JPS6481282A - Manufacture of superconductor thin film - Google Patents
Manufacture of superconductor thin filmInfo
- Publication number
- JPS6481282A JPS6481282A JP62239528A JP23952887A JPS6481282A JP S6481282 A JPS6481282 A JP S6481282A JP 62239528 A JP62239528 A JP 62239528A JP 23952887 A JP23952887 A JP 23952887A JP S6481282 A JPS6481282 A JP S6481282A
- Authority
- JP
- Japan
- Prior art keywords
- target
- atoms
- thin film
- composition
- ratios
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000002887 superconductor Substances 0.000 title abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000013076 target substance Substances 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To manufacture a superconductor thin film of a definite composition with good reproducibility by a method wherein a target substance whose constitutive elements are La, Ba, Cu and O containing La, Ba and Cu in specific ratios. CONSTITUTION:A target to be used to deposit a thin film on a substrate by evaporating a target substance while the target is irradiated with a pulsed laser beam is substance whose constitutive elements are La, Ba, Cu and O. When the total number of atoms of La, Ba and Cu per unit volume is 100% for a composition of the target, the number of atoms of La at 10-30%, the number of atoms of Ba at 20-40% and the number of atoms of 40-60% in terms of their ratios are contained. When the pulsed laser beam is irradiated only for a duration of an extremely short pulse width, evaporation is caused in the ratios of the atoms which are nearly equal to the composition of the target; accordingly, it is possible to obtain the thin film whose composition is identical to that of the target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62239528A JPS6481282A (en) | 1987-09-22 | 1987-09-22 | Manufacture of superconductor thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62239528A JPS6481282A (en) | 1987-09-22 | 1987-09-22 | Manufacture of superconductor thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6481282A true JPS6481282A (en) | 1989-03-27 |
Family
ID=17046142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62239528A Pending JPS6481282A (en) | 1987-09-22 | 1987-09-22 | Manufacture of superconductor thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6481282A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197318A (en) * | 1987-10-09 | 1989-04-14 | Toshiba Tungaloy Co Ltd | Manufacture of oxide superconductor film coated material using laser |
| CN100383274C (en) * | 2006-05-26 | 2008-04-23 | 北京工业大学 | Method for raising property of lanthanum barium manganese oxide film by laser irradiation |
-
1987
- 1987-09-22 JP JP62239528A patent/JPS6481282A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197318A (en) * | 1987-10-09 | 1989-04-14 | Toshiba Tungaloy Co Ltd | Manufacture of oxide superconductor film coated material using laser |
| CN100383274C (en) * | 2006-05-26 | 2008-04-23 | 北京工业大学 | Method for raising property of lanthanum barium manganese oxide film by laser irradiation |
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