JPWO2012036137A1 - 分析装置及び分析方法 - Google Patents
分析装置及び分析方法 Download PDFInfo
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- 238000004458 analytical method Methods 0.000 title claims abstract description 127
- 239000013076 target substance Substances 0.000 claims abstract description 77
- 239000000126 substance Substances 0.000 claims abstract description 74
- 230000003287 optical effect Effects 0.000 claims abstract description 65
- 230000008859 change Effects 0.000 claims description 38
- 230000007423 decrease Effects 0.000 claims description 24
- 239000012491 analyte Substances 0.000 claims description 11
- 239000012530 fluid Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 210000002381 plasma Anatomy 0.000 description 228
- 238000012545 processing Methods 0.000 description 28
- 230000010355 oscillation Effects 0.000 description 12
- 238000012986 modification Methods 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000008033 biological extinction Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 230000008034 disappearance Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0294—Multi-channel spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/443—Emission spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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Abstract
Description
《実施形態1》
−プラズマ生成装置の構成−
−プラズマ生成装置の動作−
プラズマ生成装置11は、制御装置14の指示に従って、分析対象物質15をプラズマ状態にしてプラズマ状態を維持するプラズマ生成維持動作を行う。
−光分析装置の構成−
−光分析装置の動作−
−実施形態1の効果−
−実施形態1の変形例1−
−実施形態1の変形例2−
なお、信号処理装置36は、マイクロ波の照射を停止した時点から発光強度がゼロになるまでの時間を用いて、分析対象物質15の成分を同定してもよい。
《実施形態2》
−実施形態2の効果−
−実施形態2の変形例−
《実施形態3》
本実施形態3は、初期プラズマ生成手段が実施形態1及び実施形態2とは異なる。
本実施形態3では、図6に示すように、放電ギャップに分析対象物質15が配置される。分析対象物質15は、支持部材(図示省略)により支持されている。
《その他の実施形態》
上記実施形態は、以下のように構成してもよい。
11 プラズマ生成装置(プラズマ生成手段)
12 キャビティー
13 光分析装置(光分析手段)
21 レーザー光源
22 集光光学系
23 マイクロ波発振器
28 アンテナ
32 光学素子
33 光ファイバー
Claims (7)
- 分析対象物質にエネルギーを瞬間的に与えて該分析対象物質をプラズマ状態にした初期プラズマを生成し、該初期プラズマに電磁波を所定の時間に亘って照射してプラズマ状態を維持するプラズマ生成手段と、
上記初期プラズマの発光強度のピークから、電磁波により維持される電磁波プラズマにより発光強度が増加して概ね一定値に達するまでの発光強度に関する情報、又は電磁波の照射を停止した後の発光強度に関する情報を用いて分析対象物質の成分を同定する光分析手段とを備えている
ことを特徴とする分析装置。 - 請求項1において、
上記光分析手段は、上記初期プラズマの発光に対する上記電磁波プラズマの発光の遅れ時間を用いて、分析対象物質の成分を同定する
ことを特徴とする分析装置。 - 請求項1又は2において、
上記光分析手段は、上記初期プラズマの発光の直後に上記電磁波プラズマにより発光強度が増加する際の発光強度の単位時間当たりの増加量を用いて、分析対象物質の成分を同定する
ことを特徴とする分析装置。 - 流体に含まれる分析対象物質にエネルギーを与えて該分析対象物質をプラズマ状態にするプラズマ生成手段と、
上記プラズマ生成手段により生成されるプラズマから発せられる光に含まれる上記分析対象物質に対応する波長の発光強度の単位時間当たりの変化量を用いて、上記分析対象物質の濃度及び物質量の少なくとも一方を検出する光分析手段とを備えている
ことを特徴とする分析装置。 - 請求項4において、
上記プラズマ生成手段は、上記分析対象物質にエネルギーを与えて上記分析対象物質をプラズマ状態に変化させる初期プラズマ生成手段と、該初期プラズマ生成手段により生成された初期プラズマに電磁波を所定の時間に亘って照射してプラズマ状態を維持するプラズマ維持手段とを備え、
上記光分析手段は、上記プラズマ維持手段が電磁波の照射を停止した後にプラズマが消滅する際の発光強度の単位時間当たりの減少量を用いて、上記分析対象物質の濃度及び物質量の少なくとも一方を検出する
ことを特徴とする分析装置。 - 分析対象物質にエネルギーを瞬間的に与えて該分析対象物質をプラズマ状態にした初期プラズマを生成し、該初期プラズマに電磁波を所定の時間に亘って照射してプラズマ状態を維持するプラズマ生成ステップと、
