JPS6469073A - Gas laser equipment - Google Patents
Gas laser equipmentInfo
- Publication number
- JPS6469073A JPS6469073A JP62225214A JP22521487A JPS6469073A JP S6469073 A JPS6469073 A JP S6469073A JP 62225214 A JP62225214 A JP 62225214A JP 22521487 A JP22521487 A JP 22521487A JP S6469073 A JPS6469073 A JP S6469073A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- discharge
- laser gas
- plasma
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32321—Discharge generated by other radiation
- H01J37/32339—Discharge generated by other radiation using electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Lasers (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225214A JPS6469073A (en) | 1987-09-10 | 1987-09-10 | Gas laser equipment |
EP95108095A EP0674471B1 (en) | 1987-01-26 | 1988-01-23 | Laser Plasma apparatus |
DE3855896T DE3855896T2 (de) | 1987-01-26 | 1988-01-23 | Plasmavorrichtung |
DE3856348T DE3856348T2 (de) | 1987-01-26 | 1988-01-23 | Laser Plasmavorrichtung |
EP88101007A EP0280044B1 (en) | 1987-01-26 | 1988-01-23 | Plasma apparatus |
US07/147,726 US4890294A (en) | 1987-01-26 | 1988-01-25 | Plasma apparatus |
KR1019880000551A KR910002239B1 (ko) | 1987-01-26 | 1988-01-25 | 레이저 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225214A JPS6469073A (en) | 1987-09-10 | 1987-09-10 | Gas laser equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6469073A true JPS6469073A (en) | 1989-03-15 |
Family
ID=16825773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62225214A Pending JPS6469073A (en) | 1987-01-26 | 1987-09-10 | Gas laser equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6469073A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5045425A (en) * | 1989-08-25 | 1991-09-03 | Commtech International Management Corporation | Electrophotographic liquid developer composition and novel charge directors for use therein |
-
1987
- 1987-09-10 JP JP62225214A patent/JPS6469073A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5045425A (en) * | 1989-08-25 | 1991-09-03 | Commtech International Management Corporation | Electrophotographic liquid developer composition and novel charge directors for use therein |
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