JPS6469069A - Gas laser equipment - Google Patents

Gas laser equipment

Info

Publication number
JPS6469069A
JPS6469069A JP22521087A JP22521087A JPS6469069A JP S6469069 A JPS6469069 A JP S6469069A JP 22521087 A JP22521087 A JP 22521087A JP 22521087 A JP22521087 A JP 22521087A JP S6469069 A JPS6469069 A JP S6469069A
Authority
JP
Japan
Prior art keywords
microwave
dielectric
discharge
plasma
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22521087A
Other languages
Japanese (ja)
Other versions
JP2566584B2 (en
Inventor
Masakazu Taki
Junichi Nishimae
Kenji Yoshizawa
Tadashi Yanagi
Yoshihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62225210A priority Critical patent/JP2566584B2/en
Publication of JPS6469069A publication Critical patent/JPS6469069A/en
Application granted granted Critical
Publication of JP2566584B2 publication Critical patent/JP2566584B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To generate spatially uniform plasma, and improve cooling efficiency, by arranging a dielectric wall with conductivity higher than plasma, which wall faces dielectric being a microwave incident window, and making another part of the microwave circuit come into close contact with the dielectric. CONSTITUTION:By intense microwave electromagnetic field generating so as to concentrate in the vicinity of ridges 21, 22, laser gas sealed in a discharge space 26 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. The discharge space 26 is formed between a conductor wall 24 and dielectric 25 which is arranged so as to face the conductor wall 24 and serves as an incidence window. In this space, microwave discharge is generated, and microwave enters only from one side surface of the plasma. Thereby, enabling the discharge by a desired microwave mode. The dielectric 25 is arranged in the manner in which a surface opposite to the surface facing the conductor wall 24 is in close contact with the ridge 22 constituting another part of the microwave circuit. Thereby, preventing the saturation of laser output caused by the temperature rise of laser gas, and obtaining a gas laser equipment of high efficiency and large output.
JP62225210A 1987-09-10 1987-09-10 Gas laser device Expired - Lifetime JP2566584B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62225210A JP2566584B2 (en) 1987-09-10 1987-09-10 Gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62225210A JP2566584B2 (en) 1987-09-10 1987-09-10 Gas laser device

Publications (2)

Publication Number Publication Date
JPS6469069A true JPS6469069A (en) 1989-03-15
JP2566584B2 JP2566584B2 (en) 1996-12-25

Family

ID=16825709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62225210A Expired - Lifetime JP2566584B2 (en) 1987-09-10 1987-09-10 Gas laser device

Country Status (1)

Country Link
JP (1) JP2566584B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957838A (en) * 1988-09-30 1990-09-18 Ricoh Company, Ltd. Electrophotographic photoconductor and triphenylamine compounds for use in the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218071A (en) * 1985-07-17 1987-01-27 Nec Corp Manufacture of semiconductor element
JPS62225209A (en) * 1986-03-28 1987-10-03 Agency Of Ind Science & Technol Separation of liquid mixture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218071A (en) * 1985-07-17 1987-01-27 Nec Corp Manufacture of semiconductor element
JPS62225209A (en) * 1986-03-28 1987-10-03 Agency Of Ind Science & Technol Separation of liquid mixture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957838A (en) * 1988-09-30 1990-09-18 Ricoh Company, Ltd. Electrophotographic photoconductor and triphenylamine compounds for use in the same

Also Published As

Publication number Publication date
JP2566584B2 (en) 1996-12-25

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