JPS6490527A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6490527A JPS6490527A JP62248853A JP24885387A JPS6490527A JP S6490527 A JPS6490527 A JP S6490527A JP 62248853 A JP62248853 A JP 62248853A JP 24885387 A JP24885387 A JP 24885387A JP S6490527 A JPS6490527 A JP S6490527A
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- chip
- exposure
- marks
- corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62248853A JPS6490527A (en) | 1987-10-01 | 1987-10-01 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62248853A JPS6490527A (en) | 1987-10-01 | 1987-10-01 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6490527A true JPS6490527A (en) | 1989-04-07 |
Family
ID=17184396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62248853A Pending JPS6490527A (en) | 1987-10-01 | 1987-10-01 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6490527A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0339864U (ja) * | 1989-08-30 | 1991-04-17 | ||
US5089874A (en) * | 1989-03-08 | 1992-02-18 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device with infrared mapping markers |
-
1987
- 1987-10-01 JP JP62248853A patent/JPS6490527A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5089874A (en) * | 1989-03-08 | 1992-02-18 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device with infrared mapping markers |
JPH0339864U (ja) * | 1989-08-30 | 1991-04-17 |
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