JPS6490527A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6490527A
JPS6490527A JP62248853A JP24885387A JPS6490527A JP S6490527 A JPS6490527 A JP S6490527A JP 62248853 A JP62248853 A JP 62248853A JP 24885387 A JP24885387 A JP 24885387A JP S6490527 A JPS6490527 A JP S6490527A
Authority
JP
Japan
Prior art keywords
alignment
chip
exposure
marks
corners
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62248853A
Other languages
English (en)
Inventor
Nobuyuki Yasutake
Shinji Miyagi
Yasushi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62248853A priority Critical patent/JPS6490527A/ja
Publication of JPS6490527A publication Critical patent/JPS6490527A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62248853A 1987-10-01 1987-10-01 Manufacture of semiconductor device Pending JPS6490527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62248853A JPS6490527A (en) 1987-10-01 1987-10-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62248853A JPS6490527A (en) 1987-10-01 1987-10-01 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6490527A true JPS6490527A (en) 1989-04-07

Family

ID=17184396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62248853A Pending JPS6490527A (en) 1987-10-01 1987-10-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6490527A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0339864U (ja) * 1989-08-30 1991-04-17
US5089874A (en) * 1989-03-08 1992-02-18 Mitsubishi Denki Kabushiki Kaisha Semiconductor device with infrared mapping markers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5089874A (en) * 1989-03-08 1992-02-18 Mitsubishi Denki Kabushiki Kaisha Semiconductor device with infrared mapping markers
JPH0339864U (ja) * 1989-08-30 1991-04-17

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