JPS6472700A - Ultrasonic transducer and its manufacture - Google Patents
Ultrasonic transducer and its manufactureInfo
- Publication number
- JPS6472700A JPS6472700A JP22829187A JP22829187A JPS6472700A JP S6472700 A JPS6472700 A JP S6472700A JP 22829187 A JP22829187 A JP 22829187A JP 22829187 A JP22829187 A JP 22829187A JP S6472700 A JPS6472700 A JP S6472700A
- Authority
- JP
- Japan
- Prior art keywords
- metallic film
- substrate
- film
- wave
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000004065 semiconductor Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22829187A JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22829187A JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6472700A true JPS6472700A (en) | 1989-03-17 |
JPH0552120B2 JPH0552120B2 (enrdf_load_stackoverflow) | 1993-08-04 |
Family
ID=16874166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22829187A Granted JPS6472700A (en) | 1987-09-14 | 1987-09-14 | Ultrasonic transducer and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6472700A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4865832A (en) * | 1984-09-14 | 1989-09-12 | Alps Electric Co., Ltd. | Molybdenum oxide whiskers and a method of producing the same |
JP2010507932A (ja) * | 2006-10-23 | 2010-03-11 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 超音波治療のための対称的かつ選択的に指向されたランダムアレイ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61220600A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
JPS62149299A (ja) * | 1985-12-24 | 1987-07-03 | Agency Of Ind Science & Technol | アレイ型超音波トランスデユ−サ |
-
1987
- 1987-09-14 JP JP22829187A patent/JPS6472700A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61220600A (ja) * | 1985-03-26 | 1986-09-30 | Nec Corp | 超音波センサ |
JPS62149299A (ja) * | 1985-12-24 | 1987-07-03 | Agency Of Ind Science & Technol | アレイ型超音波トランスデユ−サ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4865832A (en) * | 1984-09-14 | 1989-09-12 | Alps Electric Co., Ltd. | Molybdenum oxide whiskers and a method of producing the same |
JP2010507932A (ja) * | 2006-10-23 | 2010-03-11 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 超音波治療のための対称的かつ選択的に指向されたランダムアレイ |
Also Published As
Publication number | Publication date |
---|---|
JPH0552120B2 (enrdf_load_stackoverflow) | 1993-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |