JPWO2013084297A1 - Electrical characteristic inspection device, external unit transfer device, and electronic component transfer device - Google Patents

Abstract

  The size of the external post-processing apparatus can be easily changed even in consideration of installation in the electronic component conveying apparatus. A post-process processing apparatus such as a test unit that processes the electronic component is provided outside the main transfer path. A processing stage such as a socket on which electronic components are mounted is provided on a side surface of the apparatus main body. The transport means for transporting the electronic component between the main transport path and the processing stage is arranged to pass by the side surface on which the processing stage is provided.

Description

  The present invention relates to a post-process processing apparatus that performs post-process processing on an electronic component, and a transport for an external unit that transports an electronic component toward a post-process processing apparatus that is externally placed with respect to a main transport path that performs various post-processing The present invention relates to an apparatus and an electronic component conveying apparatus including these.

  The electronic component that has undergone each assembly process of dicing, mounting, bonding, and sealing is supplied to the electronic component transport apparatus. And while being held by a holding mechanism provided in the electronic component transfer apparatus and being transferred in the main transfer path, each process process such as measurement of electrical characteristics of devices, classification, marking, appearance inspection, packing, etc. is performed. In such an electronic component transport apparatus, in order to improve processing efficiency, time for process processing is shortened and transport time between process processes is shortened.

  Conventionally, an electronic component transport apparatus has been mainly used for horizontal supply of tray supply and tray storage, that is, transport in the XY biaxial direction (see, for example, Patent Document 1). However, in such transport using an XY robot, the index time, which is the transport time from one process to another, is limited to about 0.5 seconds. In a device having a test time of about 1 to 3 seconds, shortening the effective test processing time by simultaneous measurement of a large number is effective in reducing the test cost, but at this time, the above-mentioned transport time has become a bottleneck.

  In addition, the horizontal transfer type as described above is not flexible in the arrangement of processing points, and in order to provide various processing steps, it is necessary to provide a plurality of turntables adjacent to the transfer lane, such as marking, image inspection, and taping It was difficult to connect these processes continuously (for example, refer to Patent Document 2).

  Therefore, as an electronic component transport apparatus, a system that includes a rotary turntable and uses the outer periphery of the turntable as a main transport path is often employed. This rotational conveyance method has an advantage that the conveyance time is as fast as 0.1 seconds or less, and it is easy to install various post-process processing apparatuses (see, for example, Patent Document 3).

  However, even with this rotary conveyance type electronic component conveyance device, it may be preferable to dispose the electronic component conveyance device outside the main conveyance path depending on the post-processing apparatus. For example, for further processing efficiency, there is a post-process processing device that tends to increase in size for the purpose of batch processing a large number of electronic components.

  A good example is a test unit that measures electrical characteristics such as voltage, current, resistance, or frequency of an electronic component by passing a current or applying a voltage to the electronic component. In particular, it is necessary to minimize the wiring length of the test head and the test board in order to accurately test the performance of the test unit, and it may be better to install the test unit outside the electronic component transfer device. .

  Such an external post-processing apparatus is provided with a processing stage for mounting electronic components on the top surface, a branch conveyance path from the turntable, and the branch conveyance path passing above the post-processing apparatus. (For example, see Patent Document 4).

Japanese Patent Laid-Open No. 11-67794 JP-A-5-229509 JP-A-3-30340 JP 2010-14632 A

  The electronic component transport mechanism that forms the branched transport path is supported by a frame. Since the branch conveyance path passes above the post-process processing apparatus, this frame has a gate shape composed of a foot part extending from the installation surface and a parallel part supported by the foot part. It will be accommodated in the defined internal space.

  For this reason, the size of the post-processing apparatus is limited by this frame, and there is a possibility that further improvement in processing efficiency may be hindered. Alternatively, it is necessary to redesign the frame and the branch conveyance path supported by the frame in accordance with the increased size of the post-process processing apparatus, resulting in an increase in manufacturing cost. Therefore, conventionally, the size of the external post-processing apparatus cannot be easily changed.

  The present invention has been proposed in order to solve the above-described problems, and an external post-processing apparatus that can be easily changed in size even in consideration of being installed in an electronic component conveying apparatus. It is an object of the present invention to provide an external unit transport device that transports electronic components to a post-processing apparatus that is externally placed with respect to a main transport path, and an electronic component transport device including these.

  The post-process processing apparatus according to the present invention is provided in an electronic component transport apparatus that transports electronic components subjected to various process processes along a main transport path, and performs post-process processing on the electronic components. An apparatus main body provided outside the main transport path, a processing stage provided on a side surface of the apparatus main body, on which the electronic component is mounted, and a side of the side surface on which the processing stage is provided And a transfer means for transferring the electronic component between the main transfer path and the processing stage.

  The transport means includes a first holding means and a second holding means, and the first holding means rotates from a first angle facing directly downward to a second angle facing the processing stage, The second holding means and the electronic component are delivered at a first angle, the electronic component is attached to and detached from the processing stage at the second angle, and the second holding means is connected to the main transport path. You may make it reciprocate between the 1st holding means and the 1st holding means and the said electronic component which were located in the said 1st angle.

  The second holding means is provided on each of the sliders, a pair of shafts extending parallel to a straight line across a position directly below the first holding means, each slider slidable on the shaft, Each mounting stage of the electronic component having a common movement locus including directly below the first holding means, and each lifting means for lifting and lowering each mounting table, and each mounting table is alternated by the lifting means It may be possible to pass up and down by moving up and down.

  A plurality of the first holding means may be provided radially from the center of rotation, and after receiving the electronic component from the second holding means, the first holding means may rotate once while rotating intermittently.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and a plurality of the first holding means are provided along the arrangement direction of the processing stages, and the processing stages and the second holding means are provided. The movement amount of the electronic component, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and the first holding means is provided by being divided into a plurality of pieces by being fitted to a rotating shaft arranged along the arrangement direction of the processing stages. The position may be adjusted in accordance with the pitch of the processing stages by sliding independently along the rotation axis.

  In addition, the external unit transport apparatus according to the present invention supplies the electronic component by branching from the main transport path to a post-processing unit in which a stage for processing the electronic component is provided on the side surface of the apparatus main body. A transfer device for an external unit, the transfer unit being arranged so as to pass by the side of the side surface provided with a processing stage, and for transferring the electronic component between the main transfer path and the processing stage. And the conveying means includes a first holding means and a second holding means, and the first holding means rotates from a first angle facing directly downward to a second angle facing the processing stage. The second holding means and the electronic component are delivered at the first angle, the electronic component is attached to and detached from the processing stage at the second angle, and the second holding means is the main transport Route It said first and forth between the underneath of the holding means, the first of said positioned at an angle with the first holding means to said transferring electronic components, characterized by.

  The second holding means is provided on each of the sliders, a pair of shafts extending parallel to a straight line across a position directly below the first holding means, each slider slidable on the shaft, Each mounting stage of the electronic component having a common movement locus including directly below the first holding means, and each lifting means for lifting and lowering each mounting table, and each mounting table is alternated by the lifting means It may be possible to pass up and down by moving up and down.

  A plurality of the first holding means may be provided radially from the center of rotation, and after receiving the electronic component from the second holding means, the first holding means may rotate once while rotating intermittently.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and a plurality of the first holding means are provided along the arrangement direction of the processing stages, and the processing stages and the second holding means are provided. The movement amount of the electronic component, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and a plurality of the first holding means are provided separately by being fitted to a rotating shaft arranged along the arrangement direction of the processing stages. The position may be adjusted in accordance with the pitch of the processing stages by sliding independently along the rotation axis.

  The electronic component conveying apparatus according to the present invention is an electronic component conveying apparatus that performs various process processes while conveying an electronic component, and is provided on the main conveying path of the electronic component and the main conveying path. Separately from the process processing means for performing various process processes, a unit main body for performing one process processing provided outside the main transport path, provided on a side surface of the unit main body, A processing stage on which a component is mounted, and a branch transport unit that is disposed so as to pass by the side of the side surface on which the processing stage is provided, and transports the electronic component between the main transport path and the processing stage. And comprising.

  A holding unit for main transfer that holds the electronic component and intermittently moves along the main transfer path; the branch transfer unit includes a first holding unit and a second holding unit; The holding means rotates from a first angle facing directly downward to a second angle facing the processing stage, delivers the second holding means and the electronic component at the first angle, and at the second angle. The electronic component is attached to and detached from the processing stage, and the second holding means reciprocates between a stop point of the first holding means and directly below the holding means for main conveyance, and the first holding means You may make it deliver the said 2nd holding means and the said electronic component located in the angle.

  The second holding means is provided on each of the sliders, a pair of shafts extending parallel to a straight line across a position directly below the first holding means, each slider slidable on the shaft, Each mounting stage of the electronic component having a common movement locus including directly below the first holding means, and each lifting means for lifting and lowering each mounting table, and each mounting table is alternated by the lifting means It may be possible to pass up and down by moving up and down.

  A plurality of the first holding means may be provided radially from the center of rotation, and after receiving the electronic component from the third holding means, the first holding means may rotate once while rotating intermittently.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and a plurality of the first holding means are provided along the arrangement direction of the processing stages, and the processing stages and the second holding means are provided. The movement amount of the electronic component, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

  A plurality of the processing stages are arranged in the width direction on the side surface of the apparatus main body, and a plurality of the first holding means are provided separately by being fitted to a rotating shaft arranged along the arrangement direction of the processing stages. The position may be adjusted in accordance with the pitch of the processing stages by sliding independently along the rotation axis.

  According to the present invention, unlike the post-processing apparatus having the processing stage on the upper surface, there is no need to extend the branch conveyance path above the post-processing apparatus, and the post-processing apparatus is surrounded by the gate-shaped frame. There is no. That is, the transport means for transporting the electronic component between the main transport path and the processing stage is disposed so as to pass by the side surface on which the processing stage is provided, and the post-processing device is provided with the upper surface and the processing stage. It can be easily expanded in the direction of the two side surfaces adjacent to the formed side surface and the back surface of the side surface. Accordingly, the size of the post-processing apparatus can be easily changed, the processing efficiency can be improved, and the number of scenes where the branch conveyance path must be redesigned can be reduced, thereby preventing an increase in manufacturing cost. .

It is a perspective view which shows the test unit main body set outside. It is a top view which shows the whole test unit. It is a front view of a rotary pickup. It is a top view of a rotary pickup. It is a side view of a rotary pickup. It is a top view which shows a shuttle. It is a top view which shows the moving mechanism of a shuttle. It is a side view which shows the moving mechanism of a shuttle. It is a front view which shows the moving mechanism of a shuttle. An electronic component conveyance apparatus is shown, (a) is a side view of the apparatus which forms a main conveyance path | route, (b) is a top view of an electronic component conveyance apparatus.

  The electronic component transport apparatus according to the present embodiment performs various process processes while aligning and transporting electronic components. Various process processes are mainly post-process processes of electronic components. In the pre-process, it is separated into individual pieces through each assembly process such as dicing, mounting, bonding, and sealing. In the post-process, marking processing, appearance inspection, electrical property inspection, lead molding processing, classification of electronic components, or a combination of these processes is performed.

  The electronic component transport apparatus has a main transport path that goes around various post-process processing apparatuses, and the post-process processing is performed by each post-process processing apparatus. Various post-process processing apparatuses are arranged on the main conveyance path, or are arranged outside the main conveyance path by having a unique branch conveyance path.

  Hereinafter, in the present embodiment, a post-process processing device that has its own branch transport path and is arranged outside the main transport path, an external unit transport device that forms a branch transport path, and electronic component transport including these The apparatus will be described in detail with reference to the drawings. Although the test unit will be described as an example of the post-process processing apparatus, the present invention is not limited thereto, and the present invention can be applied to various post-process processing apparatuses arranged outside the main transport path.

