JPS6480020A - Manufacture of silicon thin film - Google Patents
Manufacture of silicon thin filmInfo
- Publication number
- JPS6480020A JPS6480020A JP23600587A JP23600587A JPS6480020A JP S6480020 A JPS6480020 A JP S6480020A JP 23600587 A JP23600587 A JP 23600587A JP 23600587 A JP23600587 A JP 23600587A JP S6480020 A JPS6480020 A JP S6480020A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- film
- amorphous silicon
- silicon powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23600587A JPS6480020A (en) | 1987-09-19 | 1987-09-19 | Manufacture of silicon thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23600587A JPS6480020A (en) | 1987-09-19 | 1987-09-19 | Manufacture of silicon thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6480020A true JPS6480020A (en) | 1989-03-24 |
Family
ID=16994379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23600587A Pending JPS6480020A (en) | 1987-09-19 | 1987-09-19 | Manufacture of silicon thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6480020A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06275524A (ja) * | 1993-03-24 | 1994-09-30 | G T C:Kk | 薄膜トランジスタの製造方法 |
US6514803B1 (en) * | 1993-12-22 | 2003-02-04 | Tdk Corporation | Process for making an amorphous silicon thin film semiconductor device |
-
1987
- 1987-09-19 JP JP23600587A patent/JPS6480020A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06275524A (ja) * | 1993-03-24 | 1994-09-30 | G T C:Kk | 薄膜トランジスタの製造方法 |
US6514803B1 (en) * | 1993-12-22 | 2003-02-04 | Tdk Corporation | Process for making an amorphous silicon thin film semiconductor device |
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