JPS6480027A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6480027A JPS6480027A JP23485687A JP23485687A JPS6480027A JP S6480027 A JPS6480027 A JP S6480027A JP 23485687 A JP23485687 A JP 23485687A JP 23485687 A JP23485687 A JP 23485687A JP S6480027 A JPS6480027 A JP S6480027A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- fluoride
- layer
- window
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To obtain an oxide film of the same film thickness on the planar surface and the corner parts of the window by performing a heat treatment process at a relatively low temperature after the deposition of a fluoride thin film on a semiconductor substrate. CONSTITUTION:On the side wall which is to be formed into a polycrystalline silicon layer or single crystal layer, a fluoride layer 8 of calcium fluoride or the like is deposited by a vacuum deposition method. After the deposition of the fluoride layer 8, a thermal oxidation process is executed at 600-900 deg.C in an ordinary oxygen atmosphere. Whereupon, an oxide film 9 is formed under the fluoride layer 8. The thickness of the oxide film 9 is formed substantially the same over the whole surface thereof. With this, the oxide film 9 of the same film thickness is obtained on the planar surface and the corner parts of the window.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23485687A JPS6480027A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23485687A JPS6480027A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6480027A true JPS6480027A (en) | 1989-03-24 |
Family
ID=16977421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23485687A Pending JPS6480027A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6480027A (en) |
-
1987
- 1987-09-21 JP JP23485687A patent/JPS6480027A/en active Pending
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