[Constitution]
(Outside test unit)
FIG. 1 is a perspective view showing an externally placed test unit 1. FIG. 2 is a top view showing the test unit 1. A test unit 1 shown in FIGS. 1 and 2 is an apparatus for inspecting electrical characteristics of an electronic component D. The electronic component D is a component used for an electrical product, and includes a semiconductor element. Examples of semiconductor elements include transistors and integrated circuits, and examples of electronic components include resistors and capacitors. The electrical characteristics to be inspected are the voltage, current, resistance, frequency, function test, and the like of the electronic component D. Either a single contact method in which application and measurement are performed by a common contact 11a or a Kelvin contact method in which application and measurement are performed by separate contacts 11a may be employed.

  The test unit 1 is provided with a processing stage on the side surface 1a of the unit body. The side surface 1a is a surface continuous with the installation surface of the unit. The processing stage for inspecting the electrical characteristics of the electronic component D is the socket 11 in which the electronic component D is mounted. The test unit 1 includes a plurality of sockets 11 arranged in the lateral direction of the unit. For example, the sockets 11 are provided in eight rows in a row in the width direction of the unit, and serve as a processing stage on which the electronic component D is mounted and the electrical characteristics are measured.

  The socket 11 serves as a receptacle for the electronic component D, and a contact 11a is provided on the bottom surface. The contact 11a is a metal plate or pin. For example, the contact 11a is made of an alloy such as copper or beryllium copper, stainless steel, tungsten, an alloy thereof, or a superalloy. The contact 11a is in electrical contact with the electrode of the electronic component D when the electronic component D is mounted on the socket 11.

  The test unit 1 transmits a test signal to the electronic component D mounted on the socket 11 via the contact 11a and receives an output signal of the electronic component D via the contact 11a. Then, the test unit 1 analyzes the output signal from the electronic component D and obtains various electrical characteristics of the electronic component D. The test unit 1 stores numerical data indicating an allowable range of electrical characteristics. The test unit 1 determines whether the electronic component D is good or bad by comparing the measurement result of the obtained electrical characteristics with numerical data.

  The test unit 1 includes a branch transport unit 2 that branches an electronic component D to be inspected for electrical characteristics from a main transport path to the socket 11. The branch conveying means 2 conveys the electronic component D between the turntable 100 and the test unit 1 that form the main conveyance path.

  The branching and conveying means 2 is disposed so as to pass along the side of the test unit 1 along the one side surface 1a on which the socket 11 is provided. Since the test unit 1 has the socket 11 on the side surface 1a, the branch transport unit 2 can be extended away from the upper surface of the test unit 1, and the test unit 1 can be installed between the installation surface and the transport unit. It is not necessary to be surrounded by the support frame.

  The branch conveyance means 2 has two types of holding means for the electronic component D. That is, the branch conveyance means 2 includes a rotary pickup 21 and a shuttle 22 as shown in FIG. The shuttle 22 conveys the electronic component D linearly from the turntable 100 to the rotary pickup 21. The rotary pickup 21 conveys the electronic component D between the shuttle 22 and the socket 11 of the test unit 1.

(Rotary pickup)
3 to 5 show the rotary pickup 21, FIG. 3 is a front view orthogonal to the surface and the top surface of the test unit 1 where the socket 11 is provided, FIG. 4 is a top view, and FIG. It is a side view parallel to a surface.

  As shown in FIGS. 3 to 5, the rotary pickup 21 has a plurality of holding means 212 at circumferentially equidistant positions with respect to the rotating body 211. The holding means 212 holds the electronic component D in a detachable manner. For example, four holding means 212 are fixed to the rotating body 211.

  The rotating body 211 is fitted into a rotating shaft 214 connected to the motor 213, and is rotated intermittently by a predetermined angle in the circumferential direction via the rotating shaft 214 by driving the motor 213. In other words, the motor 213 rotates intermittently by a certain angle. The rotation angle of one pitch of the rotator 211 is equal to the installation angle of the adjacent holding means 212. Further, when the rotating body 211 is stopped, any one of the holding means 212 is positioned at the first angle A <b> 1 that goes directly downward, and any one of the holding means 212 faces the socket 11 of the test unit 1. Located in. In other words, the integral multiple of the installation angle of the holding means 212 includes 90 degrees.

  The holding unit 212 includes a suction nozzle 212a and a nozzle driving unit 212b. A nozzle driving unit 212b is disposed closer to the rotating body 211, and the suction nozzle 212a extends in the radial direction of the rotating body 211 following the tip of the nozzle driving unit 212b.

  The suction nozzle 212a is a hollow pipe. The inside of the pipe communicates with a pneumatic circuit of a vacuum generator (not shown) through a tube. The suction nozzle 212a sucks the electronic component D by the generation of negative pressure by the vacuum generator, and separates the electronic component D by vacuum break.

  The nozzle driving unit 212b includes a rod that pushes out the suction nozzle 212a and an actuator that pushes and pulls the rod. When the actuator is operated to push the rod toward the suction nozzle 212a, the suction nozzle 212a is pressed in contact with the tip of the rod at the rear end, and moves in the direction in which the tip of the nozzle protrudes. When the rod is pulled by the actuator, the contact between the suction nozzle 212a and the rod is released, and the tip of the nozzle moves in a direction returning to the inside of the rotating body 211.

  A plurality of rotary pickups 21 are fitted side by side on the rotary shaft 214 corresponding to each socket 11. Each rotary pickup 21 is arranged so that the rotation locus of the holding means 212 and the socket 11 are included in the same plane. That is, when the rotating body 211 rotates by a certain angle, one holding means 212 moves toward the corresponding socket 11.

  These rotary pickups 21 are separated and independent. Position adjustment of each rotary pickup 21 and each socket 11 is performed by sliding each rotary pickup 21 individually in the axial direction of the rotating shaft 214 so as to match the pitch of the socket 11.

  Each of the rotary pickups 21 can be individually controlled. In particular, the pressing load of the electronic component D on the socket 11 via the suction nozzle 212a and the pressing load of the electronic component D on the shuttle 22 via the suction nozzle 212a are controlled for each rotary pickup 21. That is, the load, stroke, and acceleration / deceleration of the nozzle drive unit 212b are individually controlled.

