JP2003035746A - Component transport apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately transport components to a component supply section, and improve general usefulness to the type of components without need for, for example, exchanging constituent components. SOLUTION: Components are sucked and taken out of a tray Tr by a P and P robot 20, are transferred on a table of shuttle robots 30A and 30B, and are carried from a component delivery position P1 to a component delivery position P2 due to the travel of a table 32. A component recognition camera 34 for imaging components that are sucked by the P and P robot 20 is arranged between the tray Tr and the component delivery position P1. Then each component that is taken out of the tray Tr is subjected to image recognition based on the imaging of the component, recognition camera 34, and the control means of a component-testing apparatus 1 is composed so that the operation of a head 23 and the like are controlled for transferring the component to a fixed position of the table 32 based on the recognition result.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a parts conveying device incorporated in a parts testing device for testing electronic parts such as IC chips.

[0002]

2. Description of the Related Art In the process of manufacturing semiconductor devices,
A test device for performing various tests on finally manufactured electronic components such as IC chips is required. For example, as a device for performing an electrical test of components including a logic circuit,
A nozzle having a test head and a carrying head for carrying a component to the test head, the nozzle being mounted on the carrying head, the component being taken out from the tray of the tray placing section and placed in a predetermined component supply section. An apparatus is generally known in which a member is sucked and a component is conveyed to a test head and positioned as the conveying head moves.

Further, in order to increase the degree of freedom in the timing of supplying components to the component supply unit and shorten the tact time, a buffer device provided with a moving table is provided between the tray mounting unit and the component supply unit. There is also known a component testing apparatus in which a component taken out from a tray is once placed on a movable table and the component is conveyed to a component supply unit as the table moves (Japanese Patent Laid-Open No. 11-333775).

[0004]

In the test apparatus of this type, it is necessary to carry out the test in a state where the component is positioned at a predetermined position on the test head. Therefore, generally, the component is not transferred from the component supply section to the test head. At the time of transportation, the component is set on the test head after correcting the suction displacement of the component by the transportation head.

By the way, in the device, such as the device of the above-mentioned publication, which conveys the components taken out from the tray to the component supply unit by the buffer device (table), when the components are taken out from the tray, while the table is moving, and the parts are fed from the table. When picking up a component, an error (deviation of suction position or arrangement) may occur in the component. The error produced in this way is usually
Although it is eliminated by the above correction processing when the components are conveyed from the table (component supply unit) to the test head, for example, it is possible that the accumulated error value reaches a level that cannot be eliminated by the above correction processing. In some cases, it may not be possible to position the component with respect to the test head.

In view of the above, in the apparatus of the above publication, a concave portion for placing a component is formed on the table of the buffer device, the component is accommodated in the concave portion and conveyed, and the component is securely accommodated in the concave portion. In order to obtain the components, a chuck-type positioning mechanism is provided on the transfer head that takes out the components from the tray and transfers them to the buffer device, and mechanically corrects the position and direction of the components before transfer to the buffer device. It is configured. Thus, the error relating to the component placement in the component supply unit is set to be equal to or less than a certain level, that is, the cumulative value of the error can be set within the level that can be dealt with by the correction process as much as possible.

However, such a structure is not completely free of problems. That is, in this configuration, the position and direction of the component are corrected by the chuck-type positioning mechanism so that the component is reliably accommodated in the recess on the table.
Since the shape and size of the chuck suitable for positioning differ depending on the type of chip, there is a limit to the type of chip that can be handled by one type of chuck, and there is a problem of low versatility. It should be noted that the chuck may be configured to be replaceable, and the mechanism may be replaced depending on the type of parts. In this case, however, the work needs to be temporarily stopped when the chuck mechanism is replaced, and the tact time is reduced. It is a negative factor in shortening.

Further, since the above-mentioned concave portion of the table is usually formed with some allowance with respect to the component, the component may always be displaced by the gap. However, from the viewpoint of minimizing the component suction deviation and more accurately positioning the component on the test head 4, such an error factor should be eliminated as much as possible, and there is room for improvement in this respect. .

The present invention has been made in view of the above problems, and is an apparatus for taking out a component such as an IC chip for supplying to a test head from a tray and transporting it to a predetermined component supply unit by a movable table. It is an object of the present invention to accurately convey a component to a supply unit and to increase versatility with respect to the type of the component without exchanging constituent parts.

[0010]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is incorporated in a parts testing apparatus, takes out parts before testing from a tray, and mounts them on a movable table set at a predetermined parts delivery position. In a device that transfers and conveys a component to a predetermined component supply unit as the table moves, a component holding head that is movable between the tray and the component delivery position, and a component holding head that is held by this head. An image pickup means capable of picking up an image of the part, a recognition means for recognizing the holding state of the part on the basis of the image pickup result by the image pickup means, a part for holding and taking out the part from the tray, and then a head for picking up an image of the part When the holding state of the component has an error based on the recognition result by the recognizing unit, the error is corrected based on the recognition result by the recognizing unit, while the component is moved to the imaging position of the device and then moved to the component delivery position. In which and a control means for controlling the operation of the head in order to transfer the parts on a movable table from (claim 1).

According to this apparatus, the parts before the test taken out from the tray are conveyed to the image pickup position by the image pickup means, and after the holding state is image-recognized here, on the movable table set at the part delivery position. And is transferred to the component supply unit as the movable table moves. At this time, if there is an error (deviation) in the holding state in the image recognition of the part, the operation of the head is controlled so as to correct the error so that the holding state of the part is corrected before the movable table. Parts are transferred on top. That is,
The holding state of the component is corrected by software based on the image recognition of the component.

In this apparatus, it is preferable that the movable table is constructed so as to convey the transferred parts while holding them by suction (claim 2).

According to this structure, the components are less likely to be displaced during the movement of the movable table, so that the components can be more accurately conveyed to the predetermined position of the component supply section.

When the head is constructed so as to simultaneously hold and convey a plurality of parts, the parts whose holding state error is equal to or less than a predetermined value are recognized based on the recognition result of each part by the recognition means. While the parts are simultaneously placed on the movable table, the control means for controlling the head to place the parts on the movable table while compensating for the error of each part when the error in the holding state exceeds a predetermined value. Is preferably configured (claim 3).

According to this structure, a plurality of parts can be efficiently and accurately transferred onto the movable table.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. In addition, in order to clarify the directionality, the X axis and the Y axis are shown in the figure.

