JPS6489422A - Substrate wafer for semiconductor element - Google Patents
Substrate wafer for semiconductor elementInfo
- Publication number
- JPS6489422A JPS6489422A JP24404987A JP24404987A JPS6489422A JP S6489422 A JPS6489422 A JP S6489422A JP 24404987 A JP24404987 A JP 24404987A JP 24404987 A JP24404987 A JP 24404987A JP S6489422 A JPS6489422 A JP S6489422A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- hole
- semiconductor element
- substrate wafer
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain a substrate wafer for semiconductor element comprising a large diameter wafer characterized by excellent uniformity in handling process, excellent supporting of the wafer and the like, by forming holes at one or more places in the large diameter wafer used for manufacturing the semiconductor elements. CONSTITUTION:Many sheets of wafers 1 are introduced into a reaction container and treated. For example, in the case of a CVD process, a hole 2 is formed in the wafer 1. Gas is exhausted through a part, where the hole 2 is formed at the center. Uniformity in supply becomes excellent in this method in comparison with a case the gas is supplied to a wafer, in which a hole is not provided.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24404987A JPS6489422A (en) | 1987-09-30 | 1987-09-30 | Substrate wafer for semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24404987A JPS6489422A (en) | 1987-09-30 | 1987-09-30 | Substrate wafer for semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489422A true JPS6489422A (en) | 1989-04-03 |
Family
ID=17112964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24404987A Pending JPS6489422A (en) | 1987-09-30 | 1987-09-30 | Substrate wafer for semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489422A (en) |
-
1987
- 1987-09-30 JP JP24404987A patent/JPS6489422A/en active Pending
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