  Specifically, when the suction nozzle 212a is pushed out, the electronic component D held by the suction nozzle 212a is attached to the socket 11, and the electrode of the electronic component D is pushed to the contact 11a in the socket 11 with a desired load. As applied, the position of each rotary pickup 21 and the stroke, torque, and acceleration / deceleration for pushing out each suction nozzle 212a are individually adjusted. The separation distance between the contact 11a in the socket 11 and the tip of the holding means 212 facing the socket 11 is equal to the sum of the pushing amount of the suction nozzle 212a by the nozzle drive unit 212b and the thickness of the electronic component D, or Slightly shorter than the sum.

(shuttle)
FIG. 6 is a top view showing the shuttle 22. The shuttle 22 is a mounting table having a mounting area 22 a for the electronic component D. This shuttle 22 reciprocates between the turntable 100 forming the main transport path and directly below the holding means 212 facing directly below the rotary pickup 21. The shuttle 22 delivers the electronic component D between the turntable 100 and the rotary pickup 21.

  The shuttle 22 has a rectangular shape. A plurality of placement regions 22a are provided along the longitudinal direction. For example, eight placement areas 22 a are provided in a line in accordance with the number of rotary pickups 21. You may make it provide the mounting area | region 22a with the hollow or protrusion which supports the circumference | surroundings of the electronic component D so that the electronic component D may not shift | deviate by acceleration at the time of conveyance. The recess has a trapezoidal cross section along the depth direction, the cross section orthogonal to the cross section has a rectangular shape, and the electronic component D is slid into the recess so that the positional deviation of the electronic component D is corrected. You may be made to do.

  7 to 9 show a moving mechanism of the shuttle 22, FIG. 7 is a top view, FIG. 8 is a side view, and FIG. 9 is a front view. The shuttle 22 is provided on a slider 222 having a nut fitted to the ball screw 221, and moves in a straight line to a position immediately below the row of holding means 212 facing directly below the rotary pickup 21. That is, the ball screw 221 extends as a drive shaft from a position where the electronic component D of the main table is delivered to directly below the rotary pickup 21. The ball screw 221 is connected to a motor 223 and is rotatable. The slider 222 can slide on this axis.

  Note that the movement mechanism of the shuttle 22 can be configured by other known mechanisms. For example, a rail may be provided instead of the ball screw 221, and the slider 222 may be provided with wheels and a motor 223 so as to be self-propelled on the rail. Further, reels around which wires are wound may be provided at both ends, one end of each wire may be fixed to the slider 222, and the slider 222 may be moved by winding and feeding the wire by rotating the reel.

  In the present embodiment, two shuttles 22 reciprocate between the turntable 100 and the rotary pickup 21. Both shuttles 22 have a common movement trajectory T that passes directly below the holding means 212 facing downward. Therefore, the two shuttles 22 have an annular movement trajectory T that spreads up and down, and are moved up and down alternately during movement, with one moving linearly on the upper side and the other moving linearly on the lower side. The three-dimensional intersection is made in the height direction.

  That is, first, two ball screws 221 are provided across a row of holding means 212 facing directly downward, and one shuttle 22 is installed in each of them. Secondly, the shuttle 22 is attached to the slider 222 so that the center line of the shuttle 22 coincides with the row of the holding means 212 facing directly below. Thirdly, each slider 222 is provided with lifting means 224 that lifts and lowers the shuttle 22. The elevating means 224 includes a rail 224a extending in the height direction, a support member that slidably holds the rail 224a, an air cylinder (not shown) that elevates and lowers the support member, and a pressure that supplies pressure to the air cylinder. A supply pipe 224b.

  As a method of raising and lowering the shuttle 22, only one shuttle 22 may be linearly moved only on the upper side without raising and lowering, and only the lower side may be linearly moved by raising and lowering only the other shuttle 22.

[Operation]
In such a test unit 1, first, the position of the rotary pickup 21 is adjusted in accordance with each position of the socket 11 in order to install the apparatus. Specifically, each rotary pickup 21 is slid along the rotation shaft 214 so that the rotation locus of each holding means 212 and the socket 11 are included in the same plane.

  In operation, first, the electronic component D is exchanged between the turntable 100 and the shuttle 22. One shuttle 22 stops so that the top placement area 22a is positioned at the delivery position of the turntable 100, and then intermittently moves a plurality of times by the formation interval pitch of the placement area 22a. The plurality of movements is the number of times obtained by subtracting 1 from the number of placement areas 22a.

  On the shuttle 22, the electronic component D for which the electrical property test has been completed is already placed. First, the electronic component D placed in the top placement area 22a is picked up and returned to the turntable 100, and the top placement area 22a that is empty is subjected to an electrical characteristic test. The electronic component D that has moved along the turntable 100 is placed. The shuttle 22 intermittently moves one pitch at a time, so that the replaced electronic components D are sequentially mounted on the subsequent mounting area 22a.

  The shuttle 22 equipped with the electronic component D to be tested for electrical characteristics goes from the turntable 100 directly below the rotary pickup 21. On the other hand, the shuttle 22 equipped with the electronic component D for which the test of the electrical characteristics by the test unit 1 is completed proceeds from the rotary pickup 21 to the turntable 100.

  The shuttle 22 heading for the rotary pickup 21 is lifted by the lifting / lowering means 224 when the turntable 100 and the electronic component D are exchanged. The shuttle 22 moves up to the rotary pickup 21 along the upper movement trajectory T while being lifted by the elevating means 224. On the other hand, the shuttle 22 heading to the turntable 100 is lowered by the elevating means 224 after completing the exchange of the electronic component D with the rotary pickup 21, and the turntable 100 is delivered by following the lower movement locus T. It moves to the place and rises again by the lifting means 224. For this reason, the two shuttles 22 pass up and down between the turntable 100 and the rotary pickup 21.