1 and 2 schematically show a component testing apparatus equipped with a component storage device according to the present invention. As shown in these drawings, a component test apparatus 1 (hereinafter, abbreviated as test apparatus 1) includes a handler 2 that plays a mechanical role of transporting a component and holding (fixing) the component during a test, and the handler 2. The test apparatus main body 3 is incorporated.

The test apparatus body 3 has a test head 4 on the upper surface.
A box-shaped device equipped with a component that sets a component in a socket (not shown) provided in the test head 4 and supplies a test current to an input terminal of the component while receiving an output current from an output terminal of the component. Is configured to judge the quality of parts.

The test apparatus main body 3 is constructed so that it can be attached to and detached from the handler 2. Although not shown in the drawing, for example, the test apparatus main body 3 is mounted on a dedicated trolley so as to be predetermined from below the handler 2. The test head 4
Is fixed to the handler 2 in a state of being exposed to a test area Ta described later from an opening formed in the base 2a of the handler 2, and is assembled to the handler 2. It should be noted that the test head 4 and the test apparatus main body 3 do not necessarily have to be integrated, and only the test head 4 is assembled to the handler 2 and the other parts are arranged at positions apart from the handler 2 and It may be electrically connected by an electric cable or the like. In this case, the handler 2 itself excluding the test apparatus body 3 can be regarded as the component test apparatus of the present invention.

As shown in the figure, the handler 2 is a substantially box-shaped device with its upper part squeezed out to the side, and the parts housed in the tray are taken out and conveyed to the test head 4, and after the test. The parts are configured to be sorted according to the test result. The configuration will be specifically described below.

The base 2a of the handler 2 is roughly divided into two areas, a tray storage area Sa in which the tray Tr is stored and a test area Ta in which the test head 4 and the like are arranged.

In the tray storage area Sa, a plurality of tray storage sections are arranged in parallel in the X-axis direction. In this embodiment, the first to fifth tray storage sections 11 are arranged in order from the left side of FIG.
~ 15 are arranged in parallel. Then, the second tray storage section 1
Among the components after the test, the tray Tr in which the pre-test (uninspected) components are placed in the second and fourth tray storage units 14, the empty tray Tr in the first tray storage unit 11, and the component after the test in the third tray storage unit 13 The tray Tr on which a passed product (Pass) is placed and the tray Tr on which a failed product (Fail) is placed among the tested components are stored in the fifth tray storage unit 15, respectively. In addition, each tray T
Although all r have a common structure and not shown, for example, a plurality of component storage recesses (storage spaces) are formed on the surface thereof, and components such as IC chips are stored in the respective component storage recesses. It is configured to be stored inside.

Each of the tray storage units 11 to 15 is configured to store a plurality of trays Tr in a stacked state on a table that can be raised and lowered, and only the uppermost tray Tr is placed on the base 2a. The tray Tr is arranged in an empty state and the other trays Tr are stored in a space under the base.

Specifically, as shown in FIGS. 3 and 4,
Up and down direction (Z-axis direction) in each of the tray storage units 11 to 15.
A rail 17 extending in the direction is provided, and a table 16 is movably mounted on the rail 17. Further, a ball screw shaft 19 parallel to the rail 17 operated by the servomotor 18 is provided.
It is screwed and attached to the nut portion 16a of No. 6. And
A plurality of trays Tr are mounted on the table 16 in a stacked state, and the ball screw shaft 1 by the servo motor 18 is placed.
As the table 16 moves up and down in accordance with the rotational drive of 9, the uppermost one is arranged on the base through the openings 11a to 15a according to the number of trays Tr stacked on the table 16. Is configured.

Further, on the side wall of the handler 2, as shown in FIG. 1, the doors 11b to 11b corresponding to the tray accommodating portions 11 to 15 are provided.
15b is provided, and the tray Tr can be taken in and out of the tray storage sections 11 to 15 by opening the doors 11b to 15b.

Considering that most of the parts used in the test are acceptable products, the tray storage units 11 to 11 are described.
The storage capacity of the tray Tr is set to be larger in the third tray storage portion 13 of 15 which stores the passed parts than in the other tray storage portions 11, 12, 14, and 15. As a result, the frequency with which the tray Tr is taken in and out of the third tray storage unit 13 is configured so as not to become too large as compared with other tray storage units.

In the tray storage area Sa, as shown in FIGS. 1 and 2, a P & P robot (Pick & Place Robot) is installed.
t) 20 is provided.

The P & P robot 20 has a movable head 23. With this head 23, parts are taken out from the tray Tr of the second or fourth tray accommodating section 12, 14 and used by shuttle robots 30A, 30B to be described later. In addition to handing over the parts after the test, the shuttle robot 30A,
30B to be transferred to the tray Tr of the third tray storage section 13 or the fifth tray storage section 15, and further to the first tray storage section 11 and the other tray storage sections 12 to 1.
It is configured so as to also function as a tray transfer device that transfers the tray Tr to and from 5.

More specifically, a Y is formed on the base 2a.
A pair of fixed rails 21 extending in the axial direction is provided, and a head support member 22 is movably mounted on these fixed rails 21. Although not shown, a ball screw shaft that is driven to rotate by a servo motor and extends parallel to the fixed rail 21 is provided on the base 2a, and the ball screw shaft is provided on the support member 22 in a nut member. It is screwed on (not shown). Further, although not shown in detail, a fixed rail extending in the X-axis direction is provided on the support member 22, the head 23 is movably mounted on the fixed rail, and the fixed rail is rotatably driven by a servo motor. A ball screw shaft extending in parallel with is provided, and the ball screw shaft is screwed and attached to a nut portion provided on the head 23. Then, the support member 22 moves in the Y-axis direction and the head 23 moves in the X-axis direction in accordance with the rotational driving of the ball screw shaft by each of the servo motors, so that the head 23 is moved to the tray storage units 11 to 1.
5 and the shuttle robots 30A and 30B, which are configured so as to be movable in a plane (moving on the XY plane) in a range including a part delivery position P1 described later.

A plurality of nozzle members are mounted on the head 23. In this embodiment, a pair of nozzle members 24a, 24b (first nozzle 24a, second nozzle 24b) for sucking components and a tray suction member are used. A total of three nozzle members including the nozzle member 25 (referred to as a tray nozzle member 25) are mounted.

