JPS6482632A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6482632A JPS6482632A JP62242119A JP24211987A JPS6482632A JP S6482632 A JPS6482632 A JP S6482632A JP 62242119 A JP62242119 A JP 62242119A JP 24211987 A JP24211987 A JP 24211987A JP S6482632 A JPS6482632 A JP S6482632A
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- stress
- electrode
- insulating film
- longitudinal elasticity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242119A JPS6482632A (en) | 1987-09-25 | 1987-09-25 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242119A JPS6482632A (en) | 1987-09-25 | 1987-09-25 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6482632A true JPS6482632A (en) | 1989-03-28 |
Family
ID=17084580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242119A Pending JPS6482632A (en) | 1987-09-25 | 1987-09-25 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6482632A (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5415681A (en) * | 1977-07-06 | 1979-02-05 | Nec Corp | Manufacture of field effect transistor |
JPS6257255A (ja) * | 1985-09-06 | 1987-03-12 | Agency Of Ind Science & Technol | 化合物半導体装置の製造方法 |
-
1987
- 1987-09-25 JP JP62242119A patent/JPS6482632A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5415681A (en) * | 1977-07-06 | 1979-02-05 | Nec Corp | Manufacture of field effect transistor |
JPS6257255A (ja) * | 1985-09-06 | 1987-03-12 | Agency Of Ind Science & Technol | 化合物半導体装置の製造方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5742164A (en) | Semiconductor device | |
JPS6410644A (en) | Manufacture of semiconductor device | |
JPS6482632A (en) | Semiconductor device | |
JPS56155531A (en) | Manufacture of semiconductor device | |
JPS5768073A (en) | Field effect transistor | |
JPS5341188A (en) | Mis type semiconductor device | |
JPS577972A (en) | Insulated gate type thin film transistor | |
JPS55154767A (en) | Manufacture of semiconductor device | |
JPS56126977A (en) | Junction type field effect transistor | |
JPS6433970A (en) | Field effect semiconductor device | |
JPS57164573A (en) | Semiconductor device | |
JPS6450465A (en) | Semiconductor device | |
JPS6482567A (en) | Field-effect semiconductor device | |
JPS5526624A (en) | Semiconductor device | |
JPS57211783A (en) | Compound semiconductor device | |
JPS57197869A (en) | Semiconductor device | |
JPS57106080A (en) | Manufacture of gaas field effect transistor | |
JPS54148384A (en) | Power-use high dielectric strength field effect transistor | |
JPS55105376A (en) | Manufacture process of semiconductor device | |
JPS6490560A (en) | Thin-film transistor | |
JPS6481370A (en) | Semiconductor integrated circuit device | |
JPS54109385A (en) | Field effect semiconductor device of high dielectric strength | |
JPS57147283A (en) | Semiconductor device | |
JPS5563876A (en) | Field-effect semiconductor device | |
JPS6433934A (en) | Semiconductor device |