JPWO2008107962A1 - 半導体装置の評価方法 - Google Patents
半導体装置の評価方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 75
- 238000011156 evaluation Methods 0.000 title claims description 27
- 239000012535 impurity Substances 0.000 claims abstract description 147
- 239000010949 copper Substances 0.000 claims abstract description 103
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 97
- 229910052802 copper Inorganic materials 0.000 claims abstract description 97
- 238000007747 plating Methods 0.000 claims abstract description 97
- 238000009826 distribution Methods 0.000 claims abstract description 76
- 238000009792 diffusion process Methods 0.000 claims abstract description 68
- 238000010438 heat treatment Methods 0.000 claims abstract description 62
- 238000000034 method Methods 0.000 claims abstract description 30
- 238000004458 analytical method Methods 0.000 claims description 25
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000004888 barrier function Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000001179 sorption measurement Methods 0.000 claims description 9
- 238000009713 electroplating Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000005295 random walk Methods 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 11
- 238000005324 grain boundary diffusion Methods 0.000 description 19
- 238000004088 simulation Methods 0.000 description 19
- 239000000460 chlorine Substances 0.000 description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 7
- 229910052801 chlorine Inorganic materials 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000007654 immersion Methods 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000003870 refractory metal Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003887 surface segregation Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
- C25D5/50—After-treatment of electroplated surfaces by heat-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Microelectronics & Electronic Packaging (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electrodes Of Semiconductors (AREA)
- Electroplating Methods And Accessories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Influence. of. Copper Purity on Microstructure and Electromigration. B. Alers, et al. (IEEE 2004) Design of ECP Additive for 65 nm-node Technology Cu BEOL Reliability , H. Shih, et al., (ITC 2005)
2 半導体基板
3 層間絶縁膜
4 バリアメタル膜
5 シード膜
6 電解銅めっき膜
本発明の一実施形態に係る、半導体装置の評価方法の概要について説明する。図1は、本実施形態に係る半導体装置の評価方法の流れを示すフロー図である。以下、図1に示すフロー図を参照しながら、本実施形態に係る半導体装置の評価方法を説明する。
(ステップS101)まず、シリコン基板である半導体基板2に層間絶縁膜3を成膜する。層間絶縁膜3は、例えば、100nm程度の厚さになるように成膜する。