Nozzle members 24a, 24b for picking up parts
Can move up and down (rotate around the nozzle axis) with respect to the head 23, and although not shown in the figure, they are each driven by a drive mechanism using a servo motor as a drive source. Then, on the tray Tr such as the second tray storage portion 12 or the shuttle robots 30A and 30B.
With the head 23 disposed above the table 32, which will be described later, components are taken in and out of the tray Tr as the nozzle members 24a and 24b move up and down. It should be noted that when the components are placed on the table 32 or the components are stored in the tray Tr, the nozzle members 24a and 24b are rotated in addition to the nozzle elevating operation as described above, so that the tray Tr is predetermined. It is configured so that the parts can be stored in different directions.

The tray nozzle member 25 can only be moved up and down with respect to the head 23, and is configured to be operated by a drive mechanism having a servo motor as a drive source. Then, in a state where the tray Tr that has become empty due to the removal of the components is adsorbed, the second tray tray 12 and the first tray tray 1 are moved from the second tray tray 12 to the first tray tray 1 as the head 23 moves.
1 to transfer the tray Tr to the first
The empty tray Tr stored in the tray storage portion 11 is sucked and transferred to the third or fifth tray storage portion 13, 15. The tray nozzle member 2
With respect to No. 5, a wide adsorption area is secured by assembling a suction pad of, for example, a rectangular plate at the tip (lower end) thereof in order to favorably adsorb the tray Tr.

In the tray storage area Sa, a component recognition camera 34 (imaging means) composed of a CCD area sensor is arranged between the component transfer positions P1 of the shuttle robots 30A and 30B. This camera 34 images the components adsorbed (held) by the head 23 of the P & P robot 20 from the lower side, and images the components before the test before they are transferred to the shuttle robots 30A and 30B described later. In addition, the components after the test are imaged before being stored in the tray Tr.

On the other hand, in the test area Ta, the test head 4 and the pair of shuttle robots 30A and 30B (first
Shuttle robot 30A, second shuttle robot 30
B) and the test robot 40 are provided.

The test head 4 is arranged in a state of being exposed from the opening formed in the base 2a to a substantially central portion of the test area Ta as described above. A plurality of sockets (not shown) for setting components are arranged on the surface of the test head 4, and in the test apparatus 1, the two sockets are arranged in the X-axis direction. .

Each socket is provided with a contact portion (not shown) corresponding to each lead of a component (IC chip or the like). When the component is positioned in each socket,
Each lead of the component is brought into contact with a corresponding contact portion, and an electrical test such as a continuity test or an output characteristic test against an input current is performed on the component.

The shuttle robots 30A and 30B transfer the parts between the tray storage area Sa and the test area Ta, and the P & P robot 20 and the test robot 40.
2 is a device for delivering and receiving components to and from the fixed rails 31 extending in the Y-axis direction as shown in FIG. 2 and a drive mechanism having a servo motor as a drive source and moved along the fixed rails 31. Table 32 (movable table)
And have. The component transfer position P1 (component mounting portion) for the P & P robot 20 set near the first tray storage unit 11 and the fifth tray storage unit 15 and the test robot 40 set on the side of the test head 4 are set. While moving the table 32 back and forth along the fixed rail 31 between the parts delivery position P2 and the table 3
2 is configured to convey the parts.

In the table 32, an area for mounting the parts before the test and an area for mounting the parts after the test are determined in advance. In the present embodiment, as shown in FIG. Of the 32, the tray storage area Sa side (lower side in the same figure) is the first area a1 on which the component after the test is placed, and the opposite side is the second area a on which the component before the test is placed.
It is defined as 2. In each of the areas a1 and a2, a pair of suction pads 33a and 33b are arranged at predetermined intervals in the X-axis direction, specifically, the transfer heads 4 of the test robot 40.
A pair of head bodies 43a, 4 provided on 2A, 42B
The minimum pitch is 3b or more, and the pitch is provided at a distance corresponding to the nozzle members 24a and 24b of the head 23 of the P & P robot 20, and at the time of transferring the parts, parts are placed on these pads 33a and 33b. It is configured to be conveyed while being placed and adsorbed.

Each shuttle robot 30A, 30B
The delivery of parts between the P & P robot 20 and the test robot 40 is performed as follows, for example.

First, when the parts before the test are transferred from the P & P robot 20 to the respective shuttle robots 30A and 30B, the P & P robot 20 is placed at a predetermined position of the part delivery position P1 as shown in FIG. 6 (a). Nozzle members 24a, 24
b (head 23) is positioned and the nozzle members 24a,
The table 32 so that the second area a2 corresponds to 24b
Is positioned (this position is called the second position),
In this state, as the nozzle members 24a and 24b are moved up and down, the parts are transferred onto the table 32. On the other hand, when the parts after the test are transferred from the shuttle robot 30A (30B) to the P & P robot 20, the table is adjusted so that the first area a1 corresponds to the nozzle members 24a and 24b as shown in FIG. 6 (B). 32 is positioned (this position is referred to as a first position), and in this state, components on the table 32 are adsorbed as the nozzle members 24a and 24b move up and down.

Further, when transferring the parts after the test from the test robot 40 to the shuttle robot 30A (30B), as shown in FIG. 6 (c), the test robot 40 is placed at a predetermined position of the part delivery position P2. The nozzle member 60a, which will be described later,
60b (head bodies 43a, 43b) are respectively positioned in the X-axis direction, and each nozzle member 60a, 60b
The table 32 is positioned so that the first area a1 corresponds to the first area a1 (first position), and the suction pad 33b and the nozzle member 60b located in this state (that is, inside the both fixed rails 31 (right side in FIG. 5)). Fixed rail 31
The parts are placed on the table 32 as the nozzle members 60a and 60b move up and down in a state where the suction pad 33a located on the outer side of FIG. Meanwhile, the shuttle robot 30A (30B)
When transferring the parts before the test from the test robot 40 to the test robot 40, as shown in FIG.
The table 32 is positioned so that the second area a2 corresponds to the (second position).
The components are sucked from the table 32 as the 0a and 60b are moved up and down.

As described above, the test robot 40 uses the shuttle robots 30A and 30B for the tray storage area S.
The component supplied from a to the test area Ta is conveyed (supplied) to the test head 4 and is held (fixed) while being pressed against the test head 4 during the test. After the test, the component is left as it is. It is a device that delivers (discards) the shuttle robots 30A and 30B.

