JPS64780B2 - - Google Patents

Info

Publication number
JPS64780B2
JPS64780B2 JP58072661A JP7266183A JPS64780B2 JP S64780 B2 JPS64780 B2 JP S64780B2 JP 58072661 A JP58072661 A JP 58072661A JP 7266183 A JP7266183 A JP 7266183A JP S64780 B2 JPS64780 B2 JP S64780B2
Authority
JP
Japan
Prior art keywords
chromatic aberration
electron beam
value
sample
accelerating voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58072661A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59198650A (ja
Inventor
Yoshihiro Arai
Yukihisa Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58072661A priority Critical patent/JPS59198650A/ja
Publication of JPS59198650A publication Critical patent/JPS59198650A/ja
Publication of JPS64780B2 publication Critical patent/JPS64780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58072661A 1983-04-25 1983-04-25 透過電子顕微鏡 Granted JPS59198650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58072661A JPS59198650A (ja) 1983-04-25 1983-04-25 透過電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58072661A JPS59198650A (ja) 1983-04-25 1983-04-25 透過電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59198650A JPS59198650A (ja) 1984-11-10
JPS64780B2 true JPS64780B2 (enExample) 1989-01-09

Family

ID=13495772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58072661A Granted JPS59198650A (ja) 1983-04-25 1983-04-25 透過電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59198650A (enExample)

Also Published As

Publication number Publication date
JPS59198650A (ja) 1984-11-10

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