以上、本発明に係る半導体装置の評価方法によれば、不純物の濃度分布をコントロールした電解銅めっき膜を有する半導体装置を試料として用意し、この試料を用いて熱処理前後の不純物濃度の分布を二次イオン質量分析法で解析しているため、電解銅めっき膜を熱処理した際の不純物の拡散の挙動を解析し、評価することが可能となる。解析結果および評価結果から得られた電解銅めっき膜の体拡散係数等は、例えば、半導体装置に配線層を形成する目的で成膜した電解銅めっき膜の不純物濃度をコントロールしたい場合に使うことができる。すなわち、例えば、上記の数式C(x,t)に取得した拡散係数Dを当てはめることで、電解銅めっき膜を所望の不純物濃度にしたい場合の熱処理時間や熱処理温度を決定することが可能となる。これにより、例えば半導体製造プロセスを設計する際の熱処理時間や熱処理温度を容易に決定することが可能となる。
Claims (16)
- 半導体基板に銅めっき膜が成膜された試料である半導体装置を製造する半導体装置製造工程であって、成膜する銅めっき膜中の不純物の濃度分布が所望の濃度分布となるように、該半導体基板上を流れるめっき電流の単位面積あたりの電流密度が所定の電流密度である第一電流密度の状態と、該第一電流密度とは異なる電流密度である第二電流密度の状態と、を遷移する印加パターンの電流を流すことで半導体基板に銅めっき膜を成膜する半導体装置製造工程と、
前記半導体装置製造工程で製造された前記半導体装置を分析し、該半導体装置の銅めっき膜中に含まれる不純物の濃度分布を取得する第一の不純物濃度分析工程と、
前記半導体装置を熱処理する熱処理工程と、
前記熱処理工程において熱処理された前記半導体装置を分析し、該半導体装置の銅めっき膜中に含まれる不純物の濃度分布を取得する第二の不純物濃度分析工程と、
前記第一の不純物濃度分析工程において取得された不純物の濃度分布と前記第二の不純物濃度分析工程において取得された不純物の濃度分布とを比較し、熱処理の際の不純物の拡散を解析する拡散解析工程と、
を有する半導体装置の評価方法。 - 前記拡散解析工程は、前記第一の不純物濃度分析工程において取得された不純物の濃度分布と前記第二の不純物濃度分析工程において取得された不純物の濃度分布とを比較し、熱処理の際の熱処理時間に対する不純物の拡散速度の度合である拡散係数を解析する、請求項1に記載の半導体装置の評価方法。
- 前記拡散解析工程は、不純物の濃度分布と熱処理の時間との関係に基づいて前記拡散係数を解析する、請求項2に記載の半導体装置の評価方法。
- 前記第二電流密度は、前記第一電流密度の少なくとも2倍以上の電流密度である、請求項1から3の何れかに記載の半導体装置の評価方法。
- 前記第二電流密度は、前記第一電流密度の少なくとも5倍以上の電流密度である、請求項4に記載の半導体装置の評価方法。
- 前記半導体装置の銅めっき膜は、前記第一電流密度の状態と前記第二電流密度の状態とに加え、前記第二電流密度とは異なる電流密度である第三電流密度の状態と、を更に遷移する印加パターンの電流を流すことにより、該銅めっき膜中の不純物の濃度分布が所望の濃度分布となるように成膜される、請求項1から5の何れかに記載の半導体装置の評価方法。
- 前記第三電流密度は、前記第二電流密度の少なくとも2倍以上の電流密度である、請求項6に記載の半導体装置の評価方法。
- 前記第三電流密度は、前記第二電流密度の少なくとも5倍以上の電流密度である、請求項7に記載の半導体装置の評価方法。
- 前記第三電流密度は、前記第二電流密度の少なくとも2分の1以下の電流密度である、請求項6に記載の半導体装置の評価方法。
- 前記第三電流密度は、前記第二電流密度の少なくとも5分の1以下の電流密度である、請求項9に記載の半導体装置の評価方法。
- 前記熱処理工程は、150℃以上の温度で前記半導体装置を熱処理する、請求項1から10の何れかに記載の半導体装置の評価方法。
- 前記第一の不純物濃度分析工程と前記第二の不純物濃度分析工程は、二次イオン質量分析法を用いて前記不純物の濃度分布を取得する、請求項1から11の何れかに記載の半導体装置の評価方法。
- 前記半導体装置の銅めっき膜は、硫酸銅による電解めっきで成膜される、請求項1から12の何れかに記載の半導体装置の評価方法。
- 前記半導体装置の銅めっき膜は、シリコン基板の上に成膜されたバリアメタル膜とシード膜の上に成膜される、請求項1から13の何れかに記載の半導体装置の評価方法。
- 前記拡散解析工程は、熱処理の際の不純物の拡散をRandom walk modelに基づいて解析する、請求項1から14の何れかに記載の半導体装置の評価方法。
- 前記拡散解析工程は、熱処理の際の不純物の拡散をRamdom walk modelに基づいて解析し、且つ前記バリアメタルでの不純物の吸着率を組み入れた上で不純物の拡散の分布を解析する、請求項15に記載の半導体装置の評価方法。
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PCT/JP2007/054192 WO2008107962A1 (ja) | 2007-03-05 | 2007-03-05 | 半導体装置の評価方法 |
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JP6080009B2 (ja) * | 2013-05-13 | 2017-02-15 | 国立大学法人茨城大学 | 半導体集積回路装置及びその製造方法、並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法 |
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US6268291B1 (en) * | 1995-12-29 | 2001-07-31 | International Business Machines Corporation | Method for forming electromigration-resistant structures by doping |
US6123825A (en) * | 1998-12-02 | 2000-09-26 | International Business Machines Corporation | Electromigration-resistant copper microstructure and process of making |
KR100385042B1 (ko) * | 1998-12-03 | 2003-06-18 | 인터내셔널 비지네스 머신즈 코포레이션 | 내 일렉트로 마이그레이션의 구조물을 도핑으로 형성하는 방법 |
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