The test robot 40 has a pair of transfer heads 42 that move along an elevated 2B provided on the base 2a so as to straddle the shuttle robots 30A and 30B.
A, 42B (first carrying head 42A, second carrying head 42A), and these carrying heads 42A,
42B, a pair of head bodies 43a, 43 respectively mounted on
b (first head body 43a, second head body 43b) is configured to supply and discharge components to and from the test head 4. Hereinafter, the configuration of the transport heads 42A and 42B will be specifically described with reference to FIGS. 1, 2 and 7 to 9.

The carrying heads 42A and 42B respectively have
Fixed rail 45 in the X-axis direction arranged on the elevated 2B
Pair of movable frames 46a, 46b movable along
(First movable frame 46a, second movable frame 46b)
have. A servo motor 47 is fixed to the first movable frame 46a of the movable frames 46a and 46b, and a ball screw shaft 48 extending in the X-axis direction is integrally connected to an output shaft of the servo motor 47. , The ball screw shaft 48 is the second movable frame 46b.
It is screwed onto a nut portion 49 provided on the. In addition, a pair of ball screw shafts 51 parallel to the fixed rails 45, which are each driven to rotate by the servomotor 50, are mounted on the base 2.
These ball screw shafts 51 are provided on the nuts 52 provided on the first movable frames 46a of the transport heads 42A and 42B. That is, as the ball screw shaft 51 is driven to rotate by the servo motor 50, the transport heads 42A and 42B move in the X-axis direction along the fixed rails 45, and the servo motor 47 drives the ball screw shaft 48 to rotate. Accordingly, in each of the transport heads 42A and 42B, the second movable frame 46b is configured to be movable in the X-axis direction relative to the first movable frame 46a as shown by the chain double-dashed line in FIG. ing.

A fixed rail 5 extending in the Y-axis direction is provided on each of the movable frames 46a and 46b, as shown in FIGS.
4 are arranged respectively. A head support member 55 is movably supported on each rail 54, and the head main bodies 43a and 43b are respectively attached to the front end portions (the left end portion in FIG. 8) of these head support members 55. . A ball screw shaft 58 parallel to the fixed rail 54 driven by a servo motor 57 is supported on each of the movable frames 46a and 46b via a fixed base 56, and these ball screw shafts 58 are attached to the head support member 55. The nut portions 59 provided are screwed to each other. As a result, as the ball screw shaft 58 is driven to rotate by each servo motor 57, each head main body 43a, 43b is moved to the movable frame 46.
It is configured to move in the Y-axis direction with respect to a and 46b.

As shown in FIG. 8, nozzle members 60a and 60b (first nozzle member 60a and second nozzle member 60b) for adsorbing components are provided on the head bodies 43a and 43b, respectively. Each of the nozzle members 60a and 60b can be moved up and down and rotated (rotated around the nozzle axis) with respect to the frame of the head bodies 43a and 43b, and is driven by a drive mechanism (not shown) using a servo motor as a drive source. Is configured.

The head bodies 43a and 43b are provided with
A socket recognition camera 62 including a CCD area sensor for picking up an image of a reference mark attached to a socket when supplying components to the test head 4 is mounted.

In the test area Ta, component recognition cameras 64A and 64B each composed of a CCD area sensor are provided between the component transfer position P2 of the shuttle robots 30A and 30B and the test head 4. These cameras 64A and 64B are provided with respective transport heads 42A and 4A.
It is configured so that two components adsorbed by 2B can be simultaneously imaged from the lower side thereof, and as shown in FIG. 10, the head bodies 43a and 43b pick up components from each shuttle robot 30A (or 30B). After that, the component is arranged above the component recognition camera 64A (or 64B) as the head bodies 43a and 43b move, so that the component is imaged. In addition,
The component delivery position P2, the component recognition cameras 64A and 64B, and the test head 4 are arranged on the same axis line parallel to the X axis, whereby the transfer heads 42A and 42B are moved from the component delivery position P2 to the test head 4, respectively. It is configured to be able to pick up an image of a part before the test while moving the part over the shortest distance.

A dustproof cover 2c is mounted on the upper part of the handler 2 as shown in FIG. 1, and the space on the base 2a including the test area Ta and the tray storage area Sa is covered by the cover 2c. Is covered.

FIG. 11 is a block diagram showing the control system of the test apparatus 1. As shown in this figure, the test apparatus 1 is
A well-known CPU 70a that executes a logical operation, and the CPU
The control unit 70 includes a ROM 70b that stores various programs for controlling the 70a in advance, and a RAM 70c that temporarily stores various data during the operation of the apparatus.

The control unit 70 has an I / O unit (not shown), and the test apparatus main body 3 and the component recognition cameras 34 and 6 are provided.
4A, 64B and the socket recognition camera 62 are electrically connected, and the controllers 71, 72, 73A, 73B of the P & P robot 20, the test robot 40, and the shuttle robots 30A, 30B are electrically connected. An operation unit 750 for inputting / outputting various information to / from the control unit 70, a CRT 760 for notifying various information such as a test situation, etc. are electrically connected to the control unit 70.

FIG. 12 is a functional block diagram of the control unit 70, mainly showing a part for controlling the transfer operation of the parts by the test robot 40 to the test head 4 and the transfer operation of the parts by the P & P robot 20. There is.

As shown in this figure, the control unit 70 includes a main control means 74 (control means) and a head position error calculation means 75.
And first to third suction error calculation means 76, 77, 78,
The image processing means 79 is included.

The main control means 74 controls the operation of each robot in the test apparatus 1 in a centralized manner. The P & P robot 20 or the like should carry out a test operation which will be described in detail later according to a program stored in advance. Is to control each robot in a centralized manner. Especially the test robot 4
When the component (the component before the test) is positioned on the test head 4 (socket) by 0, a correction amount is calculated based on the error described later obtained by the head position error calculating means 75 and the first suction error calculating means 76, and Test robot 40 (transport heads 42A, 42B) based on the correction amount
Is configured to be driven and controlled. In addition, the shuttle robot 30 from the tray Tr by the P & P robot 20.
When the parts (parts before the test) are transported to A and 30B, based on the error described below obtained by the second suction error calculating means 77, and when the parts (the parts after the test) are stored in the tray Tr, the third suction is performed. The error calculating means 78 is configured to calculate the respective correction amounts based on the errors described below, and drive and control the P & P robot 20 based on the correction amounts. In particular, when a component (a component before the test) is transported from the tray Tr to the shuttle robots 30A and 30B, an error described below (adsorption error Δi) calculated by the second adsorption error calculation means 77 and a preset allowable value (predetermined value). ), And the correction amount is calculated only when the error exceeds the allowable value.

