JPS6489319A - Device for formation of optically pumped film - Google Patents
Device for formation of optically pumped filmInfo
- Publication number
- JPS6489319A JPS6489319A JP24541387A JP24541387A JPS6489319A JP S6489319 A JPS6489319 A JP S6489319A JP 24541387 A JP24541387 A JP 24541387A JP 24541387 A JP24541387 A JP 24541387A JP S6489319 A JPS6489319 A JP S6489319A
- Authority
- JP
- Japan
- Prior art keywords
- light
- chamber
- substrates
- gas
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To realize a light introducing window structure having sufficiently high light transmissible characteristic and dynamic strength characteristic and to accelerate a film forming speed by dividing a light introducing window and adjacently disposing them. CONSTITUTION:A light source 23 and a reflecting plate 24 for the light of the source are provided in a light source containing chamber 14. A plurality of openings are provided to directly see through substrates 15 at a partition plate 11 in a window structure, and light introducing windows 12 are so attached as to block the openings. A film forming chamber 13 is evacuated by an evacuation pump 22, N2 gas is fed from a line 25 into a chamber 14, material gas is then introduced from a supply unit 21 into the chamber 13, and the substrates 15 are heated by a heater 19. Then, when the light source 23 is fired and an ultraviolet light is irradiated through the windows 12 to the substrates 15, the gas is decomposed photovoltaicly in the chamber 13, and amorphous Si films are deposited on the substrates 15.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24541387A JPS6489319A (en) | 1987-09-29 | 1987-09-29 | Device for formation of optically pumped film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24541387A JPS6489319A (en) | 1987-09-29 | 1987-09-29 | Device for formation of optically pumped film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489319A true JPS6489319A (en) | 1989-04-03 |
Family
ID=17133284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24541387A Pending JPS6489319A (en) | 1987-09-29 | 1987-09-29 | Device for formation of optically pumped film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489319A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6211081B1 (en) | 1996-04-03 | 2001-04-03 | Kabushiki Kaisha Toshiba | Method of manufacturing a semiconductor device in a CVD reactive chamber |
JP2003045862A (en) * | 2001-08-01 | 2003-02-14 | Tokyo Electron Ltd | Optical stimulation film forming device and method |
JP2012256937A (en) * | 2012-09-14 | 2012-12-27 | Taiyo Nippon Sanso Corp | Vapor growth device and method |
-
1987
- 1987-09-29 JP JP24541387A patent/JPS6489319A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6211081B1 (en) | 1996-04-03 | 2001-04-03 | Kabushiki Kaisha Toshiba | Method of manufacturing a semiconductor device in a CVD reactive chamber |
US6383897B2 (en) | 1996-04-03 | 2002-05-07 | Kabushiki Kaisha Toshiba | Apparatus for manufacturing a semiconductor device in a CVD reactive chamber |
JP2003045862A (en) * | 2001-08-01 | 2003-02-14 | Tokyo Electron Ltd | Optical stimulation film forming device and method |
JP2012256937A (en) * | 2012-09-14 | 2012-12-27 | Taiyo Nippon Sanso Corp | Vapor growth device and method |
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