JPS648640A - Device for inspecting semiconductor - Google Patents
Device for inspecting semiconductorInfo
- Publication number
- JPS648640A JPS648640A JP62162332A JP16233287A JPS648640A JP S648640 A JPS648640 A JP S648640A JP 62162332 A JP62162332 A JP 62162332A JP 16233287 A JP16233287 A JP 16233287A JP S648640 A JPS648640 A JP S648640A
- Authority
- JP
- Japan
- Prior art keywords
- room
- fluorocarbon
- inert gas
- chips
- clearance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To prevent fluorocarbon from invading sections of an inspection device by providing an upper chamber having an inspection probe and its positioning unit and a lower chamber for disposing an LSI chip, forming an exhaust port at the upper position of the lower chamber, blowing inert gas to the upper chamber, feeding it out through a clearance to the lower chamber, and further discharging it together with refrigerant gas from the exhaust port. CONSTITUTION:When chips 1, 1' dipped in fluorocarbon liquid 14 are energized through a power line 8, the chips 1, 1' are heated, the liquid 14 is boiled, and evaporated to remove the heats of the chips 1, 1'. Thus, fluorocarbon vapor generated in this manner is filled in a room 17. On the other hand, dry inert gas blown to a room 16 is blown from the room 16 through a clearance 15 into the room 17. Thus, since the flow of the fluorocarbon vapor to be leaked to the upper room 16 from the room 17 counterflows at the clearance 15 to the flow 20 of the inert gas, the flow of the fluorocarbon vapor is stopped. The mixture gas of the fluorocarbon and the inert gas stored in the lower room is forcibly exhausted out of the room 17 from an exhaust port 13a as the mixture gas 13.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62162332A JPS648640A (en) | 1987-07-01 | 1987-07-01 | Device for inspecting semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62162332A JPS648640A (en) | 1987-07-01 | 1987-07-01 | Device for inspecting semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648640A true JPS648640A (en) | 1989-01-12 |
Family
ID=15752533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62162332A Pending JPS648640A (en) | 1987-07-01 | 1987-07-01 | Device for inspecting semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648640A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03270034A (en) * | 1990-03-19 | 1991-12-02 | Tokyo Electron Ltd | Inspection device |
JPH06163657A (en) * | 1992-11-27 | 1994-06-10 | Nec Corp | Probe card |
EP0860704A2 (en) * | 1997-02-24 | 1998-08-26 | Tokyo Electron Limited | Method and apparatus for inspecting semiconductor integrated circuits, and contactor incorporated in the apparatus |
JPH10274667A (en) * | 1997-03-31 | 1998-10-13 | Tokyo Denpa Kk | Automatic temperature characteristic testing device for electronic parts |
US9684015B2 (en) | 2014-06-17 | 2017-06-20 | Mitsubishi Electric Corporation | Measuring apparatus and measuring method utilizing insulating liquid |
-
1987
- 1987-07-01 JP JP62162332A patent/JPS648640A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03270034A (en) * | 1990-03-19 | 1991-12-02 | Tokyo Electron Ltd | Inspection device |
JPH06163657A (en) * | 1992-11-27 | 1994-06-10 | Nec Corp | Probe card |
EP0860704A2 (en) * | 1997-02-24 | 1998-08-26 | Tokyo Electron Limited | Method and apparatus for inspecting semiconductor integrated circuits, and contactor incorporated in the apparatus |
EP0860704A3 (en) * | 1997-02-24 | 2000-01-19 | Tokyo Electron Limited | Method and apparatus for inspecting semiconductor integrated circuits, and contactor incorporated in the apparatus |
JPH10274667A (en) * | 1997-03-31 | 1998-10-13 | Tokyo Denpa Kk | Automatic temperature characteristic testing device for electronic parts |
US9684015B2 (en) | 2014-06-17 | 2017-06-20 | Mitsubishi Electric Corporation | Measuring apparatus and measuring method utilizing insulating liquid |
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