with an illuminance of 5 mW or more, more preferably with an illuminance of 10 mW or more, and irradiation with an illuminance of 20 mW or more. More preferably, irradiation with an illuminance of 50 mW or more is particularly preferable. Moreover, it is preferable to irradiate light with a wavelength of 254 nm with an integrated illuminance of 1000 mJ or more, more preferably with an integrated illuminance of 1000 mJ or more and 20 J or less, and more preferably with an integrated illuminance of 1500 mJ or more and 15 J or less. It is particularly preferable to irradiate with an integrated illuminance of 2000 mJ or more and 10 J or less.

According to the present invention, there is provided a method for manufacturing a semiconductor chip by dicing a wafer in a state reinforced with a dicing tape, without causing misalignment or the like even when an aqueous organic solvent is used. It is possible to provide a method for manufacturing a semiconductor chip in which residue adhesion does not occur on the manufactured semiconductor chip.

Hereinafter, embodiments of the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

Example 1
(1) Preparation of dicing tape A reactor equipped with a thermometer, a stirrer, and a cooling tube was prepared. In this reactor, 94 parts by weight of 2-ethylhexyl acrylate as a (meth) acrylic acid alkyl ester and a functional group-containing monomer After adding 6 parts by weight of hydroxyethyl methacrylate, 0.01 part by weight of lauryl mercaptan and 80 parts by weight of ethyl acetate, the reactor was heated to start refluxing. Subsequently, 0.01 parts by weight of 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane was added as a polymerization initiator in the reactor, and polymerization was started under reflux. It was. Next, after 1 hour and 2 hours from the start of polymerization, 0.01 parts by weight of 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane was added, and the polymerization was started. 4 hours later, 0.05 part by weight of t-hexylperoxypivalate was added to continue the polymerization reaction. Then, 8 hours after the start of polymerization, an ethyl acetate solution of a functional group-containing (meth) acrylic polymer having a solid content of 55% by weight and a weight average molecular weight of 600,000 was obtained.
The resin solid content of 100 parts by weight of the ethyl acetate solution containing the functional group-containing (meth) acrylic polymer was added and reacted with 3.5 parts by weight of 2-isocyanatoethyl methacrylate as the functional group-containing unsaturated compound. To obtain a photocurable pressure-sensitive adhesive.

1 part by weight of a photopolymerization initiator (Esacure One, manufactured by Nippon Shibel Hegner), 100 parts by weight of the resin solid content of the resulting ethyl acetate solution of the photocurable adhesive, a silicone compound having a (meth) acrylic group (Daicel) Cytec Co., Ltd., EBECRYL350 (acrylic equivalent 2) 2 parts by weight, plasticizer (Negami Kogyo Co., UN-5500) 10 parts by weight, and crosslinking agent (Nippon Polyurethane Co., Ltd., Coronate L-45) 0.5 part by weight Parts were mixed to prepare an ethyl acetate solution of the pressure-sensitive adhesive composition.
A doctor knife so that the ethyl acetate solution of the obtained pressure-sensitive adhesive composition has a dry film thickness of 30 μm on the corona-treated surface of a transparent polyethylene naphthalate film having a thickness of 50 μm that has been corona-treated on one side. The coating solution was dried by heating at 110 ° C. for 5 minutes. Thereafter, static curing was performed at 40 ° C. for 3 days to obtain a dicing tape.

(2) Corona of a transparent polyethylene naphthalate film having a thickness of 50 μm obtained by corona-treating an ethyl acetate solution of a photocurable adhesive as a sample for evaluation and evaluation of the elastic modulus of the adhesive layer before and after UV irradiation On the treated surface, apply with a doctor knife so that the thickness of the dry film is 500 μm, heat at 110 ° C. for 5 minutes to dry the coating solution, and then perform static curing at 40 ° C. for 3 days. It was. The obtained adhesive tape was cut into a rectangular shape having a length of 0.6 cm and a width of 1.0 cm, and this was used as a sample for evaluation.
Next, using an ultra-high pressure mercury lamp, irradiation of 365 nm ultraviolet rays was performed for 2 minutes while adjusting the illuminance so that the irradiation intensity on the tape surface was 80 mW / cm ^2, and the photocurable pressure-sensitive adhesive component was crosslinked and cured. . About the sample for evaluation before and after hardening, it measured with the shear mode angular frequency of 10 Hz of dynamic viscoelasticity measurement, and the value of the storage elastic modulus at 25 degreeC among the measured values continuously heated from -50 degreeC to 300 degreeC is shown. Obtained.
As a result, the storage shear modulus at 25 ° C. before ultraviolet irradiation was 1.1 × 10 ⁴ Pa, and the storage shear modulus at 25 ° C. after ultraviolet irradiation was 2.3 × 10 ⁷ Pa.

