JPS6484777A - Integrated semiconductor laser - Google Patents

Integrated semiconductor laser

Info

Publication number
JPS6484777A
JPS6484777A JP62244866A JP24486687A JPS6484777A JP S6484777 A JPS6484777 A JP S6484777A JP 62244866 A JP62244866 A JP 62244866A JP 24486687 A JP24486687 A JP 24486687A JP S6484777 A JPS6484777 A JP S6484777A
Authority
JP
Japan
Prior art keywords
refractive
grating coupler
laser
convergence
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62244866A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62244866A priority Critical patent/JPS6484777A/en
Publication of JPS6484777A publication Critical patent/JPS6484777A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
    • H01S5/187—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To keep a position of a converged beam spot nearly definite by a method wherein a laser part and a convergence grating coupler are integrated on a semiconductor substrate and the convergence grating coupler has a refractive-index control region. CONSTITUTION:A groove 2 is formed on an n-InP substrate 1 ; an undoped refractive-index control layer 3 is grown selectively only on the groove 2; a diffraction grating 4, a waveguide layer 5, an active layer 6 and a clad layer 7 are laminated partially. Then, a ridge 12 used to limit a laser part 11 and a convergence grating coupler 8 are formed; lastly, an electrode is formed; a highly reflective dielectric multilayer film 9 is formed; a desired integration- type semiconductor laser is obtained. The convergence grating coupler 8 is constituted in such a way that its cycle becomes gradually short with a distance becoming more remote from the laser part 11 and that it is curved to be a concentrically circular lens. A laser beam 10 is collected upward and can be converged satisfactorily; if a refractive index is controlled by impressing an electric field on the refractive-index control layer 3, a position of a converged beam spot can be kept nearly definite even when an ambient temperature is changed.
JP62244866A 1987-09-28 1987-09-28 Integrated semiconductor laser Pending JPS6484777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62244866A JPS6484777A (en) 1987-09-28 1987-09-28 Integrated semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62244866A JPS6484777A (en) 1987-09-28 1987-09-28 Integrated semiconductor laser

Publications (1)

Publication Number Publication Date
JPS6484777A true JPS6484777A (en) 1989-03-30

Family

ID=17125159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62244866A Pending JPS6484777A (en) 1987-09-28 1987-09-28 Integrated semiconductor laser

Country Status (1)

Country Link
JP (1) JPS6484777A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03124674U (en) * 1990-02-26 1991-12-17
JPH04298703A (en) * 1989-12-26 1992-10-22 United Technol Corp <Utc> Constitution of optical waveguide wherein bragg diffraction grating for changing direction of light and focusing focal point is machined in inside
EP2447751B1 (en) * 2003-02-11 2016-11-02 Luxtera, Inc. An integrated optical apparatus comprising a waveguide grating coupler with a flared waveguide portion

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04298703A (en) * 1989-12-26 1992-10-22 United Technol Corp <Utc> Constitution of optical waveguide wherein bragg diffraction grating for changing direction of light and focusing focal point is machined in inside
JPH03124674U (en) * 1990-02-26 1991-12-17
EP2447751B1 (en) * 2003-02-11 2016-11-02 Luxtera, Inc. An integrated optical apparatus comprising a waveguide grating coupler with a flared waveguide portion

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