The image processing means 79 includes the component recognition camera 3
Predetermined image processing is performed on signals from the image pickup elements of the 4, 64A, 64B and the socket recognition camera 62.

The head position error calculating means 75, based on the image picked up by the socket recognition camera 62, transport heads 42A for the test head 4 (socket),
The relative positional relationship of 42B is obtained, and the positional relationship is compared with its proper value to calculate the error (deviation) between the transport heads 42A and 42B with respect to the test head 4, and the calculated result is used as the main control means. It outputs to 74.

The first suction error calculating means 76 is sucked onto each nozzle member 60a, 60b of the transport heads 42A, 42B based on the image of the component (component before the test) imaged by the component recognition camera 64A or 64B. The suction error (deviation) of the existing component is calculated, and the calculation result is output to the main control means 74.

The second pick-up error calculating means 77 determines each of the P & P robots 20 based on the image of the component imaged by the component recognition camera 34 prior to the transportation of the component (component before the test) to the shuttle robots 30A and 30B. Nozzle member 24
The suction error (deviation) of the components sucked on a and 24b is calculated, and the calculation result is output to the main control means 74. In this test apparatus, the image processing means 79 and the second suction error calculation means 77 constitute the recognition means of the present invention.

Further, third adsorption error calculating means (after the test)
78 is adsorbed to each nozzle member 24a, 24b of the P & P robot 20 based on the image of the component (after the test) taken by the component recognition camera 34 prior to the storage of the component (after the test) in the tray Tr. The suction error (deviation) of the present component is calculated, and the calculation result is output to the main control means 74.

Here, the control of the conveying operation of the parts, which is a characteristic part of the test apparatus 1, more specifically, the parts (parts before the test) are taken out from the tray Tr and the shuttle robot 30A,
The operation control of the P & P robot 20 when it is conveyed to 30B will be described with reference to the flowchart of FIG.

When this flowchart starts, first, in step S1, the P & P robot 20 takes out parts. Specifically, the head 23 of the P & P robot 20 is used by the second tray storage section 12 or the fourth tray storage section 14.
Of each nozzle member 24a,
Two parts (n = 2) are picked up from the tray Tr in a state where the two parts (n = 2) are adsorbed as the unit 24b moves up and down.

Next, after the initial value 1 is set in the counter i, the head 23 moves and the nozzle members 24a, 24a
The component adsorbed on one side of b is the component recognition camera 34
Image recognition of the component is performed by arranging the component on the upper side, and based on the image recognition result, the suction error Δi of the component, that is, the X axis direction, the Y axis direction, and the θ direction (around the nozzle axis) with respect to the centers of the nozzle members 24a and 24b. Deviation) is determined, and it is determined whether or not this error Δi is within a preset allowable range (steps S2 to S5).

If it is determined that the component is out of the allowable range, the number (that is, the counter value i) of the nozzle member 24a or 24b that has suctioned the component is stored, and the correction value is calculated based on the suction error Δi. To be done.

Next, after the counter is incremented (step S7), the counter value is the suction component number (n).
Is determined (step S8), and if not exceeded, the process proceeds to step S3 and a similar error recognition process is performed on the component sucked by the nozzle member 24a (or 24b) on the other side. Is done.

When the above-described process for recognizing the error is completed for all the parts (YES in step S8), the head 23 moves to the part delivery position P1 of the shuttle robot 30A (or 30B) (step S9), and the next In this way, the parts are transferred to the table 32.

First, in step S10, the nozzle members 24a whose numbers are not stored in step S6,
It is determined whether or not 24b is present. If YES here, the suction component by the nozzle member 24a (or 24b) whose number is not stored, that is, the component whose suction error Δi is less than or equal to the allowable value is displayed on the table 32. It is transferred (steps S11 and S12). At this time, the component is the nozzle member 24a.
(Or 24b) is lifted and placed on the table 32 as it is. Both nozzle members 24a, 24
When b is the target, both nozzle members 24a, 24b
The components adsorbed on are simultaneously placed on the table 32.

Nozzle member 2 whose number is not stored
When the transfer of the suction component by 4a (or 24b) is completed, or when NO is determined in step S10, the process proceeds to step S13, and whether there are the nozzle members 24a and 24b whose numbers are stored in step S6. It is determined whether or not.

Here, in the case of YES, the suction component by the nozzle member 24b (or 24a) in which the number is stored, that is, the component having the suction error Δi exceeding the allowable range is transferred onto the table 32 ( Steps S14 and S1
5). In this case, the head 23 is drive-controlled based on the correction value obtained in step S6 to correct the arrangement of components in the X-axis direction, the Y-axis direction, and the θ direction (direction around the nozzle axis). After that, components are placed on the table 32 as the nozzle member 24a (or 24b) moves up and down. As a result, the components are transferred onto the table 32 with the suction error Δi eliminated. When both nozzle members 24a and 24b are targeted, the components sucked by the nozzle members 24a and 24b are sequentially placed on the table 3.
2 is placed on.

On the other hand, if NO is determined in the step S13, the process of the steps S13 to S15 is not executed and this flowchart is ended.

Next, an example of a series of test operations under the control of the control unit 70 will be described with reference to the timing chart of FIG.

This timing chart shows the operation from a specific time point (time point t0) during the test operation,
Each robot 20, 30A, 30B at the time t0,
The state of 40 (conveying heads 42A and 42B) is as follows.

P & P robot 20: The head 23 is in a moving state so as to store the tested parts in the tray Tr. That is, the head 23 is the first shuttle robot 30A.
From the component delivery position P1 above, the state of passing through above the component recognition camera 34 and moving toward the third tray storage unit 13 or the fifth tray storage unit 15 is set. It should be noted that the process for checking the suction state of the component, that is, the image pickup of the component by the recognition camera 34 has been completed, and the suction error of the component that has already been sucked by the nozzle members 24a and 24b in the third suction error calculation means 78. (Deviation) is required.

First shuttle robot 30A: The parts to be supplied to the first transfer head 42A next time are held on the table 32 and stand by at the parts delivery position P1.

First transport head 42A; parts to be tested next are adsorbed by the head bodies 43a and 43b,
And each part is placed above the part recognition camera 64A (standby)
In this state, that is, the state in which the suction error (deviation) of the components sucked by the respective nozzle members 60a and 60b is obtained by the first suction error calculating means 76 based on the image pickup of the component by the component recognition camera 64A.

Second shuttle robot 30B: Next, the parts to be supplied to the second carrying head 42B are held on the table 32 and are on standby at the parts delivery position P1.

Second transport head 42B: The test head 4 is in a state immediately after the end of the test.

Under the above condition, first, the second
While the table 32 of the shuttle robot 30B moves to the component delivery position P2 (at time t1), the nozzle members 60a and 60b of the second transport head 42B move upward while sucking the components to remove the components from the sockets. Further, the second transport head 42B starts moving to the component delivery position P2 of the second shuttle robot 30B in order to deliver the component after the test (at time t3). At this time, if the pitch between the components sucked by the head main bodies 43a, 43b of the second transport head 42B does not match the pitch of the suction pads 33a, 33b on the table 32 (interval in the X-axis direction), During the movement of the second carrying head 42B, the second carrying head 42B is drive-controlled so that the distance between the head bodies 43a and 43b matches the pitch between the sockets.

The second carrying head 4 is placed at the part delivery position P2.
When 2B arrives (at time t7), first, the second transfer head 42B moves to the table 32 of the second shuttle robot 30B.
The parts after the test are transferred onto the table 32, and then the table 32
The next part (the part before the test) placed in advance is the second
It is delivered to the robot body 42B. Specifically, the table 32 of the second shuttle robot 30B is first positioned at the first position (see FIG. 6C) at the component delivery position P2, and the first area on the table 32 is increased and lowered as the nozzle members 60a and 60b are moved up and down. Parts are transferred to a1 (at time t9). Then, the table 32 is positioned at the second position (see FIG. 6D), and the second position on the table is set.
The parts held in the area a2 are each nozzle member 60.
It is adsorbed as a and 60b move up and down (at time t13).

When the delivery of the parts between the second carrying head 42B and the second shuttle robot 30B is completed, each part is placed on the parts recognition camera 64B as the second carrying head 42B moves. At time t18), a process for checking the suction state based on the image pickup of the component is performed, and when this process is completed, a state of waiting for conveyance to the test head 4 is set.

On the other hand, as described above, the second carrying head 42
When B moves to the component delivery position P2, the first carrying head 42A starts moving to the test head 4 to test the next component at the same timing (at time t3).
Then, when the first carrying head 42A reaches the test head 4 (at time t5), the nozzle members 60a and 60b descend, and along with this descending, the components adsorbed on the nozzle members 60a and 60b are adsorbed on the test head 4. The respective sockets are positioned while being simultaneously pressed against the respective sockets, and thereby the test of the parts is started (at time t8).

Although not shown in detail in the same timing chart, the positioning of the parts to the socket is performed by first locating the first transport head 42A at the target position on the test head 4 and picking up the image of the mark by the socket recognition camera 62. Based on the above, the positional error (deviation) of the first transport head 42A with respect to the socket is obtained. And, as mentioned above,
In the main control means 74, the correction amount of each component with respect to the socket is calculated based on this error and the suction error (deviation) of the component previously calculated by the first suction error calculation means 76, and based on this correction amount. After the position of the suction component of each head main body 43a, 43b is corrected by the drive control of the first transport head 42A, each nozzle member 60a,
Each part is positioned in the socket as the 60b is lowered.

To correct the position of each component, first, the servo motor 5
After the operation of 0 moves the entire first transport head 42A in the X-axis direction, the operation of the servo motor 47 moves only the second movable frame 46b in the X-axis direction. As a result, the components attracted to the head bodies 43a and 43b are respectively position-corrected in the X-axis direction. And the servo motor 5
7, the head bodies 43a and 43b move in the Y-axis direction to correct the positions of the components in the Y-axis direction, and the nozzle members 60a and 60b of the head bodies 43a and 43b rotate around the nozzle axis. By doing so, the position of each component is corrected in the θ direction. As a result, the components attracted to the respective head bodies 43a and 43b are separated by X, respectively.
The position is corrected in the axial direction, the Y-axis direction, and the θ direction. Here, for convenience of description, the position correction of each component is divided into the X-axis direction, the Y-axis direction, and the θ direction and described in chronological order. However, in reality, correction in each of these directions is performed in parallel. Thus, the position correction of each component is promptly performed.

When the test of the components positioned on the test head 4 is completed (at t20), each nozzle member 60
The parts are removed from the sockets as a and 60b rise (at time t23), and the parts after the test are transferred to the part delivery position P2 with the first shuttle robot 30A as the first transfer head 42A moves. (At time t25). Then, similarly to the component delivery operation between the second transport head 42B and the second shuttle robot 30B described above, the component delivery is performed between the first transport head 42A and the first shuttle robot 30A.

Further, the second carrying head 42B moves to the test head 4 (at time t23) at the same timing as the start of the movement of the first carrying head 42A to the component delivery position P2, and each of the second carrying heads 42B. Head body 43a,
The next component attracted to 43b is positioned while being pressed against the test head 4 (t26).
Time point). At this time, if the pitch of the components attracted to the head bodies 43a and 43b of the second transport head 42B is different from the pitch of the sockets on the test head 4, the head bodies 43a and 43b are moved during this movement. The second transport head 42B is drive-controlled so that the interval matches the pitch between the sockets.

On the other hand, for the P & P robot 20 and the shuttle robots 30A and 30B, the test robot 4
The operations are controlled as follows so that the parts can be continuously transferred to and from the transport heads 42A and 42B of 0.

First, in the second shuttle robot 30B, the table 32 moves to the component delivery position P2 so that the second transport head 42B arrives at the component delivery position P2 at the same time (at time t7) to receive the tested components. To do.
Then, as described above, the parts after the test are delivered from the second carrying head 42B to the table 32 in the state where the table 32 is arranged at the first position (see FIG. 6C) (at time t9), and further. The table 32 is arranged in the second position (see FIG. 6D) (at time t10), and the pre-test component is delivered from the table 32 to the second transport head 42B (at time t13).

