JPS646943Y2 - - Google Patents
Info
- Publication number
- JPS646943Y2 JPS646943Y2 JP16023284U JP16023284U JPS646943Y2 JP S646943 Y2 JPS646943 Y2 JP S646943Y2 JP 16023284 U JP16023284 U JP 16023284U JP 16023284 U JP16023284 U JP 16023284U JP S646943 Y2 JPS646943 Y2 JP S646943Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- chamber
- substrate
- inlet
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 41
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000011550 stock solution Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16023284U JPS646943Y2 (enrdf_load_stackoverflow) | 1984-10-23 | 1984-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16023284U JPS646943Y2 (enrdf_load_stackoverflow) | 1984-10-23 | 1984-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6175873U JPS6175873U (enrdf_load_stackoverflow) | 1986-05-22 |
| JPS646943Y2 true JPS646943Y2 (enrdf_load_stackoverflow) | 1989-02-23 |
Family
ID=30718157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16023284U Expired JPS646943Y2 (enrdf_load_stackoverflow) | 1984-10-23 | 1984-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646943Y2 (enrdf_load_stackoverflow) |
-
1984
- 1984-10-23 JP JP16023284U patent/JPS646943Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6175873U (enrdf_load_stackoverflow) | 1986-05-22 |
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