  The shuttle 22 is mounted with an electronic component D to be tested for electrical characteristics, and moves to a position immediately below the rotary pickup 21. At this time, the shuttle 22 stops so that the mounting areas are located in a one-to-one correspondence directly below the holding means 212 facing downward.

  The rotary pickup 21 receives the electronic component D from the shuttle 22 located immediately below. The suction nozzle 212a of the holding means 212 directed downward is lowered to the electronic component D by the nozzle driving unit 212b and sucks the electronic component D by the generation of negative pressure by the vacuum generator. At this time, the descending amount of the suction nozzle 212a, the pushed-out torque, and the acceleration / deceleration are controlled for each rotary pickup 21. When the electronic component D is sucked, the suction by the rod of the nozzle driving unit 212b is released, so that the suction nozzle 212a returns to the original position.

  On the other hand, when the holding means 212 facing downward is receiving the electronic component D, any other holding means 212 is placed in the socket 11 of the test unit 1 until the test of the held electronic component D is completed. The state where the electronic component D is mounted is maintained.

  When the reception and the test of the electronic component D are completed, the rotating body 211 of the rotary pickup 21 rotates by one pitch. In the rotating body 211, the holding means 212 positioned directly below makes one rotation intermittently. Each time the rotating body 211 rotates by one pitch, a new electronic component D is received and tested.

  When the rotating unit 211 continues to rotate intermittently and the holding unit 212 holding the electronic component D directly below the socket 11 of the test unit 1 faces the holding unit 212, the holding unit 212 attaches the electronic component D to the socket 11. The suction nozzle 212a of the holding means 212 facing the socket 11 is moved to the socket 11 by the nozzle driving unit 212b, and presses the electronic component D against the contact 11a. At this time, the descending amount of the suction nozzle 212a, the pushed-out torque, and the acceleration / deceleration are controlled for each rotary pickup 21.

  The test unit 1 transmits a test signal to the electronic component D through the contact 11a and the electrode, and receives an output signal output from the electronic component D. Then, the output signal is analyzed, and various electrical characteristics such as voltage, current, and frequency of the electronic component D are measured. When the electrical characteristics are measured, the measurement result is compared with numerical data stored in advance to determine whether the electronic component D is good or bad.

  When the test of the electrical characteristics is completed, the suction nozzle 212a returns to the original position by releasing the pressure by the rod of the nozzle driving unit 212b. When the suction nozzle 212a of the holding means 212 facing the socket 11 returns to the original state and the replacement of the electronic component D is completed directly below the rotary pickup 21, the rotary pickup 21 rotates the rotating body 211 intermittently.

  When the holding means 212 holding the electronic component D for which the electrical property test has been completed is stopped one pitch before the rotary pickup 21, the holding means 212 positioned directly below the electronic component D from the shuttle 22. Have received. The holding means 212 that has been stopped one pitch before the next one-pitch rotation faces the empty shuttle 22 while holding the electronic component D for which the electrical characteristic test has been completed.

  While holding the electronic component D for which the electrical property test has been completed, the holding means 212 positioned directly below delivers the held electronic component D to the empty shuttle 22. The suction nozzle 212a of the holding means 212 facing downward is lowered to the electronic component D by the nozzle driving unit 212b, and the electronic component D is detached to the placement area 22a of the shuttle 22 by vacuum break.

  The holding means 212 from which the electronic component D is detached waits for the next shuttle 22 on which the electronic component D to be tested for electrical characteristics is mounted. On the other hand, the shuttle 22 that has received the electronic component D for which the electrical property test has been completed moves to the turntable 100 along the lower movement locus T, and returns the electronic component D to the turntable 100.

[effect]
As described above, the post-process processing apparatus such as the test unit 1 that performs process processing on the electronic component D is provided outside the main conveyance path. A processing stage such as the socket 11 on which the electronic component D is mounted is provided on the side surface 1a of the apparatus main body. The transfer means for transferring the electronic component D between the main transfer path and the processing stage is disposed so as to pass by the side surface 1a on which the processing stage is provided.

  Therefore, unlike the post-process processing apparatus having the processing stage on the upper surface, it is not necessary to extend the branch conveyance path above the post-process processing apparatus, and the post-process processing apparatus is not surrounded by the gate-shaped frame. That is, the transport means for transporting the electronic component D between the main transport path and the processing stage is disposed so as to pass by the side surface 1a on which the processing stage is provided. Can be easily enlarged in the direction of the two surfaces adjacent to the side surface 1a provided with the side surface and the back surface of the side surface 1a. Therefore, the size of the post-processing apparatus can be easily changed, the processing efficiency can be improved, and the number of scenes where the branch conveyance path must be redesigned can be reduced, thereby preventing an increase in manufacturing cost. .

  Further, the transport means for transporting the electronic component D between the main transport path and the processing stage has two types of holding means. The first holding means is a suction nozzle 212a or the like provided in the rotary pickup 21, and rotates from a first angle A1 facing right down to a second angle A2 facing the processing stage, and the electron is moved at the first angle A1. The component D is delivered, and the electronic component D is attached to and detached from the processing stage at the second angle A2. The second holding means is a shuttle 22 or the like, and reciprocates between the main conveyance path and the first holding means, and receives the first holding means and the electronic component D positioned at the first angle A1. hand over.

  When the socket 11 is arranged on the upper surface, it is possible to mount the electronic component D on the socket 11 by arranging the holding means movable in the XYZ directions on the post-processing apparatus. When the socket 11 is arranged on the side surface 1a of the main body, it is conceivable that a rotation mechanism in the θ direction is further added to the holding means to make the holding means a four-axis drive system.

  On the other hand, the suction nozzle 212a and the like provided on the rotary pickup 21 that rotates from the first angle A1 facing directly downward to the second angle A2 facing the processing stage and delivers the electronic component D at the first angle A1 is held in rotation. By providing the means, it is possible to cope with only a single-axis drive, that is, a rotation mechanism in the θ direction. Therefore, in this case, the number of motors of the first holding means can be reduced, and the first holding means has a simple configuration as compared with the holding means that moves in the XYZθ direction, which makes the mechanism complicated. can do. Therefore, the manufacturing cost can be suppressed.