Thereafter, the table 32 is moved to the parts delivery position P.
When the table 32 is placed in the second position (see FIG. 6B) (at time t14), the P & P robot 20 moves to the table 32.
The next part (part before the test) is delivered to (t16).
Time point). Next, the table 32 is moved to the first position (see FIG. 6).
(See (a)) (at time t17), and in this state the parts after the test are delivered from the table 32 to the P & P robot 20 (at time t19), and then wait at the component delivery position P1 until the next delivery of the component. Be scented. Although this is the operation control of the second shuttle robot 30B, the operation of the first shuttle robot 30A is similarly controlled in relation to the first transfer head 42A.

On the other hand, the operation of the P & P robot 20 is controlled so that the parts for which the test has been completed are stored in the tray Tr according to the test result.

Specifically, each nozzle member 24a, 24b
When at least one of the two parts (parts after the test) adsorbed on the sheet is a passing product, first, the head 23 is placed on the third tray storage unit 13 (at time t2), for example, the first part.
As the nozzle member 24a moves up and down, the acceptable product is stored in the tray Tr (at time t4). Then, the second nozzle member 24
When the suction component of b is a passed product, the head 23 slightly moves to the next component storage section on the same tray Tr, while it is a rejected product (when the test result in the test head 4 is unacceptable). In this case, after the head 23 moves onto the fifth tray storage portion 15, the remaining components are stored in the tray Tr as the second nozzle member 24b moves up and down (at time t6). In this way, as the second nozzle member 24b moves up and down, the component is stored in the tray Tr of the third tray storage portion 13 or the fifth tray storage portion 15 according to the test result (at time t8). If both components are rejected, the head 23 is placed on the fifth tray storage portion 15 (at time t2), and the first component is stored in the tray Tr as the first nozzle member 24a moves up and down, for example. After that (at time t4), the head 23 is placed on the next component storage portion on the tray Tr (at time t6), and the remaining components are stored in the tray Tr as the second nozzle member 24b moves up and down. (T8
Time point).

When the P & P robot 20 stores the parts in the tray Tr, the third suction error calculating means 78 has already been used.
On the basis of the component suction error (deviation) obtained in step 1, the main control means 74 obtains the correction amount of each component with respect to the component storage concave portion of the tray Tr, and the head 23 of the P & P robot 20 is determined based on this correction amount. The drive control is performed to correct the position of each component adsorbed to the head 23 in the X-axis, Y-axis, and θ directions, and then the component is stored in each component storage recess.

When the storage of the components after the test in the tray Tr is completed, the head 23 is placed above the second tray storage portion 12 or the fourth tray storage portion 14 (at time t11), and a new component is removed from the tray Tr. It is taken out (at time t12). Then, as the head 23 moves, each component (component before the test)
Are sequentially arranged on the component recognition camera 34, and after the suction state of each component is checked based on the image pickup of each component, the second
The head 23 is moved and arranged at the component delivery position P1 of the shuttle robot 30B, the new component is delivered to the second shuttle robot 30B as described above (at time t16), and the tested component is the second shuttle robot. It is transferred from 30B to the P & P robot 20 (at time t19). The second shuttle robot 30B
The transfer of each part (part before the test) to the (table 32) is performed by obtaining the suction error Δi of each part based on the image recognition by the part recognition camera 34 as already described using the flowchart (FIG. 13). Then, the parts having the error Δi within the allowable range are transferred to the table 32 in the same state, while the correction amount is calculated for the part having the suction error Δi exceeding the allowable range. The head 23 is driven and controlled based on the table 3 to correct the component arrangement in the X-axis, Y-axis, and θ directions, and then the table 3
The parts will be transferred onto the device 2.

When the delivery of the component to the second shuttle robot 30B is completed, the head 23 is placed on the component recognition camera 34, and the process for checking the suction state of the component based on the image of the component after the test is performed. When this process is completed and the processing is completed, the operation of the head 23 and the like is controlled to store the component in the tray Tr (at time t22). During the time from t22 to t27 (the time when the head 23 is positioned above the third tray storage 13 or the like so as to store the next component after the test), the component is determined to be predetermined according to the test result. After being stored in the tray Tr,
A new part is taken out from the second tray storage section 12 or the like and delivered to the table 32 of the first shuttle robot 30A, and a series of operations for receiving the part after the test is completed is performed by the first and first shuttle robots 30A and 30A. It is performed by the P & P robot 20. This series of operations is similar to the operation from the time point t2 to the time point t19. Also,
The test operation by the second transport head 42B between the time point t26 and the time point t28 (the time point when the test of the next part is completed) is the same as the operation by the first transport head 42A between the time point t8 and the time point t20. The operation is controlled.

In this manner, thereafter, as shown in FIG. 10, the first transport head 42A (or the second transport head 42B) moves to the test head 4 between the component delivery position P2 and the test head 4. While carrying out the test by transporting and positioning the components two by two, in parallel with this, the second transport head 42B (or the first transport head 42A) and the second shuttle robot 30B (or the second shuttle robot 30).
B) while carrying out the delivery of the parts (that is, the delivery of the part after the test and the next part), and further the first carrying head 42A and the second carrying head 42B as described above.
The shuttle robots 30A and 30B and the P & P robot 2 so that the delivery of parts to and from the robot is continuously performed.
The operation of 0 is controlled.

Although not shown in the timing chart of FIG. 14, as the test progresses, the second tray storage unit 1
When the tray Tr (uppermost tray) of the second or fourth tray storage portion 14 becomes empty, the empty tray Tr is moved by the head 23.
The operation of the P & P robot 20 is controlled so that the P & P robot 20 picks up and transfers it from the second tray storage unit 12 or the like to the first tray storage unit 11. As a result, it is possible to take out the component from the next tray Tr in the second tray storage section 12 or the like. Similarly, the third tray storage section 13 or the fifth tray storage section 15
When the tray Tr (topmost tray) is full of components, the empty tray Tr stored in the first tray storage section 11 is sucked by the head 23 and transferred to the third tray storage section 13 or the like. Thus, the operation of the P & P robot 20 is controlled. As a result, the next component after the test is completed can be stored in the tray Tr in the third tray storage portion 13 or the like.

