JPS6475031A - Evacuation apparatus - Google Patents

Evacuation apparatus

Info

Publication number
JPS6475031A
JPS6475031A JP22956787A JP22956787A JPS6475031A JP S6475031 A JPS6475031 A JP S6475031A JP 22956787 A JP22956787 A JP 22956787A JP 22956787 A JP22956787 A JP 22956787A JP S6475031 A JPS6475031 A JP S6475031A
Authority
JP
Japan
Prior art keywords
cooling plate
sublimation
refrigerator
exhaust pipe
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22956787A
Other languages
Japanese (ja)
Other versions
JPH074515B2 (en
Inventor
Norihide Saho
Yukiyoshi Yoshimatsu
Norimoto Matsuda
Tadashi Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62229567A priority Critical patent/JPH074515B2/en
Publication of JPS6475031A publication Critical patent/JPS6475031A/en
Publication of JPH074515B2 publication Critical patent/JPH074515B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To prevent a sublimation of trapped gas by arranging a cooling plate cooled with a refrigerator in an exhaust pipe connecting a evacuated chamber with vacuum pumps. CONSTITUTION:A cooling plate 10 cooled with a refrigerator 8 is arranged in an exhaust pipe 3 connecting a evacuated chamber 1 with vacuum pumps 5, 6. As an evacuating performance is maintained in a good condition by always keeping the cooling plate at a low temperature, a sublimation of trapped gas can be prevented.
JP62229567A 1987-09-16 1987-09-16 Operating method of vacuum processing equipment Expired - Lifetime JPH074515B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229567A JPH074515B2 (en) 1987-09-16 1987-09-16 Operating method of vacuum processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229567A JPH074515B2 (en) 1987-09-16 1987-09-16 Operating method of vacuum processing equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP453196A Division JP2674591B2 (en) 1996-01-16 1996-01-16 Operating method of vacuum processing equipment

Publications (2)

Publication Number Publication Date
JPS6475031A true JPS6475031A (en) 1989-03-20
JPH074515B2 JPH074515B2 (en) 1995-01-25

Family

ID=16894195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229567A Expired - Lifetime JPH074515B2 (en) 1987-09-16 1987-09-16 Operating method of vacuum processing equipment

Country Status (1)

Country Link
JP (1) JPH074515B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04176118A (en) * 1990-11-08 1992-06-23 Nec Kyushu Ltd Low pressure cvd device
US5340460A (en) * 1990-08-22 1994-08-23 Anelva Corporation Vacuum processing equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533059A (en) * 1978-08-28 1980-03-08 Semiconductor Res Found Pressure-reduced reactor
JPS6053684A (en) * 1983-09-02 1985-03-27 Ulvac Corp Cryopump
JPS62131983A (en) * 1985-12-05 1987-06-15 Anelva Corp Cryopump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533059A (en) * 1978-08-28 1980-03-08 Semiconductor Res Found Pressure-reduced reactor
JPS6053684A (en) * 1983-09-02 1985-03-27 Ulvac Corp Cryopump
JPS62131983A (en) * 1985-12-05 1987-06-15 Anelva Corp Cryopump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5340460A (en) * 1990-08-22 1994-08-23 Anelva Corporation Vacuum processing equipment
JPH04176118A (en) * 1990-11-08 1992-06-23 Nec Kyushu Ltd Low pressure cvd device

Also Published As

Publication number Publication date
JPH074515B2 (en) 1995-01-25

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