EP0138567A3 - Semiconductor diode lasers - Google Patents

Semiconductor diode lasers Download PDF

Info

Publication number
EP0138567A3
EP0138567A3 EP84306901A EP84306901A EP0138567A3 EP 0138567 A3 EP0138567 A3 EP 0138567A3 EP 84306901 A EP84306901 A EP 84306901A EP 84306901 A EP84306901 A EP 84306901A EP 0138567 A3 EP0138567 A3 EP 0138567A3
Authority
EP
European Patent Office
Prior art keywords
layer
laser
semiconductor diode
different parts
diode lasers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84306901A
Other languages
German (de)
French (fr)
Other versions
EP0138567A2 (en
Inventor
Joseph Alan Barnard
Edwin Yue Bun Pun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB838327296A external-priority patent/GB8327296D0/en
Priority claimed from GB838332679A external-priority patent/GB8332679D0/en
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Publication of EP0138567A2 publication Critical patent/EP0138567A2/en
Publication of EP0138567A3 publication Critical patent/EP0138567A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H01S5/0422—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer
    • H01S5/0424—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer lateral current injection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2203—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure with a transverse junction stripe [TJS] structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0425—Electrodes, e.g. characterised by the structure
    • H01S5/04252—Electrodes, e.g. characterised by the structure characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0425—Electrodes, e.g. characterised by the structure
    • H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
    • H01S5/04257—Electrodes, e.g. characterised by the structure characterised by the configuration having positive and negative electrodes on the same side of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3201—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm

Abstract

A semiconductor diode laser of the kind in which laser ra­ diation occurs in an active region in a layer (3) of semiconductor material wherein optical confinement of the radiation to a por­ tion (19) of said layer so as to direct light from said region to a light waveguide is obtained by virtue of differences in the re­ fractive index of different parts of said layer arising from me­ chanical stresses in said layer, produced, for example, by dif­ ferential thermal contracting during fabrication of the laser of different parts (96, 11b and 13, 15 or 21 and 5 or 23 and 3) of the laser structure.
EP84306901A 1983-10-12 1984-10-10 Semiconductor diode lasers Withdrawn EP0138567A3 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB838327296A GB8327296D0 (en) 1983-10-12 1983-10-12 Semiconductor diode lasers
GB8327296 1983-10-12
GB838332679A GB8332679D0 (en) 1983-12-07 1983-12-07 Semiconductor diode lasers
GB8332679 1983-12-07

Publications (2)

Publication Number Publication Date
EP0138567A2 EP0138567A2 (en) 1985-04-24
EP0138567A3 true EP0138567A3 (en) 1985-05-29

Family

ID=26286912

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84306901A Withdrawn EP0138567A3 (en) 1983-10-12 1984-10-10 Semiconductor diode lasers

Country Status (3)

Country Link
US (1) US4663761A (en)
EP (1) EP0138567A3 (en)
GB (1) GB2149572B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5145807A (en) * 1988-05-11 1992-09-08 Mitsubishi Kasei Corporation Method of making semiconductor laser devices
DE69104573T2 (en) * 1990-08-03 1995-04-20 Philips Nv Optical amplifier.
JPH0794833A (en) * 1993-09-22 1995-04-07 Mitsubishi Electric Corp Semiconductor laser and its manufacturing method
US5561680A (en) * 1994-12-20 1996-10-01 Philips Electronics North America Corporation II-VI semiconductor diode laser having a strained layer
DE102017112242B4 (en) * 2016-06-20 2019-10-24 Osram Opto Semiconductors Gmbh Edge-emitting semiconductor laser

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2029083A (en) * 1978-08-18 1980-03-12 Standard Telephones Cables Ltd Semiconductor waveguide devices
US4212020A (en) * 1978-07-21 1980-07-08 California Institute Of Technology Solid state electro-optical devices on a semi-insulating substrate
GB2057748A (en) * 1979-09-04 1981-04-01 Matsushita Electric Ind Co Ltd Semiconductor lasers
US4334311A (en) * 1980-05-13 1982-06-08 Mitsubishi Denki Kabushiki Kaisha Transverse junction stripe semiconductor laser device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183038A (en) * 1978-03-29 1980-01-08 Mitsubishi Denki Kabushiki Kaisha Semiconductor laser device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4212020A (en) * 1978-07-21 1980-07-08 California Institute Of Technology Solid state electro-optical devices on a semi-insulating substrate
GB2029083A (en) * 1978-08-18 1980-03-12 Standard Telephones Cables Ltd Semiconductor waveguide devices
GB2057748A (en) * 1979-09-04 1981-04-01 Matsushita Electric Ind Co Ltd Semiconductor lasers
US4334311A (en) * 1980-05-13 1982-06-08 Mitsubishi Denki Kabushiki Kaisha Transverse junction stripe semiconductor laser device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS, vol. 41, no. 2, 15th July 1982, pages 129-131, American Institute of Physics, New York, US; Y.C. CHEN et al.: "Thermal waveguiding in oxide-defined, narrow-stripe, large-optical-cavity lasers" *
ELECTRONICS LETTERS, vol. 16, no. 13, 19th June 1980, pages 510-511, Hitchin, Herts., GB; T.P. LEE et al.: "Low threshold current transverse junction lasers on semi-insulating substrates by M.B.E." *

Also Published As

Publication number Publication date
GB2149572B (en) 1988-02-24
EP0138567A2 (en) 1985-04-24
GB8425642D0 (en) 1984-11-14
GB2149572A (en) 1985-06-12
US4663761A (en) 1987-05-05

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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PUAL Search report despatched

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18D Application deemed to be withdrawn

Effective date: 19860130

RIN1 Information on inventor provided before grant (corrected)

Inventor name: BARNARD, JOSEPH ALAN

Inventor name: PUN, EDWIN YUE BUN