JPS6481181A - Surface treatment of metal electrode - Google Patents

Surface treatment of metal electrode

Info

Publication number
JPS6481181A
JPS6481181A JP23814387A JP23814387A JPS6481181A JP S6481181 A JPS6481181 A JP S6481181A JP 23814387 A JP23814387 A JP 23814387A JP 23814387 A JP23814387 A JP 23814387A JP S6481181 A JPS6481181 A JP S6481181A
Authority
JP
Japan
Prior art keywords
electrode
organic titanate
film
metal electrode
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23814387A
Other languages
Japanese (ja)
Inventor
Osami Hayashi
Akio Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP23814387A priority Critical patent/JPS6481181A/en
Publication of JPS6481181A publication Critical patent/JPS6481181A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Electrical Connectors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To improve the resistibility of an metal electrode against air pollution by wash-removing the film polluted by air on the surface of the metal electrode, and then forming an organic titanate compound film on this surface. CONSTITUTION:An oxide film formed on the surface of Al electrode is removed being subjected to a chemical grinding bath, and treated with a treating liquid including an organic titanate compound, whereby the organic titanate compound film is formed on the Al electrode surface. This compound serves to protect the Al electrode from being oxidized naturally by air, reducing extremely interruption of a conduction path. Furthermore, when adherable-terminally fused type conductive resin bump is formed on the surface, the organic titanate coating film is bound with the base resin of resin bump to van der Waals force, whereby strong adherence is secured. In this way the Al electrode of an IC chip is treated and connected to a circuit board.
JP23814387A 1987-09-22 1987-09-22 Surface treatment of metal electrode Pending JPS6481181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23814387A JPS6481181A (en) 1987-09-22 1987-09-22 Surface treatment of metal electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23814387A JPS6481181A (en) 1987-09-22 1987-09-22 Surface treatment of metal electrode

Publications (1)

Publication Number Publication Date
JPS6481181A true JPS6481181A (en) 1989-03-27

Family

ID=17025825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23814387A Pending JPS6481181A (en) 1987-09-22 1987-09-22 Surface treatment of metal electrode

Country Status (1)

Country Link
JP (1) JPS6481181A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5196371A (en) * 1989-12-18 1993-03-23 Epoxy Technology, Inc. Flip chip bonding method using electrically conductive polymer bumps
US5879761A (en) * 1989-12-18 1999-03-09 Polymer Flip Chip Corporation Method for forming electrically conductive polymer interconnects on electrical substrates
JP2015173256A (en) * 2014-03-11 2015-10-01 インテル コーポレイション integrated circuit package

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5196371A (en) * 1989-12-18 1993-03-23 Epoxy Technology, Inc. Flip chip bonding method using electrically conductive polymer bumps
US5879761A (en) * 1989-12-18 1999-03-09 Polymer Flip Chip Corporation Method for forming electrically conductive polymer interconnects on electrical substrates
US5918364A (en) * 1989-12-18 1999-07-06 Polymer Flip Chip Corporation Method of forming electrically conductive polymer interconnects on electrical substrates
JP2015173256A (en) * 2014-03-11 2015-10-01 インテル コーポレイション integrated circuit package
US9472515B2 (en) 2014-03-11 2016-10-18 Intel Corporation Integrated circuit package
US10157869B2 (en) 2014-03-11 2018-12-18 Intel Corporation Integrated circuit package

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