上記初期プラズマの発光強度のピークから、電磁波により維持される電磁波プラズマにより発光強度が増加して概ね一定値に達するまでの発光強度に関する情報、又は電磁波の照射を停止した後の発光強度に関する情報を用いて分析対象物質の成分を同定する光分析ステップとを備えている
ことを特徴とする分析方法。 - 流体に含まれる分析対象物質にエネルギーを与えて該分析対象物質をプラズマ状態にするプラズマ生成ステップと、
上記プラズマ生成ステップにより生成されるプラズマから発せられる光に含まれる上記分析対象物質に対応する波長の発光強度の単位時間当たりの変化量を用いて、上記分析対象物質の濃度及び物質量の少なくとも一方を検出する光分析ステップとを備えている
ことを特徴とする分析方法。
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JP2010207384 | 2010-09-15 | ||
JP2010207384 | 2010-09-15 | ||
PCT/JP2011/070773 WO2012036137A1 (ja) | 2010-09-15 | 2011-09-12 | 分析装置及び分析方法 |
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JPWO2012036137A1 true JPWO2012036137A1 (ja) | 2014-02-03 |
JP5906500B2 JP5906500B2 (ja) | 2016-04-20 |
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JP2012534003A Active JP5906500B2 (ja) | 2010-09-15 | 2011-09-12 | 分析装置 |
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US (1) | US8879062B2 (ja) |
EP (1) | EP2618131A4 (ja) |
JP (1) | JP5906500B2 (ja) |
WO (1) | WO2012036137A1 (ja) |
Families Citing this family (4)
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WO2014156465A1 (ja) * | 2013-03-27 | 2014-10-02 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 送電装置、受電装置、電力供給システムおよび電力供給方法 |
WO2015157294A1 (en) | 2014-04-08 | 2015-10-15 | Plasma Igniter, Inc. | Dual signal coaxial cavity resonator plasma generation |
WO2020012744A1 (ja) * | 2018-07-11 | 2020-01-16 | 株式会社島津製作所 | 発光分析装置、及び、そのメンテナンス方法 |
JP2021043041A (ja) * | 2019-09-10 | 2021-03-18 | トヨタ自動車株式会社 | 元素組成分析方法 |
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US5715053A (en) * | 1995-10-23 | 1998-02-03 | Loge; Gary W. | Method for determining the concentration of atomic species in gases and solids |
US6008897A (en) * | 1999-01-19 | 1999-12-28 | National Research Council Of Canada | Method and apparatus for materials analysis by enhanced laser induced plasma spectroscopy |
JP3660938B2 (ja) * | 2000-06-12 | 2005-06-15 | 工業技術院長 | レーザを用いた成分分析方法 |
WO2008115287A2 (en) * | 2006-10-18 | 2008-09-25 | Efthimion Enterprises, Inc. | Laser assisted microwave plasma spectroscopy |
EP2137516A2 (en) * | 2007-04-20 | 2009-12-30 | Thermo Niton Analyzers LLC | Laser-triggered plasma apparatus for atomic emission spectroscopy |
JP5352895B2 (ja) * | 2008-07-23 | 2013-11-27 | イマジニアリング株式会社 | 物質分析装置 |
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2011
- 2011-09-12 WO PCT/JP2011/070773 patent/WO2012036137A1/ja active Application Filing
- 2011-09-12 EP EP11825139.6A patent/EP2618131A4/en not_active Withdrawn
- 2011-09-12 JP JP2012534003A patent/JP5906500B2/ja active Active
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2013
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US8879062B2 (en) | 2014-11-04 |
US20130208274A1 (en) | 2013-08-15 |
EP2618131A1 (en) | 2013-07-24 |
EP2618131A4 (en) | 2016-04-06 |
WO2012036137A1 (ja) | 2012-03-22 |
JP5906500B2 (ja) | 2016-04-20 |
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