JPS648269A - Production of sputtering target material - Google Patents
Production of sputtering target materialInfo
- Publication number
- JPS648269A JPS648269A JP62164907A JP16490787A JPS648269A JP S648269 A JPS648269 A JP S648269A JP 62164907 A JP62164907 A JP 62164907A JP 16490787 A JP16490787 A JP 16490787A JP S648269 A JPS648269 A JP S648269A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- mixture
- target material
- sputtering target
- carbonates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 title abstract 2
- 239000013077 target material Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000203 mixture Substances 0.000 abstract 3
- 229910052765 Lutetium Inorganic materials 0.000 abstract 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000000155 melt Substances 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 229910052727 yttrium Inorganic materials 0.000 abstract 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 229910052692 Dysprosium Inorganic materials 0.000 abstract 1
- 229910052691 Erbium Inorganic materials 0.000 abstract 1
- 229910052689 Holmium Inorganic materials 0.000 abstract 1
- 229910052775 Thulium Inorganic materials 0.000 abstract 1
- 229910052769 Ytterbium Inorganic materials 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- -1 etc.) Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000011812 mixed powder Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 229910052711 selenium Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164907A JPS648269A (en) | 1987-06-30 | 1987-06-30 | Production of sputtering target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164907A JPS648269A (en) | 1987-06-30 | 1987-06-30 | Production of sputtering target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648269A true JPS648269A (en) | 1989-01-12 |
Family
ID=15802130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62164907A Pending JPS648269A (en) | 1987-06-30 | 1987-06-30 | Production of sputtering target material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648269A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100734811B1 (ko) * | 2005-09-16 | 2007-07-03 | 한국기초과학지원연구원 | 고품질의 대면적 글래시 산화물 타겟의 제조방법 및 그제조방법에 의한 타겟 |
-
1987
- 1987-06-30 JP JP62164907A patent/JPS648269A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100734811B1 (ko) * | 2005-09-16 | 2007-07-03 | 한국기초과학지원연구원 | 고품질의 대면적 글래시 산화물 타겟의 제조방법 및 그제조방법에 의한 타겟 |
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