  The second holding means has a plurality of mounting tables having a common movement trajectory T including a position directly below the first holding means. Each of the mounting tables is provided on a slider 222, and the slider 222 is slidable on a pair of shafts extending in parallel with each other directly below the first holding means. Each mounting table is alternately raised and lowered by the raising / lowering means 224 and passes up and down.

  In order to deliver the electronic component D to the rotation holding means such as the suction nozzle 212a provided in the rotary pickup 21, the delivery place is limited to one place where the first holding means faces directly below. Therefore, when the movement trajectory T of the second holding means is linear, only one mounting table is provided, and the processing efficiency of the electronic component D is reduced. However, according to this second holding means, at least two mounting tables can be operated simultaneously, so when one machine is delivering the rotation holding means and the electronic component D, the other machine is the main transporter. The path and the electronic component D can be transferred and the processing efficiency can be improved.

  In addition, a plurality of first holding means such as the suction nozzles 212a provided in the rotary pickup 21 are provided radially from the rotation center, and intermittently after receiving the electronic component D from the second holding means such as the shuttle 22. To make one rotation.

  For example, one first holding means may reciprocate 90 degrees between the angle immediately below where the socket 11 stops and the angle facing the socket 11, but the electronic component D is mounted on the socket 11. When the shuttle 22 and the electronic component D are delivered, the shuttle 22 and the electronic component D cannot be delivered. When the shuttle 22 and the electronic component D are delivered, the electrical characteristics of the electronic component D cannot be measured.

  However, by providing a plurality of first holding means radially from the center of rotation, when any of the holding means is mounted with the electronic component D in the socket 11, any of the other holding means is the shuttle 22 and the electronic device. Part D can be delivered. Therefore, the processing efficiency of the electronic component D is improved.

  Further, a plurality of first holding means such as the rotary pickup 21 are provided along the arrangement direction of the processing stages such as the socket 11, and the movement amount of the electronic component D relative to the processing stage and the second holding means such as the shuttle 22, The pressing load or acceleration / deceleration of movement was controlled individually. As a result, it is possible to cope with variations in the position of the rotary pickup 21, shuttle 22, and socket 11, and variations in the movement of the suction nozzle 212a and the nozzle drive unit 212b, and prevents the electronic component D from being damaged during conveyance. it can. In addition, it is possible to control the damage to the post-processing apparatus such as the test unit 1, and it is possible to achieve a long life of the post-processing apparatus.

  Further, a plurality of first holding means such as the rotary pickup 21 are provided by being fitted to the rotating shaft 214 and separated. As a result, even if the arrangement pitch of the processing stage of the post-processing apparatus changes, the first holding means need not be exchanged, and each slides along the rotation axis 214 and is aligned with a position facing the processing stage. Can do.

[Application example]
An electronic component transport apparatus including the test unit 1 will be described. 10A and 10B show an electronic component transport apparatus, wherein FIG. 10A is a side view of the electronic component transport apparatus, and FIG. 10B is a top view of the apparatus that forms the main transport path.

  The turntable 100 of the electronic component conveying apparatus shown in FIG. 10 is connected to the direct drive motor 101 and rotates intermittently. The turntable 100 is fixed with holding means 110 spaced apart at equal intervals along the outer periphery. The arrangement interval is equal to the rotation angle of one pitch of the turntable 100.

  The holding means 110 fixed to the turntable 100 is composed of a suction nozzle 111 and a nozzle driving unit 112 as in the rotary pickup 21 of the test unit 1, and attaches / detaches the electronic component D by generation of a negative pressure and vacuum break. The suction nozzle 111 of the holding means 110 is supported by a support portion attached to the outer peripheral portion of the turntable 100 so that the lower end protrudes from the lower surface of the turntable 100.

  The shuttle 22 exchanges the suction nozzle 111 and the electronic component D. That is, the shuttle 22 dives under the turntable 100 and stops at one of the stop positions of the suction nozzle 111.

  Around the turntable 100, in addition to the test unit 1, there are a parts feeder, a marking unit, an appearance inspection unit, a test contact unit, a sorting / sorting unit, an attitude determination unit, an attitude correction unit, a taping unit, a defective product discharge unit, etc. Each process processing unit 120 is arranged.

  These process processing units 120 surround the turntable 100 and are arranged at equal intervals in the outer circumferential direction. The arrangement interval is the same as or equal to an integral multiple of the rotation angle of one pitch of the turntable 100. The arrangement position of the process processing unit 120 coincides with the stop position of the holding means 110 for main conveyance. One of the transfer processing units is arranged at the stop position. Note that if the number of stop positions L is equal to or greater than the number of process processing units 120, these numbers do not have to be the same, and there may be stop positions where the process processing units 120 are not disposed.

  The parts feeder is an apparatus that supplies the electronic component D to the electronic component conveying apparatus. This parts feeder, for example, combines a circular vibration part feeder and a linear supply vibration feeder, and continuously conveys a large number of electronic components D to the end of the conveyance path immediately below the outer peripheral edge of the turntable 100. .

  The marking unit has a lens for laser irradiation facing the electronic component D, and performs marking by irradiating the electronic component D with a laser.

  The appearance inspection unit has a camera, takes an image of the electronic component D, and inspects the presence or absence of an electrode shape, surface defects, scratches, dirt, foreign matter, and the like of the electronic component D from the image.

  The classification sorting unit classifies the electronic component D into a defective product and a non-defective product according to the electrical characteristics and the result of the appearance inspection, and classifies and shoots according to the level.

  The posture determination unit has a camera and determines the posture of the electronic component D. The posture correction unit aligns the electronic component D and positions the holding position in accordance with the posture determined by the posture determination unit.

  The taping unit stores the electronic component D determined to be non-defective. The defective product discharge unit discharges the electronic component D that has not been taped and packed from the electronic component transport apparatus.

