JPS6477521A - Manufacture of perforated body film - Google Patents
Manufacture of perforated body filmInfo
- Publication number
- JPS6477521A JPS6477521A JP23424087A JP23424087A JPS6477521A JP S6477521 A JPS6477521 A JP S6477521A JP 23424087 A JP23424087 A JP 23424087A JP 23424087 A JP23424087 A JP 23424087A JP S6477521 A JPS6477521 A JP S6477521A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- base
- metal film
- holes
- perforated body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To highly densely and easily made holes several ten micrometers in diameter on a thin film by a method wherein resin is applied on a base, on which metal film is formed, and an infinite number of holes are formed on the resin by means of photolithography and, after that, the metal film is removed. CONSTITUTION:As a base 1, a polished glass or corrosion-resistant metal plate is used. A metal film 2 is formed on the base by wet plating, metallizing or dry plating. Resin 3 is applied on the base, on which the metal film 2 is formed. Next, photoresist 4 is applied on the applied resin. The photoresist is exposed through a mask, which is made conforming to the shape and layout of holes in the aimed perforated body, and, after that, developed. By etching the resin in the portion exposed by development, an infinite number of holes are made. After that, resist 4 is removed. Finally, by separating the resin part from the base through the etching with chemical, which does not attack the resin on the metal film, a perforated body film is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23424087A JPS6477521A (en) | 1987-09-18 | 1987-09-18 | Manufacture of perforated body film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23424087A JPS6477521A (en) | 1987-09-18 | 1987-09-18 | Manufacture of perforated body film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6477521A true JPS6477521A (en) | 1989-03-23 |
Family
ID=16967876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23424087A Pending JPS6477521A (en) | 1987-09-18 | 1987-09-18 | Manufacture of perforated body film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6477521A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2737927A1 (en) * | 1995-08-17 | 1997-02-21 | Commissariat Energie Atomique | METHOD AND DEVICE FOR FORMING HOLES IN A LAYER OF PHOTOSENSITIVE MATERIAL, ESPECIALLY FOR THE MANUFACTURE OF ELECTRON SOURCES |
US6467152B1 (en) * | 1999-12-11 | 2002-10-22 | Hughes Electronics Corp. | Method of fabricating a microwave microstrip/waveguide transition structure |
US7753568B2 (en) * | 2007-01-23 | 2010-07-13 | Foxconn Technology Co., Ltd. | Light-emitting diode assembly and method of fabrication |
CN103446683A (en) * | 2013-09-16 | 2013-12-18 | 武汉龙飞翔科技产品制造有限公司 | Five-prevention oxygen-enriched mask |
-
1987
- 1987-09-18 JP JP23424087A patent/JPS6477521A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2737927A1 (en) * | 1995-08-17 | 1997-02-21 | Commissariat Energie Atomique | METHOD AND DEVICE FOR FORMING HOLES IN A LAYER OF PHOTOSENSITIVE MATERIAL, ESPECIALLY FOR THE MANUFACTURE OF ELECTRON SOURCES |
EP0759631A1 (en) * | 1995-08-17 | 1997-02-26 | Commissariat A L'energie Atomique | Process and apparatus for the fabrication of holes in a layer of photosensitive material, especially for the fabrication of electron sources |
US6467152B1 (en) * | 1999-12-11 | 2002-10-22 | Hughes Electronics Corp. | Method of fabricating a microwave microstrip/waveguide transition structure |
US7753568B2 (en) * | 2007-01-23 | 2010-07-13 | Foxconn Technology Co., Ltd. | Light-emitting diode assembly and method of fabrication |
CN103446683A (en) * | 2013-09-16 | 2013-12-18 | 武汉龙飞翔科技产品制造有限公司 | Five-prevention oxygen-enriched mask |
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