(2) Manufacture of semiconductor chip The surface on the pressure-sensitive adhesive layer side of the dicing tape was attached to the surface of a silicon wafer having a diameter of 20 cm and a thickness of about 100 μm to obtain a laminate. Next, using an ultra-high pressure mercury lamp, irradiation with 365 nm ultraviolet rays is performed for 1 minute while adjusting the illuminance so that the irradiation intensity on the surface of the dicing tape is 80 mW / cm ² to crosslink and cure the photocurable adhesive component. It was.
The wafer reinforced with the dicing tape was diced by a method of cutting and separating using a grindstone or the like to obtain a 10 mm × 10 mm semiconductor chip. During dicing, an aqueous isopropyl alcohol solution was sprayed onto the surface of the wafer in order to remove shavings. During the dicing process, the wafer was sufficiently fixed to the dicing tape, and no occurrence of misalignment was observed.
After the dicing process, the obtained semiconductor chip was peeled off by a method of pushing up from the dicing tape side with a needle.
The surfaces of all the obtained semiconductor chips were observed at a magnification of 100 times using an optical microscope, but no semiconductor chips were found to have attached residues.

(Example 2)
A silicon wafer having a diameter of 20 cm and a thickness of about 100 μm in which a circuit having a groove having a height of 20 μm and a width of 100 μm is formed on one surface is used as a silicon wafer, and a dicing tape is attached to the circuit surface to obtain a laminate. A semiconductor chip was manufactured in the same manner as in Example 1 except that.
As a result, during the dicing process, the wafer was sufficiently fixed to the dicing tape, and no occurrence of misalignment was observed, and the surfaces of all the obtained semiconductor chips were magnified by a factor of 100 using an optical microscope. As a result of observation, no semiconductor chip was found to have adhered residues.

(Example 3)
As a silicon wafer, a silicon wafer having a diameter of 20 cm and a thickness of about 100 μm on which an electrode having a height of 80 μm is formed on a surface on which a polyimide passivation film is formed, and a dicing tape is attached to the electrode surface to form a laminate. A semiconductor chip was manufactured in the same manner as in Example 1 except that it was obtained.
As a result, during the dicing process, the wafer was sufficiently fixed to the dicing tape, and no occurrence of misalignment was observed, and the surfaces of all the obtained semiconductor chips were magnified by a factor of 100 using an optical microscope. As a result of observation, no semiconductor chip was found to have adhered residues.

Example 4
In the manufacture of semiconductor chips, after the photocurable adhesive component is cross-linked and cured, before dicing, the wafer reinforced with dicing tape is placed in a reflow oven and subjected to a total of 3 heat treatments at 260 ° C. for 6 minutes. A semiconductor chip was manufactured in the same manner as in Example 1 except that the process was repeated.
As a result, during the dicing process, the wafer was sufficiently fixed to the dicing tape, and no occurrence of misalignment was observed, and the surfaces of all the obtained semiconductor chips were magnified by a factor of 100 using an optical microscope. As a result of observation, no semiconductor chip was found to have adhered residues.

(Comparative Example 1)
A semiconductor chip was produced in the same manner as in Example 1 except that the photocurable pressure-sensitive adhesive component was not crosslinked and cured without performing ultraviolet irradiation before the dicing step.
As a result, during the dicing process, the adhesive strength of the dicing tape was reduced and a slight positional shift occurred. Moreover, when the surface of all the obtained semiconductor chips was observed at 100-times magnification using the optical microscope, the semiconductor chip which the residue adhered was recognized.

(Comparative Example 2)
A semiconductor chip was manufactured in the same manner as in Example 2 except that the dicing tape was irradiated with ultraviolet rays to crosslink and cure the photocurable adhesive component before being attached to the wafer.
However, the dicing tape did not sufficiently adhere to the wafer, and the dicing process could not be performed.

(Comparative Example 3)
As a silicon wafer, a silicon wafer having a diameter of 20 cm and a thickness of about 100 μm in which an electrode having a height of 20 μm is formed on a surface on which a polyimide passivation film is formed, and a dicing tape is attached to the electrode surface to form a laminate. A semiconductor chip was manufactured in the same manner as in Example 3 except that the photocurable pressure-sensitive adhesive component was not crosslinked and cured without performing ultraviolet irradiation before the dicing step.
As a result, during the dicing process, the adhesive strength of the dicing tape was reduced and a slight positional shift occurred. Further, when the surfaces of all the obtained semiconductor chips were observed at a magnification of 100 times using an optical microscope, a large number of semiconductor chips to which residues adhered were observed.

(Comparative Example 4)
A semiconductor chip was produced in the same manner as in Example 4 except that the photocurable pressure-sensitive adhesive component was not crosslinked and cured without performing ultraviolet irradiation before the dicing step.
As a result, during the dicing process, the adhesive strength of the dicing tape was reduced and a slight positional shift occurred. Further, when the surfaces of all the obtained semiconductor chips were observed at a magnification of 100 times using an optical microscope, a large number of semiconductor chips to which residues adhered were observed.

According to the present invention, there is provided a method for manufacturing a semiconductor chip by dicing a wafer in a state reinforced with a dicing tape, without causing misalignment or the like even when an aqueous organic solvent is used. It is possible to provide a method for manufacturing a semiconductor chip in which residue adhesion does not occur on the manufactured semiconductor chip.

Claims (7)

At least a dicing tape affixing step for adhering a dicing tape comprising a pressure-sensitive adhesive layer containing a curable pressure-sensitive adhesive component that crosslinks and cures upon stimulation and a base film to the wafer from the pressure-sensitive adhesive layer side; and
A pressure-sensitive adhesive layer curing step of stimulating the pressure-sensitive adhesive layer to crosslink and cure the curable pressure-sensitive adhesive component;
A dicing step of obtaining semiconductor chips by dicing the wafer reinforced by the dicing tape;
A method of manufacturing a semiconductor chip, comprising: a semiconductor chip peeling step for peeling the semiconductor chip from the dicing tape. 2. The method of manufacturing a semiconductor chip according to claim 1, wherein the wafer has irregularities having a height of 20 [mu] m or more on a surface to which the single-sided adhesive tape is applied. 3. The method of manufacturing a semiconductor chip according to claim 2, wherein the thickness of the pressure-sensitive adhesive layer of the dicing tape is thinner than the height of the unevenness of the wafer. The adhesive shear layer before the dicing tape attaching step has a storage shear elastic modulus at 25 ° C. measured from -50 ° C. to 300 ° C. in the shear mode of dynamic viscoelasticity measurement under the condition of continuous temperature rise of 1.0 × 10 ² to At 25 ° C. measured at 2.0 × 10 ⁵ Pa and the pressure-sensitive adhesive layer after the pressure-sensitive adhesive layer curing step was continuously heated from −50 ° C. to 300 ° C. in a shear mode of dynamic viscoelasticity measurement. 4. The method of manufacturing a semiconductor chip according to claim 1, wherein the storage shear elastic modulus is from 2.0 × 10 ^{5 to} 1.0 × 10 ⁹ Pa. 5. 5. The semiconductor chip according to claim 1, further comprising a wafer processing step of performing a process involving heating on the wafer reinforced by the dicing tape after the pressure-sensitive adhesive layer curing step and before the dicing step. Production method. 6. The method of manufacturing a semiconductor chip according to claim 1, wherein the stimulus for crosslinking and curing the curable pressure-sensitive adhesive component is ultraviolet light. The pressure-sensitive adhesive layer further contains a gas generating agent that generates gas by stimulation, and generates gas from the gas generating agent by applying stimulation in the semiconductor chip peeling step. A method for manufacturing a semiconductor chip according to 3, 4, 5 or 6.