  Such an electronic component transport apparatus includes a transport control unit (not shown), a direct drive motor 101, a main transport holding unit 110, a test unit 1, a shuttle 22 moving mechanism, a rotary pickup 21 rotating mechanism, and other components. These operation timings are controlled by sending electric signals to various process processing units 120. That is, the conveyance control unit includes a ROM, a CPU, and a driver that store a control program, and outputs an operation signal at each timing to each drive mechanism through an interface according to the control program.

  In the electronic component transport apparatus as described above, instead of the holding means 212 of the rotary pickup 21 or the holding means 110 for main transport, instead of the method of sucking and releasing the electronic component D by generating and breaking a vacuum, electrostatic chucking You may arrange | position the chuck | zipper mechanism which clamps the system, Bernoulli chuck system, or the electronic component D mechanically. Moreover, as long as it has the test unit 1, it is not restricted to the process processing unit 120 of the kind mentioned above, It can replace with the unit which performs other types of process processing, and arrangement order can also be changed suitably. is there.

DESCRIPTION OF SYMBOLS 1 Test unit 1a Side 11 Socket 11a Contact D Electronic component 2 Branch conveyance means 21 Rotary pick-up 211 Rotating body 212 Holding means 212a Adsorption nozzle 212b Nozzle drive part 213 Motor 214 Rotating shaft A1 1st angle A2 2nd angle 22 Shuttle 22a Mounting area 221 Ball screw 222 Slider 223 Motor 224 Lifting / lowering means 224a Rail 224b Pressure supply pipe T Movement locus 100 Turntable 101 Direct drive motor 110 Holding means 111 Adsorption nozzle 112 Nozzle drive unit 120 Process processing unit

An electrical property inspection apparatus according to the present invention is provided in an electronic component transport device that transports electronic components to be subjected to various process processes along a main transport path, and inspects the electrical properties of the electronic components. an inspection apparatus, an apparatus body which is provided outside of the main conveying path, provided on a side face of the apparatus main body, and Luz stage the electronic component is mounted, the side front kissing stage is provided is arranged to pass through the side of, between said main transport path and before kissing stage, be provided with a transport means for transporting the electronic component, characterized by.

It said conveying means comprises a first holding means and the second holding means, said first holding means is rotated from a first angle facing beneath to a second angle opposite the front kissing stage, said first angle transferring the electronic component and the second holding means, to attach and detach the said electronic components for the previous kissing stage at the second angle, said second retaining means, said main conveyor You may make it reciprocate between a path | route and directly under the said 1st holding means, and may deliver the said 1st holding means located in the said 1st angle, and the said electronic component.

Before kissing stage, the device side plurality lined in the width direction of the body, said first holding means, before more provided along the arrangement direction of the kiss stage, before kissing stage and the second The movement amount of the electronic component relative to the holding means, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

Before kissing stage, the device side plurality lined in the width direction of the body, the first retaining means is separate and independent fitted to a rotating shaft arranged along a row direction before kissing stage provided in plurality, by independently slide along the axis of rotation, may be before kissing stage is positioned tailored to pitch arranged.

In addition, the external unit transport device according to the present invention branches from the main transport path to the electrical property inspection unit in which the stage on which the electronic component is mounted for electrical property inspection is provided on the side surface of the device body. wherein a conveying device for unit outboard supplying electronic components, is arranged so as to pass through the side of the side where the stage is provided, between said main transport path and before kissing stage Te, the has a conveying means for conveying the electronic components, said conveying means comprises a first holding means and the second holding means, said first holding means, the first angle before kissing stage facing beneath rotated to a second angle opposite the said first angle transferring said electronic component and said second holding means, to attach and detach the said electronic components for the previous kissing stage at the second angle, the The second holding means is Back and forth between the emission conveyance path and below the said first holding means, the first of said positioned at an angle with the first holding means to said transferring electronic components, characterized by.

Before kissing stage, the device side plurality lined in the width direction of the body, said first holding means, before more provided along the arrangement direction of the kiss stage, before kissing stage and the second The movement amount of the electronic component relative to the holding means, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

Before kissing stage, the device side plurality lined in the width direction of the body, the first retaining means is separate and independent fitted to a rotating shaft arranged along a row direction before kissing stage provided in plurality, by independently slide along the axis of rotation, may be before kissing stage is positioned tailored to pitch arranged.

The electronic component conveying apparatus according to the present invention is an electronic component conveying apparatus that performs various process processes while conveying an electronic component, and is provided on the main conveying path of the electronic component and the main conveying path. a step processing unit for performing various steps process, the disposed outside the front Symbol main conveying path to separate from the process processing means, a unit body for inspecting electrical characteristics for the electronic component, said unit body provided on a side surface of the electronic component are mounted away stage, before kissing stage is arranged so as to pass through the side of the side surface which is provided, between said main transport path and before kissing stage And a branch conveyance means for conveying the electronic component.

A holding unit for main transfer that holds the electronic component and intermittently moves along the main transfer path; the branch transfer unit includes a first holding unit and a second holding unit; holding means rotates from a first angle facing beneath to a second angle opposite the front kissing stage, transferring the electronic component and the second holding means at the first angle, the second angle in install or remove the electronic component before kissing stage, said second holding means, and reciprocates between the underneath of the first holding means for the main conveyor as one stop point of the holding means, said first You may make it deliver the said 1st holding means located in 1 angle, and the said electronic component.

Before kissing stage, the device side plurality lined in the width direction of the body, said first holding means, before more provided along the arrangement direction of the kiss stage, before kissing stage and the second The movement amount of the electronic component relative to the holding means, the pressing load, or the acceleration / deceleration of the movement may be individually controlled.

Before kissing stage, a plurality aligned in the width direction on a side surface of said apparatus body, said first holding means separates independently fitted to a rotary shaft disposed along the arrangement direction of the processing stage plurality provided, by independently slide along the axis of rotation, may be before kissing stage is positioned tailored to pitch arranged.

