JPS6475682A - Method for replenishing copper to chemical copper plating liquid - Google Patents

Method for replenishing copper to chemical copper plating liquid

Info

Publication number
JPS6475682A
JPS6475682A JP23230187A JP23230187A JPS6475682A JP S6475682 A JPS6475682 A JP S6475682A JP 23230187 A JP23230187 A JP 23230187A JP 23230187 A JP23230187 A JP 23230187A JP S6475682 A JPS6475682 A JP S6475682A
Authority
JP
Japan
Prior art keywords
chamber
copper
anode
plating
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23230187A
Other languages
English (en)
Inventor
Hirotoku Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP23230187A priority Critical patent/JPS6475682A/ja
Publication of JPS6475682A publication Critical patent/JPS6475682A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1617—Purification and regeneration of coating baths

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
JP23230187A 1987-09-18 1987-09-18 Method for replenishing copper to chemical copper plating liquid Pending JPS6475682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23230187A JPS6475682A (en) 1987-09-18 1987-09-18 Method for replenishing copper to chemical copper plating liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23230187A JPS6475682A (en) 1987-09-18 1987-09-18 Method for replenishing copper to chemical copper plating liquid

Publications (1)

Publication Number Publication Date
JPS6475682A true JPS6475682A (en) 1989-03-22

Family

ID=16937067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23230187A Pending JPS6475682A (en) 1987-09-18 1987-09-18 Method for replenishing copper to chemical copper plating liquid

Country Status (1)

Country Link
JP (1) JPS6475682A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2721309A1 (fr) * 1994-06-21 1995-12-22 Centre Nat Rech Scient Procédé et dispositif de diffusion d'ions cuivriques pour le traitement d'un milieu liquide salé.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2721309A1 (fr) * 1994-06-21 1995-12-22 Centre Nat Rech Scient Procédé et dispositif de diffusion d'ions cuivriques pour le traitement d'un milieu liquide salé.

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