JPS649616B2 - - Google Patents

Info

Publication number
JPS649616B2
JPS649616B2 JP1051880A JP1051880A JPS649616B2 JP S649616 B2 JPS649616 B2 JP S649616B2 JP 1051880 A JP1051880 A JP 1051880A JP 1051880 A JP1051880 A JP 1051880A JP S649616 B2 JPS649616 B2 JP S649616B2
Authority
JP
Japan
Prior art keywords
etching
electron beam
resist
inorganic resist
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1051880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56107243A (en
Inventor
Tatsuya Ikeuchi
Tomihiro Nakada
Hachiro Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP1051880A priority Critical patent/JPS56107243A/ja
Publication of JPS56107243A publication Critical patent/JPS56107243A/ja
Publication of JPS649616B2 publication Critical patent/JPS649616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • G03F7/0043—Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1051880A 1980-01-31 1980-01-31 Developing method for inorganic resist Granted JPS56107243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1051880A JPS56107243A (en) 1980-01-31 1980-01-31 Developing method for inorganic resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1051880A JPS56107243A (en) 1980-01-31 1980-01-31 Developing method for inorganic resist

Publications (2)

Publication Number Publication Date
JPS56107243A JPS56107243A (en) 1981-08-26
JPS649616B2 true JPS649616B2 (en, 2012) 1989-02-17

Family

ID=11752442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1051880A Granted JPS56107243A (en) 1980-01-31 1980-01-31 Developing method for inorganic resist

Country Status (1)

Country Link
JP (1) JPS56107243A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60195940A (ja) * 1984-03-17 1985-10-04 Mitsubishi Electric Corp 微細パタ−ン形成方法
EP4557004A1 (en) * 2022-07-29 2025-05-21 Tokyo Electron Limited Method for processing substrate, and system for processing substrate

Also Published As

Publication number Publication date
JPS56107243A (en) 1981-08-26

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