JPS6476534A - Production of perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To enable the mass production of a perpendicularly magnetized film having excellent perpendicular magnetic anisotropy by forming the perpendicularly magnetized film having a two-layered structure composed of Co-Ta and Co-Cr-Ta by one time of sputtering and by freely setting the compsn. ratios of 1st and 2nd targets as well. CONSTITUTION:The 1st and 2nd targets 7a, 7b are successively arranged in the transfer direction of a nonmagnetic substrate 4. Sputtering is first executed by using the 1st, 2nd targets 7a, 7b, of Co-Ta having the same compsn. ratio to form a thin Co-Ta film having 0.25mum film thickness on the nonmagnetic substrate 4 consisting of polyimide. A thin Co-Cr-Ta film having 0.25mum film thickness is similarly formed on the nonmagnetic substrate 4 consisting of polyimide. The perpendicular magnetic recording medium having the high- performance pseudo two-layered structure having the low coercive force layer consisting of the Co-Cr alloy on the lower layer and the high coercive force layer consisting of the Co-Cr-Ta alloy and having the perpendicular magnetic anisotropy on the lower layer is obtd. by one time of sputtering if the concn. of the Ta in the 1st and 2nd targets is set within the prescribed range in such a manner.