In the test apparatus 1 described above, the tray Tr
The parts taken out from the parts (parts before the test) are placed on the table 32 of the shuttle robots 30A and 30B, and conveyed to the part delivery position P2 with respect to the test robot 40 as the table 32 moves. When the parts picked up from the tray Tr by the robot 20 are transferred to the shuttle robots 30A and 30B, the suction deviation (error) of the parts is corrected based on the image recognition and then placed on the table 32. Since it is configured, it is possible to effectively prevent an error in the arrangement of the components at the component delivery position P2. In particular, since the shuttle robots 30A and 30B are configured to convey the components while holding the components on the table 32 by suction, the components do not move on the table during the conveyance.
The components conveyed to the component delivery position P2 are arranged with almost no error in the predetermined arrangement. Therefore, the accumulated value of the error such as the suction deviation occurring in the process from the tray Tr to the component delivery position P2 becomes large,
There is an effect that it is possible to more effectively prevent the occurrence of a situation in which correction becomes impossible when positioning a component on the test head 4.

Moreover, since the P & P robot 20 corrects the component pick-up error by software based on the image recognition of the component as described above,
There is no restriction by the kind of parts, unlike the conventional device that mechanically corrects the suction error by the chuck mechanism. Therefore, the shuttle robot 30 can be satisfactorily corrected while the component pick-up error by the P & P robot 20 is being corrected.
While being transferred to A and 30B, there is an effect that versatility with respect to parts can be enhanced.

In this test apparatus 1, area sensors are used as the component recognition cameras 34, 64A, 64B, but a component recognition camera composed of, for example, a linear sensor may be used. Since the linear sensor can capture an image while moving the component, there is a merit that the component can be efficiently imaged as compared with an area sensor that needs to stop the component and image the component.

Further, from the tray Tr to the shuttle robot 3
0A, 30B (table 32), when the parts are transferred to the table 32, only the suction parts of the P & P robot 20 for which the suction error Δi exceeds the allowable range are corrected in the suction state before being transferred to the table 32. However, it is of course possible to transfer the components onto the table 32 after correcting the suction state of all the components for which the suction error Δi is obtained. However, the test apparatus 1 is configured to correct the suction state of the component based on the image recognition even when the component is conveyed from the component delivery position P2 to the test head 4 as described above, and some error may occur. Can be corrected at the time of the correction. Therefore, in the transfer stage to the shuttle robots 30A and 30B, the suction state is corrected only when an error Δi of a certain level or more is involved, and in other cases, the parts are transferred at the same time without any change. Is advantageous in reducing the tact time.

Further, in the above-described test apparatus 1, one component recognition camera 34 is used as a camera for picking up images of the parts before and after the test. For example, each shuttle robot 3
A component recognition camera may be provided near each of the component transfer positions P1 of 0A and 30B.

[0100]

As described above, the present invention is an apparatus which is incorporated in a component testing apparatus and conveys a component taken out from a tray to a predetermined component supply section by a movable table.
When the parts holding head is used to convey the parts taken out of the tray to the movable table, the holding state of each part is image-recognized and the operation of the head is controlled to correct the error (deviation) of the holding state. Since it is configured, it is possible to effectively prevent an error in the arrangement of the components conveyed to the component supply unit. Moreover, when the parts are transferred to the movable table, the positions of the parts are corrected by software based on the image recognition as described above, so that the position correction of all the parts is good without the need to replace the device constituent parts. Can be done. Therefore, the component can be accurately conveyed to the component supply unit, and the versatility with respect to the type of the component can be improved.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a component testing apparatus in which a component carrying apparatus according to the present invention is incorporated.

FIG. 2 is a plan view showing a component testing device.

FIG. 3 is a cross-sectional view showing a configuration of a tray storage portion in a tray storage area.

FIG. 4 is a cross-sectional view taken along the line AA of FIG. 3, showing the configuration of the tray storage section.

FIG. 5 is a schematic plan view showing the configuration of the table of the shuttle robot.

FIG. 6 is a B arrow view of FIG. 2 showing the position of the table at the component transfer position of the shuttle robot ((a),
(C) shows the table in the first position,
(B) and (d) show the state where the table is arranged in the second position).

FIG. 7 is a plan view showing a specific configuration of a test robot.

FIG. 8C of FIG. 7 showing a specific configuration of the test robot.
FIG.

FIG. 9D of FIG. 8 showing a specific configuration of the test robot
It is a -D sectional view.

FIG. 10 is a schematic diagram showing a configuration of a test area.

FIG. 11 is a block diagram showing a control system of the component testing apparatus.

FIG. 12 is a block diagram showing a functional configuration of a control unit.

FIG. 13 is a flowchart showing an example of operation control when a component is transported from a tray to a shuttle robot (table).

14 is a timing chart showing the operation of the component testing apparatus based on the control of the control system shown in FIG.

[Explanation of symbols] 1 Parts test equipment 2 handler 3 Test equipment body 4 test head 11-15 Tray storage 20 P & P robots 23 heads 24a, 24b Nozzle member 30A 1st shuttle robot 30B 2nd shuttle robot 32 tables (movable table) 34 Parts recognition camera (imaging means) 40 test robot 70 Control unit 74 Main control means (control means) 75 Head position error calculation means 76 First adsorption error calculation means 77 Second adsorption error calculation means 78 Third adsorption error calculation means 79 image processing means 79 Sa tray storage area Ta test area P1 parts delivery position P2 parts delivery position (parts supply section) Tr tray

Claims (3)

[Claims] 1. A component testing apparatus, which is incorporated into a component testing apparatus, takes out a component before testing from a tray and transfers it onto a movable table set at a predetermined component delivery position, and moves the component along with the predetermined component. In a device that conveys to a supply unit, a component holding head that can move between the tray and a component delivery position, an image capturing unit that can capture an image of the component held by the head, and an image capturing result by the image capturing unit. Recognition means for recognizing the holding state of the component based on the above, and after holding and taking out the component from the tray, passing the head through the image pickup position of the image pickup means to pick up this component In addition to moving it to the position, if there is an error in the holding state of the component based on the recognition result by the recognition means, correct the error and then transfer the component on the movable table. Parts conveying apparatus characterized by and a control means for controlling the operation of the head. 2. The component transfer device according to claim 1, wherein the movable table is configured to transfer the transferred component while suction-holding the transferred component. 3. The component transfer apparatus according to claim 1, wherein the head is configured to hold and transfer a plurality of components at the same time, and the control unit controls each of the recognition units. Based on the recognition result of the parts, the parts whose holding state error is less than or equal to a predetermined value are transferred to the movable table at the same time, while the parts whose holding state error exceeds the predetermined value are those errors. The component transfer device is configured to control the head so as to place each component on the movable table while correcting the above.