JPH036204A - Method for forming plasma polymerization film - Google Patents

Method for forming plasma polymerization film

Info

Publication number
JPH036204A
JPH036204A JP13975189A JP13975189A JPH036204A JP H036204 A JPH036204 A JP H036204A JP 13975189 A JP13975189 A JP 13975189A JP 13975189 A JP13975189 A JP 13975189A JP H036204 A JPH036204 A JP H036204A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
electric discharge
gas
plasma
site
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13975189A
Inventor
Yoshihito Suzuki
Original Assignee
Furukawa Electric Co Ltd:The
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Abstract

PURPOSE: To obtain the subject film wherein the skeleton of a starting gas is kept intact by decomposing the starting gas with a plasma which has been transferred from the site of electric discharge to the site of starting gas decomposition and depositing the decomposition product on a base.
CONSTITUTION: A vacuum chamber 1 is evacuated and a base heater 10 is energized by a heating power supply 17 to heat a base 2 placed on a support 8. While keeping this state, an electric discharge gas (a) is introduced into the chamber 1 from an electric discharge gas source 4 and an electric discharge voltage is applied to an electric discharge induction coil 6 from an RF power supply 3 to generate a plasma. The plasma is transferred from the site of electric discharge to the site of starting gas (b) decomposition in a period of time which is longer than the time taken for the afterglow of the plasma to disappear and mixed with the gas (b) supplied from a monomer source 5 to decompose the gas (b), and the decomposition product is deposited on the base 2 to give the subject film.
COPYRIGHT: (C)1991,JPO&Japio
JP13975189A 1989-06-01 1989-06-01 Method for forming plasma polymerization film Pending JPH036204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13975189A JPH036204A (en) 1989-06-01 1989-06-01 Method for forming plasma polymerization film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13975189A JPH036204A (en) 1989-06-01 1989-06-01 Method for forming plasma polymerization film

Publications (1)

Publication Number Publication Date
JPH036204A true true JPH036204A (en) 1991-01-11

Family

ID=15252543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13975189A Pending JPH036204A (en) 1989-06-01 1989-06-01 Method for forming plasma polymerization film

Country Status (1)

Country Link
JP (1) JPH036204A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0985741A1 (en) * 1998-09-07 2000-03-15 THE PROCTER & GAMBLE COMPANY Modulated plasma glow discharge treatments for making super hydrophobic substrates
US6649222B1 (en) 1998-09-07 2003-11-18 The Procter & Gamble Company Modulated plasma glow discharge treatments for making superhydrophobic substrates
KR100715070B1 (en) * 1999-04-22 2007-05-07 어플라이드 머티어리얼스, 인코포레이티드 A novel rf plasma source for material processing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0985741A1 (en) * 1998-09-07 2000-03-15 THE PROCTER & GAMBLE COMPANY Modulated plasma glow discharge treatments for making super hydrophobic substrates
WO2000014297A1 (en) * 1998-09-07 2000-03-16 The Procter & Gamble Company Modulated plasma glow discharge treatments for making superhydrophobic substrates
US6649222B1 (en) 1998-09-07 2003-11-18 The Procter & Gamble Company Modulated plasma glow discharge treatments for making superhydrophobic substrates
KR100715070B1 (en) * 1999-04-22 2007-05-07 어플라이드 머티어리얼스, 인코포레이티드 A novel rf plasma source for material processing

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