Claims (17)

It is provided in an electronic component transport device that transports electronic components to be subjected to various process processes along a main transport path, and is a post-process processing device that performs process processing on the electronic components,
An apparatus main body provided outside the main transport path;
A processing stage provided on a side surface of the apparatus main body, on which the electronic component is mounted;
A conveying means arranged to pass beside the side surface provided with the processing stage, and for conveying the electronic component between the main conveying path and the processing stage;
Providing
The post-process processing apparatus characterized by this. The conveying means is
A first holding means and a second holding means;
The first holding means includes
Rotating from a first angle facing directly down to a second angle facing the processing stage, delivering the second holding means and the electronic component at the first angle, and passing the second stage to the processing stage at the second angle The electronic component is attached to and detached from the
The second holding means is
Reciprocating between the main transport path and directly below the first holding means, and delivering the first holding means and the electronic component positioned at the first angle;
The post-process processing apparatus of Claim 1 characterized by these. The second holding means is
A pair of axes extending parallel to a straight line across a position directly below the first holding means;
Each slider slidable on the shaft;
Each mounting table of the electronic component provided on each slider and having a common movement trajectory including directly under the first holding means;
Each lifting means for lifting and lowering each mounting table;
With
Each mounting table is moved up and down alternately by the lifting means, so
The post-process processing apparatus of Claim 2 characterized by these. The first holding means includes
A plurality are provided radially from the center of rotation,
After receiving the electronic component from the second holding means, rotating once while rotating intermittently;
The post-process processing apparatus of Claim 2 or 3 characterized by these. The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of electronic components are provided along the direction in which the processing stages are arranged, and the movement amount, pressing load, or acceleration / deceleration of movement of the electronic components with respect to the processing stage and the second holding unit are individually controlled.
The post-process processing apparatus in any one of Claims 2 thru | or 4 characterized by these. The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of independent and independent fittings are provided on rotation shafts arranged along the alignment direction of the processing stages,
By independently sliding along the rotation axis, the position is adjusted according to the pitch of the processing stages.
The post-process processing apparatus in any one of Claims 2 thru | or 4 characterized by these. A transport device for an external unit that branches the main transport path and supplies the electronic component to a post-processing unit provided with a stage for processing electronic components on the side of the apparatus body,
It is arranged to pass by the side of the side surface provided with a processing stage, and has a transport means for transporting the electronic component between the main transport path and the processing stage,
The conveying means is
A first holding means and a second holding means;
The first holding means includes
Rotating from a first angle facing directly down to a second angle facing the processing stage, delivering the second holding means and the electronic component at the first angle, and passing the second stage to the processing stage at the second angle The electronic component is attached to and detached from the
The second holding means is
Reciprocating between the main transport path and directly below the first holding means, and delivering the first holding means and the electronic component positioned at the first angle;
A transfer device for an external unit characterized by the above. The second holding means is
A pair of axes extending parallel to a straight line across a position directly below the first holding means;
Each slider slidable on the shaft;
Each mounting table of the electronic component provided on each slider and having a common movement trajectory including directly under the first holding means;
Each lifting means for lifting and lowering each mounting table;
With
Each mounting table is moved up and down alternately by the lifting means, so
The transfer device for an external unit according to claim 7. The first holding means includes
A plurality are provided radially from the center of rotation,
After receiving the electronic component from the second holding means, rotating once while rotating intermittently;
The transfer device for an external unit according to claim 7 or 8. The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of electronic components are provided along the direction in which the processing stages are arranged, and the movement amount, pressing load, or acceleration / deceleration of movement of the electronic components with respect to the processing stage and the second holding unit are individually controlled.
The transfer device for an external unit according to any one of claims 7 to 9. The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of independent and independent fittings are provided on rotation shafts arranged along the alignment direction of the processing stages,
By independently sliding along the rotation axis, the position is adjusted according to the pitch of the processing stages.
The transfer device for an external unit according to any one of claims 7 to 9. An electronic component transport apparatus that performs various process processes while transporting an electronic component,
A main transport path of the electronic component;
Process processing means for performing various process processes provided on the main transport path;
Apart from the process processing means, a unit main body for performing one process process provided outside the main transport path;
A processing stage provided on a side surface of the unit main body, on which the electronic component is mounted;
A branch conveyance means arranged to pass beside the side surface on which the processing stage is provided, and for conveying the electronic component between the main conveyance path and the processing stage;
Providing
An electronic component conveying device characterized by the above. Holding means for main transport that holds the electronic component and moves intermittently along the main transport path;
The branch conveying means includes
A first holding means and a second holding means;
The first holding means includes
Rotating from a first angle facing directly down to a second angle facing the processing stage, delivering the second holding means and the electronic component at the first angle, and passing the second stage to the processing stage at the second angle Removing and attaching the electronic component,
The second holding means is
Reciprocating between one stop point of the first holding means and directly below the main conveying holding means, and delivering the first holding means and the electronic component located at the first angle;
The electronic component carrying device according to claim 12. The second holding means is
A pair of axes extending parallel to a straight line across a position directly below the first holding means;
Each slider slidable on the shaft;
Each mounting table of the electronic component provided on each slider and having a common movement locus including directly below the second holding means;
Each lifting means for lifting and lowering each mounting table;
With
Each mounting table is moved up and down alternately by the lifting means, so
The electronic component conveying apparatus according to claim 13. The first holding means includes
A plurality are provided radially from the center of rotation,
After receiving the electronic component from the second holding means, rotating once while rotating intermittently;
The electronic component carrying device according to claim 13 or 14. The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of electronic components are provided along the direction in which the processing stages are arranged, and the movement amount, pressing load, or acceleration / deceleration of movement of the electronic components with respect to the processing stage and the second holding unit are individually controlled.
The electronic component carrying device according to claim 13, wherein The processing stage is:
A plurality of the device main bodies are arranged in the width direction on the side surface,
The first holding means includes
A plurality of independent and independent fittings are provided on rotation shafts arranged along the alignment direction of the processing stages,
By independently sliding along the rotation axis, the position is adjusted according to the pitch of the processing stages.
The electronic component carrying device according to claim 13, wherein

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